公开(公告)号：US20090267003A1

公开(公告)日：2009-10-29

申请号：US12469176

申请日：2009-05-20

申请人： Masato MORIYA ,  Osamu WAKABAYASHI ,  Georg SOUMAGNE

发明人： Masato MORIYA ,  Osamu WAKABAYASHI ,  Georg SOUMAGNE

IPC分类号： G21K5/00

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70575 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064 ,  G21K2201/067

摘要： The exposure device is able to supply only EUV radiation to a mask, while eliminating radiation other than the EUV radiation. A multi layer made from a plurality of Mo/Si pair layers is provided upon the front surface of a mirror, and blazed grooves are formed in this multi layer. Radiation which is incident from a light source device is incident upon this mirror, and is reflected or diffracted. Since the reflected EUV radiation (including diffracted EUV radiation) and the radiation of other wavelengths are reflected or diffracted at different angles, accordingly their directions of progression are different. By eliminating the radiation of other wavelengths with an aperture and/or a dumper, it is possible to irradiate a mask only with EUV radiation of high purity.

摘要翻译： 曝光装置只能将EUV辐射提供给掩模，同时消除EUV辐射以外的辐射。 在反射镜的前表面上设置由多个Mo / Si对层制成的多层，并且在该多层中形成闪耀的凹槽。 从光源装置入射的辐射入射在该反射镜上并被反射或衍射。 由于反射的EUV辐射（包括衍射的EUV辐射）和其他波长的辐射以不同的角度被反射或衍射，因此它们的进展方向是不同的。 通过用孔和/或自卸车消除其它波长的辐射，可以仅用高纯度的EUV辐射照射掩模。

公开(公告)号：US20090261242A1

公开(公告)日：2009-10-22

申请号：US12406388

申请日：2009-03-18

申请人： Yoshifumi UENO ,  Osamu WAKABAYASHI ,  Tamotsu ABE ,  Akira SUMITANI ,  Hideo HOSHINO ,  Akira ENDO ,  Georg SOUMAGNE

发明人： Yoshifumi UENO ,  Osamu WAKABAYASHI ,  Tamotsu ABE ,  Akira SUMITANI ,  Hideo HOSHINO ,  Akira ENDO ,  Georg SOUMAGNE

IPC分类号： B01D59/44 ,  H01J49/00

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70916 ,  G03F7/70983 ,  G21K1/093 ,  G21K2201/00 ,  H05G2/005 ,  H05G2/008

摘要： An ion withdrawal apparatus that withdraws ions emitted from a plasma in an EUV light production apparatus in which a target at an EUV light production point is irradiated with laser light to be made in a plasma state and the target emits EUV light, the ion withdrawal apparatus which includes: a collector mirror that is disposed in a direction opposite to a laser light incidence direction to collect the EUV light and has a hole for the ions to pass therethrough; magnetic line of force production means that produces a magnetic line of force that is parallel or approximately parallel to the laser light incidence direction at or in the vicinity of the EUV light production point; and ion withdrawal means that is disposed on the opposite side of the collector mirror from the EUV light production point and withdraws the ions.

摘要翻译： 一种离子提取装置，其在EUV光产生装置中从在等离子体状态的激光照射EUV光产生点的靶，并且靶射出EUV光的EUV光产生装置中，从等离子体发射的离子， 其包括：收集器反射镜，其设置在与激光入射方向相反的方向上以收集EUV光，并具有用于离子通过的孔; 磁力线产生装置意味着产生在EUV光产生点处或附近平行或近似平行于激光入射方向的磁力线; 以及离开收集反射镜与EUV光产生点相反的一侧的离子提取装置，并且离子退出。

公开(公告)号：US20080087840A1

公开(公告)日：2008-04-17

申请号：US11870020

申请日：2007-10-10

申请人： Yoshifumi UENO ,  Georg SOUMAGNE ,  Akira SUMITANI ,  Osamu WAKABAYASHI

发明人： Yoshifumi UENO ,  Georg SOUMAGNE ,  Akira SUMITANI ,  Osamu WAKABAYASHI

IPC分类号： H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An extreme ultra violet light source apparatus having relatively high output for exposure, in which debris are suppressed to be produced as much as possible in stead of disposing debris that has been once produced. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target supply unit for supplying solid tin or lithium as a target to a predetermined position within the chamber; a CO2 laser for applying a laser beam based on pulse operation to the target supplied by the target supply unit so as to generate plasma; and a collector mirror having a multilayer film on a reflecting surface thereof, for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light.

