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公开(公告)号：US07309563B2
公开(公告)日：2007-12-18
申请号：US10741252
申请日：2003-12-19
IPC分类号： G03C5/00
CPC分类号： H01L21/31144 , H01L21/0272 , H01L21/0335 , H01L21/76802
摘要： A method for performing a liftoff operation involves printing a liftoff pattern using low-resolution patterning techniques to form fine feature patterns. The resulting feature size is defined by the spacing between printed patterns rather than the printed pattern size. By controlling the cross-sectional profile of the printed liftoff pattern, mask structures may be formed from the liftoff operation having beneficial etch-mask aperture profiles. For example, a multi-layer printed liftoff pattern can be used to create converging aperture profiles in a patterned layer. The patterned layer can then be used as an etch mask, where the converging aperture profiles result in desirable diverging etched features.
摘要翻译： 用于执行提升操作的方法包括使用低分辨率图案化技术打印提升图案以形成精细的特征图案。 所得到的特征尺寸由印刷图案之间的间距而不是印刷图案尺寸定义。 通过控制印刷的剥离图案的横截面轮廓，可以从具有有利的蚀刻掩模孔径轮廓的提升操作形成掩模结构。 例如，可以使用多层印刷提升图案来在图案化层中形成会聚孔径轮廓。 然后可以将图案化层用作蚀刻掩模，其中会聚孔径轮廓导致期望的发散蚀刻特征。
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公开(公告)号：US07559619B2
公开(公告)日：2009-07-14
申请号：US11204648
申请日：2005-08-15
IPC分类号： B41J29/393
CPC分类号： B41J2/2139 , B81C99/0065 , B81C2201/0184 , B81C2201/0198
摘要： A digital lithography system including a droplet source (printhead) for selectively ejecting liquid droplets of a phase-change masking material, and an imaging system for capturing (generating) image data representing printed features formed by the ejected liquid droplets. The system also includes a digital control system that detects defects in the printed features, for example, by comparing the image data with stored image data. The digital control system then modifies the printed feature to correct the defect, for example, by moving the printhead over the defect and causing the printhead to eject droplets onto the defect's location. In one embodiment, a single-printhead secondary printer operates in conjunction with a multi-printhead main printer to correct defects.
摘要翻译： 一种数字光刻系统，包括用于选择性地喷射相变掩模材料的液滴的液滴源（打印头）和用于捕获（产生）表示喷射液滴形成的打印特征的图像数据的成像系统。 该系统还包括数字控制系统，其检测打印特征中的缺陷，例如通过将图像数据与存储的图像数据进行比较。 然后，数字控制系统修改打印的特征以校正缺陷，例如通过将打印头移动到缺陷上并使打印头将液滴喷射到缺陷的位置上。 在一个实施例中，单打印头二次打印机与多打印头主打印机一起操作以校正缺陷。
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3.发明授权公开(公告)号：US07087444B2
公开(公告)日：2006-08-08
申请号：US10320904
申请日：2002-12-16
IPC分类号： H01L21/00
CPC分类号： B81C1/00492 , B01L3/502707 , B01L2200/12 , B01L2300/0654 , B01L2300/0663 , B81B2201/058 , G01N21/01 , H01L2221/68363
摘要： A method of forming an integrated microelectronic device and a micro channel is provided. The method offers an inexpensive way of integrating devices that are usually incompatible during fabrication, a microchannel and a microelectronic structure such as an electro-optic light source, a detector or a MEMs device into a single integrated structure.
摘要翻译： 提供一种形成集成的微电子器件和微通道的方法。 该方法提供了将制造期间通常不兼容的器件，微通道和诸如电光源，检测器或MEM器件的微电子结构集成到单个集成结构中的廉价方式。
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4.发明授权公开(公告)号：US06972261B2
公开(公告)日：2005-12-06
申请号：US10186092
申请日：2002-06-27
IPC分类号： B05D1/26 , B05D1/32 , B05D7/00 , H01L21/033 , H01L21/288 , H01L21/311 , H01L21/3205 , H01L21/3213 , H01L21/336 , H01L29/786 , H01L51/00 , H01L51/05 , H01L51/40 , H01L21/302
CPC分类号： H01L51/0004 , B82Y30/00 , H01L21/0337 , H01L21/31144 , H01L21/32139 , H01L29/66765 , H01L51/0021 , H01L51/0023 , H01L51/0541
摘要： A method and system for masking a surface to be etched is described. The method includes the operation of heating a phase-change masking material and using a droplet source to eject droplets of a masking material for deposit on a thin-film or other substrate surface to be etched. The temperature of the thin-film or substrate surface is controlled such that the droplets rapidly freeze after upon contact with the thin-film or substrate surface. The thin-film or substrate is then treated to alter the surface characteristics, typically by depositing a self assembled monolayer on the surface. After deposition, the masking material is removed. A material of interest is then deposited over the substrate such that the material adheres only to regions not originally covered by the mask such that the mask acts as a negative resist. Using such techniques, feature sizes of devices smaller than the smallest droplet printed may be fabricated.
