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14 条记录 (耗时 0.022 秒)

    Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
    6.
    发明授权
    Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making 有权
    具有多层不同压电材料的薄膜体声共振器及制作方法

    公开(公告)号：US09065421B2

    公开(公告)日：2015-06-23

    申请号：US13362321

    申请日：2012-01-31

    申请人： Chris Feng ,  John Choy ,  Kevin J. Grannen ,  Phil Nikkel ,  Tom Yeh

    发明人： Chris Feng ,  John Choy ,  Kevin J. Grannen ,  Phil Nikkel ,  Tom Yeh

    IPC分类号： H01L41/09 ,  H03H9/12 ,  H03H9/17 ,  H03H9/02 ,  H03H9/58

    CPC分类号： H03H9/173 ,  H03H9/02149 ,  H03H9/171 ,  H03H9/178 ,  H03H9/585 ,  Y10T29/42

    摘要： A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.

    摘要翻译： 薄膜体声波谐振器（FBAR）包括第一电极，具有第一c轴取向的第一压电层，在第一电极上具有在第一压电层上具有第二c轴取向的第二压电层，以及 在第二压电层上的第二电极。 第一和第二压电层由相应的不同的压电材料制成。 通过选择第一和第二c轴取向分别相同或不同，可以将FBAR设置为具有不同的谐振频率。 因此可以扩展FBAR的高低频范围。

    Magnetic recording medium having a nitrogen-doped hydrogenated carbon protective overcoat
    7.
    发明授权
    Magnetic recording medium having a nitrogen-doped hydrogenated carbon protective overcoat 失效
    具有氮掺杂氢化碳保护外涂层的磁记录介质

    公开(公告)号：US06312798B1

    公开(公告)日：2001-11-06

    申请号：US09400187

    申请日：1999-09-21

    申请人： Xiaoding Ma ,  Kevin J. Grannen ,  Jing Gui ,  Jeffrey A. McCann ,  Mark A. Shows

    发明人： Xiaoding Ma ,  Kevin J. Grannen ,  Jing Gui ,  Jeffrey A. McCann ,  Mark A. Shows

    IPC分类号： G11B572

    CPC分类号： G11B5/72 ,  Y10T428/265 ,  Y10T428/30

    摘要： Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for magnetic recording media, such as hard disks, are formed by supplying a mixture of hydrocarbon and nitrogen gases to an ion beam generator. Nitrogen atom content of the films is controlled to within from about 5 to about 25 at. % by appropriate selection of the ratio of hydrocarbon gas flow to nitrogen gas flow. The resultant IBD i-C:HN films exhibit a reduced tendency for charge build-up thereon during hard disk operation by virtue of their lower resistivity vis-à-vis conventional a-C:H materials.

    摘要翻译： 离子束沉积的氮掺杂的C：H膜具有比未掺杂的离子束沉积的C：H膜具有显着更低的电阻率，并且适合用作硬记录介质（例如硬盘）的硬的，耐磨损的外涂层 通过向离子束发生器提供烃和氮气的混合物。 将膜的氮原子含量控制在约5至约25at。 通过适当选择碳氢化合物气体流量与氮气流量的比例来确定。 所得到的IBD i-C：HN膜在硬盘操作期间由于其相对于常规a-C：H材料的较低电阻率而在其上积累电荷降低的倾向。

    Thin films of crosslinked fluoropolymer on a carbon substrate
    8.
    发明授权
    Thin films of crosslinked fluoropolymer on a carbon substrate 失效
    交联氟聚合物在碳基体上的薄膜

    公开(公告)号：US06589641B1

    公开(公告)日：2003-07-08

    申请号：US09323510

    申请日：1999-06-01

    申请人： Michael J. Stirniman ,  Samuel J. Falcone ,  Li-Pang Wang ,  Kevin J. Grannen

    发明人： Michael J. Stirniman ,  Samuel J. Falcone ,  Li-Pang Wang ,  Kevin J. Grannen

    IPC分类号： G11B5725

    CPC分类号： G11B5/725 ,  G11B5/656 ,  G11B5/72 ,  G11B5/7315 ,  Y10S428/90 ,  Y10T428/24975 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/3154 ,  Y10T428/31544

    摘要： A material, preferably a magnetic data storage disc, includes a carbon layer covering at least a portion of a magnetic substrate and a crosslinked fluoropolymer layers covering at least-a portion of the carbon layer. The crosslinked polymer layer has a thickness less than about 40 angstroms, and the carbon layer has a thickness less than about 100 angstroms. Preferred fluoropolymers include, for example, perfluoropolyethers. In some embodiments, the crosslinked fluoropolymer layer has a thickness at one point on the carbon layer greater than the thickness crosslinked fluoropolymer layer at another point on the carbon layer. The crosslinking generally is performed by irradiating the lubricant material on the carbon layer.

