公开(公告)号：US5069157A

公开(公告)日：1991-12-03

申请号：US573235

申请日：1990-08-24

申请人： Mizuho Imai ,  Mikio Sekiguchi ,  Nobuyasu Shiba ,  Hideyo Iida

发明人： Mizuho Imai ,  Mikio Sekiguchi ,  Nobuyasu Shiba ,  Hideyo Iida

IPC分类号： C23C18/02 ,  C03C17/00 ,  C23C16/448 ,  C23C16/54 ,  C23C18/12 ,  H01B5/14 ,  H01B13/00 ,  H01L21/283 ,  H01L21/288 ,  H01L31/042

CPC分类号： C23C16/4486 ,  C03C17/002 ,  C23C16/545

摘要： A thin film forming apparatus which forms a thin film over the film forming surface of a substrate by spraying a mist of a source solution produced by atomization over the film forming surface of the substrate heated to a given temperature. The substrate conveying direction is reversible, or a nozzle for spouting the mist into a film forming chamber and an exhaust duct are connected removably to a hearth forming the bottom wall of the film forming chamber and can be switched with one another. The film forming apparatus is capable of forming thin films of different laminate constructions.

公开(公告)号：US5090360A

公开(公告)日：1992-02-25

申请号：US637069

申请日：1991-01-03

申请人： Nobuyasu Shiba ,  Mizuho Imai ,  Mikio Sekiguchi ,  Hideyo Iida

发明人： Nobuyasu Shiba ,  Mizuho Imai ,  Mikio Sekiguchi ,  Hideyo Iida

IPC分类号： C23C16/44 ,  B05B13/00 ,  C03C17/00 ,  C03C17/25 ,  C23C16/455 ,  C23C16/46 ,  H01L31/18

CPC分类号： B05B13/00 ,  C03C17/001 ,  C03C17/25 ,  H01L31/1884 ,  C03C2218/112 ,  Y02E10/50

摘要： There is disclosed an atomized thin film forming apparatus for forming a thin film by spouting an atomized source solution toward a heated substrate. A pair of inner wall surfaces defined at the upper portion of a film forming nozzle and disposed opposite to each other with respect to the longitudinal direction of a film forming chamber are restricted so as to gradually narrow in the interval therebetween toward a spouting opening in a smooth curve. Hence, it is possible to prevent a mist of the source solution atomized by the atomizer from being locally stagnant in the film forming nozzle and prevent a precipitate of the atomized source solution from growing. Consequently, the flow of the mist of the source solution is not hindered by the precipitation of the atomized source solution so that the thin film is formed over the surface of the substrate at a high uniformity for a long period of time.

公开(公告)号：US5086727A

公开(公告)日：1992-02-11

申请号：US573240

申请日：1990-08-24

申请人： Mikio Sekiguchi ,  Mizuho Imai ,  Nobuyasu Shiba ,  Hideyo Iida

发明人： Mikio Sekiguchi ,  Mizuho Imai ,  Nobuyasu Shiba ,  Hideyo Iida

IPC分类号： C23C18/02 ,  B05B13/00 ,  C03C17/00 ,  C23C18/12 ,  H01B5/14 ,  H01B13/00 ,  H01L21/283 ,  H01L21/288 ,  H01L31/042

CPC分类号： C03C17/002 ,  B05B13/00

摘要： A thin film forming apparatus which forms a thin film over a surface of a subtrate by spraying a mist of a source solution produced by atomization over the surface of the substrate heated to a given temperature. The film forming apparatus is provided with a pair of guide members for supporting and guiding the substrate at opposite sides of the same. The distance between the opposite inner surfaces of the guide members can be changed according to the width of the substrate to be supported and guided by the pair of guide members. The distance between the respective lower portions of the opposite inner surfaces of the pair of guide members is greater than the distance between the upper portions of the opposite inner surfaces of the same, so that the distribution of the flow rate per unit flow passage area of the mist of the source solution is uniform with respect to the width of the substrate and enables a thin film of a uniform thickness to be formed over the entire surface of the substrate.