摘要翻译： 描述用于掩蔽待蚀刻表面的方法和系统。 该方法包括加热相变掩模材料和使用液滴源来喷射掩模材料的液滴以沉积在待蚀刻的薄膜或其它基底表面上的操作。 控制薄膜或基板表面的温度，使得在与薄膜或基板表面接触之后液滴快速冷冻。 然后通常通过在表面上沉积自组装的单层来处理薄膜或基底以改变表面特性。 沉积后，去除掩模材料。 然后将感兴趣的材料沉积在衬底上，使得材料仅粘附到最初不被掩模覆盖的区域，使得掩模用作负抗蚀剂。 使用这样的技术，可以制造小于最小液滴印刷的装置的特征尺寸。
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5.发明授权Method for the printing of homogeneous electronic material with a multi-ejector print head 有权使用多重喷射打印头打印均质电子材料的方法公开(公告)号：US08104863B2
公开(公告)日：2012-01-31
申请号：US12787362
申请日：2010-05-25
申请人： Steven E. Ready , William S. Wong
发明人： Steven E. Ready , William S. Wong
IPC分类号： B41J29/393
CPC分类号： H05K3/125 , H01L21/288 , H01L21/76838 , H01L23/544 , H01L2924/0002 , H01L2924/00
摘要： Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A first alignment operation is performed to achieve a specified orientation between the printhead and a first set of alignment marks on the substrate using first image data generated by the imaging sensor of the camera before performing a first print operation, and a second alignment operation to orient the printhead relative to a second set of alignment marks is performed before a second print operation. A first pattern layout portion includes first layout elements aligned parallel to a first reference axis, and the first print operation is performed by making multiple printing passes in a print direction aligned with the first reference axis.
摘要翻译： 公开了印刷系统，其通过将图案布局分离成仅具有平行布局特征的离散设计层，并且通过使用沉积到所述图案上的各个印刷液滴印刷每个设计层来产生均匀的平滑边缘印刷图案（例如集成电路（IC）图案） 基质。 执行第一对准操作，以在执行第一打印操作之前使用由相机的成像传感器产生的第一图像数据在第二组对准操作之前在打印头和基板上的第一组对准标记之间实现指定的取向， 在第二打印操作之前执行打印头相对于第二组对准标记。 第一图案布局部分包括平行于第一参考轴线排列的第一布局元件，并且通过在与第一参考轴线对齐的打印方向上进行多次打印遍历来执行第一打印操作。
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6.发明授权公开(公告)号：US07223700B2
公开(公告)日：2007-05-29
申请号：US11251525
申请日：2005-10-14
IPC分类号： H01L21/302
CPC分类号： H01L51/0004 , B82Y30/00 , H01L21/0337 , H01L21/31144 , H01L21/32139 , H01L29/66765 , H01L51/0021 , H01L51/0023 , H01L51/0541
摘要： A method and system for masking a surface to be etched is described. The method includes the operation of heating a phase-change masking material and using a droplet source to eject droplets of a masking material for deposit on a thin-film or other substrate surface to be etched. The temperature of the thin-film or substrate surface is controlled such that the droplets rapidly freeze after upon contact with the thin-film or substrate surface. The thin-film or substrate is then treated to alter the surface characteristics, typically by depositing a self assembled monolayer on the surface. After deposition, the masking material is removed. A material of interest is then deposited over the substrate such that the material adheres only to regions not originally covered by the mask such that the mask acts as a negative resist. Using such techniques, feature sizes of devices smaller than the smallest droplet printed may be fabricated.
摘要翻译： 描述用于掩蔽待蚀刻表面的方法和系统。 该方法包括加热相变掩模材料和使用液滴源来喷射掩模材料的液滴以沉积在待蚀刻的薄膜或其它基底表面上的操作。 控制薄膜或基板表面的温度，使得在与薄膜或基板表面接触之后液滴快速冷冻。 然后通常通过在表面上沉积自组装的单层来处理薄膜或基底以改变表面特性。 沉积后，去除掩模材料。 然后将感兴趣的材料沉积在衬底上，使得材料仅粘附到最初不被掩模覆盖的区域，使得掩模用作负抗蚀剂。 使用这样的技术，可以制造小于最小液滴印刷的装置的特征尺寸。
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7.发明授权Method for the printing of homogeneous electronic material with a multi-ejector print head 有权使用多重喷射打印头打印均质电子材料的方法公开(公告)号：US07997680B2
公开(公告)日：2011-08-16
申请号：US12787371
申请日：2010-05-25
申请人： Steven E. Ready , William S. Wong
发明人： Steven E. Ready , William S. Wong
IPC分类号： B41J29/393
CPC分类号： H05K3/125 , H01L21/288 , H01L21/76838 , H01L23/544 , H01L2924/0002 , H01L2924/00
摘要： Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A printhead alignment operation includes positioning the printhead and printing a spot onto the substrate from each ejector, determining a vertical offset between an expected location of each spot along a vertical axis and the actual location of the spot along the vertical axis, calculating a linear fit line for the vertical offset of each spot plotted against an expected location of the spot along a horizontal axis, calculating the slope of the linear fit line, and rotating the printhead relative to the substrate according to an angle defined by the slope of the linear fit line.
