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公开(公告)号：US06372103B1
公开(公告)日：2002-04-16
申请号：US09568617
申请日：2000-05-10
申请人： Michael D. Perry , Paul S. Banks , Brent C. Stuart
发明人： Michael D. Perry , Paul S. Banks , Brent C. Stuart
IPC分类号： C23C1434
CPC分类号： C23C14/28 , B23K26/0624 , C23C14/0605
摘要： Short pulse PLD is a viable technique of producing high quality films with properties very close to that of crystalline diamond. The plasma generated using femtosecond lasers is composed of single atom ions with no clusters producing films with high Sp3/Sp2 ratios. Using a high average power femtosecond laser system, the present invention dramatically increases deposition rates to up to 25 &mgr;m/hr (which exceeds many CVD processes) while growing particulate-free films. In the present invention, deposition rates is a function of laser wavelength, laser fluence, laser spot size, and target/substrate separation. The relevant laser parameters are shown to ensure particulate-free growth, and characterizations of the films grown are made using several diagnostic techniques including electron energy loss spectroscopy (EELS) and Raman spectroscopy.
摘要翻译： 短脉冲PLD是生产具有非常接近结晶金刚石的性能的高质量薄膜的可行技术。 使用飞秒激光器产生的等离子体由单个原子离子组成，没有产生具有高Sp3 / Sp2比率的膜的簇。 使用高平均功率的飞秒激光系统，当生长无颗粒的膜时，本发明显着地将沉积速率提高到高达25mum / hr（其超过许多CVD工艺）。 在本发明中，沉积速率是激光波长，激光能量密度，激光光斑尺寸和靶/衬底分离的函数。 显示相关的激光参数以确保无颗粒生长，并且使用包括电子能量损失光谱（EELS）和拉曼光谱学的几种诊断技术来制备生长的膜的表征。
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公开(公告)号：US06303901B1
公开(公告)日：2001-10-16
申请号：US09558144
申请日：2000-04-21
申请人： Michael D. Perry , Paul S. Banks , Brent C. Stuart
发明人： Michael D. Perry , Paul S. Banks , Brent C. Stuart
IPC分类号： B23K2638
CPC分类号： B23K26/12 , B23K26/0624 , B23K26/123 , B23K26/18 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2103/04 , B23K2103/16 , B23K2103/30 , B23K2103/32 , B23K2103/36 , B23K2103/50 , C06B21/0033 , F42B33/008 , G02F2001/392
摘要： The present invention is a method for penetrating a workpiece using an ultra-short pulse laser beam without causing damage to subsequent surfaces facing the laser. Several embodiments are shown which place holes in fuel injectors without damaging the back surface of the sack in which the fuel is ejected. In one embodiment, pulses from an ultra short pulse laser remove about 10 nm to 1000 nm of material per pulse. In one embodiment, a plasma source is attached to the fuel injector and initiated by common methods such as microwave energy. In another embodiment of the invention, the sack void is filled with a solid. In one other embodiment, a high viscosity liquid is placed within the sack. In general, high-viscosity liquids preferably used in this invention should have a high damage threshold and have a diffusing property.
