公开(公告)号：US06670766B2

公开(公告)日：2003-12-30

申请号：US09863474

申请日：2001-05-24

申请人： Keiichi Yamazaki ,  Yukiko Inooka ,  Yasushi Sawada ,  Noriyuki Taguchi ,  Yoshiyuki Nakazono ,  Akio Nakano

发明人： Keiichi Yamazaki ,  Yukiko Inooka ,  Yasushi Sawada ,  Noriyuki Taguchi ,  Yoshiyuki Nakazono ,  Akio Nakano

IPC分类号： H01J724

CPC分类号： H01J37/32357

摘要： A plasma treatment apparatus and a plasma treatment method having the capability of uniformly treating an object with plasma at a high treatment speed. This apparatus includes a tubular vessel having a laterally elongated cross section, a pair of electrodes arranged such that electric flux lines develop substantially in an axial direction of the tubular vessel when one of an AC voltage and a pulse voltage is applied between the electrodes, a gas supply for supplying a streamer generation gas into the tubular vessel, a power source for applying the voltage between the electrodes to generate plural streamers of the gas in the tubular vessel, and a plasma uniformity mechanism for making the plural streamers uniform in a lateral direction of the laterally elongated cross section of the tubular vessel to provide the plasma from one end of the tubular vessel.

摘要翻译： 一种等离子体处理装置和等离子体处理方法，其具有以高处理速度等离子体均匀地处理物体的能力。 该装置包括具有横向细长横截面的管状容器，一对电极被布置为使得当在电极之间施加AC电压和脉冲电压之一时，电流线基本上沿管状容器的轴向方向显影，a 用于向管状容器供应流光产生气体的气体供给源，用于在电极之间施加电压的电源，以在管状容器中产生多个气流拖缆;以及等离子体均匀性机构，用于使多个拖缆在横向方向上均匀 的管状容器的横向细长的横截面以从管状容器的一端提供等离子体。

公开(公告)号：US06465964B1

公开(公告)日：2002-10-15

申请号：US09694324

申请日：2000-10-24

申请人： Noriyuki Taguchi ,  Yasushi Sawada ,  Keiichi Yamazaki ,  Yoshiyuki Nakazono ,  Yukiko Inooka ,  Kazuya Kitayama

发明人： Noriyuki Taguchi ,  Yasushi Sawada ,  Keiichi Yamazaki ,  Yoshiyuki Nakazono ,  Yukiko Inooka ,  Kazuya Kitayama

IPC分类号： H01J724

CPC分类号： H05H1/2406 ,  H05H2001/2456

摘要： A plasma treatment apparatus can generate atmospheric pressure plasma with reliability by help of an ignition electrode to facilitate starting the apparatus without using an expensive impedance matching device. The apparatus comprises a plasma-generation chamber having an aperture from which the plasma blows out, a gas supply unit for supplying a gas for plasma generation into the chamber, a pair of electrodes, a power source for applying an AC electric field between the electrodes to maintain the plasma in the chamber, a pulse generator for providing a pulse voltage, and the ignition electrode for applying the pulse voltage to the gas supplied in the chamber to generate the plasma.

摘要翻译： 等离子体处理装置可以通过点火电极的可靠性产生大气压等离子体，以便于在不使用昂贵的阻抗匹配装置的情况下启动装置。 该装置包括具有等离子体吹出的孔的等离子体生成室，用于将用于等离子体产生的气体供应到室中的气体供给单元，一对电​​极，用于在电极之间施加AC电场的电源 以维持腔室中的等离子体，用于提供脉冲电压的脉冲发生器和用于将脉冲电压施加到在腔室中供应的气体以产生等离子体的点火电极。

公开(公告)号：US20060042545A1

公开(公告)日：2006-03-02

申请号：US10529861

申请日：2004-05-26

申请人： Tetsuji Shibata ,  Keiichi Yamazaki ,  Noriyuki Taguchi ,  Yasushi Sawada

发明人： Tetsuji Shibata ,  Keiichi Yamazaki ,  Noriyuki Taguchi ,  Yasushi Sawada

IPC分类号： C23C16/00

CPC分类号： H01J37/32009 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32541 ,  H01J2237/3325

