公开(公告)号：US07595241B2

公开(公告)日：2009-09-29

申请号：US11466488

申请日：2006-08-23

申请人： Kevin Sean Matocha ,  Jody Alan Fronheiser ,  Larry Burton Rowland ,  Jesse Berkley Tucker ,  Stephen Daley Arthur ,  Zachary Matthew Stum

发明人： Kevin Sean Matocha ,  Jody Alan Fronheiser ,  Larry Burton Rowland ,  Jesse Berkley Tucker ,  Stephen Daley Arthur ,  Zachary Matthew Stum

IPC分类号： H01L21/336

CPC分类号： H01L29/7802 ,  H01L29/0634 ,  H01L29/1095 ,  H01L29/1608 ,  H01L29/41766 ,  H01L29/66068

摘要： A method of forming a vertical MOSFET device includes forming a trench within a drift layer substrate, the drift layer comprising a first polarity type, the trench generally defining a well region of a second polarity type opposite the first polarity type. An ohmic contact layer is formed within a bottom surface of the trench, the ohmic contact layer comprising a material of the second polarity type. A layer of the second polarity type is epitaxially grown over the drift layer, sidewall surfaces of the trench, and the ohmic contact layer. A layer of the first polarity type is epitaxially grown over the epitaxially grown layer of the second polarity type so as to refill the trench, and the epitaxially grown layers of the first and second polarity type are planarized so as to expose an upper surface of the drift layer substrate.

摘要翻译： 形成垂直MOSFET器件的方法包括在漂移层衬底内形成沟槽，漂移层包括第一极性类型，沟槽通常限定与第一极性类型相反的第二极性类型的阱区。 欧姆接触层形成在沟槽的底表面内，欧姆接触层包括第二极性类型的材料。 在漂移层，沟槽的侧壁表面和欧姆接触层上外延生长第二极性类型的层。 第一极性类型的层在第二极性类型的外延生长层上外延生长，以便重新填充沟槽，并且将第一和第二极性类型的外延生长层平坦化，以暴露出第二极性类型的上表面 漂移层基板。

公开(公告)号：US20080142811A1

公开(公告)日：2008-06-19

申请号：US11637991

申请日：2006-12-13

申请人： Kevin Sean Matocha ,  Larry Burton Rowland

发明人： Kevin Sean Matocha ,  Larry Burton Rowland

IPC分类号： H01L29/24 ,  H01L29/78 ,  H01L21/336

CPC分类号： H01L29/7802 ,  H01L29/0878 ,  H01L29/1608 ,  H01L29/2003 ,  H01L29/66068 ,  H01L29/66712

摘要： A vertical MOSFET is disclosed. The MOSFET includes a gate dielectric region, a drift region having a drift region dopant concentration profile of a first conductivity type, and a JFET region having a JFET region dopant concentration profile of the first conductivity type adjacent to the gate dielectric region and disposed over the drift region. The JFET region dopant concentration profile is different from the drift region dopant concentration profile. A method for fabricating a vertical MOSFET is also disclosed.

摘要翻译： 公开了一种垂直MOSFET。 MOSFET包括栅极电介质区域，具有第一导电类型的漂移区掺杂浓度分布的漂移区域和具有与栅介电区域相邻的第一导电类型的JFET区掺杂浓度分布的JFET区域， 漂移区。 JFET区掺杂剂浓度分布与漂移区掺杂浓度分布不同。 还公开了一种用于制造垂直MOSFET的方法。

公开(公告)号：US20080050876A1

公开(公告)日：2008-02-28

申请号：US11466488

申请日：2006-08-23

申请人： Kevin Sean Matocha ,  Jody Alan Fronheiser ,  Larry Burton Rowland ,  Jesse Berkley Tucker ,  Stephen Daley Arthur ,  Zachary Matthew Stum

发明人： Kevin Sean Matocha ,  Jody Alan Fronheiser ,  Larry Burton Rowland ,  Jesse Berkley Tucker ,  Stephen Daley Arthur ,  Zachary Matthew Stum