摘要翻译： 具有相对高的曝光输出的极紫外光源装置，其中尽可能多地抑制碎屑被产生以代替已经生产的碎屑。 极紫外光源装置包括：产生极紫外光的室; 用于将固体锡或锂作为目标供应到所述室内的预定位置的目标供应单元; 用于将基于脉冲操作的激光束施加到由目标供给单元提供的目标以产生等离子体的CO 2激光器; 以及在其反射表面上具有多层膜的收集器反射镜，用于收集从等离子体辐射的极紫外光以输出极紫外光。

公开(公告)号：US20120217414A1

公开(公告)日：2012-08-30

申请号：US13465108

申请日：2012-05-07

申请人： Yoshifumi UENO ,  Osamu WAKABAYASHI ,  Tamotsu ABE ,  Akira SUMITANI ,  Hideo HOSHINO ,  Akira ENDO ,  Georg SOUMAGNE

发明人： Yoshifumi UENO ,  Osamu WAKABAYASHI ,  Tamotsu ABE ,  Akira SUMITANI ,  Hideo HOSHINO ,  Akira ENDO ,  Georg SOUMAGNE

IPC分类号： H01J1/50

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70916 ,  G03F7/70983 ,  G21K1/093 ,  G21K2201/00 ,  H05G2/005 ,  H05G2/008

摘要： An ion withdrawal apparatus that withdraws ions emitted from a plasma in an EUV light production apparatus in which a target at an EUV light production point is irradiated with laser light to be made in a plasma state and the target emits EUV light, the ion withdrawal apparatus which includes: a collector mirror that is disposed in a direction opposite to a laser light incidence direction to collect the EUV light and has a hole for the ions to pass therethrough; magnetic line of force production means that produces a magnetic line of force that is parallel or approximately parallel to the laser light incidence direction at or in the vicinity of the EUV light production point; and ion withdrawal means that is disposed on the opposite side of the collector mirror from the EUV light production point and withdraws the ions.

摘要翻译： 一种离子提取装置，其在EUV光产生装置中从在等离子体状态的激光照射EUV光产生点的靶，并且靶射出EUV光的EUV光产生装置中，从等离子体发射的离子， 其包括：收集器反射镜，其设置在与激光入射方向相反的方向上以收集EUV光，并具有用于离子通过的孔; 磁力线产生装置意味着产生在EUV光产生点处或附近平行或近似平行于激光入射方向的磁力线; 以及离开收集反射镜与EUV光产生点相反的一侧的离子提取装置，并且离子退出。

公开(公告)号：US20110180734A1

公开(公告)日：2011-07-28

申请号：US13081899

申请日：2011-04-07

申请人： Masato MORIYA ,  Tamotsu ABE ,  Takashi SUGANUMA ,  Hiroshi SOMEYA ,  Takayuki YABU ,  Akira SUMITANI ,  Osamu WAKABAYASHI

发明人： Masato MORIYA ,  Tamotsu ABE ,  Takashi SUGANUMA ,  Hiroshi SOMEYA ,  Takayuki YABU ,  Akira SUMITANI ,  Osamu WAKABAYASHI

IPC分类号： H05G2/00

CPC分类号： H05G2/003 ,  H05G2/008

摘要： An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV light source apparatus includes: the EUV light generation chamber; a target material supply unit; an EUV light collector mirror; a driver laser; a window; a parabolic mirror which focuses collimated laser beam by reflection and is disposed within the EUV light generation chamber; an energy detector detecting energy of the laser beam diffused without being applied to a target material after being focused by the laser beam focusing optics when the EUV light is not generated; and a processing unit for judging the deterioration of the window and the parabolic mirror according to the laser beam energy detected by the energy detector.

摘要翻译： EUV光源装置可以可靠地检测并准确地判断设置在EUV光产生室内的激光束聚焦光学元件中的光学元件的劣化。 该EUV光源装置包括：EUV光产生室; 目标材料供应单位; EUV集光镜; 驱动激光器 一个窗口; 抛物面镜，其通过反射聚焦准直激光束并设置在EUV光产生室内; 能量检测器，当不产生EUV光时，检测在被激光束聚焦光学器件聚焦之后不会施加到目标材料上的激光束的能量扩散; 以及处理单元，用于根据由能量检测器检测的激光束能量来判断窗口和抛物面镜的劣化。

公开(公告)号：US20150168848A1

公开(公告)日：2015-06-18

申请号：US14629282

申请日：2015-02-23

申请人： Hiroshi TANAKA ,  Akihiko KUROSU ,  Hiroyuki MASUDA ,  Hideyuki OCHIAI ,  Osamu WAKABAYASHI ,  Masato MORIYA

发明人： Hiroshi TANAKA ,  Akihiko KUROSU ,  Hiroyuki MASUDA ,  Hideyuki OCHIAI ,  Osamu WAKABAYASHI ,  Masato MORIYA

