公开(公告)号：US20140061180A1

公开(公告)日：2014-03-06

申请号：US13603881

申请日：2012-09-05

申请人： Klaus Petry ,  James Carroll

发明人： Klaus Petry ,  James Carroll

IPC分类号： H02N13/00 ,  H05B1/00

CPC分类号： H05B3/0047 ,  H01L21/67115 ,  H01L21/6831 ,  H01L21/68757

摘要： An electrostatic chuck is formed using materials that are optically transparent to a range of frequencies, such as infrared radiation. The invention discloses several methods for achieving optical transparency. The chuck electrode can be formed having a mesh pattern designed with a specific open area percentage to provide adequate wafer clamping force while still allowing sufficient levels of infrared radiation to pass through. Alternatively, the chuck electrode can also be made from a transparent conductive film. A workpiece is disposed on one surface of the chuck, and a radiative heat source is positioned on the opposite side of the chuck. A reflector plate may be used to reflect the infrared radiation toward the chuck and the wafer. The spacing of the radiation sources and the shape of the reflector plate may be modified to focus more radiation on a particular portion of the workpiece if desired.

摘要翻译： 使用在诸如红外辐射的频率范围上光学透明的材料形成静电卡盘。 本发明公开了几种获得光学透明度的方法。 卡盘电极可以形成为具有以特定开口面积百分比设计的网格图案，以提供足够的晶片夹紧力，同时仍然允许足够的红外辐射通过。 或者，卡盘电极也可以由透明导电膜制成。 工件设置在卡盘的一个表面上，辐射热源位于卡盘的相对侧。 可以使用反射板来将红外辐射反射到卡盘和晶片。 如果需要，可以修改辐射源的间隔和反射板的形状以将更多的辐射聚焦在工件的特定部分上。

公开(公告)号：US07381969B2

公开(公告)日：2008-06-03

申请号：US11409759

申请日：2006-04-24

申请人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

发明人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

IPC分类号： H01J37/18

CPC分类号： H01L21/67201 ,  Y10S414/139

摘要： A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one such valves is a passthrough valve for removal of and insertion of workpieces from and into a load lock interior. A second fast acting valve also opens to atmosphere. A pressure rise inside the loadlock interior is monitored and when the pressure reaches a threshold pressure above atmosphere the fast acting valve is opened to atmosphere. This second fast acting valve is configured to relieve overpressure from the passthrough valve prior to opening of said passthrough valve. Workpiece movement is accomplished with the aid of a robot which reaches into the loadlock interior as it is either depositing workpieces or retrieving them. This system and process minimizes particle contamination of the load lock interior as well as contamination in the region outside the loadlock near the passthrough valve and any scheduled workpieces.

摘要翻译： 用于对加载锁加压的控制。 该控制通过将气源连接到负载锁内部来启动负载锁内部的加压。 代表性的加载锁包括压力传感器和多个阀，其中至少一个这样的阀是用于从工作装置锁定内部移除和插入工件的直通阀。 第二个快动作阀也向大气敞开。 监控负载锁内部的压力上升，当压力达到高于大气压的阈值压力时，快速作用阀向大气开放。 该第二快动阀构造成在打开所述通气阀之前减轻通气阀的过压。 工件运动是借助于一个机器人来实现的，该机器人可以通过放置工件或检索它们而进入到装载锁内部。 该系统和过程最大限度地减少了负载锁内部的颗粒污染以及穿通阀附近的负载锁定区域和任何预定工件的污染。

公开(公告)号：US20070246658A1

公开(公告)日：2007-10-25

申请号：US11409759

申请日：2006-04-24

申请人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

发明人： Tariq Fasheh ,  James Carroll ,  Klaus Petry ,  Dale Stone ,  Lyudmila Stone ,  Dave Wiederspahn

IPC分类号： H01J37/18

CPC分类号： H01L21/67201 ,  Y10S414/139

摘要： A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a pressure sensor and multiple valves to atmosphere where at least one such valves is a passthrough valve for removal of and insertion of workpieces from and into a load lock interior. A second fast acting valve also opens to atmosphere. A pressure rise inside the loadlock interior is monitored and when the pressure reaches a threshold pressure above atmosphere the fast acting valve is opened to atmosphere. This second fast acting valve is configured to relieve overpressure from the passthrough valve prior to opening of said passthrough valve. Workpiece movement is accomplished with the aid of a robot which reaches into the loadlock interior as it is either depositing workpieces or retrieving them. This system and process minimizes particle contamination of the load lock interior as well as contamination in the region outside the loadlock near the passthrough valve and any scheduled workpieces.