    摘要翻译： 优选磁性数据存储盘的材料包括覆盖至少一部分磁性基底的碳层和覆盖至少一部分碳层的交联的氟聚合物层。 交联聚合物层的厚度小于约40埃，碳层的厚度小于约100埃。 优选的含氟聚合物包括例如全氟聚醚。 在一些实施方案中，交联的含氟聚合物层在碳层上的一个点处的厚度大于碳层上另一点的交联氟聚合物厚度。 交联通常通过在碳层上照射润滑剂材料来进行。

    Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing
    9.
    发明授权
    Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing 有权
    通过烃源气体脉冲离子束沉积金刚石碳覆盖层

    公开(公告)号：US06392244B1

    公开(公告)日：2002-05-21

    申请号：US09376495

    申请日：1999-08-18

    申请人： Kevin J. Grannen ,  Xiaoding Ma ,  Jing Gui

    发明人： Kevin J. Grannen ,  Xiaoding Ma ,  Jing Gui

    IPC分类号： H05H124

    CPC分类号： C23C14/221 ,  C23C14/0605

    摘要： Stable operation of an ion beam deposition (IBD) station forming part of a multi-station apparatus and formation therein of a tribologically robust DLC-type i-C:H ultra-thin protective overcoat for high recording density magnetic media are achieved by pulsing (i.e., limiting) the flow of a hydrocarbon source gas to the ion beam source to deposition intervals between substrate transfer/pressure cycling. Embodiments include utilizing a circularly-shaped, closed drift, end Hall type ion beam source as part of a multi-process station apparatus, wherein undesirable arcing of the ion beam source during substrate transfer is eliminated, or at least substantially reduced, as a result of the pulsed supply of hydrocarbon source gas to the ion beam source.

    摘要翻译： 形成多工位装置的一部分的离子束沉积（IBD）站的稳定操作，并且在其中形成用于高记录密度磁介质的摩擦学稳健的DLC型iC：H超薄保护外涂层通过脉冲（即， 限制）烃源气体到离子束源的流动到衬底转移/压力循环之间的沉积间隔。 实施例包括利用圆形封闭漂移端霍尔型离子束源作为多处理站装置的一部分，其中在衬底传送期间不期望的离子束源的电弧消除或至少大大减少 将烃源气体脉冲供应给离子束源。

    Method of forming fluorine-bearing diamond layer on substrates, including tool substrates
    10.
    发明授权
    Method of forming fluorine-bearing diamond layer on substrates, including tool substrates 失效
    在基材上形成含氟金刚石层的方法，包括工具基材

    公开(公告)号：US06500488B1

    公开(公告)日：2002-12-31

    申请号：US07924901

    申请日：1992-08-04

    申请人： R. P. H. Chang ,  Kevin J. Grannen

    发明人： R. P. H. Chang ,  Kevin J. Grannen

    IPC分类号： C23C1626

    CPC分类号： C23C16/274 ,  C23C16/278

    摘要： A method of forming a fluorine-bearing diamond layer on non-diamond substrates, especially on tool substrates comprising a metal matrix and hard particles, such as tungsten carbide particles, in the metal matrix. The substrate and a fluorine-bearing plasma or other gas are then contacted under temperature and pressure conditions effective to nucleate fluorine-bearing diamond on the substrate. A tool insert substrate is treated prior to the diamond nucleation and growth operation by etching both the metal matrix and the hard particles using suitable etchants.

    摘要翻译： 在非金刚石基底上形成含氟金刚石层的方法，特别是在金属基质中包含金属基体和硬质颗粒（例如碳化钨颗粒）的工具基底上。 然后在有效使含氟金刚石在基材上成核的温度和压力条件下接触衬底和含氟等离子体或其它气体。 在金刚石成核和生长操作之前，通过使用合适的蚀刻剂蚀刻金属基体和硬质粒子来处理工具插入物基底。