IPC分类号： G03F7/20 ,  H01L21/268 ,  H01L21/67 ,  H01L21/66

CPC分类号： G03F7/70483 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70358 ,  H01L21/268 ,  H01L21/67115 ,  H01L21/67253 ,  H01L22/10 ,  H01L22/26

摘要： A light source apparatus according to an embodiment may be used for an exposure apparatus which exposes a plurality of wafers by repeating a wafer exposure for exposing a total exposure area of each wafer. The wafer exposure may include a sequential execution of scanning exposures in which each divided area defined by dividing the total exposure area of each wafer is scanned by pulsed light. The apparatus may comprise: a light source controller configured to execute a control for outputting the pulsed light based on a luminescence trigger signal received from the exposure apparatus; a detector configured to detect a characteristic of the pulsed light; and a data collection processor configured to collect at least a piece of data in data included in a pulse light data group related to the pulsed light detected by the detector and a control data group related to the control, and execute a mapping process of mapping the collected data by at least one of scanning exposure basis and wafer exposure basis.

摘要翻译： 根据实施例的光源装置可以用于通过重复用于暴露每个晶片的总曝光区域的晶片曝光而暴露多个晶片的曝光装置。 晶片曝光可以包括扫描曝光的顺序执行，其中通过用脉冲光扫描每个晶片的总曝光面积所限定的每个划分区域。 该装置可以包括：光源控制器，被配置为基于从曝光装置接收的发光触发信号执行用于输出脉冲光的控制; 检测器，被配置为检测所述脉冲光的特性; 以及数据收集处理器，被配置为收集与由所述检测器检测到的脉冲光有关的脉冲光数据组中包含的数据中的至少一条数据以及与所述控制相关的控制数据组，并执行映射处理 通过扫描曝光基础和晶片曝光基础中的至少一个来收集数据。

公开(公告)号：US20120068091A1

公开(公告)日：2012-03-22

申请号：US13306358

申请日：2011-11-29

申请人： Akira ENDO ,  Krzysztof NOWAK ,  Hideo HOSHINO ,  Tatsuya ARIGA ,  Masato MORIYA ,  Osamu WAKABAYASHI

发明人： Akira ENDO ,  Krzysztof NOWAK ,  Hideo HOSHINO ,  Tatsuya ARIGA ,  Masato MORIYA ,  Osamu WAKABAYASHI

IPC分类号： G21K5/00 ,  H01S3/04

CPC分类号： H05G2/003 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/2316 ,  H05G2/008

摘要： An EUV light source of the present invention is capable of using a saturable absorber stably and continuously in a high heat load state. A saturable absorber (SA) device is disposed on a laser beam line to absorb feeble light, such as self-excited oscillation light, parasitic oscillation light or return light. SA gas from an SA gas cylinder and buffer gas from a buffer gas cylinder are mixed to be a mixed gas. The mixed gas is supplied to an SA gas cell via a supply pipeline, and absorbs the feeble light included in the laser beam. The mixed gas is exhausted via an exhaust pipeline, and is sent to a heat exchanger. The mixed gas, cooled down by a heat exchanger, is sent back to the SA gas cell by a circulation pump.

摘要翻译： 本发明的EUV光源能够在高热负荷状态下稳定且连续地使用饱和吸收体。 可饱和吸收体（SA）装置设置在激光束线上以吸收诸如自激振荡光，寄生振荡光或返回光的微弱光。 来自SA气瓶的SA气体和来自缓冲气瓶的缓冲气体混合成混合气体。 混合气体经由供给管路供给到SA气室，吸收激光束中包含的微弱光。 混合气体通过排气管道排出，并被送到热交换器。 由热交换器冷却的混合气体通过循环泵送回到SA气室。

公开(公告)号：US20100140512A1

公开(公告)日：2010-06-10

申请号：US12603872

申请日：2009-10-22

申请人： Takashi SUGANUMA ,  Masato MORIYA ,  Tamotsu ABE ,  Kouji KAKIZAKI ,  Osamu WAKABAYASHI

发明人： Takashi SUGANUMA ,  Masato MORIYA ,  Tamotsu ABE ,  Kouji KAKIZAKI ,  Osamu WAKABAYASHI

IPC分类号： G21K5/00

CPC分类号： G03F7/70891 ,  G03F7/70033 ,  G03F7/70141 ,  G03F7/70175 ,  G03F7/70191 ,  G03F7/70575 ,  G03F7/70591 ,  G03F7/7085 ,  H05G2/005

摘要： An extreme ultraviolet (EUV) light source apparatus in which a location or posture shift of an EUV collector mirror can be detected. The apparatus includes: a chamber; a target supply mechanism for supplying a target material into the chamber; a driver laser for irradiating the target material with a laser beam to generate plasma; a collector mirror having a first focal point and a second focal point, for reflecting light, which is generated at the first focal point, toward the second focal point; a splitter optical element provided in an optical path of the light reflected by the collector mirror, for splitting a part of the light reflected by the collector mirror; and an image sensor provided in an optical path of the light split by the splitter optical element, for detecting a profile of the light split by the splitter optical element.

