公开(公告)号：US5206702A

公开(公告)日：1993-04-27

申请号：US592239

申请日：1990-10-03

申请人： Masahiko Kato ,  Takao Okada ,  Hiroshi Kajimura

发明人： Masahiko Kato ,  Takao Okada ,  Hiroshi Kajimura

IPC分类号： G01B7/34 ,  G01B11/02 ,  G01B11/14 ,  G01Q20/02 ,  G01Q30/00 ,  G01Q60/24

CPC分类号： G01Q20/02 ,  B82Y35/00 ,  Y10S977/87

摘要： A light beam from a light source is divided into two beams by a polarized beam splitter. The beam is reflected by a mirror, is converted into a P-polarized beam by a 1/4 .lambda. plate, passes through the beam splitter, is reflected by prisms, passes through a polarized beam splitter, is reflected by a mirror, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, and is finally incident on a detector. The beam is converted into a S-polarized beam by a 1/2 .lambda. plate, is reflected by a polarized beam splitter, is reflected by the upper face of a cantilever supporting a probe, passes through a polarized beam splitter, is reflected twice in a prism, passes through the beam splitter, is reflected again by the cantilever, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, is converted into a P-polarized beam by a 1/2 .lambda. plate, passes through the beam splitter, and is finally incident on the detector. The detector outputs the displacement of the cantilever from the optical path difference of the beams Lr and Lt.

公开(公告)号：US5245863A

公开(公告)日：1993-09-21

申请号：US724145

申请日：1991-07-01

申请人： Hiroshi Kajimura ,  Takao Okada

发明人： Hiroshi Kajimura ,  Takao Okada

IPC分类号： G01B7/34 ,  G01Q20/02 ,  G01Q60/38 ,  G01Q60/40 ,  G01Q60/42 ,  G01R31/312

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  Y10S977/87

摘要： A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.

摘要翻译： 悬臂在端部的一侧具有探针，在相对侧具有反射镜。 悬臂通过压电元件固定到支撑构件上。 位于反射镜上方的半导体激光器具有反射解理面，并且在反射镜和反射解理面之间构成了法布里 - 珀罗（Francry-Pérot）谐振器。 谐振器的输出根据悬臂的端部的位移量，即样品的表面构型而变化。 该变化由检测器通过光电检测器检测。 控制电路控制施加到XYZ扫描仪的驱动电压，以抵消来自谐振器的输出的变化，从而保持探针的尖端与样品表面之间的距离恒定。 驱动电压提供样品表面的高度数据。 驱动电压以及与从XYZ扫描器输出的样品表面相关的位置信号被提供给图像形成单元。 图像形成单元基于输入电压和信号生成表示样本的表面配置的三维图像。

公开(公告)号：US5266502A

公开(公告)日：1993-11-30

申请号：US678597

申请日：1991-04-01

申请人： Takao Okada ,  Hiroshi Kajimura

发明人： Takao Okada ,  Hiroshi Kajimura

IPC分类号： G11B9/00 ,  G11B9/08 ,  G11B11/08 ,  H01L21/265

CPC分类号： B82Y10/00 ,  G11B9/08 ,  G11B9/1472 ,  G11B9/149 ,  G11B11/08 ,  Y10S977/863 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/943

摘要： An STM memory medium comprising a substrate whose surface is smooth or even, a first insulating layer formed at a predetermined depth in the substrate by implanting first ion atoms from the smooth surface of the substrate into it under a certain condition, and a second insulating layer formed adjacent to the first insulating layer and at another predetermined depth in the substrate by implanting second ion atoms from the smooth surface of the substrate into it under another certain condition.

摘要翻译： 一种STM存储介质，包括表面光滑或均匀的基板，通过在一定条件下从基板的平滑表面注入第一离子原子而在基板中以预定深度形成第一绝缘层，以及第二绝缘层 通过在另一特定条件下将第二离子原子从衬底的光滑表面注入其中而形成在第一绝缘层附近并且在衬底中的另一预定深度处。

公开(公告)号：US5260824A

公开(公告)日：1993-11-09

申请号：US511054

申请日：1990-04-19

申请人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

发明人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

IPC分类号： G01B7/34 ,  G01B21/30 ,  G01L5/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/38 ,  G02B4/00 ,  G01B5/28 ,  G01N23/00

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q30/025 ,  Y10S977/87

摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

公开(公告)号：US5227626A

公开(公告)日：1993-07-13

申请号：US828349

申请日：1992-01-30

申请人： Takao Okada ,  Hiroshi Kajimura

发明人： Takao Okada ,  Hiroshi Kajimura

IPC分类号： H01J37/28 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/10 ,  G01Q80/00 ,  G03F7/20 ,  G03F9/00 ,  G11B9/00 ,  H01J37/30 ,  H01J37/317 ,  H01L21/00 ,  H01L21/20 ,  H01L21/205 ,  H01L21/283 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3205 ,  H01L21/68 ,  H01L21/768

