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30 条记录 (耗时 0.025 秒)

    Method for pattern inspection and apparatus therefor
    1.
    发明授权
    Method for pattern inspection and apparatus therefor 失效
    图案检查方法及其设备

    公开(公告)号：US5301248A

    公开(公告)日：1994-04-05

    申请号：US904892

    申请日：1992-06-25

    申请人： Ninomiya Takanori ,  Kazushi Yoshimura ,  Mineo Nomoto

    发明人： Ninomiya Takanori ,  Kazushi Yoshimura ,  Mineo Nomoto

    IPC分类号： G01R31/308 ,  G06T7/00 ,  G06K9/00

    CPC分类号： G06T7/001 ,  G01R31/308 ,  G06T7/0006 ,  G06T2207/20036 ,  G06T2207/20144 ,  G06T2207/30141

    摘要： A detected pattern is binarized, the binarized pattern is expanded, an image size is reduced while a connectivity of the expanded pattern is preserved and stored in a first memory. In turn, the binarized pattern is contracted, the image size is reduced while a connectivity of the contracted pattern is preserved and stored in a second memory. Then the expanded pattern is read out from the first memory and a connectivity of the pattern is selected. The contracted pattern is read out from the second pattern and the connectivity of the pattern is extracted. The selected connectivities are compared with the connectivity of a normal pattern to detect a non-coincidence. The circuit pattern having a short circuit or a semi-short circuit defect and a circuit pattern having an open circuit or a semi-open circuit defect are classified and selected in response to these non-coincidences. Further, a pattern shape stored in the first memory is analyzed to specify the position where the short circuit or a semi-short circuit defect is present.

    摘要翻译： 检测到的图案被二值化，二值化图案被扩展，图像尺寸减小，而扩展图案的连接被保存并存储在第一存储器中。 反过来，二进制图案被缩小，图像尺寸减小，而合同图案的连接被保存并存储在第二存储器中。 然后，从第一存储器读出扩展模式，并且选择模式的连接。 从第二模式读出收缩模式，并提取模式的连接。 将所选择的连接性与正常模式的连接进行比较以检测不重合。 具有短路或半短路缺陷的电路图案以及具有开路或半开路缺陷的电路图案被分类并响应于这些非重合而选择。 此外，分析存储在第一存储器中的图案形状以指定存在短路或半短路缺陷的位置。

    Laser processing machine and laser processing method
    2.
    发明申请
    Laser processing machine and laser processing method 审中-公开
    激光加工机和激光加工方法

    公开(公告)号：US20060102608A1

    公开(公告)日：2006-05-18

    申请号：US11270600

    申请日：2005-11-10

    申请人： Daisuke Katsuta ,  Mineo Nomoto ,  Kazushi Yoshimura

    发明人： Daisuke Katsuta ,  Mineo Nomoto ,  Kazushi Yoshimura

    IPC分类号： B23K26/03

    CPC分类号： B23K26/032 ,  B23K26/03 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0853 ,  B23K2101/40

    摘要： The laser beam machine of the present invention includes: an XY stage on which to rest a workpiece with multiple machining objects arrayed on it, and which moves the workpiece in an XY direction on the basis of NC data; an image acquisition head which is provided in an image acquisition station and has oblique illumination optical system and detection optical system; and a laser machining head which is provided in a laser machining station and has a laser light source, an XY optical beam deflector for deflecting a laser beam in the XY direction on the basis of the deflection control data obtained in accordance with the image signals from each machining object that have been acquired by the image acquisition head, and an irradiation lens for admitting the above-deflected laser beam into each machining object from a substantially perpendicular direction.