摘要翻译： 可以检测EUV收集镜的位置或姿势偏移的极紫外（EUV）光源装置。 该装置包括：一个室; 用于将目标材料供应到所述室中的目标供给机构; 用于用激光束照射目标材料以产生等离子体的驱动器激光器; 收集器反射镜，具有第一焦点和第二焦点，用于将在第一焦点处产生的光朝向第二焦点反射; 分离器光学元件，设置在由集光镜反射的光的光路中，用于分离由集光镜反射的一部分光; 以及图像传感器，其设置在由分离光学元件分离的光的光路中，用于检测由分离光学元件分离的光的轮廓。

公开(公告)号：US20150139258A1

公开(公告)日：2015-05-21

申请号：US14602208

申请日：2015-01-21

申请人： Hiroaki TSUSHIMA ,  Osamu WAKABAYASHI ,  Takashi MATSUNAGA

发明人： Hiroaki TSUSHIMA ,  Osamu WAKABAYASHI ,  Takashi MATSUNAGA

IPC分类号： H01S3/097

CPC分类号： H01S3/09702 ,  H01S3/0014 ,  H01S3/08009 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/2366

摘要： A laser apparatus according to embodiment may include: a laser chamber filled with a laser gain medium; a pair of electrodes disposed in the laser chamber; a charger configured to apply a charge voltage for causing a discharge to occur between the pair of the electrodes; a pulse power module configured to covert the charge voltage applied by the charger into a short pulsed voltage, and apply the short pulsed voltage between the pair of the electrodes; and a controller configured to calculate input energies Ein applied to the pair of the electrodes based on the charge voltage, calculate an integration value Einsum of the input energies Ein by integrating the calculated input energies Ein, and determine whether the integration value Einsum exceeds an integration lifetime value Einsumlife of input energy or not.

摘要翻译： 根据实施例的激光装置可以包括：填充有激光增益介质的激光室; 设置在激光室中的一对电极; 充电器，被配置为施加用于在所述一对电极之间发生放电的充电电压; 脉冲功率模块，被配置为将由充电器施加的充电电压转换成短脉冲电压，并且在一对电极之间施加短脉冲电压; 以及控制器，被配置为基于所述充电电压来计算施加到所述一对电极的输入能量Ein，通过对所计算的输入能量Ein进行积分来计算输入能量Ein的积分值Einsum，并且确定积分值Einsum是否超过积分 输入能量的寿命值Einsumlife。

公开(公告)号：US20140369373A1

公开(公告)日：2014-12-18

申请号：US14245371

申请日：2014-04-04

申请人： Osamu WAKABAYASHI ,  Tatsuya ARIGA ,  Takahito KUMAZAKI ,  Kotaro SASANO

发明人： Osamu WAKABAYASHI ,  Tatsuya ARIGA ,  Takahito KUMAZAKI ,  Kotaro SASANO

IPC分类号： H01S3/23 ,  H01S3/083

CPC分类号： H01S3/2308 ,  G03F7/70025 ,  H01S3/083

摘要： The invention relates to a two-stage laser system well fit for semiconductor aligners, which is reduced in terms of spatial coherence while taking advantage of the high stability, high output efficiency and fine line width of the MOPO mode. The two-stage laser system for aligners comprises an oscillation-stage laser (50) and an amplification-stage laser (60). Oscillation laser light having divergence is used as the oscillation-stage laser (50), and the amplification-stage laser (60) comprises a Fabry-Perot etalon resonator made up of an input side mirror (1) and an output side mirror (2). The resonator is configured as a stable resonator.

摘要翻译： 本发明涉及一种适用于半导体对准器的两级激光系统，其在利用MOPO模式的高稳定性，高输出效率和细线宽度的同时，在空间相干性方面被减少。 用于对准器的两级激光系统包括振荡级激光器（50）和放大级激光器（60）。 具有发散的振荡激光用作振荡级激光器（50），放大级激光器（60）包括由输入侧反射镜（1）和输出侧反射镜（2）构成的法布里 - 珀罗标准具共振器 ）。 谐振器被配置为稳定谐振器。