摘要： A plasma treatment apparatus is provided, which enables to increase a treatment area and provide good treatment uniformity. This apparatus comprises a pair of electrode plates having a plurality of through holes and an insulating plate having a plurality of through holes. The insulating plate is disposed between the electrode plates such that positions of the through holes of the electrode plates correspond to the positions of the through holes of the insulating plate. A plurality of discharge spaces are formed by the through holes of the electrode plates and the through holes of the insulating plate. By applying a voltage between the electrode plates, while supplying a plasma generation gas into the discharge spaces, plasmas are generated simultaneously in the discharge spaces, and sprayed on an object to efficiently perform a large-area, uniform plasma treatment.

摘要翻译： 提供了一种能够增加处理面积并提供良好的处理均匀性的等离子体处理装置。 该装置包括具有多个通孔的一对电极板和具有多个通孔的绝缘板。 绝缘板设置在电极板之间，使得电极板的通孔的位置对应于绝缘板的通孔的位置。 多个放电空间由电极板的通孔和绝缘板的通孔形成。 通过在电极板之间施加电压，在将等离子体产生气体供应到放电空间中的同时，在放电空间中同时产生等离子体，并喷射到物体上以有效地进行大面积均匀的等离子体处理。

公开(公告)号：US07543546B2

公开(公告)日：2009-06-09

申请号：US10529861

申请日：2004-05-26

申请人： Tetsuji Shibata ,  Keiichi Yamazaki ,  Noriyuki Taguchi ,  Yasushi Sawada

发明人： Tetsuji Shibata ,  Keiichi Yamazaki ,  Noriyuki Taguchi ,  Yasushi Sawada

IPC分类号： C23C16/00

CPC分类号： H01J37/32009 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32541 ,  H01J2237/3325

摘要： A plasma treatment apparatus is provided, which enables to increase a treatment area and provide good treatment uniformity. This apparatus comprises a pair of electrode plates having a plurality of through holes and an insulating plate having a plurality of through holes. The insulating plate is disposed between the electrode plates such that positions of the through holes of the electrode plates correspond to the positions of the through holes of the insulating plate. A plurality of discharge spaces are formed by the through holes of the electrode plates and the through holes of the insulating plate. By applying a voltage between the electrode plates, while supplying a plasma generation gas into the discharge spaces, plasmas are generated simultaneously in the discharge spaces, and sprayed on an object to efficiently perform a large-area, uniform plasma treatment.

摘要翻译： 提供了一种能够增加处理面积并提供良好的处理均匀性的等离子体处理装置。 该装置包括具有多个通孔的一对电极板和具有多个通孔的绝缘板。 绝缘板设置在电极板之间，使得电极板的通孔的位置对应于绝缘板的通孔的位置。 多个放电空间由电极板的通孔和绝缘板的通孔形成。 通过在电极板之间施加电压，在将等离子体产生气体供应到放电空间中的同时，在放电空间中同时产生等离子体，并喷射到物体上以有效地进行大面积均匀的等离子体处理。

公开(公告)号：US06429400B1

公开(公告)日：2002-08-06

申请号：US09667437

申请日：2000-09-22

申请人： Yasushi Sawada ,  Keiichi Yamazaki ,  Yoshitami Inoue ,  Sachiko Okazaki ,  Masuhiro Kogoma

发明人： Yasushi Sawada ,  Keiichi Yamazaki ,  Yoshitami Inoue ,  Sachiko Okazaki ,  Masuhiro Kogoma

IPC分类号： B23K1000

CPC分类号： H01J37/32366 ,  H05H1/2406 ,  H05H2001/2443

摘要： A plasma processing apparatus for performing plasma processing of an article, comprising: a central electrode; a tubular outer electrode which is provided so as to surround the central electrode; a tubular reaction pipe which is disposed between the central electrode and the outer electrode so as to electrically insulate the central electrode and the outer electrode from each other; a gas supply device for supplying a plasma producing gas to a discharge space defined between the central electrode and the outer electrode in the reaction pipe; an AC power source for applying an AC voltage between the central electrode and the outer electrode; wherein not only the plasma producing gas is supplied to the discharge space by the gas supply device but the AC voltage is applied between the central electrode and the outer electrode by the AC power source so as to generate a glow discharge in the discharge space under atmospheric pressure such that a plasma jet is blown to the article from a blow-off outlet of the reaction pipe; and a cooling device for cooling the central electrode and the outer electrode.

