公开(公告)号：US06188643B1

公开(公告)日：2001-02-13

申请号：US08322919

申请日：1994-10-13

申请人： Kenneth K. Liang ,  Philippe G. Herve ,  Fred E. Stanke

发明人： Kenneth K. Liang ,  Philippe G. Herve ,  Fred E. Stanke

IPC分类号： G01V140

CPC分类号： E21B47/00 ,  E21B47/082 ,  G01B17/02 ,  G01V1/48 ,  G01V1/50

摘要： An improved technique for determining the thickness of a member, especially pipe such as fluid-filled casing in an earth borehole, includes the following steps: directing a pulse of ultrasonic energy toward the inner surface of the pipe, and receiving and storing, as a function of time, signals representative of ultrasonic energy reflected from the inner surface of the pipe; determining, from the stored signals, the arrival time of the initial echo from the inner surface; determining, from the stored signals, the arrival time and the amplitude of a first candidate initial echo from the outer surface of the pipe; performing a reverse search on the stored signals to determine, from stored signals at times earlier than the arrival time of the first candidate, the arrival time and the amplitude of a second candidate initial echo from the outer surface; comparing amplitudes of the first and second candidates, and selecting, based on the comparison, one of the first and second candidates as the actual outer surface echo; and determining the thickness of the pipe from the arrival time of the actual outer surface echo and the arrival time of the inner surface echo. Using this technique, the earlier arriving candidate can be properly identified as the actual outer surface echo, even when the later arriving candidate has a greater amplitude.

摘要翻译： 用于确定构件厚度的改进技术，特别是诸如地球钻孔中的流体填充壳体的管道包括以下步骤：将超声能量的脉冲引导到管的内表面，并且接收和存储为 时间函数，表示从管内表面反射的超声波能量的信号; 从所存储的信号确定来自内表面的初始回波的到达时间; 根据所存储的信号，从所述管的外表面确定第一候选初始回波的到达时间和振幅; 对所存储的信号执行反向搜索，从存储的信号中确定来自第一候选者的到达时间的时间，来自外表面的第二候选初始回波的到达时间和振幅; 比较第一和第二候选的振幅，并且基于比较选择第一和第二候选中的一个作为实际外表面回波; 并根据实际外表面回波的到达时间和内表面回波的到达时间来确定管道的厚度。 使用这种技术，即使当后来的候选者具有更大的振幅时，早期到达的候选者也可被适当地识别为实际的外表面回波。

公开(公告)号：US5717169A

公开(公告)日：1998-02-10

申请号：US703305

申请日：1996-08-26

申请人： Kenneth K. Liang ,  Philippe G. Herve ,  Fred E. Stanke

发明人： Kenneth K. Liang ,  Philippe G. Herve ,  Fred E. Stanke

IPC分类号： E21B47/00 ,  E21B47/08 ,  G01B17/02 ,  G01V1/48 ,  G01V1/50 ,  G01V1/40

CPC分类号： E21B47/00 ,  E21B47/082 ,  G01B17/02 ,  G01V1/48 ,  G01V1/50

摘要： An improved technique for determining the thickness of a member, especially pipe such as fluid-filled casing in an earth borehole, includes the following steps: directing a pulse of ultra-sonic energy toward the inner surface of the pipe and receiving/storing, as a function of time, signals representative of ultra-sonic energy reflected from the inner surface of the pipe; determining, from the stored signals, the arrival or the initial echo from the inner surface; determining from the stored signals, the arrival and the amplitude of a first candidate initial echo from the outer surface of the pipe; performing a reverse search on the stored signals to determine, from stored signals at times earlier than the arrival time of the first candidate the arrival and the amplitude of a second candidate initial echo from the outer surface; comparing amplitudes of the first and second candidates and selecting, based on the comparison, one of the first and second candidates as the actual outer surface echo; and determining the thickness of the pipe from the arrival time of the actual outer surface echo and the arrival time of the inner surface echo. Using this technique, the earlier arriving candidate can be properly identified as the actual outer surface echo, even when the later arriving candidate has a greater amplitude.