摘要翻译： 本发明是一种使用超短脉冲激光束穿透工件的方法，而不会对面对激光器的后续表面造成损害。 示出了在燃料喷射器中放置孔而不损坏其中喷射燃料的袋的背面的几个实施例。 在一个实施例中，来自超短脉冲激光的脉冲每脉冲去除约10nm至1000nm的材料。 在一个实施例中，等离子体源连接到燃料喷射器并通过诸如微波能量的常用方法启动。 在本发明的另一个实施方案中，袋状空隙填充有固体。 在另一个实施方案中，将高粘度液体放置在袋内。 通常，本发明优选使用的高粘度液体应具有高损伤阈值并具有扩散性。
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公开(公告)号：US6150630A
公开(公告)日：2000-11-21
申请号：US62078
申请日：1998-04-17
IPC分类号： B23K26/00 , B23K26/06 , B23K26/12 , B23K26/18 , B23K26/36 , B23K26/38 , B23K26/40 , C06B21/00 , F42B33/00 , H01S3/00
CPC分类号： C06B21/0033 , B23K26/0624 , B23K26/12 , B23K26/127 , B23K26/18 , B23K26/382 , B23K26/402 , F42B33/008 , B23K2203/05 , G02F2001/392 , H01S3/0057
摘要： The invention consists of a method for machining (cutting, drilling, sculpting) of explosives (e.g., TNT, TATB, PETN, RDX, etc.). By using pulses of a duration in the range of 5 femtoseconds to 50 picoseconds, extremely precise and rapid machining can be achieved with essentially no heat or shock affected zone. In this method, material is removed by a nonthermal mechanism. A combination of multiphoton and collisional ionization creates a critical density plasma in a time scale much shorter than electron kinetic energy is transferred to the lattice. The resulting plasma is far from thermal equilibrium. The material is in essence converted from its initial solid-state directly into a fully ionized plasma on a time scale too short for thermal equilibrium to be established with the lattice. As a result, there is negligible heat conduction beyond the region removed resulting in negligible thermal stress or shock to the material beyond a few microns from the laser machined surface. Hydrodynamic expansion of the plasma eliminates the need for any ancillary techniques to remove material and produces extremely high quality machined surfaces. There is no detonation or deflagration of the explosive in the process and the material which is removed is rendered inert.
摘要翻译： 本发明包括一种用于加工（切割，钻孔，雕刻）爆炸物（例如TNT，TATB，PETN，RDX等）的方法。 通过使用持续时间在5飞秒至50皮秒范围内的脉冲，可以在基本上没有受热或冲击影响的区域实现非常精确和快速的机械加工。 在这种方法中，通过非热机制去除材料。 多光子和碰撞电离的组合在比电子动能转移到晶格更短的时间尺度上产生临界密度等离子体。 所得到的等离子体远离热平衡。 该材料本质上从其初始固态直接转化为完全离子化的等离子体，其时间尺度太短而不能与晶格建立。 结果，除去区域之外的热传导可忽略不计，导致对激光加工表面超过几微米的材料的热应力或冲击可忽略不计。 等离子体的流体动力学膨胀不需要任何辅助技术去除材料并产生极高质量的加工表面。 在该过程中爆炸物没有爆炸或爆燃，被除去的物质变得惰性。
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公开(公告)号：US5960016A
公开(公告)日：1999-09-28
申请号：US869345
申请日：1997-06-05
IPC分类号： H01S3/00 , H01S3/1055
CPC分类号： H01S3/0057
摘要： An all-reflective pulse stretcher for laser systems employing chirped-pulse amplification enables on-axis use of the focusing mirror which results in ease of use, significantly decreased sensitivity to alignment and near aberration-free performance. By using a new type of diffraction grating which contains a mirror incorporated into the grating, the stretcher contains only three elements: 1) the grating, 2) a spherical or parabolic focusing mirror, and 3) a flat mirror. Addition of a fourth component, a retro-reflector, enables multiple passes of the same stretcher resulting in stretching ratios beyond the current state of the art in a simple and compact design. The pulse stretcher has been used to stretch pulses from 20 fsec to over 600 psec (a stretching ratio in excess of 30,000).