摘要翻译： 一种用于执行制品的等离子体处理的等离子体处理装置，包括：中心电极; 设置成围绕中心电极的管状外电极; 管状反应管，其设置在所述中心电极和所述外部电极之间，以使所述中心电极和所述外部电极彼此电绝缘; 气体供给装置，用于将等离子体产生气体供给到在反应管中的中心电极和外部电极之间限定的放电空间; 用于在中心电极和外部电极之间施加AC电压的AC电源; 其中不仅通过气体供应装置将等离子体产生气体供应到放电空间，而且通过AC电源将AC电压施加在中心电极和外部电极之间，以便在大气中的放电空间中产生辉光放电 压力使得等离子体射流从反应管的吹出口吹送到制品; 以及用于冷却中心电极和外部电极的冷却装置。

公开(公告)号：US20100237375A1

公开(公告)日：2010-09-23

申请号：US12734913

申请日：2008-12-05

申请人： Keiichi Yamazaki ,  Naoko Takei ,  Tomoyuki Nakajima

发明人： Keiichi Yamazaki ,  Naoko Takei ,  Tomoyuki Nakajima

IPC分类号： H01L33/50 ,  H01L33/44

CPC分类号： H01L33/507 ,  H01L33/58 ,  H01L33/60 ,  H01L33/644 ,  H01L2224/48091 ,  H01L2924/00014

摘要： A light emitting device (1) includes a LED chip (10) as well as a mounting substrate (20) on which the LED chip (10) is mounted. Further, the light emitting device (1) includes a cover member (60) and a color conversion layer (70). The cover member (60) is formed to have a dome shape and is made of a translucency inorganic material. The color conversion layer (70) is formed to have a dome shape and is made of a translucency material (such as, a silicone resin) including a fluorescent material excited by light emitted from the LED chip (10) and emitting light longer in wavelength than the light emitted from the LED chip (10). The cover member (60) is attached to the mounting substrate (20) such that there is an air layer (80) between the cover member (60) and the mounting substrate (20). The color conversion layer (70) is superposed on a light-incoming surface or a light-outgoing surface of the cover member (60).

摘要翻译： 发光器件（1）包括LED芯片（10）以及其上安装有LED芯片（10）的安装基板（20）。 此外，发光装置（1）包括盖构件（60）和颜色转换层（70）。 盖构件（60）形成为具有圆顶形状并且由半透明无机材料制成。 颜色转换层70形成为圆顶形状，并且由包括由LED芯片（10）发射的光激发的荧光材料的透明材料（例如硅树脂）制成，并且发射波长较长的光 比从LED芯片（10）发射的光。 盖构件（60）附接到安装基板（20），使得在盖构件（60）和安装基板（20）之间存在空气层（80）。 颜色转换层（70）叠置在盖构件（60）的光入射表面或光出射表面上。

公开(公告)号：US08669578B2

公开(公告)日：2014-03-11

申请号：US13497723

申请日：2010-09-24

申请人： Shinji Shibamoto ,  Keiichi Yamazaki ,  Shunpei Fujii ,  Tomokazu Kusunoki

发明人： Shinji Shibamoto ,  Keiichi Yamazaki ,  Shunpei Fujii ,  Tomokazu Kusunoki

IPC分类号： H01L33/00

CPC分类号： H05B33/14 ,  C09K11/0883 ,  C09K11/7728 ,  H01L33/502 ,  H01L33/507 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2924/181 ,  H01L2924/19107 ,  Y10T428/2982 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/00

摘要： A wavelength conversion particle 7 used for a wavelength conversion member 70 is provided with a moth-eye structure section 74 having a fine concavo-convex structure in the side of a surface of a fluorescent particle 71, and the fine concavo-convex structure is formed in fluorescent particle 71 itself. Wavelength conversion member 70 is formed by dispersing wave-length conversion particle(s) 7 into a translucent medium 73 having a smaller refraction index than fluorescent particle 71 of wavelength conver-sion particle 7. Wavelength conversion member 70 is further provided with an antireflection section 76 in the side of the surface of fluorescent particle 71. Antireflection section 76 comprises moth-eye structure section 74 and translucent medium 73 entered between taper-shaped fine projections 75 of moth-eye structure section 74. In a light emitting device 1, wavelength conversion member 70 is used as a color conversion member converting a part of light emitted from a LED chip 10 into light having a longer wave-length than the light emitted from LED chip 10 and emitting the converted light.