摘要翻译： 用于对加载锁加压的控制。 该控制通过将气源连接到负载锁内部来启动负载锁内部的加压。 代表性的加载锁包括压力传感器和多个阀，其中至少一个这样的阀是用于从工作装置锁定内部移除和插入工件的直通阀。 第二个快动作阀也向大气敞开。 监控负载锁内部的压力上升，当压力达到高于大气压的阈值压力时，快速作用阀向大气开放。 该第二快动阀构造成在打开所述通气阀之前减轻通气阀的过压。 工件运动是借助于一个机器人来实现的，该机器人可以通过放置工件或检索它们而进入到装载锁内部。 该系统和过程最大限度地减少了负载锁内部的颗粒污染以及穿通阀附近的负载锁定区域和任何预定工件的污染。

公开(公告)号：US08987639B2

公开(公告)日：2015-03-24

申请号：US13603881

申请日：2012-09-05

申请人： Klaus Petry ,  James Carroll

发明人： Klaus Petry ,  James Carroll

IPC分类号： H05B11/00 ,  H05B3/68 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687 ,  H05B3/00

CPC分类号： H05B3/0047 ,  H01L21/67115 ,  H01L21/6831 ,  H01L21/68757

摘要： An electrostatic chuck is formed using materials that are optically transparent to a range of frequencies, such as infrared radiation. The invention discloses several methods for achieving optical transparency. The chuck electrode can be formed having a mesh pattern designed with a specific open area percentage to provide adequate wafer clamping force while still allowing sufficient levels of infrared radiation to pass through. Alternatively, the chuck electrode can also be made from a transparent conductive film. A workpiece is disposed on one surface of the chuck, and a radiative heat source is positioned on the opposite side of the chuck. A reflector plate may be used to reflect the infrared radiation toward the chuck and the wafer. The spacing of the radiation sources and the shape of the reflector plate may be modified to focus more radiation on a particular portion of the workpiece if desired.

摘要翻译： 使用在诸如红外辐射的频率范围上光学透明的材料形成静电卡盘。 本发明公开了几种获得光学透明度的方法。 卡盘电极可以形成为具有以特定开口面积百分比设计的网格图案，以提供足够的晶片夹紧力，同时仍允许足够的红外辐射通过。 或者，卡盘电极也可以由透明导电膜制成。 工件设置在卡盘的一个表面上，辐射热源位于卡盘的相对侧。 可以使用反射板来将红外辐射反射到卡盘和晶片。 如果需要，可以修改辐射源的间隔和反射板的形状以将更多的辐射聚焦在工件的特定部分上。

公开(公告)号：US08722431B2

公开(公告)日：2014-05-13

申请号：US13426785

申请日：2012-03-22

申请人： Nilay Anil Pradhan ,  Stanislav S. Todorov ,  Kurt Decker-Lucke ,  Klaus Petry ,  Benjamin Colombeau ,  Baonian Guo

发明人： Nilay Anil Pradhan ,  Stanislav S. Todorov ,  Kurt Decker-Lucke ,  Klaus Petry ,  Benjamin Colombeau ,  Baonian Guo

IPC分类号： H01L21/00

CPC分类号： H01L29/66795 ,  H01L21/26513 ,  H01L21/76243

摘要： A method of forming a FinFET device. The method may include providing a substrate having a single crystalline region, heating the substrate to a substrate temperature effective for dynamically removing implant damage during ion implantation, implanting ions into the substrate while the substrate is maintained at the substrate temperature, and patterning the single crystalline region so as to form a single crystalline fin.

