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    WAFER PLACEMENT TABLE
    2.
    发明申请
    WAFER PLACEMENT TABLE 有权

    公开(公告)号：US20250079229A1

    公开(公告)日：2025-03-06

    申请号：US18583957

    申请日：2024-02-22

    Applicant: NGK INSULATORS, LTD.

    Inventor： Seiya INOUE ,  Tatsuya KUNO ,  Shinya YOSHIDA ,  Takahiro ANDO

    IPC: H01L21/687 ,  H01J37/32 ,  H01L21/683

    Abstract: A wafer placement table includes: a ceramic substrate that has a wafer placement surface at an upper surface of the ceramic substrate; an electrode that is incorporated in the ceramic substrate; and an electrically conductive electrode extraction portion that is incorporated in the ceramic substrate and is electrically connected to the electrode. A volume content percentage of a ceramic material that is identical to a main component of the ceramic substrate is high in the electrode extraction portion compared with the electrode.

    NOZZLE AND HONEYCOMB FILTER PRODUCTION APPARATUS USING THE SAME
    3.
    发明申请
    NOZZLE AND HONEYCOMB FILTER PRODUCTION APPARATUS USING THE SAME 有权
    喷嘴和蜂窝状过滤器生产设备使用它

    公开(公告)号：US20140290568A1

    公开(公告)日：2014-10-02

    申请号：US14217835

    申请日：2014-03-18

    Applicant: NGK Insulators, Ltd.

    Inventor： Yasuho AOKI ,  Tasuke NARISHIGE ,  Shinya YOSHIDA

    IPC: B05B1/14 ,  B05B7/14

    CPC classification number: B05B1/14 ,  B01J35/04 ,  B01J37/0232 ,  B05B7/0075 ,  B05B7/1409 ,  B05B7/1454 ,  B05B7/1486 ,  B05B12/084 ,  B05B15/18

    Abstract: A nozzle is mounted on an end of an ejector for ejecting an aerosol on an ejection side in a honeycomb filter production apparatus. The nozzle is formed into a shape having a longitudinal direction. A single introduction port is formed at an end surface of the nozzle on one side in the longitudinal direction, and a plurality of discharge ports are formed at an end surface of the nozzle on the other side in the longitudinal direction. A single introduction passage extends linearly from the single introduction port in the longitudinal direction. A plurality of discharge passages are each branched from an end portion of the introduction passage on a side opposite to the introduction port and extend to corresponding one of the discharge ports in a direction tilted from the longitudinal direction.

    Abstract translation: 喷嘴安装在喷射器的端部，用于在蜂窝过滤器制造设备中的喷射侧喷射气溶胶。 喷嘴形成为具有纵向的形状。 在喷嘴的纵向方向的一侧的端面上形成单个引入口，并且在长度方向上的另一侧的喷嘴的端面形成有多个排出口。 单个引入通道在纵向方向上从单个引入口线性地延伸。 多个排出通路分别从引入通道的与引入口相反的一侧的端部分支，并沿着从纵向方向倾斜的方向延伸到相应的一个排出口。

    MANUFACTURING METHOD OF HONEYCOMB STRUCTURE
    4.
    发明申请
    MANUFACTURING METHOD OF HONEYCOMB STRUCTURE 有权
    蜂窝结构的制造方法

    公开(公告)号：US20130255854A1

    公开(公告)日：2013-10-03

    申请号：US13851397

    申请日：2013-03-27

    Applicant: NGK INSULATORS, LTD.

