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    Method for the production of a magnetic head
    4.
    发明授权
    Method for the production of a magnetic head 失效
    制造磁头的方法

    公开(公告)号：US06199267B1

    公开(公告)日：2001-03-13

    申请号：US09282543

    申请日：1999-03-31

    申请人： Takao Koshikawa ,  Atsuhiko Nagai

    发明人： Takao Koshikawa ,  Atsuhiko Nagai

    IPC分类号： G11B5187

    CPC分类号： G11B5/3967 ,  G11B5/1871 ,  G11B5/3106 ,  G11B5/3109 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/40 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for the production of a magnetic head, where first a lower magnetic pole is formed on a wafer. Next, a nonmagnetic write gap layer is formed on the lower magnetic pole. A coil is then formed to be sandwiched between nonmagnetic insulating layers on the nonmagnetic write gap layer. Finally, an upper magnetic pole, provided with a pole tip, is formed to contact the write gap layer on the nonmagnetic write gap layer. After formation, a focused ion beam is irradiated in the direction from a thickness of the pole tip to the lateral parts of the pole tip, the nonmagnetic write gap layer lying directly thereunder. The lower magnetic pole thereby trims the lateral parts of the pole tip while consequently decreasing the width of the pole tip. At the same time, depressed parts are formed in the lower magnetic pole in the areas extending outward from directly below the lateral parts of the pole tip. The width of the pole tip is then equalized and a width of the lower magnetic pole is sandwiched by the depressed parts. Lastly, a protective layer is formed, which is made of a nonmagnetic insulating material, fills in the depressed parts, and, at the same time, covers the upper magnetic pole and the lower magnetic pole.

    摘要翻译： 一种用于制造磁头的方法，其中首先在晶片上形成下磁极。 接下来，在下磁极上形成非磁性写间隙层。 然后形成线圈以夹在非磁性写间隙层上的非磁性绝缘层之间。 最后，设置有极尖的上磁极与非磁性写间隙层上的写间隙层接触。 形成后，在从极尖的厚度到极尖的侧面的方向照射聚焦离子束，非磁性写入间隙层位于其下方。 因此，下磁极修剪极尖的侧部，从而减小极尖的宽度。 同时，在从极尖的侧面的正下方向外延伸的区域中的下磁极中形成凹陷部。 然后使极尖的宽度相等，并且下磁极的宽度被凹陷部分夹持。 最后，形成由非磁性绝缘材料制成的保护层，填充凹陷部分，同时覆盖上磁极和下磁极。

    Thin film magnetic head and process for producing same
    8.
    发明授权
    Thin film magnetic head and process for producing same 失效
    薄膜磁头及其制造方法

    公开(公告)号：US6083410A

    公开(公告)日：2000-07-04

    申请号：US953186

    申请日：1997-10-17

    申请人： Yukinori Ikegawa ,  Takao Koshikawa ,  Yoshinori Ohtsuka

    发明人： Yukinori Ikegawa ,  Takao Koshikawa ,  Yoshinori Ohtsuka

    IPC分类号： G11B5/23 ,  G11B5/31 ,  B44C1/22

    CPC分类号： G11B5/3183 ,  G11B5/3116 ,  G11B5/232 ,  G11B5/3163

    摘要： A plan or vertical type thin film magnetic head is produced by a process comprising the steps of: forming a gap separator layer of a non-magnetic material on the surface of a substrate, while the forming process is not limited to plating; forming a mask layer on the gap layer; patterning the mask layer to form a shield; etching the gap layer, while the shield functions as a mask, thereby forming a gap wall having a width narrower than that of the shield independent of the resolution degree of the resist; forming a magnetic pole layer of a soft magnetic material on the surface of the substrate by exposing the resist at a time, thereby the formed magnetic pole layer being separated by the gap wall; and, utilizing the gap wall as a magnetic pole gap of the magnetic pole layer.

    摘要翻译： 通过包括以下步骤的方法制造平面或垂直型薄膜磁头：在基板的表面上形成非磁性材料的间隙隔离层，而成形过程不限于电镀; 在间隙层上形成掩模层; 图案化掩模层以形成屏蔽; 蚀刻间隙层，而屏蔽件用作掩模，从而形成宽度窄于屏蔽件的宽度的间隙壁，而与抗蚀剂的分辨度无关; 通过一次曝光抗蚀剂，在基板的表面上形成软磁性材料的磁极层，由此形成的磁极层被间隙壁分离; 并且利用间隙壁作为磁极层的磁极间隙。