IPC分类号： H01L21/336

CPC分类号： H01L29/7802 ,  H01L29/0634 ,  H01L29/1095 ,  H01L29/1608 ,  H01L29/41766 ,  H01L29/66068

摘要： A method of forming a vertical MOSFET device includes forming a trench within a drift layer substrate, the drift layer comprising a first polarity type, the trench generally defining a well region of a second polarity type opposite the first polarity type. An ohmic contact layer is formed within a bottom surface of the trench, the ohmic contact layer comprising a material of the second polarity type. A layer of the second polarity type is epitaxially grown over the drift layer, sidewall surfaces of the trench, and the ohmic contact layer. A layer of the first polarity type is epitaxially grown over the epitaxially grown layer of the second polarity type so as to refill the trench, and the epitaxially grown layers of the first and second polarity type are planarized so as to expose an upper surface of the drift layer substrate.

摘要翻译： 形成垂直MOSFET器件的方法包括在漂移层衬底内形成沟槽，漂移层包括第一极性类型，沟槽通常限定与第一极性类型相反的第二极性类型的阱区。 欧姆接触层形成在沟槽的底表面内，欧姆接触层包括第二极性类型的材料。 在漂移层，沟槽的侧壁表面和欧姆接触层上外延生长第二极性类型的层。 第一极性类型的层在第二极性类型的外延生长层上外延生长，以便重新填充沟槽，并且将第一和第二极性类型的外延生长层平坦化，以暴露出第二极性类型的上表面 漂移层基板。

公开(公告)号：US20090267141A1

公开(公告)日：2009-10-29

申请号：US12498630

申请日：2009-07-07

申请人： Kevin Sean Matocha ,  Jody Alan Fronheiser ,  Larry Burton Rowland ,  Jesse Berkley Tucker ,  Stephen Daley Arthur ,  Zachary Matthew Stum

发明人： Kevin Sean Matocha ,  Jody Alan Fronheiser ,  Larry Burton Rowland ,  Jesse Berkley Tucker ,  Stephen Daley Arthur ,  Zachary Matthew Stum

IPC分类号： H01L29/78 ,  H01L21/22

CPC分类号： H01L29/7802 ,  H01L29/0634 ,  H01L29/1095 ,  H01L29/1608 ,  H01L29/41766 ,  H01L29/66068

摘要： A method of forming a vertical MOSFET device includes forming a trench within a drift layer substrate, the drift layer comprising a first polarity type, the trench generally defining a well region of a second polarity type opposite the first polarity type. An ohmic contact layer is formed within a bottom surface of the trench, the ohmic contact layer comprising a material of the second polarity type. A layer of the second polarity type is epitaxially grown over the drift layer, sidewall surfaces of the trench, and the ohmic contact layer. A layer of the first polarity type is epitaxially grown over the epitaxially grown layer of the second polarity type so as to refill the trench, and the epitaxially grown layers of the first and second polarity type are planarized so as to expose an upper surface of the drift layer substrate.

摘要翻译： 形成垂直MOSFET器件的方法包括在漂移层衬底内形成沟槽，漂移层包括第一极性类型，沟槽通常限定与第一极性类型相反的第二极性类型的阱区。 欧姆接触层形成在沟槽的底表面内，欧姆接触层包括第二极性类型的材料。 在漂移层，沟槽的侧壁表面和欧姆接触层上外延生长第二极性类型的层。 第一极性类型的层在第二极性类型的外延生长层上外延生长，以便重新填充沟槽，并且将第一和第二极性类型的外延生长层平坦化，以暴露出第二极性类型的上表面 漂移层基板。

公开(公告)号：US20080146004A1

公开(公告)日：2008-06-19

申请号：US11610199

申请日：2006-12-13

申请人： Kevin Sean Matocha ,  Vinayak Tilak ,  Stephen Daley Arthur ,  Zachary Matthew Stum

发明人： Kevin Sean Matocha ,  Vinayak Tilak ,  Stephen Daley Arthur ,  Zachary Matthew Stum

IPC分类号： H01L21/20 ,  H01L21/36

CPC分类号： H01L21/0465 ,  H01L29/66068

摘要： A method for fabricating a SiC MOSFET is disclosed. The method includes growing a SiC epilayer over a substrate, planarizing the SiC epilayer to provide a planarized SiC epilayer, and forming a gate dielectric layer in contact with the planarized epilayer.

