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公开(公告)号：US3995266A
公开(公告)日：1976-11-30
申请号：US577875
申请日：1975-05-15
CPC分类号： G05B19/075 , H01J37/24 , H03K21/00 , H03M1/0612
摘要： A device for setting an electric command variable comprising parallel circuit branches for the coarse and fine adjustment of the variable is disclosed. In particular, the fine and coarse adjustment branches each include a digital bi-directional counter and a digital-analog converter. Upon exceeding the limits of the conversion range of the digital-to-analog converter of the fine branch, the counter therein is adjusted to a value which corresponds to a middle setting of its associated converter. To prevent the latter adjustment from causing a variation of the analog command variable, a corresponding correction of the counter in the coarse branch is then made. The present device has particular application in the setting of the energizing currents in magnetic lenses of an electron microscope.
摘要翻译： 公开了一种用于设置电子指令变量的装置，包括用于粗调和微调整变量的并行电路分支。 特别地，精细和粗调分支各自包括数字双向计数器和数模转换器。 当超过精细分支的数模转换器的转换范围的限制时，其中的计数器被调整为对应于其相关联的转换器的中间设置的值。 为了防止后一种调整引起模拟命令变量的变化，然后对粗分支中的计数器进行相应的校正。 本装置在电子显微镜的磁性透镜的激励电流的设定中具有特别的应用。
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公开(公告)号：US4149074A
公开(公告)日：1979-04-10
申请号：US717652
申请日：1976-08-25
CPC分类号： H01J37/244 , G02B21/002 , G02B6/04 , G02B6/10 , G02B6/4214 , H01J37/26 , H01J37/28 , H01J2237/2443 , H01J2237/2802
摘要： A scanning transmission-type electron microscope including an annular-shaped detector disposed concentrically with respect to the optical axis of the microscope behind a specimen along the microscope beam path, and means for amplifying output signals generated by the detector. The detector comprises a scintillation detector and the microscope includes a photoelectron multiplier coupled to the detector and disposed outside the microscope beam. A curved light guide is also coupled to the detector and the photoelectron multiplier and includes a canal which extends through the light guide along the microscope axis for permitting the passage of a central ray cone of the electron beam of the microscope through the light guide.
摘要翻译： 一种扫描透射型电子显微镜，其包括相对于显微镜光路的样本相对于显微镜的光轴同心布置的环状检测器，以及用于放大由检测器产生的输出信号的装置。 检测器包括闪烁检测器，显微镜包括耦合到检测器并设置在显微镜束外部的光电子倍增器。 弯曲光导还耦合到检测器和光电子倍增器，并且包括沿着显微镜轴线延伸穿过光导的管道，以允许显微镜的电子束的中心射线锥通过光导。
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3.发明授权Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope 失效用于聚焦扫描透射型红外光束显微镜的物镜的方法和装置
公开(公告)号：US4097740A
公开(公告)日：1978-06-27
申请号：US721693
申请日：1976-09-09
IPC分类号： H01J37/153 , H01J37/21 , H01J37/28 , H01J37/26
CPC分类号： H01J37/21 , H01J37/153 , H01J37/28
摘要： A method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope. In the method, the beam of the microscope is deflected by a deflection system excited in sawtooth fashion and generates a raster consisting of parallel lines on the specimen to be examined. The microscope includes a beam radiation detector disposed behind the specimen along the beam path which generates an output signal which controls the brightness of a picture tube monitor operated synchronously with the raster. The improvement of the invention comprises the steps of measuring, during the exposure of a specimen point, partial beam radiation intensities in the cone of the beam at two points disposed symmetrical with respect to the longitudinal axis of the beam cone by means of the detector, the effective input area of the detector being smaller than the cross-sectional area of the cone of the beam at the same height in the microscope. The lens current of the objective lens is then adjusted so that the output signals generated by the detector are equal for the beam radiation measurements at the two points. An apparatus for automatically focusing the objective lens in the foregoing manner is also disclosed.
摘要翻译： 一种用于聚焦扫描透射型红外光束显微镜的物镜的方法和装置。 在该方法中，显微镜的光束被以锯齿形激发的偏转系统偏转，并产生由被检样本上的平行线构成的光栅。 显微镜包括沿着光束路径设置在样本后面的光束辐射检测器，其产生控制与光栅同步操作的显像管监视器的亮度的输出信号。 本发明的改进包括以下步骤：在试样点的曝光期间，通过检测器在相对于束锥的纵向轴线对称设置的两个点处测量梁的锥体中的部分束辐射强度， 检测器的有效输入面积小于显微镜中相同高度处的梁的锥体的横截面面积。 然后调整物镜的透镜电流，使得检测器产生的输出信号对于两点处的光束辐射测量是相等的。
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4.发明授权Method for pictorially displaying output information generated by an object imaging apparatus 失效用于图形显示由对象成像装置生成的输出信息的方法
公开(公告)号：US4091374A
公开(公告)日：1978-05-23
申请号：US719112
申请日：1976-08-31
摘要： A method for pictorially displaying output information generated in the form of an electrical signal by an apparatus for imaging an object which includes a first display means for visually displaying a working image of the object and a second display means for visually displaying an orientation image of the object. The orientation image is obtained by varying the operating parameters of the apparatus and is displayed simultaneously with the working image. The improvement of the invention comprises the steps of generating the orientation image once, storing the orientation image in an image storage means, and then reproducing the orientation image from the generated image stored in the image storage means.