摘要翻译： 打印系统被公开，通过分离图案布局成离散的设计层仅具有平行布局特征产生均匀，平滑边缘的印刷图案（诸如集成电路（IC）图案），并且通过使用沉积到各个打印溶液液滴打印每个设计层 基质。 打印头对准操作包括定位打印头并从每个喷射器将斑点印刷到基板上，确定沿着垂直轴线的每个光点的预期位置与光点沿着垂直轴的实际位置之间的垂直偏移，计算线性拟合 每个点的垂直偏移的线对应于点沿水平轴的预期位置，计算线性拟合线的斜率，并且根据由线性拟合的斜率限定的角度相对于基底旋转打印头 线。
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8.发明授权公开(公告)号：US07992958B2
公开(公告)日：2011-08-09
申请号：US12787367
申请日：2010-05-25
申请人： Steven E. Ready , William S. Wong
发明人： Steven E. Ready , William S. Wong
IPC分类号： B41J29/393
CPC分类号： H05K3/125 , H01L21/288 , H01L21/76838 , H01L23/544 , H01L2924/0002 , H01L2924/00
摘要： Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A printhead alignment operation includes printing a first spot from a first printhead ejector on a first substrate location, positioning a second ejector over the first substrate location and printing a second spot, measuring a distance between the first spot and the second spot, adjusting a rotational orientation between the print head and the substrate to reduce the distance between the first spot and the second spot, and then repeating the printing, measuring and adjusting processes until the first and second spots are separated by a predefined threshold value apart. The design layers are then printed.
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9.发明申请Method For The Printing Of Homogeneous Electronic Material With A Multi-Ejector Print Head 有权使用多功能喷头打印头打印均匀电子材料的方法公开(公告)号：US20100231638A1
公开(公告)日：2010-09-16
申请号：US12787371
申请日：2010-05-25
申请人： Steven E. Ready , William S. Wong
发明人： Steven E. Ready , William S. Wong
IPC分类号： B41J29/393
CPC分类号： H05K3/125 , H01L21/288 , H01L21/76838 , H01L23/544 , H01L2924/0002 , H01L2924/00
摘要： Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A printhead alignment operation includes positioning the printhead and printing a spot onto the substrate from each ejector, determining a vertical offset between an expected location of each spot along a vertical axis and the actual location of the spot along the vertical axis, calculating a linear fit line for the vertical offset of each spot plotted against an expected location of the spot along a horizontal axis, calculating the slope of the linear fit line, and rotating the printhead relative to the substrate according to an angle defined by the slope of the linear fit line.
摘要翻译： 打印系统被公开，通过分离图案布局成离散的设计层仅具有平行布局特征产生均匀，平滑边缘的印刷图案（诸如集成电路（IC）图案），并且通过使用沉积到各个打印溶液液滴打印每个设计层 基质。 打印头对准操作包括定位打印头并从每个喷射器将斑点印刷到基板上，确定沿着垂直轴线的每个光点的预期位置与光点沿着垂直轴的实际位置之间的垂直偏移，计算线性拟合 每个点的垂直偏移的线对应于点沿水平轴的预期位置，计算线性拟合线的斜率，并且根据由线性拟合的斜率限定的角度相对于基底旋转打印头 线。
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10.发明申请Method For The Printing Of Homogeneous Electronic Material With A Multi-Ejector Print Head 有权使用多功能喷头打印头打印均匀电子材料的方法公开(公告)号：US20100231637A1
公开(公告)日：2010-09-16
申请号：US12787367
申请日：2010-05-25
申请人： Steven E. Ready , William S. Wong
发明人： Steven E. Ready , William S. Wong
IPC分类号： B41J29/393
CPC分类号： H05K3/125 , H01L21/288 , H01L21/76838 , H01L23/544 , H01L2924/0002 , H01L2924/00
摘要： Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A printhead alignment operation includes printing a first spot from a first printhead ejector on a first substrate location, positioning a second ejector over the first substrate location and printing a second spot, measuring a distance between the first spot and the second spot, adjusting a rotational orientation between the print head and the substrate to reduce the distance between the first spot and the second spot, and then repeating the printing, measuring and adjusting processes until the first and second spots are separated by a predefined threshold value apart. The design layers are then printed.
摘要翻译： 公开了印刷系统，其通过将图案布局分离成仅具有平行布局特征的离散设计层，并且通过使用沉积在该图案上的各个印刷液滴印刷每个设计层来产生均匀的平滑边缘印刷图案（例如集成电路（IC）图案） 基质。 打印头对准操作包括在第一基板位置上从第一打印头喷射器打印第一斑点，将第二喷射器定位在第一基板位置上并打印第二光斑，测量第一光斑和第二光点之间的距离， 打印头和基板之间的取向以减小第一点和第二点之间的距离，然后重复打印，测量和调整过程，直到第一和第二点间隔一预定阈值。 然后打印设计图层。
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