CPC分类号： H01L21/67225 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/2049 ,  H01J37/3174 ,  H01L21/67092 ,  H01L21/681 ,  G01Q80/00 ,  G11B9/14 ,  H01J2237/20235 ,  H01J2237/31776 ,  Y10S977/857 ,  Y10S977/868

摘要： A lithography apparatus is provided with an SXM base, which has a plurality of cantilevers movably supporting probes at their free ends, respectively. The SXM base is secured to a mirror base by a support arm via inchworm devices, such that it faces a silicon wafer placed on a wafer stage. The silicon wafer has an alignment pattern formed thereon, while the SXM base has a reference alignment pattern formed thereon which is similar to the alignment pattern. A voltage is applied to the probes at a predetermined point of time under the control of a controller while a gas containing a film-forming material is being supplied onto the wafer, whereby the film-forming material is adsorbed in a desired portion of the surface of the wafer.

摘要翻译： 光刻设备设置有SXM基座，其具有分别在其自由端可移动地支撑探针的多个悬臂。 SXM基座通过支撑臂通过蚯蚓装置固定到反射镜基座，使得其面向放置在晶片台上的硅晶片。 硅晶片具有形成在其上的取向图案，而SXM基座具有形成在其上的参考对准图案，其类似于对准图案。 在控制器的控制下，在预定的时间点向探针施加电压，同时将含有成膜材料的气体供给到晶片上，由此成膜材料被吸附在表面的所需部分 的晶片。

公开(公告)号：US5394741A

公开(公告)日：1995-03-07

申请号：US874528

申请日：1992-04-27

申请人： Hiroshi Kajimura ,  Takao Okada

发明人： Hiroshi Kajimura ,  Takao Okada

IPC分类号： G01Q10/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q60/02 ,  G01Q60/24 ,  G01Q60/38 ,  G01B7/34 ,  G01B11/30

CPC分类号： G01Q20/04 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q60/38 ,  Y10S977/87

摘要： A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.

摘要翻译： 悬臂在端部的一侧具有探针，在相对侧具有反射镜。 悬臂通过压电元件固定到支撑构件上。 位于反射镜上方的半导体激光器具有反射解理面，并且在反射镜和反射解理面之间构成了法布里 - 珀罗（Francry-Pérot）谐振器。 谐振器的输出根据悬臂的端部的位移量，即样品的表面构型而变化。 该变化由检测器通过光电检测器检测。 控制电路控制施加到XYZ扫描仪的驱动电压，以抵消来自谐振器的输出的变化，从而保持探针的尖端与样品表面之间的距离恒定。 驱动电压提供样品表面的高度数据。 驱动电压以及与从XYZ扫描器输出的样品表面相关的位置信号被提供给图像形成单元。 图像形成单元基于输入电压和信号生成表示样本的表面配置的三维图像。

公开(公告)号：US5079958A

公开(公告)日：1992-01-14

申请号：US492811

申请日：1990-03-12

申请人： Tsugio Takase ,  Hideo Adachi ,  Takao Okada ,  Hisanari Shimazu ,  Hideo Tomabechi ,  Hiroshi Kajimura

发明人： Tsugio Takase ,  Hideo Adachi ,  Takao Okada ,  Hisanari Shimazu ,  Hideo Tomabechi ,  Hiroshi Kajimura

IPC分类号： G01B7/06 ,  G01L5/00

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01B7/06 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q60/16 ,  Y10S977/852

摘要： A sensor comprises a tiny cantilever of a thin film having a detection region at its free end portion, a detector for detecting a displacement of the cantilever caused by material acting on the detecting region, and calculation unit for calculating an amount of the material acting on the detection region, based on the displacement of the cantilever which has been detected by the detector, thereby to measure the intensity of a particle-stream applied to the detection region or the thickness of a film formed on the detection region.

