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公开(公告)号：US09793089B2
公开(公告)日：2017-10-17
申请号：US14485588
申请日：2014-09-12
Applicant: KLA-Tencor Corporation
Inventor： Thomas Plettner , Mehran Nasser-Ghodsi
IPC: H01J1/304 , H01J37/153 , H01J37/073 , H01J37/28 , H01J37/285 , H01J37/147 , B82Y15/00 , B82Y40/00 , H01J9/02
CPC classification number: H01J37/153 , B82Y15/00 , B82Y40/00 , H01J9/025 , H01J37/073 , H01J37/1471 , H01J37/28 , H01J37/285 , H01J2203/0216 , H01J2237/06375 , H01J2237/28 , H01J2237/31774 , Y10S977/842 , Y10S977/939
Abstract: A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
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公开(公告)号：US20160148774A1
公开(公告)日：2016-05-26
申请号：US14929792
申请日：2015-11-02
Inventor： So Ra PARK , Yoon Ho SONG , Jin Woo JEONG , Jae Woo KIM , Min Sik SHIN
CPC classification number: H01J3/021 , H01J29/46 , H01J29/467 , H01J2203/0216 , H01J2203/0232
Abstract: The present disclosure may provide a field emission device with an enhanced beam convergence. For this, the device may include a gate structure disposed between a cathode electrode and an anode electrode, wherein the gate structure includes a gate electrode and an atomic layer sheet disposed on the gate electrode, the gate electrode facing an emitter and having at least one aperture formed therein.
Abstract translation: 本公开可以提供具有增强的光束会聚的场发射装置。 为此，器件可以包括设置在阴极电极和阳极电极之间的栅极结构，其中栅极结构包括栅电极和设置在栅电极上的原子层片，栅电极面向发射极并具有至少一个 孔中形成。
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公开(公告)号：US09666401B2
公开(公告)日：2017-05-30
申请号：US14929792
申请日：2015-11-02
Inventor： So Ra Park , Yoon Ho Song , Jin Woo Jeong , Jae Woo Kim , Min Sik Shin
CPC classification number: H01J3/021 , H01J29/46 , H01J29/467 , H01J2203/0216 , H01J2203/0232
Abstract: The present disclosure may provide a field emission device with an enhanced beam convergence. For this, the device may include a gate structure disposed between a cathode electrode and an anode electrode, wherein the gate structure includes a gate electrode and an atomic layer sheet disposed on the gate electrode, the gate electrode facing an emitter and having at least one aperture formed therein.
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公开(公告)号：US20130230146A1
公开(公告)日：2013-09-05
申请号：US13771736
申请日：2013-02-20
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Il-hwan KIM , Do-yoon KIM , Yong-chul KIM , Shang-hyeun PARK , Tae-won JEONG
CPC classification number: H01J29/025 , H01J3/021 , H01J35/045 , H01J35/065 , H01J2203/0216 , H01J2203/0236 , H01J2203/0244 , H01J2203/0272 , H01J2235/068
Abstract: An electron emission device includes a cathode electrode; a mesh-shaped gate electrode spaced apart from the cathode electrode; a plurality of gate spacers between the cathode electrode and the gate electrode; and a plurality of electron emission sources between the cathode electrode and the gate electrode, and alternating with the plurality of gate spacers.
Abstract translation: 电子发射装置包括阴极电极; 与阴极间隔开的网状栅电极; 在所述阴极电极和所述栅电极之间的多个栅极间隔物; 以及在所述阴极电极和所述栅电极之间的多个电子发射源，并且与所述多个栅极间隔物交替。
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公开(公告)号：US20150076988A1
公开(公告)日：2015-03-19
申请号：US14485588
申请日：2014-09-12
Applicant: KLA-Tencor Corporation
Inventor： Thomas Plettner , Mehran Nasser-Ghodsi
IPC: H01J37/153 , H01J37/28 , H01J37/285 , H01J37/073 , H01J9/02
CPC classification number: H01J37/153 , B82Y15/00 , B82Y40/00 , H01J9/025 , H01J37/073 , H01J37/1471 , H01J37/28 , H01J37/285 , H01J2203/0216 , H01J2237/06375 , H01J2237/28 , H01J2237/31774 , Y10S977/842 , Y10S977/939
Abstract: A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Abstract translation: 场发射器件包括一个或多个发射极元件，每个发射极元件具有纳米尺度横截面的高纵横比结构; 以及一个或多个分段电极，每个围绕所述一个或多个发射器中的一个发射器。 一个或多个分段电极中的每一个具有多个电极板。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。
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Patent Agency Ranking
公开(公告)号：US20140270087A1
公开(公告)日：2014-09-18
申请号：US14207216
申请日：2014-03-12
Applicant: SRI INTERNATIONAL , Samsung Electronics Co., Ltd.