摘要翻译： 采用啁啾脉冲放大的激光系统的全反射脉冲展宽器能够实现聚焦镜的轴向使用，从而易于使用，显着降低对准灵敏度和近无像差性能。 通过使用包含结合到光栅中的反射镜的新型衍射光栅，担架仅包含三个元件：1）光栅，2）球面或抛物面聚焦镜，以及3）平面镜。 添加第四组件，后向反射器使得能够在简单且紧凑的设计中多次通过相同的拉伸机，导致拉伸比超过现有技术的拉伸比。 已经使用脉冲拉伸器将脉冲从20fsec拉伸到超过600psec（拉伸比超过30,000）。
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5.发明授权公开(公告)号：US06784400B1
公开(公告)日：2004-08-31
申请号：US10377902
申请日：2003-03-03
申请人： Paul S. Banks , Brent C. Stuart , Michael D. Perry
发明人： Paul S. Banks , Brent C. Stuart , Michael D. Perry
IPC分类号： B23K2600
CPC分类号： B23K26/073 , B23K26/0624 , B23K26/382 , B23K26/40 , B23K2103/05 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/26 , B23K2103/50
摘要： A method for removing material via a laser so as to reduce the formation of channels comprising the steps of emitting a laser pulse comprising a pulse energy, a pulse duration, and a fluence towards a surface of a drilling material the fluence of a value sufficient to avoid the formation of a channel in the drilling material at the surface to form a hole comprising a side wall and a bottom, shaping a spatial profile of the laser pulse such that the fluence is substantially uniform across the spatial profile; and emitting at least one subsequent laser pulse having a pulse energy, a pulse duration, and a fluence sufficient to avoid the formation of a channel at the bottom of the hole.
摘要翻译： 一种用于通过激光去除材料以减少通道形成的方法，包括以下步骤：向钻孔材料的表面发射包括脉冲能量，脉冲持续时间和能量密度的激光脉冲，该能量值足以 避免在表面处的钻井材料中形成通道以形成包括侧壁和底部的孔，使激光脉冲的空间轮廓成形，使得注量在空间轮廓上基本均匀; 并且发射至少一个具有足够的脉冲能量，脉冲持续时间和能量密度的后续激光脉冲，以避免在孔的底部形成通道。
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公开(公告)号：US07103078B2
公开(公告)日：2006-09-05
申请号：US11190357
申请日：2005-07-26
CPC分类号： H01S3/025 , H01S3/0401 , H01S3/0407 , H01S3/042 , H01S3/0602 , H01S3/0604 , H01S3/0612 , H01S3/07 , H01S3/0941 , H01S3/16 , H01S3/1603 , H01S3/1643 , H01S3/20 , H01S3/2341
摘要： A laser device which may be used as an oscillator or amplifier comprising a chamber having a volume formed therein and a gain medium within the volume. The gain medium comprises solid-state elements containing active laser ion distributed within the volume. A cooling fluid flows about the solid-state elements and a semiconductor laser diode provides optical pump radiation into the volume of the laser chamber such that laser emission from the device passes through the gain medium and the fluid. The laser device provides the advantages of a solid-state gain medium laser (e.g., diode-pumping, high power density, etc), but enables operation at higher average power and beam quality than would be achievable from a pure solid-state medium.
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公开(公告)号：US06664498B2
公开(公告)日：2003-12-16
申请号：US10120731
申请日：2002-04-10
IPC分类号： B23K2600
CPC分类号： B23K26/0676 , B23K26/0613 , B23K26/0622 , B23K26/0624
摘要： Methods and apparatus for material modification using laser bursts including appropriately timed laser pulses to enhance material modification. In one implementation, a method for material modification comprises the steps of: providing bursts of laser pulses, wherein each burst comprises at least two laser pulses, wherein each laser pulse has a pulse duration within a range of between approximately 10 ps and 100 ns, wherein a time between each laser pulse of each burst is within a range of between approximately 5 ns and 5 &mgr;s; a time between successive bursts is greater than the time between each laser pulse comprising each burst; and directing the bursts upon a workpiece, wherein an intensity of a primary laser pulse of each burst exceeds a damage threshold of the workpiece.