    摘要翻译： 本发明的激光束机包括：XY台，其上放置有多个加工对象的工件，并且基于NC数据在XY方向上移动工件; 图像获取头，设置在图像采集站中，具有倾斜照明光学系统和检测光学系统; 以及激光加工头，其设置在激光加工台中并具有激光光源，XY光束偏转器，用于根据根据来自于...的图像信号获得的偏转控制数据在XY方向上偏转激光束 由图像获取头获取的每个加工对象以及用于从大致垂直的方向将上述偏转的激光束进入每个加工对象的照射透镜。

    Stirling Engine
    3.
    发明申请
    Stirling Engine 失效
    斯特林发动机

    公开(公告)号：US20080282694A1

    公开(公告)日：2008-11-20

    申请号：US11794839

    申请日：2006-01-17

    申请人： Yoshiyuki Kitamura ,  Kazushi Yoshimura ,  Kenji Takai ,  Shinji Yamagami ,  Jin Sakamoto

    发明人： Yoshiyuki Kitamura ,  Kazushi Yoshimura ,  Kenji Takai ,  Shinji Yamagami ,  Jin Sakamoto

    IPC分类号： F02G1/043

    CPC分类号： F02G1/0435 ,  F02G2270/40 ,  F02G2270/55 ,  F02G2280/10 ,  F25B2309/001

    摘要： A Stirling engine, wherein the inner yoke of a linear motor is installed on the outer peripheral surface of a cylinder. To keep a proper pressure balance between a compression space on one end side of a displacer and a back pressure space on the outer peripheral side of the cylinder, a first flow passage is formed in the piston starting at the compression space side end face toward the outer peripheral surface and a second flow passage allowing the first flow passage to communicate with the back pressure space is formed in the cylinder. The second flow passage is composed of a through hole that penetrates the wall of the cylinder in a radial direction and a communication passage formed between the outer peripheral surface of the cylinder and the inner peripheral surface of the inner yoke to allow the through hole to communicate with the back pressure space.

    摘要翻译： 一种斯特林发动机，其中线性电动机的内轭安装在气缸的外周表面上。 为了在置换器的一端侧的压缩空间与气缸的外周侧的背压空间之间保持适当的压力平衡，在活塞的起始于压缩空间侧的端面朝向 在圆筒中形成外周面和允许第一流路与背压空间连通的第二流路。 第二流路由径向贯通圆筒壁的通孔和形成在圆筒的外周面与内轭的内周面之间的连通通道构成，以允许通孔连通 与背压空间。

    Sterling refrigerating system and cooling device
    4.
    发明授权
    Sterling refrigerating system and cooling device 失效
    Sterling冷冻系统和冷却装置

    公开(公告)号：US06779349B2

    公开(公告)日：2004-08-24

    申请号：US10362187

    申请日：2003-02-21

    申请人： Kazushi Yoshimura

    发明人： Kazushi Yoshimura

    IPC分类号： F25B900

    CPC分类号： F25B9/14 ,  F25B2309/001 ,  F25B2500/01 ,  F25D11/00

    摘要： A ring-shaped jacket is fitted around the warm section of a Stirling refrigerating device, and a cylindrical heat-rejecting heat exchanger is disposed around the body of the Stirling refrigerating device with a gap secured in between. The jacket and the heat-rejecting heat exchanger are connected together with a pipe to form a closed circuit, and a refrigerant is circulated through the closed circuit. This allows the heat in the warm section to be transferred by the refrigerant, permitting efficient heat rejection from the heat-rejecting heat exchanger. Thus, the desired cold is obtained stably from the cold section of the Stirling refrigerating device.

    摘要翻译： 在斯特林制冷装置的温暖部分周围装有一个环形护套，圆柱形散热热交换器设置在斯特林制冷装置的主体周围，间隙固定在其间。 夹套和排热热交换器与管连接在一起形成闭路，制冷剂循环通过闭路。 这允许温暖部分中的热量被制冷剂转移，从而允许来自排热热交换器的高效散热。 因此，从斯特林制冷装置的冷部稳定地获得所需的冷却。

    Apparatus and method for inspecting soldered portions
    8.
    发明授权
    Apparatus and method for inspecting soldered portions 失效
    用于检查焊接部分的装置和方法