Inventor： Shang-hyeun PARK , Paul R. SCHWOEBEL , Il-hwan KIM , Do-yoon KIM , Yong-chul KIM , Chang-soo LEE , Tae-won JEONG
IPC: H01J35/06
CPC classification number: H01J35/065 , A61B6/40 , A61B6/4064 , A61B6/4488 , B82Y30/00 , H01J1/304 , H01J1/90 , H01J3/021 , H01J3/38 , H01J19/24 , H01J19/42 , H01J19/44 , H01J35/045 , H01J35/06 , H01J2201/304 , H01J2201/30469 , H01J2201/3195 , H01J2203/0204 , H01J2203/0208 , H01J2203/0212 , H01J2203/0216 , H01J2203/0236 , H01J2235/06 , H01J2235/1212 , H01J2235/1291 , H01J2235/1295 , Y10S977/742 , Y10S977/939 , Y10S977/95
Abstract: An x-ray generator includes a housing, a cathode block that is arranged in the housing and emits electrons via a field emission scheme, an anode block that is arranged in the housing and generates x-rays in response to the electrons emitted from the cathode block and collide with the anode block, and a heat sink block that contacts the cathode block and dissipates heat generated therein to an outside of the housing.
Abstract translation: X射线发生器包括壳体，阴极块，其布置在壳体中并经由场致发射方案发射电子;阳极块，布置在壳体中并响应于从阴极发射的电子产生X射线 阻挡并与阳极块碰撞，以及散热块，其接触阴极块并将其中产生的热量散发到壳体的外部。
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公开(公告)号：US20100201247A1
公开(公告)日：2010-08-12
申请号：US12694474
申请日：2010-01-27
Applicant: Takanori Suwa , Toshihiko Takeda , Tamayo Hiroki
Inventor： Takanori Suwa , Toshihiko Takeda , Tamayo Hiroki
IPC: H01J29/46
CPC classification number: H01J3/021 , H01J1/3046 , H01J31/127 , H01J2201/30423 , H01J2203/0216 , H01J2203/0272 , H01J2329/0423 , H01J2329/4613 , H01J2329/4673 , H01J2329/4682
Abstract: An electron beam apparatus is provided having an electron emitting device which has a simple configuration, exhibits high electron emission efficiency, operates stably, and in which emitted electrons are effectively converged. The electron beam apparatus includes: an insulator having a notch on its surface; a gate positioned on the surface of the insulator; at least one cathode having a protruding portion protruding from an edge of the notch toward the gate, and positioned on the surface of the insulator so that the protruding portion is opposed to the gate; and an anode arranged to be opposed to the protruding portion via the gate, wherein the gate is formed on the surface of the insulator so that at least a part of a region opposed to the cathode is projected outward and recessed portions are provided in which ends of the gate are recessed and interpose the projected region.
Abstract translation: 提供了一种具有电子发射器件的电子束装置，该电子发射器件具有简单的结构，表现出高的电子发射效率，稳定地工作，并且其中发射的电子被有效地收敛。 电子束装置包括：在其表面上具有凹口的绝缘体; 位于绝缘体表面上的门; 至少一个阴极，具有从所述凹口的边缘向所述栅极突出的突出部分，并且位于所述绝缘体的所述表面上，使得所述突出部分与所述栅极相对; 以及经由所述栅极与所述突出部相对的阳极，其中，所述栅极形成在所述绝缘体的表面上，使得与所述阴极相对的区域的至少一部分向外突出，并且设置有凹部 的栅极凹进并插入投影区域。
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公开(公告)号：US09508522B2
公开(公告)日：2016-11-29
申请号：US14207216
申请日：2014-03-12
Applicant: Samsung Electronics Co., Ltd. , SRI INTERNATIONAL
Inventor： Shang-hyeun Park , Paul R. Schwoebel , Il-hwan Kim , Do-yoon Kim , Yong-chul Kim , Chang-soo Lee , Tae-won Jeong
IPC: H01J35/06 , H01J35/04 , H01J19/44 , H01J3/02 , H01J3/38 , H01J1/30 , H01J1/90 , A61B6/00 , H01J1/304 , H01J19/24 , H01J19/42 , B82Y30/00
CPC classification number: H01J35/065 , A61B6/40 , A61B6/4064 , A61B6/4488 , B82Y30/00 , H01J1/304 , H01J1/90 , H01J3/021 , H01J3/38 , H01J19/24 , H01J19/42 , H01J19/44 , H01J35/045 , H01J35/06 , H01J2201/304 , H01J2201/30469 , H01J2201/3195 , H01J2203/0204 , H01J2203/0208 , H01J2203/0212 , H01J2203/0216 , H01J2203/0236 , H01J2235/06 , H01J2235/1212 , H01J2235/1291 , H01J2235/1295 , Y10S977/742 , Y10S977/939 , Y10S977/95
Abstract: An x-ray generator includes a housing, a cathode block that is arranged in the housing and emits electrons via a field emission scheme, an anode block that is arranged in the housing and generates x-rays in response to the electrons emitted from the cathode block and collide with the anode block, and a heat sink block that contacts the cathode block and dissipates heat generated therein to an outside of the housing.