摘要翻译： 一种用于通过用于成像对象的装置的用于图形显示以电信号形式生成的输出信息的方法，该装置包括用于可视地显示该对象的工作图像的第一显示装置和用于可视地显示该对象的定向图像的第二显示装置 目的。 通过改变设备的操作参数获得定向图像，并与工作图像同时显示。 本发明的改进包括以下步骤：一次生成定向图像，将取向图像存储在图像存储装置中，然后从存储在图像存储装置中的生成图像再现定向图像。
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5.发明授权Method for the pictorial display of a diffraction image in a transmission-type, scanning, corpuscular-beam microscope 失效传输类型，扫描，微光束显微镜中的衍射图像的图像显示方法
公开(公告)号：US4160162A
公开(公告)日：1979-07-03
申请号：US847439
申请日：1977-11-01
IPC分类号： H01J37/22 , H01J37/28 , H01J37/295 , G01N23/00
CPC分类号： H01J37/28 , H01J37/2955
摘要： An improved method for pictorially displaying a diffraction image in a transmission-type, scanning, corpuscular-beam microscope in which a beam detector is scanned by a diffraction image moved by a deflection system in line-raster fashion in a first, predetermined direction over the beam detector. The beam detector generates an output signal for controlling the brightness of a television monitor which displays the diffraction image. The improvement of the invention comprises the step of additionally exciting the deflection system so as to move the diffraction image in another, second direction over the beam detector which is perpendicular to the first, predetermined direction so that a predetermined area of the diffraction image which includes at least part of the cross-section of the maximum intensity of the null reflex of the beam is excluded during scanning of the beam detector and the diffraction image displayed by the television monitor is blanked in an area corresponding to the cross-section of the diffraction image which is excluded during scanning.
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公开(公告)号：US4211924A
公开(公告)日：1980-07-08
申请号：US7647
申请日：1979-01-29
IPC分类号： H01J37/22 , H01J37/295
CPC分类号： H01J37/28 , H01J37/224 , H01J37/2955
摘要： An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.
摘要翻译： 一种改进的透射型扫描带电粒子束显微镜，包括电视照相机管和用于产生和显示被检样本的衍射图像的电视显示管。 本发明的改进包括在显微镜中沿着光束路径设置在样品后面的光束的透射荧光屏中的光学装置，适于将荧光屏成像在电视摄像机管的目标上 以及用于整体地检测从荧光屏发出的辐射的检测器装置。
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公开(公告)号：US4031390A
公开(公告)日：1977-06-21
申请号：US392526
申请日：1973-08-29
CPC分类号： H01J37/21 , H01J37/147 , H01J37/22 , H01J37/265
摘要： A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.
摘要翻译： 操作诸如电子显微镜等的装备有布置在光束路径处的偏转系统的粒子束装置的方法和可操作地连接到偏转系统的控制装置包括通过控制来调节偏转系统的激发 将粒子束引导到可选择的时间周期的装置，以将对象物体的位置进行调查，并且再次通过控制装置调整偏转系统的激励，以将粒子束引导到其余的 时间到物体的另一位置，其中粒子束通过物体，最后提到的位置被布置在第一个提到的位置的侧面。
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公开(公告)号：US4514798A
公开(公告)日：1985-04-30
申请号：US393297
申请日：1982-06-29
摘要： Disclosed is a control apparatus having an indicator and a control which are used to display and change two different types of parameters in two modes of operation of the apparatus. The apparatus includes a control panel and a movable panel which can be moved to alternately overlay and expose at least a portion of the control panel. Switch means are provided to condition the apparatus to operate in a first mode in which the indicator displays a first type of parameter and the control selects or adjusts the value of the first parameter while the apparatus is automatically prevented from operating in a second mode of operation. The switch means further conditions the apparatus to operate in the second mode in which the indicator displays a second type of parameter and the control selects or adjusts the value of the second parameter while the apparatus is automatically prevented from operating in the first mode.
摘要翻译： 公开了一种具有指示器和控制器的控制装置，其用于在设备的两种操作模式中显示和改变两种不同类型的参数。 该装置包括控制面板和可移动面板，其可移动以交替地覆盖和暴露控制面板的至少一部分。 提供开关装置以使装置工作在第一模式中，其中指示器显示第一类型的参数，并且控制选择或调整第一参数的值，同时自动防止装置在第二操作模式下操作 。 开关装置进一步使设备在第二模式下运行，其中指示器显示第二类型的参数，并且当自动防止装置在第一模式下运行时，控制选择或调整第二参数的值。
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公开(公告)号：US4497038A
公开(公告)日：1985-01-29
申请号：US383102
申请日：1982-05-28
摘要： An electronic controller having a detachably mounted front panel unit on which display devices and control elements are arranged is disclosed. By means of the control elements, the process variables and the control parameters are changed incrementally. Values of the control parameter, process variables, and the selected control parameter are indicated by the display devices. To provide a compact, independent front panel unit which can be removed from the main housing of the controller for protection against unauthorized operation, the front panel unit is provided with a slave microprocessor which is connected via a plug-in connector to a master microprocessor in the main housing. Because the master microprocessor operates independently of the front panel mounted slave microprocessor, the front panel unit can be removed without affecting the operation of the controller.
摘要翻译： 公开了一种具有可拆卸地安装的显示装置和控制元件的前面板单元的电子控制器。 通过控制元件，过程变量和控制参数逐渐变化。 控制参数，过程变量和所选控制参数的值由显示设备指示。 为了提供紧凑的独立的前面板单元，其可以从控制器的主壳体移除以防止未经授权的操作，前面板单元设置有从微处理器，其通过插入式连接器连接到主微处理器 主要住房。 由于主微处理器独立于前面板安装的从属微处理器进行操作，所以前面板单元可以被移除而不影响控制器的操作。
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