GAS DISTRIBUTION PLATE AND APPARATUS USING THE SAME
    1.
    发明申请
    GAS DISTRIBUTION PLATE AND APPARATUS USING THE SAME 审中-公开
    气体分配板和使用它的装置

    公开(公告)号:US20110073038A1

    公开(公告)日:2011-03-31

    申请号:US12616203

    申请日:2009-11-11

    IPC分类号: C23C16/455

    CPC分类号: C23C16/45574 C23C16/45565

    摘要: The present invention provides a gas distribution plate for providing at least two gas flowing channel. In one embodiment, the gas distribution plate has a first flowing channel, at least a second flowing channel disposed around the first flowing channel, and a tapered opening communicating with the first and the second flowing channel. In another embodiment, the gas distribution plate has a first flowing channel passing through a first and a second surface of the gas distribution plate, a second flowing channel paralleling to the first surface and a third flowing channel disposed at the second surface and communicating with the second flowing channel. The ends of the first and the third flowing channel have a tapered opening respectively. Besides, the present further provides a gas distribution apparatus for allowing at least two separate gases to be delivered independently into a process chamber while enabling the gases to be mixed completely after entering the processing chamber.

    摘要翻译: 本发明提供一种用于提供至少两个气体流动通道的气体分配板。 在一个实施例中,气体分配板具有第一流动通道,围绕第一流动通道设置的至少第二流动通道和与第一和第二流动通道连通的锥形开口。 在另一个实施例中,气体分布板具有穿过气体分配板的第一和第二表面的第一流动通道,与第一表面平行的第二流动通道和设置在第二表面处的第三流动通道, 第二流通道。 第一和第三流动通道的末端分别具有锥形开口。 此外,本发明还提供了一种气体分配装置,用于允许至少两个分离的气体独立地输送到处理室中,同时使气体在进入处理室之后能够被完全混合。

    GAS DISTRIBUTION SHOWER MODULE AND FILM DEPOSITION APPARATUS
    2.
    发明申请
    GAS DISTRIBUTION SHOWER MODULE AND FILM DEPOSITION APPARATUS 审中-公开
    气体分配淋浴模块和薄膜沉积装置

    公开(公告)号:US20110247559A1

    公开(公告)日:2011-10-13

    申请号:US12853315

    申请日:2010-08-10

    摘要: A gas distribution shower module and a film deposition apparatus are provided. The gas distribution shower module includes a first distributor, a second distributor, a third distributor and a fourth distributor. The second distributor is under the first distributor, the third distributor is under the second distributor, the fourth distributor is under the third distributor, and a distance is between the fourth distributor and the third distributor. The third distributor is divided into an inner region and an outer region, and an area ratio of the inner region to the outer region is from 1:1 to 1:5. Furthermore, the third distributor has a plurality of gas holes in the inner region and the outer region, and an area ratio of the gas holes in the inner region to the gas holes in the outer region is from 1:1 to 1:5.

    摘要翻译: 提供了气体分配淋浴组件和成膜装置。 气体分配淋浴模块包括第一分配器,第二分配器,第三分配器和第四分配器。 第二家经销商是第一批经销商,第三家分销商是第二家经销商,第四家分销商是第三家经销商,第四家分销商之间距离第四家分销商之间。 第三分配器分为内部区域和外部区域,内部区域与外部区域的面积比为1:1至1:5。 此外,第三分配器在内部区域和外部区域中具有多个气体孔,并且内部区域中的气体孔与外部区域中的气体孔的面积比为1:1至1:5。

    Method for manufacturing P-I-N microcrystalline silicon structure for thin-film solar cells
    4.
    发明授权
    Method for manufacturing P-I-N microcrystalline silicon structure for thin-film solar cells 有权
    薄膜太阳能电池用P-I-N微晶硅结构的制造方法