摘要翻译： 一种用于确定构件厚度的改进技术，特别是诸如地球钻孔中的流体填充壳体的管道，包括以下步骤：将超声能量的脉冲引导到管的内表面并接收/存储，如 时间的函数，表示从管内表面反射的超声能的信号; 从存储的信号确定来自内表面的到达或初始回波; 从存储的信号确定来自管道的外表面的第一候选初始回波的到达和振幅; 对所存储的信号执行反向搜索，以从存储的信号确定来自第一候选者的到达时间的时间来自外表面的第二候选初始回波的到达和振幅; 比较第一和第二候选的振幅，并且基于比较选择第一和第二候选中的一个作为实际外表面回波; 并根据实际外表面回波的到达时间和内表面回波的到达时间来确定管道的厚度。 使用这种技术，即使当后来的候选者具有更大的振幅时，早期到达的候选者也可被适当地识别为实际的外表面回波。

公开(公告)号：US07289219B2

公开(公告)日：2007-10-30

申请号：US11105099

申请日：2005-04-13

申请人： Adam E. Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke

发明人： Adam E. Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke

IPC分类号： G01N21/55 ,  G01J4/00

CPC分类号： G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

摘要： An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

摘要翻译： 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。

公开(公告)号：US07042580B1

公开(公告)日：2006-05-09

申请号：US09533613

申请日：2000-03-22

申请人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill ,  Michael Weber ,  Elliot Burke

发明人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill ,  Michael Weber ,  Elliot Burke

IPC分类号： G01B11/24

CPC分类号： G01B11/0625 ,  B24B37/042 ,  B24B49/12 ,  G01B11/30 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/8825 ,  H01L21/67259

摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

公开(公告)号：US06919958B2

公开(公告)日：2005-07-19

申请号：US10397917

申请日：2003-03-26

申请人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Van Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill, Jr. ,  Michael Weber-Grabau ,  Elliot Burke ,  Adam E. Norton

发明人： Fred E. Stanke ,  Clinton B. Carlisle ,  Hung Van Pham ,  Edric Tong ,  Douglas E. Ruth ,  James M. Cahill, Jr. ,  Michael Weber-Grabau ,  Elliot Burke ,  Adam E. Norton

IPC分类号： B24B49/12 ,  G01B11/06 ,  G01B11/30 ,  G01N21/21 ,  G01N21/95 ,  H01L21/66 ,  H01L21/67 ,  G01N21/88

CPC分类号： H01L21/67 ,  B24B49/12 ,  G01B11/0625 ,  G01B11/30 ,  G01N21/211 ,  H01L22/12

摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

摘要翻译： 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

公开(公告)号：US06768967B2

公开(公告)日：2004-07-27

申请号：US09927177

申请日：2001-08-10

申请人： Kenneth C. Johnson ,  Fred E. Stanke

发明人： Kenneth C. Johnson ,  Fred E. Stanke

IPC分类号： G01B1106

CPC分类号： G02B5/18 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956

摘要： A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.

摘要翻译： 数据库插值方法用于快速计算衍射微结构的预测光学响应特性，作为实时光学测量过程的一部分。 内插的光学响应是连续的（在优选实施例中）测量参数的平滑功能，并且它与在数据库存储的插值点处的理论计算的光学响应相匹配。

公开(公告)号：US06753961B1

公开(公告)日：2004-06-22

申请号：US09956356

申请日：2001-09-18

申请人： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke ,  Abdurrahman Sezginer

发明人： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke ,  Abdurrahman Sezginer

IPC分类号： G01J400

CPC分类号： G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

摘要： A spectroscopic ellipsometer having a multiwavelength light source, spectrometer (or wavelength-scanning monochromator and photodetector), a polarizer and polarization analyzer, and one or more objectives in the illumination and collection light paths, further comprises a stationary polarization modulator that modulates the light polarization versus wavelength. Modulator can be an optically active crystal rotating the linear polarization plane by a different angle for each wavelength or a non-achromatic waveplate retarder that varies the relative phase delay of the polarization components periodically over wavelength. The measured spectrum can be used to characterize selected features or parameters of a sample, e.g. by comparison with one or more theoretical spectra.