摘要翻译： 用于波长转换构件70的波长转换颗粒7在荧光颗粒71的表面侧上设置有具有微细凹凸结构的蛾眼结构部分74，并且形成微细凹凸结构 在荧光颗粒71本身中。 波长转换部件70通过将波长转换粒子7分散到具有比波长转换粒子7的荧光粒子71小的折射率的透光性介质73中而形成。波长转换部件70还具有抗反射部 76.反射防止部分76包括进入蛾眼结构部分74的锥形细突起75之间的蛾眼结构部分74和半透明介质73.在发光装置1中，波长 转换构件70用作将从LED芯片10发射的光的一部分转换成具有比从LED芯片10发射的光更长的波长的光并发射转换的光的颜色转换构件。

公开(公告)号：US20130001619A1

公开(公告)日：2013-01-03

申请号：US13497723

申请日：2010-09-24

申请人： Shinji Shibamoto ,  Keiichi Yamazaki ,  Shunpei Fujii ,  Tomokazu Kusunoki

发明人： Shinji Shibamoto ,  Keiichi Yamazaki ,  Shunpei Fujii ,  Tomokazu Kusunoki

IPC分类号： G02B1/00 ,  C09K11/02 ,  H01L33/50

CPC分类号： H05B33/14 ,  C09K11/0883 ,  C09K11/7728 ,  H01L33/502 ,  H01L33/507 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2924/181 ,  H01L2924/19107 ,  Y10T428/2982 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/00

摘要： A wavelength conversion particle 7 used for a wavelength conversion member 70 is provided with a moth-eye structure section 74 having a fine concavo-convex structure in the side of a surface of a fluorescent particle 71, and the fine concavo-convex structure is formed in fluorescent particle 71 itself. Wavelength conversion member 70 is formed by dispersing wave-length conversion particle(s) 7 into a translucent medium 73 having a smaller refraction index than fluorescent particle 71 of wavelength conver-sion particle 7. Wavelength conversion member 70 is further provided with an antireflection section 76 in the side of the surface of fluorescent particle 71. Antireflection section 76 comprises moth-eye structure section 74 and translucent medium 73 entered between taper-shaped fine projections 75 of moth-eye structure section 74. In a light emitting device 1, wavelength conversion member 70 is used as a color conversion member converting a part of light emitted from a LED chip 10 into light having a longer wave-length than the light emitted from LED chip 10 and emitting the converted light.

摘要翻译： 用于波长转换构件70的波长转换颗粒7在荧光颗粒71的表面侧上设置有具有微细凹凸结构的蛾眼结构部分74，并且形成微细凹凸结构 在荧光颗粒71本身中。 波长转换部件70通过将波长转换粒子7分散到具有比波长转换粒子7的荧光粒子71小的折射率的透光性介质73中而形成。波长转换部件70还具有抗反射部 76.反射防止部分76包括进入蛾眼结构部分74的锥形细突起75之间的蛾眼结构部分74和半透明介质73.在发光装置1中，波长 转换构件70用作将从LED芯片10发射的光的一部分转换成具有比从LED芯片10发射的光更长的波长的光并发射转换的光的颜色转换构件。