公开(公告)号：US5036490A

公开(公告)日：1991-07-30

申请号：US414128

申请日：1989-09-28

申请人： Hiroshi Kajimura ,  Takao Okada

发明人： Hiroshi Kajimura ,  Takao Okada

IPC分类号： G11C13/00 ,  G01N37/00 ,  G01Q60/10 ,  G01Q70/06 ,  G01Q80/00 ,  G01Q90/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B15/18 ,  G11B21/00 ,  G11B23/50 ,  G11C11/21 ,  G11C11/22

CPC分类号： G11B21/00 ,  G11B15/1808 ,  G11B23/50 ,  G11B9/08 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1436 ,  G11B9/1472 ,  G11C11/22 ,  B82Y10/00 ,  G01Q10/06 ,  G01Q60/16 ,  G01Q70/06 ,  G01Q80/00 ,  G11B9/149 ,  Y10S977/849 ,  Y10S977/861 ,  Y10S977/881 ,  Y10S977/943

摘要： The memory device comprises a recording member in which perturbations are selectively formed, a probe for detecting the presence or absence of the perturbations, a first cantilever having the recording member at a forward end, and a second cantilever having the probe needle at a forward end. The probe is supported by the first and second cantilevers at a relative position in close proximity to and spaced from the recording member. Independent drive of the first and second cantilevers permits the probe to be scanned relatively across the recording member over a wide range.

摘要翻译： 存储装置包括记录部件，其中选择性地形成扰动，用于检测扰动的存在或不存在的探针，在前端具有记录部件的第一悬臂和在前端具有探针的第二悬臂 。 该探针由靠近记录部件并与间隔开的相对位置由第一和第二悬臂支撑。 第一和第二悬臂的独立驱动器允许探测器相对穿过记录部件在宽范围内被扫描。

公开(公告)号：US5141319A

公开(公告)日：1992-08-25

申请号：US792819

申请日：1991-11-15

申请人： Hiroshi Kajimura ,  Masahiko Kato

发明人： Hiroshi Kajimura ,  Masahiko Kato

IPC分类号： G01D5/38 ,  G01B7/34 ,  G01B9/02 ,  G01B21/30 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/38 ,  G05D3/12 ,  H01J37/28

CPC分类号： G01Q20/02 ,  B82Y35/00 ,  G01B9/02002 ,  G01B9/02003 ,  G01B9/02051 ,  Y10S977/87

摘要： A displacement detection device has a laser unit. The laser unit has two semiconductor lasers formed on a single substrate through a single process. One of the lasers has an end coated with a reflection preventing film and facing a mirror provided at the end of a cantilever. The other end of the laser is coated with a film having a high reflectance film such that a light resonator is formed together with the mirror and the high reflectance film. The other laser has both opposite ends coated with films of a high reflectance, and a light resonator is formed between the opposite ends. Two laser beams emitted from the two semiconductor lasers interfere with each other, and the resultant interference light enters the light detector. The detector detects a variation in the interference light caused by displacement of the mirror, and outputs a signal indicative of a displacement in the cantilever.

摘要翻译： 位移检测装置具有激光单元。 激光单元具有通过单个工艺在单个衬底上形成的两个半导体激光器。 其中一个激光器的端部涂有防反射膜，并且面向设置在悬臂端部的反射镜。 激光的另一端涂覆有具有高反射率膜的膜，使得与镜和高反射率膜一起形成光谐振器。 另一个激光器的两个相对端都涂覆有高反射率的膜，并且在相对端之间形成光谐振器。 从两个半导体激光器发射的两束激光彼此干涉，并且所得到的干涉光进入光检测器。 检测器检测由反射镜的位移引起的干涉光的变化，并且输出表示悬臂中的位移的信号。

公开(公告)号：US5216254A

公开(公告)日：1993-06-01

申请号：US517588

申请日：1990-05-01

申请人： Hiroko Ohta ,  Ryouhei Shimizu ,  Toshihito Kouchi ,  Akitoshi Toda ,  Yasuo Isono ,  Yoshiyuki Mimura ,  Hiroshi Kajimura

发明人： Hiroko Ohta ,  Ryouhei Shimizu ,  Toshihito Kouchi ,  Akitoshi Toda ,  Yasuo Isono ,  Yoshiyuki Mimura ,  Hiroshi Kajimura

IPC分类号： H01J37/26 ,  G01Q60/10 ,  G01Q70/06 ,  G01Q80/00 ,  H01J37/28 ,  H01J37/317 ,  H05K3/00 ,  H05K3/06 ,  H05K3/14

CPC分类号： H05K3/0082 ,  H05K3/146 ,  B82Y10/00 ,  H05K2203/0121 ,  H05K2203/1338 ,  H05K3/061 ,  Y10S977/849 ,  Y10S977/855 ,  Y10S977/861 ,  Y10S977/872 ,  Y10S977/874 ,  Y10S977/887

摘要： An apparatus for forming a predetermined circuit pattern on a circuit substrate by using a .mu.-STM write head, the .mu.-STM write head comprising a write head substrate having a flat surface, a plurality of micro chip electrodes formed upright on the flat surface of the write head substrate and constituting a .mu.-STM, a level of a distal end of each of the chip electrodes being set to be constant, and scanning means for scanning the micro chip electrodes on the circuit substrate by moving the micro chip electrodes and the circuit substrate relative to each other in two-dimensional directions.