摘要翻译： 具有多波长光源，光谱仪（或波长扫描单色仪和光电检测器），偏振器和偏振分析器以及照明和采集光路中的一个或多个目标的光谱椭偏仪还包括调制光偏振的固定偏振调制器 对波长。 调制器可以是旋转线性偏振平面对于每个波长旋转不同角度的光学活性晶体，或者是在波长周期性地改变偏振分量的相对相位延迟的非消色差波片延迟器。 测量的光谱可用于表征所选择的特征或样品的参数，例如。 通过与一个或多个理论光谱进行比较。

公开(公告)号：US5274604A

公开(公告)日：1993-12-28

申请号：US960524

申请日：1992-10-13

申请人： Ralph M. D'Angelo ,  Fred E. Stanke ,  Hung-Wen Chang ,  Kai Hsu

发明人： Ralph M. D'Angelo ,  Fred E. Stanke ,  Hung-Wen Chang ,  Kai Hsu

IPC分类号： G01V1/50 ,  G01V1/40

CPC分类号： G01V1/50

摘要： A method and apparatus for spatially filtering a signal set to enhance interface echoes representing a borehole configuration. The spatial filtering technique provides information regarding the various interfaces formed between materials in the borehole environment, as well as thicknesses of the various materials present in the borehole. Further, the presence of channels formed during the cementing procedure are detected.

摘要翻译： 一种用于空间滤波信号集以增强表示井眼配置的接口回波的方法和装置。 空间滤波技术提供了有关钻孔环境中材料之间形成的各种界面的信息以及钻孔中存在的各种材料的厚度。 此外，检测在固井过程中形成的通道的存在。

公开(公告)号：US06950780B2

公开(公告)日：2005-09-27

申请号：US10777353

申请日：2004-02-12

申请人： Kenneth C. Johnson ,  Fred E. Stanke

发明人： Kenneth C. Johnson ,  Fred E. Stanke

IPC分类号： G01B11/00 ,  G01B11/14 ,  G01N21/47 ,  G01N21/95 ,  G01N21/956 ,  G02B5/18 ,  G06F17/10 ,  H01L21/66 ,  G01N21/00

CPC分类号： G02B5/18 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956

摘要： A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.

摘要翻译： 数据库插值方法用于快速计算衍射微结构的预测光学响应特性，作为实时光学测量过程的一部分。 内插的光学响应是连续的（在优选实施例中）测量参数的平滑功能，并且它与在数据库存储的插值点处的理论计算的光学响应相匹配。

公开(公告)号：US06738136B2

公开(公告)日：2004-05-18

申请号：US10290730

申请日：2002-11-07

申请人： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

发明人： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

IPC分类号： G01J308

CPC分类号： G01J3/02 ,  G01J3/0218 ,  G01J3/08 ,  G01J3/42 ,  G01N21/55

摘要： The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.

摘要翻译： 本发明是用于确定样品特性的方法和装置。 该系统和方法提供用于检测从反射镜反射的监视光束，其中监视光束对应于入射在样本上的光的强度。 该系统和方法还提供了用于检测测量光束，其中测量光束已经从被表征的样品反射出来。 监测光束和测量光束都通过相同的传输路径传输，并由相同的检测器检测。 因此，监测光束和测量光束之间不是由于样品特性引起的变化的潜在来源被最小化。 可以通过将与测量光束相对应的数据相对于监视光束对应的数据进行比较来确定样本的反射率信息。