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    Optical waveguide structures and formation methods
    3.
    发明授权
    Optical waveguide structures and formation methods 失效
    光波导结构及其形成方法

    公开(公告)号：US5263111A

    公开(公告)日：1993-11-16

    申请号：US841956

    申请日：1992-02-26

    申请人： James Nurse ,  John P. Arrington

    发明人： James Nurse ,  John P. Arrington

    IPC分类号： G02B6/12 ,  G02B6/13 ,  G02B6/28 ,  G02B6/30 ,  G02B6/42 ,  G02B6/00 ,  G02B6/36

    CPC分类号： G02B6/13 ,  G02B6/12002 ,  G02B6/2817 ,  G02B6/30 ,  G02B6/42 ,  G02B2006/12076 ,  G02B2006/12102 ,  G02B2006/12104

    摘要： A method is provided for forming an optical waveguide structure upon a substrate in accordance with the steps of: (a) forming a layer of base coat material upon the substrate, (b) forming a layer of cladding material having a predetermined refractive index upon the base coat layer, (c) applying a channel waveguide pattern defining structure to the layer of cladding material, (d) applying a patterning agent to transfer the pattern of the channel waveguide pattern defining structure to a predetermined depth or depths into the cladding material layer to define a waveguide trench pattern, (e) removing any remaining residue of channel waveguide pattern defining structure, (f) forming a thick coat layer of waveguide material having a higher refractive index than the cladding material onto the cladding material and into the waveguide trench pattern, (g) planarizing the waveguide material substantially to the plane of a topmost surface of the cladding material in order to reduce the thickness of the thick coat layer, and (h) forming a layer of additional cladding material to encapsulate the waveguide material in the waveguide trench pattern. An out-of-plane mirror can be used to couple two different layers together optically. A lens element can be used for collimating light reflected by the out-of-plane mirror.

    摘要翻译： 提供了一种根据以下步骤在基板上形成光波导结构的方法：（a）在所述基板上形成底涂层材料层，（b）在所述基板上形成具有预定折射率的包层材料层 底涂层，（c）将限定结构的通道波导图案施加到包层材料层，（d）施加图案化剂以将沟道波导图案限定结构的图案转移到预定深度或深度进入包层材料层 限定波导沟槽图案，（e）去除沟道波导图案限定结构的任何剩余残留物，（f）在包层材料上形成具有比包覆材料更高的折射率的波导材料的厚涂层，并且进入波导沟槽 图案，（g）将波导材料基本上平行化到包层材料的最上表面的平面，以便减小厚度 并且（h）形成附加的包覆材料层以将波导材料封装在波导沟槽图案中。 平面镜可用于将两个不同的层耦合在一起。 透镜元件可用于准直由平面外反射镜反射的光。