公开(公告)号：US5114076A

公开(公告)日：1992-05-19

申请号：US726622

申请日：1991-06-27

申请人： Mizuho Imai ,  Atsuo Ito ,  Mikio Sekiguchi ,  Hideyo Iida ,  Kikuji Fukai ,  Komei Kato

发明人： Mizuho Imai ,  Atsuo Ito ,  Mikio Sekiguchi ,  Hideyo Iida ,  Kikuji Fukai ,  Komei Kato

IPC分类号： B05B7/00 ,  B05B15/04

CPC分类号： B05B7/0012 ,  B05B15/0406 ,  Y10S261/65

摘要： An atomizer for forming a thin film comprising an atomizing box, a guide tube having an open end of small diameter and an other open end of large diameter, a nozzle having an ejection outlet disposed in the atomizing box, an atomizing solution reservoir defined in the atomizing box adjacent to the open end of large diameter of the guide tube, and a fluid return passage defined around the circumference of the guide tube for returning the atomized solution from the atomizing solution reservoir to the one open end thereof. The atomizing box can contain a plurality of guide tubes each provided with a nozzle. The guide tube can also have a plurality of nozzles positioned therein.

公开(公告)号：US4500743A

公开(公告)日：1985-02-19

申请号：US428712

申请日：1982-09-30

申请人： Yutaka Hayashi ,  Mithuyuki Yamanaka ,  Hideyo Iida ,  Nobuyasu Shiba ,  Hideyuki Karasawa ,  Toshio Mishuku ,  Atsuo Itou

发明人： Yutaka Hayashi ,  Mithuyuki Yamanaka ,  Hideyo Iida ,  Nobuyasu Shiba ,  Hideyuki Karasawa ,  Toshio Mishuku ,  Atsuo Itou

IPC分类号： H01L31/04 ,  H01L31/0224 ,  H01L31/18

CPC分类号： H01L31/1884 ,  H01L31/022425 ,  H01L31/022466 ,  Y02E10/50

摘要： An amorphous semiconductor solar cell which comprises a glass substrate and a transparent electrode coated on the substrate. The device also comprises an amorphous semiconductor layer on the transparent electrode, and a rear electrode on the amorphous layer, wherein the average grain diameter of the surface of the transparent electrode ranges from 0.1 .mu.m to 2.5 .mu.m.

摘要翻译： 一种非晶半导体太阳能电池，其包括玻璃基板和涂覆在基板上的透明电极。 所述器件还包括在所述透明电极上的非晶半导体层和所述非晶层上的后电极，其中所述透明电极的表面的平均粒径为0.1μm至2.5μm。

公开(公告)号：US5009928A

公开(公告)日：1991-04-23

申请号：US498038

申请日：1990-03-23

申请人： Yutaka Hayashi ,  Atuo Itoh ,  Mizuho Imai ,  Hideyo Iida

发明人： Yutaka Hayashi ,  Atuo Itoh ,  Mizuho Imai ,  Hideyo Iida

IPC分类号： G02F1/1343 ,  C03C17/00 ,  C03C17/23 ,  C23C16/40 ,  C30B28/14 ,  C30B29/16 ,  C30B29/22 ,  H01B13/00 ,  H01L31/04

CPC分类号： C23C16/407 ,  C03C17/001 ,  C03C17/23 ,  C03C2217/229 ,  C03C2218/11 ,  C03C2218/15

摘要： This invention relates to a method for forming a transparent conductive metal oxide film having good characteristic properties. The method comprises feeding an atomized or gasified starting material onto a substrate to form a metal oxide film on the substrate, wherein the substrate is heated to form a first metal oxide film having a good degree of orientation of crystals and a second film formation step wherein a second metal oxide film is formed on the first metal oxide film under higher substrate temperature conditions than those in the first film formation step to form a second metal oxide film having a degree of orientation of crystals in conformity with that of the first metal oxide film.