摘要翻译： 公开了一种制造SiC MOSFET的方法。 该方法包括在衬底上生长SiC外延层，平面化SiC外延层以提供平坦化的SiC外延层，以及形成与平坦化的外延层接触的栅极电介质层。

公开(公告)号：US20080108190A1

公开(公告)日：2008-05-08

申请号：US11593317

申请日：2006-11-06

申请人： Kevin Sean Matocha

发明人： Kevin Sean Matocha

IPC分类号： H01L21/8234

CPC分类号： H01L29/66068 ,  H01L21/0465 ,  H01L29/1608 ,  H01L29/7827

摘要： The present invention provides a method of fabricating a metal oxide semiconductor field effect transistor. The method includes the steps of forming a source region on a silicon carbide layer and annealing the source region. A gate oxide layer is formed on the source region and the silicon carbide layer. The method further includes providing a gate electrode on the gate oxide layer and disposing a dielectric layer on the gate electrode and the gate oxide layer. The method further includes etching a portion of the dielectric layer and a portion of the gate oxide layer to form sidewalls on the gate electrode. A metal layer is disposed on the gate electrode, the sidewalls and the source region. The method further includes forming a gate contact and a source contact by subjecting the metal layer to a temperature of at least about 800 degrees Celsius. The gate contact and the source contact comprise a metal silicide. The distance between the gate contact and the source contact is less than about 0.6 micrometers. A vertical SiC MOSFET is also provided.

摘要翻译： 本发明提供一种制造金属氧化物半导体场效应晶体管的方法。 该方法包括以下步骤：在碳化硅层上形成源极区域并退火源极区域。 在源区和碳化硅层上形成栅氧化层。 该方法还包括在栅极氧化物层上设置栅电极，并在栅电极和栅极氧化物层上设置电介质层。 该方法还包括蚀刻介电层的一部分和栅极氧化物层的一部分以在栅电极上形成侧壁。 金属层设置在栅电极，侧壁和源极区上。 该方法还包括通过使金属层经受至少约800摄氏度的温度来形成栅极接触和源极接触。 栅极接触和源极接触包括金属硅化物。 栅极接触点和源极接触点之间的距离小于约0.6微米。 还提供了一个垂直的SiC MOSFET。

公开(公告)号：US10367089B2

公开(公告)日：2019-07-30

申请号：US13431596

申请日：2012-03-27

申请人： Stephen Daley Arthur ,  Joseph Darryl Michael ,  Tammy Lynn Johnson ,  David Alan Lilienfeld ,  Kevin Sean Matocha ,  Jody Alan Fronheiser ,  William Gregg Hawkins

发明人： Stephen Daley Arthur ,  Joseph Darryl Michael ,  Tammy Lynn Johnson ,  David Alan Lilienfeld ,  Kevin Sean Matocha ,  Jody Alan Fronheiser ,  William Gregg Hawkins

IPC分类号： H01L21/04 ,  H01L29/16 ,  H01L29/45 ,  H01L29/49 ,  H01L29/78 ,  H01L29/739 ,  H01L29/745

摘要： According to one embodiment, a semiconductor device, having a semiconductor substrate comprising silicon carbide with a gate electrode disposed on a portion of the substrate on a first surface with, a drain electrode disposed on a second surface of the substrate. There is a dielectric layer disposed on the gate electrode and a remedial layer disposed about the dielectric layer, wherein the remedial layer is configured to mitigate negative bias temperature instability maintaining a change in threshold voltage of less than about 1 volt. A source electrode is disposed on the remedial layer, wherein the source electrode is electrically coupled to a contact region of the semiconductor substrate.

公开(公告)号：US08815721B2

公开(公告)日：2014-08-26

申请号：US12971188

申请日：2010-12-17

申请人： Zachary Matthew Stum ,  Stephen Daley Arthur ,  Kevin Sean Matocha ,  Peter Almern Losee

发明人： Zachary Matthew Stum ,  Stephen Daley Arthur ,  Kevin Sean Matocha ,  Peter Almern Losee

IPC分类号： H01L21/425 ,  H01L21/04 ,  H01L29/66 ,  H01L29/78

CPC分类号： H01L29/36 ,  H01L21/046 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/7816 ,  H01L29/7827

摘要： A method comprising, introducing a dopant type into a semiconductor layer to define a well region of the semiconductor layer, the well region comprising a channel region, and introducing a dopant type into the well region to define a multiple implant region substantially coinciding with the well region but excluding the channel region.