摘要翻译： 一种形成FinFET器件的方法。 该方法可以包括提供具有单晶区域的衬底，将衬底加热到​​衬底温度以有效地在离子注入期间动态地去除注入损伤，在将衬底保持在衬底温度的同时将离子注入到衬底中，并且使单晶 以形成单晶翅片。

公开(公告)号：US20130160814A1

公开(公告)日：2013-06-27

申请号：US13775786

申请日：2013-02-25

申请人： Ralph B. Ahlgren ,  Klaus Petry

发明人： Ralph B. Ahlgren ,  Klaus Petry

IPC分类号： H01L31/058

CPC分类号： F24S10/20 ,  F24S10/502 ,  F24S80/30 ,  F24S2020/17 ,  F24S2025/6007 ,  H01L31/042 ,  H01L31/052 ,  H02S20/00 ,  H02S40/44 ,  Y02E10/44 ,  Y02E10/50 ,  Y02E10/60

摘要： The present invention discloses a method for converting solar energy, comprises the following step of: providing a photovoltaic panel comprising a plurality of photovoltaic cells for gathering solar energy and converting the incident solar energy into electric energy; providing a multi-layer assembly comprising N layers, each layer adapted to contain a fluid stream; distributing the fluid streams to be heated into the N layers; rising temperature of the fluid streams within each layer of the multi-layer assembly by the heating of the multi-layer assembly and the photovoltaic panel; and collecting the heated fluid stream from the N layers; wherein N is a positive integer.

摘要翻译： 本发明公开了一种转换太阳能的方法，包括以下步骤：提供包括多个用于收集太阳能并将入射的太阳能转换为电能的多个光伏电池的光伏面板; 提供包括N层的多层组件，每层适于容纳流体流; 将待加热的流体流分配成N层; 通过加热多层组件和光伏面板，多层组件的各层内的流体流的上升温度; 并从N层收集加热的流体流; 其中N是正整数。

公开(公告)号：US20130020940A1

公开(公告)日：2013-01-24

申请号：US13187905

申请日：2011-07-21

申请人： Klaus Becker ,  Klaus Petry ,  Piotr Lubicki

发明人： Klaus Becker ,  Klaus Petry ,  Piotr Lubicki

IPC分类号： H01J7/44

CPC分类号： H01J37/241 ,  H01J27/022 ,  H01J37/3171 ,  H01J2237/0203 ,  H01J2237/0206 ,  H02H9/02

摘要： Disclosed is a surge protection system for use with an ion source assembly. The system comprises a high voltage power source coupled in series with a thermionic diode and an ion source assembly. The high voltage power supply is enclosed in the pressure tank and drives the ion source assembly. The thermionic diode is comprised of an insulating tube disposed between the ion source assembly enclosure and the output of the high voltage power supply and makes use of existing ion source assembly components to limit damage to the power supply during arc failures of the ion source assembly.

摘要翻译： 公开了一种用于离子源组件的浪涌保护系统。 该系统包括与热离子二极管和离子源组件串联耦合的高压电源。 高压电源封装在压力罐中并驱动离子源组件。 热离子二极管包括设置在离子源组件外壳和高压电源的输出之间的绝缘管，并且利用现有的离子源组件部件来限制离子源组件的电弧故障期间对电源的损坏。

公开(公告)号：US08766209B2

公开(公告)日：2014-07-01

申请号：US13187905

申请日：2011-07-21

申请人： Klaus Becker ,  Klaus Petry ,  Piotr Lubicki

发明人： Klaus Becker ,  Klaus Petry ,  Piotr Lubicki

IPC分类号： H01J27/00

CPC分类号： H01J37/241 ,  H01J27/022 ,  H01J37/3171 ,  H01J2237/0203 ,  H01J2237/0206 ,  H02H9/02

摘要： Disclosed is a surge protection system for use with an ion source assembly. The system comprises a high voltage power source coupled in series with a thermionic diode and an ion source assembly. The high voltage power supply is enclosed in the pressure tank and drives the ion source assembly. The thermionic diode is comprised of an insulating tube disposed between the ion source assembly enclosure and the output of the high voltage power supply and makes use of existing ion source assembly components to limit damage to the power supply during arc failures of the ion source assembly.

