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    METHODS AND SYSTEMS FOR POINT OF USE REMOVAL OF SACRIFICIAL MATERIAL
    2.
    发明申请
    METHODS AND SYSTEMS FOR POINT OF USE REMOVAL OF SACRIFICIAL MATERIAL 有权
    使用移除材料的方法和系统

    公开(公告)号：US20150206762A1

    公开(公告)日：2015-07-23

    申请号：US14676697

    申请日：2015-04-01

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Christina E. INMAN ,  Alexander MASTROIANNI ,  Wolfgang HINZ ,  Shifeng LI ,  Scott C. BENSON

    IPC: H01L21/311 ,  G01N27/414

    CPC classification number: H01L21/31105 ,  G01N27/4145 ,  H01L21/31144

    Abstract: A method of manufacturing a sensor, the method including forming an array of chemically-sensitive field effect transistors (chemFETs), depositing a dielectric layer over the chemFETs in the array, depositing a protective layer over the dielectric layer, etching the dielectric layer and the protective layer to form cavities corresponding to sensing surfaces of the chemFETs, and removing the protective layer. The method further includes, etching the dielectric layer and the protective layer together to form cavities corresponding to sensing surfaces of the chemFETs. The protective layer is at least one of a polymer, photoresist material, noble metal, copper oxide, and zinc oxide. The protective protective layer is removed using at least one of sodium hydroxide, organic solvent, aqua regia, ammonium carbonate, hydrochloric acid, acetic acid, and phosphoric acid.

    Abstract translation: 一种制造传感器的方法，所述方法包括形成化学敏感场效应晶体管阵列（chemFET），在阵列中的chemFET上沉积电介质层，在电介质层上沉积保护层，蚀刻电介质层和 保护层以形成对应于chemFET的感测表面的空腔，以及去除保护层。 该方法还包括：将电介质层和保护层一起蚀刻以形成对应于chemFET的感测表面的空腔。 保护层是聚合物，光致抗蚀剂材料，贵金属，氧化铜和氧化锌中的至少一种。 使用氢氧化钠，有机溶剂，王水，碳酸铵，盐酸，乙酸和磷酸中的至少一种除去保护性保护层。

    POLYMER PARTICLES AND METHODS OF MAKING AND USING SAME
    7.
    发明申请
    POLYMER PARTICLES AND METHODS OF MAKING AND USING SAME 审中-公开
    聚合物颗粒及其制备方法和使用方法

    公开(公告)号：US20140057109A1

    公开(公告)日：2014-02-27

    申请号：US14045601

    申请日：2013-10-03

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Steven M. MENCHEN ,  Alexander MASTROIANNI

    IPC: C12N15/10

    CPC classification number: C12N15/1093 ,  C08F2/22 ,  C08F220/56 ,  C08L33/26 ,  Y10T428/2982

    Abstract: A method of making polymer particles includes making an aqueous gel reaction mixture; forming an emulsion comprising dispersed aqueous phase micelles of gel reaction mixture in a continuous phase at a temperature less than about 10° C.; and performing a polymerization reaction in the micelles. Further, the emulsion comprises at least one polymerization initiator in the micelles of gel reaction mixture. The gel reaction mixture can be maintained at a temperature less than about 10° C. when it comprises the polymerization initiator.

    Abstract translation: 制备聚合物颗粒的方法包括制备水凝胶反应混合物; 在小于约10℃的温度下，在连续相中形成包含分散的凝胶反应混合物的水相胶束的乳液; 并在胶束中进行聚合反应。 此外，乳液在凝胶反应混合物的胶束中含有至少一种聚合引发剂。 当凝胶反应混合物包含聚合引发剂时，可将其保持在低于约10℃的温度。

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