公开(公告)号：US08294177B2

公开(公告)日：2012-10-23

申请号：US12734913

申请日：2008-12-05

申请人： Keiichi Yamazaki ,  Naoko Takei ,  Tomoyuki Nakajima

发明人： Keiichi Yamazaki ,  Naoko Takei ,  Tomoyuki Nakajima

IPC分类号： H01L29/24 ,  H01L33/00 ,  H01L29/20 ,  H01L29/201 ,  H01L29/22 ,  H01L29/227 ,  H01L31/0203 ,  H01L31/00

CPC分类号： H01L33/507 ,  H01L33/58 ,  H01L33/60 ,  H01L33/644 ,  H01L2224/48091 ,  H01L2924/00014

摘要： A light emitting device (1) includes a LED chip (10) as well as a mounting substrate (20) on which the LED chip (10) is mounted. Further, the light emitting device (1) includes a cover member (60) and a color conversion layer (70). The cover member (60) is formed to have a dome shape and is made of a translucency inorganic material. The color conversion layer (70) is formed to have a dome shape and is made of a translucency material (such as, a silicone resin) including a fluorescent material excited by light emitted from the LED chip (10) and emitting light longer in wavelength than the light emitted from the LED chip (10). The cover member (60) is attached to the mounting substrate (20) such that there is an air layer (80) between the cover member (60) and the mounting substrate (20). The color conversion layer (70) is superposed on a light-incoming surface or a light-outgoing surface of the cover member (60).

摘要翻译： 发光器件（1）包括LED芯片（10）以及其上安装有LED芯片（10）的安装基板（20）。 此外，发光装置（1）包括盖构件（60）和颜色转换层（70）。 盖构件（60）形成为具有圆顶形状并且由半透明无机材料制成。 颜色转换层70形成为圆顶形状，并且由包括由LED芯片（10）发射的光激发的荧光材料的透明材料（例如硅树脂）制成，并且发射波长较长的光 比从LED芯片（10）发射的光。 盖构件（60）附接到安装基板（20），使得在盖构件（60）和安装基板（20）之间存在空气层（80）。 颜色转换层（70）叠置在盖构件（60）的光入射表面或光出射表面上。

公开(公告)号：US5525560A

公开(公告)日：1996-06-11

申请号：US444924

申请日：1995-05-19

申请人： Keiichi Yamazaki ,  Masahiro Nawa ,  Koichi Niihara ,  Atsushi Nakahira ,  Tohru Sekino

发明人： Keiichi Yamazaki ,  Masahiro Nawa ,  Koichi Niihara ,  Atsushi Nakahira ,  Tohru Sekino

IPC分类号： C04B35/48 ,  C04B35/488 ,  C04B35/76 ,  C22C29/12

CPC分类号： C22C29/12 ,  C04B35/488 ,  C04B35/76

摘要： A zirconia based composite material with improved strength and toughness includes a partially stabilized zirconia including 1.5 to 4.5 mol % of yttrium oxide as a matrix thereof and a metal phase of at least one metal selected from the group consisting of titanium, vanadium, niobium, tantalum, chromium, molybdenum and tungsten as metal grains dispersed in the matrix. The metal phase has a melting point higher than a sintering temperature of the partially stabilized zirconia. In addition, it is preferred that the composite material further contains a ceramic phase of at least one ceramic selected from the group consisting of Al.sub.2 O.sub.3, SiC, Si.sub.3 N.sub.4, B.sub.4 C, carbides, nitrides and borides of titanium, vanadium, niobium, tantalum, chromium, molybdenum and tungsten as ceramic grains dispersed in the matrix. The composite material of the present invention is manufactured by the following steps. A mixture is prepared by incorporating at least one first constituent forming the partially stabilized zirconia with at least one second constituent forming the metal phase, and if necessary, at least one third constituent forming the ceramic phase. The mixture is sintered in a non-oxidation atmosphere to obtain the composite material.

摘要翻译： 具有改进的强度和韧性的氧化锆基复合材料包括部分稳定的氧化锆，其包含1.5至4.5mol％的氧化钇作为其基体，以及选自钛，钒，铌，钽的至少一种金属的金属相 ，铬，钼和钨作为分散在基质中的金属颗粒。 金属相的熔点高于部分稳定的氧化锆的烧结温度。 此外，优选复合材料还含有选自Al2O3，SiC，Si3N4，B4C，钛，钒，铌，钽，铬的碳化物，氮化物和硼化物中的至少一种陶瓷的陶瓷相， 钼和钨作为分散在基质中的陶瓷颗粒。 本发明的复合材料通过以下步骤制造。 通过将形成部分稳定的氧化锆的至少一种第一组分与形成金属相的至少一种第二组分并且如果需要，至少形成陶瓷相的第三组分合并来制备混合物。 将混合物在非氧化气氛中烧结，得到复合材料。