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公开(公告)号：US06865213B2
公开(公告)日：2005-03-08
申请号：US09801428
申请日：2001-03-07
申请人： Michael D. Perry , Paul S. Banks
发明人： Michael D. Perry , Paul S. Banks
IPC分类号： H01S3/0941 , H01S3/093 , H01S3/04
CPC分类号： H01S3/0941 , H01S3/094076
摘要： A solid-state laser device consists of a gain medium in the shape of a polyhedron. A beam enters the gain medium at one surface of the polyhedron and is reflected internally at one or more surfaces with each reflection occurring in approximate the same plane as the plane of incidence of the incident beam. The beam enters and exits the gain medium at different locations. Pump radiation enters the polyhedron through one or more faces. The laser device may be used as the gain medium for a laser oscillator or a laser amplifier. In one variation, the polyhedron contains an internal core section in which there is no gain material. In another variation, the gain medium further includes one or more surfaces oriented to achieve a 90 degree internal reflection of the beam.
摘要翻译： 固体激光装置由多面体形状的增益介质组成。 光束在多面体的一个表面处进入增益介质，并在一个或多个表面内部反射，每个反射出现在与入射光束的入射平面近似的相同平面上。 光束在不同位置进入和离开增益介质。 泵辐射通过一个或多个面进入多面体。 激光装置可以用作激光振荡器或激光放大器的增益介质。 在一个变型中，多面体包含内部核心部分，其中不存在增益材料。 在另一变型中，增益介质还包括一个或多个取向以实现光束的90度内部反射的表面。
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公开(公告)号：US07366211B2
公开(公告)日：2008-04-29
申请号：US11470243
申请日：2006-09-05
IPC分类号： H01S3/04
CPC分类号： H01S3/025 , H01S3/0401 , H01S3/0407 , H01S3/042 , H01S3/0602 , H01S3/0604 , H01S3/0612 , H01S3/07 , H01S3/0941 , H01S3/16 , H01S3/1603 , H01S3/1643 , H01S3/20 , H01S3/2341
摘要： A laser device which may be used as an oscillator or amplifier comprising a chamber having a volume formed therein and a gain medium within the volume. The gain medium comprises a solid-state element containing active laser ion within the volume. A cooling fluid flows about the solid-state element and a semiconductor laser diode provides optical pump radiation into the volume of the laser chamber such that laser emission from the device passes through the gain medium and the fluid. The laser device provides the advantages of a solid-state gain medium laser (e.g., diode-pumping, high power density, etc), but enables operation at higher average power and beam quality than would be achievable from a pure solid-state medium.
摘要翻译： 可以用作振荡器或放大器的激光装置，其包括其中形成有体积的腔室和体积内的增益介质。 增益介质包括在体积内含有活性激光离子的固态元件。 冷却流体围绕固态元件流动，并且半导体激光二极管将光泵辐射提供到激光室的体积中，使得来自器件的激光发射通过增益介质和流体。 激光器件提供了固态增益介质激光器（例如，二极管泵浦，高功率密度等）的优点，但是能够以比从纯固体介质可实现的更高的平均功率和光束质量进行操作。
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公开(公告)号：US06937629B2
公开(公告)日：2005-08-30
申请号：US10302630
申请日：2002-11-21
CPC分类号： H01S3/025 , H01S3/0401 , H01S3/0407 , H01S3/042 , H01S3/0602 , H01S3/0604 , H01S3/0612 , H01S3/07 , H01S3/0941 , H01S3/16 , H01S3/1603 , H01S3/1643 , H01S3/20 , H01S3/2341
摘要： A laser device which may be used as an oscillator or amplifier comprising a chamber having a volume formed therein and a gain medium within the volume. The gain medium comprises solid-state elements containing active laser ion distributed within the volume. A cooling fluid flows about the solid-state elements and a semiconductor laser diode provides optical pump radiation into the volume of the laser chamber such that laser emission from the device passes through the gain medium and the fluid. The laser device provides the advantages of a solid-state gain medium laser (e.g., diode-pumping, high power density, etc), but enables operation at higher average power and beam quality than would be achievable from a pure solid-state medium.
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