摘要翻译： 公开了一种用于离子源组件的浪涌保护系统。 该系统包括与热离子二极管和离子源组件串联耦合的高压电源。 高压电源封装在压力罐中并驱动离子源组件。 热离子二极管包括设置在离子源组件外壳和高压电源的输出之间的绝缘管，并且利用现有的离子源组件部件来限制离子源组件的电弧故障期间对电源的损坏。

公开(公告)号：US07105840B2

公开(公告)日：2006-09-12

申请号：US11049913

申请日：2005-02-03

申请人： Klaus Becker ,  Werner Baer ,  Klaus Petry

发明人： Klaus Becker ,  Werner Baer ,  Klaus Petry

IPC分类号： G21K5/10 ,  H01J37/08

CPC分类号： H01J37/08 ,  H01J27/08 ,  H01J37/3171

摘要： An ion implanter having a source, a workpiece support and a transport system for delivering ions from the source to an ion implantation chamber that contains the workpiece support. The ion source has an arc chamber for ionizing a source material routed into the arc chamber that defines an exit aperture for routing ions to the transport system and including an arc chamber flange attached to the arc chamber and including a first surface that defines a gas inlet which accepts gas from a source and a gas outlet which opens into the arc chamber. An arc chamber support includes a support flange having a conforming surface that sealingly engages the first surface of arc chamber flange at a region of the gas inlet and further includes a throughpassage that aligns with the gas inlet. A gas supply line routes gas from a gas source through the throughpassage of the support flange and into the gas inlet of said arc chamber flange.

摘要翻译： 一种离子注入机，其具有源，工件支撑和用于将离子从源输送到包含工件支撑件的离子注入室的输送系统。 离子源具有电弧室，用于电离导入电弧室的源材料，其限定用于将离子引导到输送系统的出口孔，并且包括附接到电弧室的电弧室凸缘，并且包括限定气体入口的第一表面 其接收来自源的气体和通向电弧室的气体出口。 电弧室支撑件包括具有适配表面的支撑凸缘，其密封地接合在气体入口的区域处的电弧室凸缘的第一表面，并且还包括与气体入口对准的通道。 气体供应管线将来自气体源的气体通过支撑凸缘的通孔引入到所述电弧室凸缘的气体入口中。

公开(公告)号：US5695396A

公开(公告)日：1997-12-09

申请号：US617487

申请日：1996-03-15

申请人： Michael Markwart ,  Klaus Petry ,  Thomas Scherer

发明人： Michael Markwart ,  Klaus Petry ,  Thomas Scherer

IPC分类号： B64D13/00 ,  B64D13/06

CPC分类号： B64D13/00 ,  B64D2013/003 ,  B64D2013/0651 ,  B64D2013/0688 ,  F24F2003/1646 ,  F24F2011/0024 ,  Y02B30/78 ,  Y02T50/56

摘要： An air supply system for an aircraft cabin reduces the concentration of contaminations of the air in the cabin by a flexibly controllable valve system that comprises pairs of valves which on the one hand are ganged to respective air openings. One valve of a pair is connected to a fresh air or mixed air supply line. The other valve of a pair is connected to a suction or exhaust duct. Thus, depending on which valve in a pair is open and which is closed, the respective air opening can function as an air outlet for supply of mixed or fresh air into the cabin or as a suction port. Such a system permits a flexible volume control of the supply of fresh air into selectable cabin sections as well as a flexible volume control for the removal of used air from respective cabin sections. Additionally, it is now possible to increase the size of the non-smoking section at the expense of the smoking section or vice versa simply by a respective valve control.

摘要翻译： 用于飞机机舱的空气供应系统通过柔性可控的阀门系统来减少舱内空气的污染物浓度，该系统包括成对的阀门，这些阀门一方面被组合到相应的空气开口。 一对一个阀连接到新鲜空气或混合空气供应管线。 一对的另一个阀连接到吸气或排气管道。 因此，取决于一对中的哪个阀打开并且其被关闭，相应的空气开口可以用作用于将混合或新鲜空气供应到客舱或作为吸入口的出气口。 这样的系统允许将新鲜空气供应到可选择的舱室部分中的灵活的体积控制以及用于从相应的舱室部分移除用过的空气的灵活的体积控制。 此外，现在可以通过相应的阀门控制来增加非吸烟部分的尺寸，而烟费部分的费用也是相反的。