    Inventor： Toru OGAWA ,  Shuhei FUJITA ,  Shinya YOSHIDA

    IPC: H01B13/00

    CPC classification number: H01B13/0016 ,  B01D46/2418 ,  B01J35/04 ,  B28B11/041 ,  B28B19/0038 ,  C04B38/0006 ,  C04B41/009 ,  C04B41/45 ,  C04B41/4501 ,  C04B41/4511 ,  C04B41/5059 ,  C04B41/51 ,  C04B41/87 ,  C04B2111/0081 ,  C09D5/38 ,  F01N3/022 ,  F01N3/28 ,  F01N3/2828 ,  H05B3/00 ,  H05B3/26 ,  C04B35/565 ,  C04B35/571 ,  C04B41/5096

    Abstract: The manufacturing method of the honeycomb structure includes a step of coating a surface of each of releasing sheets with a paste for an electrode, to prepare electrode forming sheets in which the releasing sheets are provided with electrode paste films; a formed honeycomb body with the electrode forming sheets forming step of attaching the electrode forming sheets to a side surface of a tubular formed ceramic honeycomb body which is the curved surface to prepare a formed honeycomb body with the electrode forming sheets; and a honeycomb structure forming step of firing the formed honeycomb body, or removing releasing sheets from the formed honeycomb body to form the formed honeycomb body with the pastes for the electrodes, and then firing the formed honeycomb body with the pastes for the electrodes, to obtain a honeycomb structure having a side surface provided with the electrodes.

    Abstract translation: 蜂窝结构体的制造方法包括用电极用糊剂涂布各剥离片的表面的步骤，制备电极形成片，其中剥离片设置有电极糊剂膜; 具有电极形成片形成步骤的成形蜂窝体，所述电极形成片形成步骤是将电极形成片附着到作为弯曲表面的管状陶瓷蜂窝体的侧表面，以制备具有电极形成片的成形蜂窝体; 以及对形成的蜂窝体进行烧成的蜂窝结构体的形成工序，或者从形成的蜂窝体中除去脱模片，形成电极用糊料形成的蜂窝体，然后，利用电极用糊料烧结成形的蜂窝体， 获得具有设置有电极的侧面的蜂窝结构体。

    METHOD OF ASSEMBLING OR DISASSEMBLING HOUSING SHELF, METHOD OF PRODUCING CERAMIC FIRED BODY, AND TRANSFERRING SYSTEM
    6.
    发明申请
    METHOD OF ASSEMBLING OR DISASSEMBLING HOUSING SHELF, METHOD OF PRODUCING CERAMIC FIRED BODY, AND TRANSFERRING SYSTEM 审中-公开

    公开(公告)号：US20190255711A1

    公开(公告)日：2019-08-22

    申请号：US16265144

    申请日：2019-02-01

    Applicant: NGK INSULATORS, LTD.

    Inventor： Shinya YOSHIDA ,  Yuito ABE

    IPC: B25J9/16 ,  G03B15/05 ,  H04N5/225 ,  G06T7/13

    Abstract: A method of assembling or disassembling a housing shelf configured at least from shelf plates and frames, including a step in which a chuck holds a frame; a step of determining, based on an image captured by an imager that captures an image of the frame held by the chuck and positioned at an imaged position, a position of a target portion of the frame on the image; and a step of determining, based on the determined position on the image, at least one correction value for causing a change in a release position for the frame when the frame is released from the chuck onto the shelf plate. The target portion may be an inner wall surface of the frame. An illumination unit may be arranged between the imager and the imaged position of the frame.

    DRYING APPARATUS
    7.
    发明申请
    DRYING APPARATUS 有权
    干燥装置

    公开(公告)号：US20150354892A1

    公开(公告)日：2015-12-10

    申请号：US14832196

    申请日：2015-08-21

    Applicant: NGK Insulators, Ltd.

