摘要:
A surface processing apparatus and a dry etching method using a neutral beam. The surface processing apparatus comprises a plasma chamber for generating a plasma P, a neutralizing chamber for converting an ion beam extracted from the plasma P by an ion extracting electrode into the neutral beam, and a processing chamber for introducing therein the neutral beam and etching a substrate S to be processed using the neutral beam. There is also provided a static electric field lens comprising two spaced first electrodes provided on the inner periphery of the neutralizing chamber and a second electrode interposed therebetween so as to obtain the neutral beams having low energy and high flux.
摘要:
A hub unit bearing H1 includes a rotational speed detector 9 which is made up of an encoder 6 and a sensor 8. A seal 5b on a side facing a center side of a vehicle includes a primary seal 5bp and a secondary seal 5bq which are disposed in that order in an axial direction from rolling elements 32 on a side facing the center side of the vehicle towards the center side of the vehicle so as to define a primary sealed space portion I between the vehicle's center side facing rolling elements 32 and the primary seal 5bp and a secondary sealed space portion II between the primary seal 5bp and the secondary seal 5bq, with the rotational speed detector 9 disposed within the secondary sealed space portion II.
摘要:
A clock generator has a ring oscillator which has odd-numbered inverters connected in series, wherein an output of the inverter at a final stage is inputted into the inverter at a first stage to generate and output a clock signal, a frequency divider which receives the clock signal outputted from the ring oscillator, and divides frequency thereof for output, and a heater which is on-off controlled based on the output of the frequency divider and heats the ring oscillator when turned on.
摘要:
To find a compound having a tissue fibrinosis-inhibitory activity and a fibrinolytic activity, and to provide a novel compound that is useful for preventing and/or treating tissue fibrinosis diseases (pulmonary fibrosis, renal fibrosis etc.), diseases caused by pathological blood clots such as ischemic heart diseases (myocardial infarction, angina), intraatrial thrombus, pulmonary embolism, deep venous thrombosis, disseminated intravascular coagulation, ischemic cerebral diseases (cerebral infarction, cerebral bleeding) and arteriosclerosis and the like. To provide a pharmaceutical drug comprising a 5-phenyl-3-pyridazinone derivative represented by the following general formula (I): and an optical isomer thereof, or a pharmaceutically acceptable salt thereof, or a hydrate or solvate thereof, useful for preventing and/or treating disease conditions or symptoms mediated by plasminogen activator inhibitor-1.
摘要:
To provide a tunnel junction device having a high MR ratio even at room temperature, a tunneling film as a nonmagnetic layer of three-layer structure of LaMnO3/SrTiO3/LaMnO3 is arranged between a ferromagnetic metal material La0.6Sr0.4MnO3 (12) and a ferromagnetic metal film material La0.6Sr0.4MnO3 (14). The tunneling film comprises two unit layers of LaMnO3 (13A) arranged on the ferromagnetic metal material La0.6Sr0.4MnO3 (12); five unit layers of SrTiO3 (13B); and two unit layers of LaMnO3 (13C) arranged at the interface between the SrTiO3 (13B) and the ferromagnetic metal film material La0.6Sr0.4MnO3 (14).
摘要:
The present invention provides a rare earth element-doped optical fiber amplifier having a function which allows to omit an optical isolator component, and a method for providing the optical non-reciprocity using the same. In the optical fiber, the optical fiber matrix material is a ferroelectric solid state material, and the ferroelectric solid state material is doped by a rare earth element such as erbium (Er) or thulium (Tm). The optical fiber is characterized by an optical amplification function and an optical non-reciprocity function.
摘要:
A tunnel junction device capable of controlling its spin retention is provided. The tunnel junction device includes a La0.6Sr0.4MnO3-δ electrode (12), a La0.6Sr0.4Mn1-yRuyO3-δ electrode (14), both as ferromagnetic (including ferrimagnetic) metal materials, and a LaAlO3-δ (electrically insulating layer) (13) arranged between the two electrodes (12) and (14).
摘要翻译:提供能够控制其自旋保留的隧道连接装置。 隧道结装置包括La 0.6 N 4 O 5 MnO 3-δ电极(12),La 0.6 N (14),均为铁磁性(包括(ⅲ)),(ⅲ) 铁氧体)金属材料和布置在两个电极(12)和(14)之间的LaAlO 3-δ(电绝缘层)(13)。
摘要:
A memory card is disclosed, which comprises a content interface, an interface driver, a card interface controller, a security processing section which supplies an encryption key to the card interface controller upon a content reproduction request, a memory core interface including a binary counter which counts one of the amount and the number of times of content reproduced, in response to a request for reproduction of a content, and a memory core which records one of the amount and the number of times of content reproduced, if a request for reproduction of a content is input to the memory core, the memory core outputting the encrypted content to the memory core interface if the reproduction request does not cause one of the amount and the number of times of possible content reproduction to be exceeded.
摘要:
The present invention provides the method of manufacturing a dual-gate CMOS device which has high transconductance and improved breakdown voltage, in which depletion in the interface between a gate oxide and a gate electrode is prevented without the increase of the steps of process.A gate oxide film (5) formed on a semiconductor substrate (1) is washed with an aqueous solution, or exposed to a gas atomosphere containing hydrogen, and an amorphous silicon film (3) is formed on the whole surface of the gate oxide film (5). The amorphous silicon film (3) is then crystallized. Alternatively, after a silicon oxide film (53) or a silicon nitrided film is formed on the amorphous silicon film (3), the amorhpous silicon film (3) is crystallized.
摘要:
An aligning method suitably usable in a semiconductor device manufacturing exposure apparatus of step-and-repeat type, for sequentially positioning regions on a wafer to an exposure position. In one preferred form, the marks provided on selected regions of the wafer are detected to obtain corresponding mark signals and then respective positional data related to the positions or positional errors of the selected regions are measured, on the basis of the mark signals. Then, the reliability of each measured positional data of a corresponding selected region is detected, on the basis of the state of a corresponding mark signal or the state of that measured positional data and by using fuzzy reasoning, for example. Corrected positional data related to the disposition of all the regions on the wafer is then prepared by using the measured positional data of the selected regions, wherein, for preparation of the corrected positional data, each measured positional data is weighted in accordance with the detected reliability thereof such that measured positional data having higher reliability is more influential to determine the corrected positional data.