Abstract translation: X射线发生器包括壳体，阴极块，其布置在壳体中并经由场致发射方案发射电子;阳极块，布置在壳体中并响应于从阴极发射的电子产生X射线 阻挡并与阳极块碰撞，以及散热块，其接触阴极块并将其中产生的热量散发到壳体的外部。
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公开(公告)号：US09064670B2
公开(公告)日：2015-06-23
申请号：US13771736
申请日：2013-02-20
Applicant: Samsung Electronics Co., Ltd.
Inventor： Il-hwan Kim , Do-yoon Kim , Yong-chul Kim , Shang-hyeun Park , Tae-won Jeong
CPC classification number: H01J29/025 , H01J3/021 , H01J35/045 , H01J35/065 , H01J2203/0216 , H01J2203/0236 , H01J2203/0244 , H01J2203/0272 , H01J2235/068
Abstract: An electron emission device includes a cathode electrode; a mesh-shaped gate electrode spaced apart from the cathode electrode; a plurality of gate spacers between the cathode electrode and the gate electrode; and a plurality of electron emission sources between the cathode electrode and the gate electrode, and alternating with the plurality of gate spacers.
Abstract translation: 电子发射装置包括阴极电极; 与阴极间隔开的网状栅电极; 在所述阴极电极和所述栅电极之间的多个栅极间隔物; 以及在所述阴极电极和所述栅电极之间的多个电子发射源，并且与所述多个栅极间隔物交替。
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10.发明授权公开(公告)号：US08154188B2
公开(公告)日：2012-04-10
申请号：US12694474
申请日：2010-01-27
Applicant: Takanori Suwa , Toshihiko Takeda , Tamayo Hiroki
Inventor： Takanori Suwa , Toshihiko Takeda , Tamayo Hiroki
CPC classification number: H01J3/021 , H01J1/3046 , H01J31/127 , H01J2201/30423 , H01J2203/0216 , H01J2203/0272 , H01J2329/0423 , H01J2329/4613 , H01J2329/4673 , H01J2329/4682
Abstract: An electron beam apparatus is provided having an electron emitting device which has a simple configuration, exhibits high electron emission efficiency, operates stably, and in which emitted electrons are effectively converged. The electron beam apparatus includes: an insulator having a notch on its surface; a gate positioned on the surface of the insulator; at least one cathode having a protruding portion protruding from an edge of the notch toward the gate, and positioned on the surface of the insulator so that the protruding portion is opposed to the gate; and an anode arranged to be opposed to the protruding portion via the gate, wherein the gate is formed on the surface of the insulator so that at least a part of a region opposed to the cathode is projected outward and recessed portions are provided in which ends of the gate are recessed and interpose the projected region.
Abstract translation: 提供了一种具有电子发射器件的电子束装置，该电子发射器件具有简单的结构，表现出高的电子发射效率，稳定地工作，并且其中发射的电子被有效地收敛。 电子束装置包括：在其表面上具有凹口的绝缘体; 位于绝缘体表面上的门; 至少一个阴极，其具有从所述凹口的边缘向所述栅极突出的突出部分，并且位于所述绝缘体的所述表面上，使得所述突出部分与所述栅极相对; 以及经由所述栅极与所述突出部相对的阳极，其中，所述栅极形成在所述绝缘体的表面上，使得与所述阴极相对的区域的至少一部分向外突出，并且设置有凹部， 的栅极凹进并插入投影区域。
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