    Inventor： Shuhei FUJITA ,  Shinya YOSHIDA ,  Hiroyuki TSUJI

    IPC: F26B3/28 ,  F26B3/30

    CPC classification number: F26B3/283 ,  B05D3/0263 ,  F26B3/30 ,  F26B13/10

    Abstract: A drying apparatus includes a furnace body 10; a conveyor belt 20 configured to move in an interior space of the furnace body 10, with an object to be dried loaded thereon; and a plurality of infrared heaters 40 arranged above the conveyor belt 20 in the interior space of the furnace body 10. A division wall 50 is provided, which divides the interior space of the furnace body 10 into a space S1 including the conveyor belt 20 and a space S2 including the infrared heaters 40. In the division wall 50, first portions 51 located at positions corresponding to the respective infrared heaters 40 in the longitudinal direction are made of a material that transmits infrared radiation, whereas second portions 52 located at positions corresponding to respective spaces between adjacent infrared heaters 40 in the longitudinal direction are made of a material that does not transmit infrared radiation.

    Abstract translation: 干燥装置包括炉体10; 输送带20，其构造成在炉体10的内部空间中移动，待干燥物体装载在其上; 以及在炉体10的内部空间内配置在输送带20的上方的多个红外线加热器40.设置分隔壁50，将炉体10的内部空间分成包括输送带20的空间S1， 包括红外加热器40的空间S2。在分隔壁50中，位于相应于红外线加热器40的纵向方向上的位置处的第一部分51由透射红外辐射的材料制成，而第二部分52位于相应的位置 在相邻的红外线加热器40之间的纵向方向上的相应空间由不透射红外线的材料制成。

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    9.
    发明公开
    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS 审中-公开

    公开(公告)号：US20240186170A1

    公开(公告)日：2024-06-06

    申请号：US18346951

    申请日：2023-07-05

    Applicant: NGK INSULATORS, LTD.

    Inventor： Natsuki HIRATA ,  Shinya YOSHIDA ,  Tatsuya KUNO ,  Seiya INOUE ,  Taro USAMI ,  Kenji YONEMOTO ,  Aoi SAITO

    IPC: H01L21/683

    CPC classification number: H01L21/6833

    Abstract: A member for a semiconductor manufacturing apparatus includes: a ceramic plate that has a wafer placement surface at an upper surface thereof; a plug disposition hole that extends through the ceramic plate in an up-down direction and that has a truncated conical space whose upper opening is larger than a lower opening thereof; a truncated conical plug that is disposed in the plug disposition hole, that allows gas to flow in the up-down direction, and whose upper surface is larger than a lower surface thereof; an adhesive layer that is provided between the plug disposition hole and the truncated conical plug; an electrically conductive baseplate that is joined to a lower surface of the ceramic plate through a joint layer; and a gas supply path that is provided in the baseplate and the joint layer and that supplies gas to the truncated conical plug.

    METHOD OF PRODUCING A CERAMIC FIRED BODY
    10.
    发明申请
    METHOD OF PRODUCING A CERAMIC FIRED BODY 审中-公开

    公开(公告)号：US20190218150A1

    公开(公告)日：2019-07-18

    申请号：US16231652

    申请日：2018-12-24

    Applicant: NGK INSULATORS, LTD.

    Inventor： Chikashi IHARA ,  Shinya YOSHIDA ,  Yoshiyuki KAMEI ,  Masato SHIMADA

    IPC: C04B41/00 ,  C04B14/04 ,  C04B41/50

    CPC classification number: C04B41/009 ,  C04B14/04 ,  C04B35/64 ,  C04B41/5076

    Abstract: A method of producing a ceramic fired body may includes a step of passing a first accommodating shelf through a firing kiln, the first accommodating shelf including a stack of units of a shelf plate and a frame placed on the shelf plate, one or more ceramic bodies placed on the shelf plate being surrounded by the frame extending in a circumferential direction between the shelf plates; a step of retrieving one or more frames from the first accommodating shelf which has passed through the firing kiln; a step of using the one or more retrieved frames to build a second accommodating shelf for passing through the firing kiln; and a step of rotating the retrieved frame such that a rotational position of the retrieved frame when the second accommodating shelf passes through the firing kiln is different from a rotational position of the retrieved frame when the first accommodating shelf passed through the firing kiln.

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