    公开(公告)号：US4772125A

    公开(公告)日：1988-09-20

    申请号：US875974

    申请日：1986-06-19

    申请人： Kazushi Yoshimura ,  Takashi Hiroi ,  Takanori Ninomiya ,  Toshimitsu Hamada ,  Yasuo Nakagawa ,  Kohichi Karasaki

    发明人： Kazushi Yoshimura ,  Takashi Hiroi ,  Takanori Ninomiya ,  Toshimitsu Hamada ,  Yasuo Nakagawa ,  Kohichi Karasaki

    IPC分类号： G01B11/24 ,  G01N21/64 ,  G01N21/88 ,  G01N21/956 ,  G06T7/00

    CPC分类号： G06T7/0006 ,  G01N21/95684 ,  G01N2021/95646 ,  G01N21/64 ,  G06T2207/10064 ,  G06T2207/30152

    摘要： An apparatus for inspecting an appearance of soldered portions connected between the pads formed on a printed circuit board and leads of an electronic body part. A slit light beam is directed to portions to be inspected and scanned thereon with a light fluorescent image generated from the substrate portion of the printed circuit board and a dark fluorescent image generated from the leads, pads and soldered portions being detected with an image signal being generated in accordance therewith. The image signal is binarized and different functions are extracted from the binarized signal which functions are utilized in connection with other functions and previously obtained data to determine whether an abnormal portion is present or not in a predetermined position on the circuit board.

    摘要翻译： 一种用于检查连接在形成在印刷电路板上的焊盘和电子主体部分的引线之间的焊接部分的外观的装置。 利用从印刷电路板的基板部分产生的荧光图像将狭缝光束引导到要检查和扫描的部分，并且从引线，焊盘和焊接部分产生的暗荧光图像被图像信号检测到 根据其产生。 图像信号被二值化，并且从二值化信号中提取不同的功能，该功能与其他功能相关联使用，并且先前获得的数据用于确定在电路板上的预定位置是否存在异常部分。

    Method and apparatus for detecting edge of fine pattern on specimen
    9.
    发明授权
    Method and apparatus for detecting edge of fine pattern on specimen 失效
    用于检测样品上精细图案边缘的方法和装置

    公开(公告)号：US4556797A

    公开(公告)日：1985-12-03

    申请号：US530044

    申请日：1983-09-07

    申请人： Asahiro Kuni ,  Toshimitsu Hamada ,  Hiroshi Makihira ,  Kazushi Yoshimura

    发明人： Asahiro Kuni ,  Toshimitsu Hamada ,  Hiroshi Makihira ,  Kazushi Yoshimura

    IPC分类号： H01L21/66 ,  G01B7/00 ,  G01B15/04 ,  H01J37/28 ,  H01L21/027 ,  H01J37/00

    CPC分类号： G01B15/04 ,  H01J37/28

    摘要： In a method and apparatus for detecting the edge of a fine pattern formed on a specimen such as a fine circuit pattern formed on a semiconductor element or the like, there is prepared a predetermined model waveform based on theoretical secondary electron emission from the edge portion. Secondary electrons emitted from successive scanning points across the pattern edge portion through the irradiation of a scanning electron beam thereonto are detected to produce an actual signal waveform reflecting the secondary electron emission from the pattern edge portion. The actual signal waveform is compared with the model waveform, and one of the scanning points at which the highest coincidence exists between both the actual and model waveforms, is determined as a position of the pattern edge.

    摘要翻译： 在形成在半导体元件等上形成的精细电路图案的试样上形成的精细图案的边缘的方法和装置中，根据来自边缘部分的理论二次电子发射，制备预定的模型波形。 检测从连续的扫描点通过扫描电子束照射到图案边缘部分的二次电子，以产生反映来自图案边缘部分的二次电子发射的实际信号波形。 将实际信号波形与模型波形进行比较，确定实际波形和模型波形之间存在最高一致性的扫描点之一，作为图形边缘的位置。