摘要翻译： 一种方法，包括：将掺杂剂类型引入到半导体层中以限定所述半导体层的阱区，所述阱区包括沟道区，并且将掺杂剂类型引入所述阱区以限定与所述阱大致重合的多个注入区 但不包括渠道区域。

公开(公告)号：US08377812B2

公开(公告)日：2013-02-19

申请号：US12483469

申请日：2009-06-12

申请人： Kevin Sean Matocha ,  Gregory Keith Dudoff ,  William Gregg Hawkins ,  Zachary Matthew Stum ,  Stephen Daley Arthur ,  Dale Marius Brown

发明人： Kevin Sean Matocha ,  Gregory Keith Dudoff ,  William Gregg Hawkins ,  Zachary Matthew Stum ,  Stephen Daley Arthur ,  Dale Marius Brown

IPC分类号： H01L21/28

CPC分类号： H01L29/4975 ,  H01L21/0465 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/7827 ,  H01L29/872

摘要： The present invention provides a method of fabricating a metal oxide semiconductor field effect transistor. The method includes the steps of forming a source region on a silicon carbide layer and annealing the source region. A gate oxide layer is formed on the source region and the silicon carbide layer. The method further includes providing a gate electrode on the gate oxide layer and disposing a dielectric layer on the gate electrode and the gate oxide layer. The method further includes etching a portion of the dielectric layer and a portion of the gate oxide layer to form sidewalls on the gate electrode. A metal layer is disposed on the gate electrode, the sidewalls and the source region. The method further includes forming a gate contact and a source contact by subjecting the metal layer to a temperature of at least about 800° C. The gate contact and the source contact comprise a metal silicide. The distance between the gate contact and the source contact is less than about 0.6 μm. A vertical SiC MOSFET is also provided.

摘要翻译： 本发明提供一种制造金属氧化物半导体场效应晶体管的方法。 该方法包括以下步骤：在碳化硅层上形成源极区域并退火源极区域。 在源区和碳化硅层上形成栅氧化层。 该方法还包括在栅极氧化物层上设置栅电极，并在栅电极和栅极氧化物层上设置电介质层。 该方法还包括蚀刻介电层的一部分和栅极氧化物层的一部分以在栅电极上形成侧壁。 金属层设置在栅电极，侧壁和源极区上。 该方法还包括通过使金属层经受至少约800℃的温度来形成栅极接触和源极接触。栅极接触和源极接触包括金属硅化物。 栅极接触点和源极接触点之间的距离小于约0.6μm。 还提供了一个垂直的SiC MOSFET。

公开(公告)号：US08159002B2

公开(公告)日：2012-04-17

申请号：US11961532

申请日：2007-12-20

申请人： Vinayak Tilak ,  Alexei Vertiatchikh ,  Kevin Sean Matocha ,  Peter Micah Sandvik ,  Siddharth Rajan

发明人： Vinayak Tilak ,  Alexei Vertiatchikh ,  Kevin Sean Matocha ,  Peter Micah Sandvik ,  Siddharth Rajan

IPC分类号： H01L29/66

CPC分类号： H01L29/7787 ,  H01L29/2003 ,  H01L29/207

摘要： A heterostructure device includes a semiconductor multi-layer structure that has a first region, a second region and a third region. The first region is coupled to a source electrode and the second region is coupled to a drain electrode. The third region is disposed between the first region and the second region. The third region provides a switchable electrically conductive pathway from the source electrode to the drain electrode. The third region includes iodine ions. A system includes a heterostructure field effect transistor that includes the device.

摘要翻译： 异质结构器件包括具有第一区域，第二区域和第三区域的半导体多层结构。 第一区域耦合到源电极，第二区域耦合到漏电极。 第三区域设置在第一区域和第二区域之间。 第三区域提供从源电极到漏电极的可切换导电路径。 第三区域包括碘离子。 一种系统包括包括该器件的异质结构场效应晶体管。