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12 条记录 (耗时 0.022 秒)

    Surface treatment apparatus
    6.
    发明授权
    Surface treatment apparatus 失效
    表面处理装置

    公开(公告)号：US5246526A

    公开(公告)日：1993-09-21

    申请号：US908913

    申请日：1992-07-02

    申请人： Sumio Yamaguchi ,  Akio Inada ,  Kenichi Kawasumi

    发明人： Sumio Yamaguchi ,  Akio Inada ,  Kenichi Kawasumi

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67103 ,  H01L21/67028

    摘要： In a surface treatment apparatus, an organic substance is removed through ashing by ultraviolet rays and ozone at atmospheric pressure. A transparent partition plate is provided in closely spaced, opposed relation to a material to be treated, and at least one gas outlet is open to that surface of the partition plate opposed to the material to be treated. With this arrangement, the gas can be directly collected via the gas outlet during the treatment, and the end point of the organic substance removal treatment can be detected by analyzing the collected gas.

    摘要翻译： 在表面处理装置中，通过紫外线和臭氧在大气压下灰化除去有机物质。 透明分隔板与待处理材料紧密隔开，相对设置，并且至少一个气体出口与分隔板的与待处理材料相对的表面开口。 通过这种布置，可以在处理期间通过气体出口直接收集气体，并且可以通过分析收集的气体来检测有机物质去除处理的终点。

    Take-up method and device for synthetic fiber and method of using thread package
    8.
    发明授权
    Take-up method and device for synthetic fiber and method of using thread package 失效
    合成纤维的卷取方法和装置以及使用螺纹包装的方法

    公开(公告)号：US06629660B1

    公开(公告)日：2003-10-07

    申请号：US09530641

    申请日：2000-04-27

    申请人： Sumio Yamaguchi ,  Tamotsu Suzuki ,  Hirotaka Nakajima ,  Katsumi Sonoyama ,  Kazumasa Yamashita ,  Teruaki Saijo

    发明人： Sumio Yamaguchi ,  Tamotsu Suzuki ,  Hirotaka Nakajima ,  Katsumi Sonoyama ,  Kazumasa Yamashita ,  Teruaki Saijo

    IPC分类号： B65H5422

    CPC分类号： B65H54/34 ,  B65H54/343 ,  B65H54/46 ,  B65H54/48 ,  B65H65/00 ,  B65H67/048 ,  B65H2701/31

    摘要： A method and apparatus for winding synthetic fibers is disclosed. According to the invention, a yarn is wound around a bobbin without winding a tail bunch, at a high successful bobbin-to-bobbin yarn transfer rate for a variety of yarn properties, i.e. different in thickness, lubricant used, etc., while inhibiting the loosening of the yarn tail into single fibers and stably and easily forming a proper yarn tail length. Tail bunch removing work is not required and the winding process is stabilized. A yarn is wound around an empty bobbin using a yarn winding apparatus composed of a traverse fulcrum guide, a traverse device, a contact pressure roller, two spindles, a moving device for moving the spindles, and a yarn transfer device for introducing the yarn into a yarn holding portion for holding the yarn. The yarn transfer device is composed of an upper yarn passage guide, a lower yarn passage guide, and a surface bunching guide respectively provided at positions upstream and downstream of the empty bobbin in the yarn running direction. The yarn is moved outside the traverse width, to be kept almost parallel to the yarn holding portion by the upper yarn passage guide and the lower yarn passage guide, pressed to the empty bobbin by at least either of the guides, moved to the yarn holding portion by at least either of the guides, and held and cut by the yarn holding portion the holding point of the yarn is allowed to move in the rotating direction of the empty bobbin reverse to the running direction of the yarn. The yarn is allowed to be automatically disengaged from the upper yarn guide, and is moved toward the center of the traverse without forming the initially straight-wound yarn tail bunch, and that when the yarn is engaged with the traverse guide, regular winding is started.

    摘要翻译： 公开了一种用于缠绕合成纤维的方法和装置。 根据本发明，纱线缠绕在线轴上而不缠绕尾巴，以高成功的纱线到纱线的纱线传输速率，用于各种纱线性能，即厚度不同，使用的润滑剂等，同时抑制 纱线尾部松动成单根纤维，并稳定且容易地形成合适的纱尾长度。 不需要尾部束去除工作，并且卷绕过程稳定。 使用由横动支点引导件，横动装置，接触压力辊，两个主轴构成的纱线卷绕装置将纱线缠绕在空筒管上，移动锭子的移动装置以及用于将纱线引入的纱线输送装置 用于保持纱线的纱线保持部。 纱线输送装置由分别设置在空纱管的纱线行进方向上游和下游的上部纱线通道引导件，下部纱线引导件和表面打褶引导件构成。 纱线移动到横移宽度以外，通过上纱线引导件和下纱线导向器保持几乎平行于纱线保持部分，并通过至少任一个引导件压向空筒管，移动到纱线保持 并且由纱线保持部保持切割，允许纱线的保持点沿与纱线的行进方向相反的空筒管的旋转方向移动。 允许纱线与上导纱器自动脱离，并且不会形成初始直线卷绕的纱线束束而向着纬纱的中心移动，并且当纱线与横动导纱器接合时，开始规则的卷绕 。

    Semiconductor device with a low resistance wiring
    9.
    发明授权
    Semiconductor device with a low resistance wiring 失效
    具有低电阻布线的半导体器件

    公开(公告)号：US06674171B2

    公开(公告)日：2004-01-06

    申请号：US10208837

    申请日：2002-08-01

    申请人： Sumio Yamaguchi

    发明人： Sumio Yamaguchi

    IPC分类号： H01L2348

    CPC分类号： H01L23/53238 ,  H01L23/485 ,  H01L2924/0002 ,  H01L2924/00

    摘要： An impurity region is formed on the surface of a semiconductor substrate. An insulating layer is provided on the semiconductor substrate to cover the impurity region. A trench for defining a wiring layer is provided on the surface of the insulating layer. A connection hole is provided in the insulating layer for connecting the trench and the impurity region with each other. A conductive layer made of a high melting point metal or a compound thereof is embedded in the connection hole. A copper wire is formed in the trench to be connected to the conductive layer. According to the present invention, a semiconductor device improved to be capable of implementing an excellent wiring circuit and providing a highly integrated semiconductor circuit is obtained.

    摘要翻译： 在半导体衬底的表面上形成杂质区。 在半导体衬底上设置绝缘层以覆盖杂质区域。 用于限定布线层的沟槽设置在绝缘层的表面上。 在绝缘层中设置有用于将沟槽和杂质区域彼此连接的连接孔。 由高熔点金属或其化合物制成的导电层嵌入连接孔中。 在沟槽中形成铜线以连接到导电层。 根据本发明，获得了能够实现优异的布线电路并提供高度集成的半导体电路的半导体器件。