    公开(公告)号:US08557041B1

    公开(公告)日:2013-10-15

    申请号:US13549049

    申请日:2012-07-13

    摘要: A method for manufacturing a P-I-N microcrystalline silicon structure for thin-film solar cells, includes the steps of: (a) forming a P-type layer; (b) forming an I-type layer including a plurality of sub-layers successively stacked on the P-type layer using gas mixtures including fluoride and hydride that have different gas ratios, respectively; and (c) forming an N-type layer on the I-type layer. First, second, and third I-type sub-layers may be formed on the P-type layer using gas mixtures including fluoride and hydride at a first, second, and third gas ratios, respectively. Then, advantageously, the third gas ratio may be larger than the second gas ratio and the second gas ratio may be larger than the first gas ratio, and the first gas ratio may be 8%, the second gas ratio may range between 15% and 35%, and the third gas ratio may range between 35% and 50%.

    摘要翻译: 一种薄膜太阳能电池用P-I-N微晶硅结构体的制造方法,包括以下步骤:(a)形成P型层; (b)使用分别具有不同气体比的氟化物和氢化物的气体混合物,分别形成包括依次层叠在P型层上的多个子层的I型层; 和(c)在I型层上形成N型层。 可以分别在第一,第二和第三气体比例下使用包括氟化物和氢化物的气体混合物在P型层上形成第一,第二和第三I型亚层。 那么有利地,第三气体比可以大于第二气体比,第二气体比可以大于第一气体比,第一气体比可以是8%,第二气体比可以在15%和 35%,第三气体比可以在35%至50%之间。

    Method of manufacturing thin film solar cells
    5.
    发明授权
    Method of manufacturing thin film solar cells 有权
    制造薄膜太阳能电池的方法

    公开(公告)号:US08772071B2

    公开(公告)日:2014-07-08

    申请号:US13314332

    申请日:2011-12-08

    摘要: A method for manufacturing thin film solar cells, includes forming a light permeable first electrode layer in the back light surface of a glass substrate, and formed in the first electrode layer a plurality of first openings for exposing a part of the back light surface therefrom; forming a photoelectric conversion layer on the first electrode layer and the exposed back light surface, and forming a plurality of second openings in the photoelectric conversion layer for exposing a part of the first electrode layer therefrom; and forming a glistening second electrode layer having a plurality of third openings formed therein, wherein the second electrode layer comprises a conductive colloid comprised of non-diffractive fillings and polymeric base material.

    摘要翻译: 一种制造薄膜太阳能电池的方法,包括在玻璃基板的背光表面形成透光性第一电极层,在第一电极层上形成多个第一开口,用于使背光表面露出一部分; 在所述第一电极层和所述暴露的背光表面上形成光电转换层,以及在所述光电转换层中形成多个第二开口,用于使所述第一电极层的一部分露出; 以及形成其中形成有多个第三开口的闪光的第二电极层,其中所述第二电极层包括由非衍射填料和聚合物基材构成的导电胶体。

    Solar cell and method for fabricating the same
    6.
    发明申请
    Solar cell and method for fabricating the same 审中-公开
    太阳能电池及其制造方法

    公开(公告)号:US20110094573A1

    公开(公告)日:2011-04-28

    申请号:US12653625

    申请日:2009-12-15

    摘要: A solar cell and a method for fabricating the same are provided. The solar cell includes a first electrode, a second electrode, a photoelectric conversion layer and a non-conductive reflector. The first electrode including a nano-metal transparent conductive layer is disposed on a transparent substrate. The nano-metal transparent conductive layer substantially contacts with the photoelectric conversion layer. The second electrode is disposed between the photoelectric conversion layer and the transparent substrate. The photoelectric conversion layer is disposed between the first and the second electrodes. The non-conductive reflector is disposed on the first electrode.

    摘要翻译: 提供太阳能电池及其制造方法。 太阳能电池包括第一电极,第二电极,光电转换层和非导电反射器。 包括纳米金属透明导电层的第一电极设置在透明基板上。 纳米金属透明导电层基本上与光电转换层接触。 第二电极设置在光电转换层和透明基板之间。 光电转换层设置在第一和第二电极之间。 非导电反射器设置在第一电极上。