公开(公告)号：US4675469A

公开(公告)日：1987-06-23

申请号：US823589

申请日：1986-01-29

申请人： Hideyo Iida ,  Toshio Mishuku ,  Nobuyasu Shiba

发明人： Hideyo Iida ,  Toshio Mishuku ,  Nobuyasu Shiba

IPC分类号： H01L31/04 ,  H01L31/0224 ,  H01L31/052 ,  H01L31/18 ,  H01L31/06

CPC分类号： H01L31/1884 ,  H01L31/022466 ,  H01L31/056 ,  Y02E10/52

摘要： An amorphous silicon solar battery is formed by applying a sequence of layers on a transparent substrate, preferably of glass. A transparent electrode film of conductive material is applied on the substrate, followed by an amorphous silicon semi-conductor, which is in turn followed by a back electrode film of transparent conductive film. In addition, a metallic film may be formed on the back electrode. The surface roughness of the first transparent conductive film is such that the average grain diameter is in the range of 0.1-0.9 micron. Impinging light rays are refracted at random by this uneven surface. The result is an increase in the current density of the solar battery, due to the increased optical paths of the light rays through the semi-conductor material and the increased reflection effect at the second transparent conductive film.

摘要翻译： 非晶硅太阳能电池通过在透明基板上优选玻璃上施加一层层而形成。 将导电材料的透明电极膜施加在基板上，随后是非晶硅半导体，然后是透明导电膜的背面电极膜。 此外，可以在背面电极上形成金属膜。 第一透明导电膜的表面粗糙度使得平均粒径在0.1-0.9微米的范围内。 引起的光线被这个不平坦的表面随机折射。 结果是由于通过半导体材料的光线的光路增加以及第二透明导电膜上的反射效应增加，太阳能电池的电流密度增加。

公开(公告)号：US20090095344A1

公开(公告)日：2009-04-16

申请号：US12226504

申请日：2007-04-24

申请人： Tomohiro Machida ,  Yoshifumi Tonomura ,  Akira Miyazawa ,  Keisuke Ohhira ,  Hideyo Iida ,  Toshiei Yamazaki

发明人： Tomohiro Machida ,  Yoshifumi Tonomura ,  Akira Miyazawa ,  Keisuke Ohhira ,  Hideyo Iida ,  Toshiei Yamazaki

IPC分类号： H01L31/00 ,  H01B1/12 ,  H01B1/20

CPC分类号： H01L31/022425 ,  C03C8/02 ,  C03C8/10 ,  C03C8/14 ,  C03C8/16 ,  C03C8/18 ,  C03C14/006 ,  C03C2214/08 ,  C03C2214/16 ,  H01B1/22 ,  H05K1/092 ,  Y02E10/50

摘要： A conductive paste for solar cell electrodes with which high FF value can be obtained stably, and a method for producing a solar cell using the same are provided.The conductive paste is a conductive paste for solar cell electrodes which includes an organic binder, a solvent, conductive particles, glass frits, and (A) a substance which changes into a gas at a temperature in the range of 150 to 800° C., and a metal oxide, (B) an organometallic compound and a metal oxide, or (C) a compound containing Al, Ga, In or Tl.

摘要翻译： 可以稳定地获得高FF值的太阳能电池用电极用导电膏，提供使用其的太阳能电池的制造方法。 导电性糊剂是太阳能电池用电极用导电性糊剂，其包含有机粘合剂，溶剂，导电性粒子，玻璃料，（A）在150〜800℃的温度范围内变为气体的物质。 ，和金属氧化物，（B）有机金属化合物和金属氧化物，或（C）含有Al，Ga，In或Tl的化合物。

公开(公告)号：US4783006A

公开(公告)日：1988-11-08

申请号：US068466

申请日：1987-06-30

申请人： Yutaka Hayashi ,  Atuo Itoh ,  Hideyo Iida ,  Kikuji Fukai

发明人： Yutaka Hayashi ,  Atuo Itoh ,  Hideyo Iida ,  Kikuji Fukai

IPC分类号： B05B17/04 ,  C23C4/12 ,  C23C18/12 ,  B05B1/00 ,  B05B1/34

CPC分类号： C23C4/12

摘要： A mist supplying device for supplying a film-forming solution to form a thin film on a substrate includes a nozzle having an elongate outlet port, an atomizer coupled to the nozzle for atomizing the film-forming solution, and a disperser movably disposed in the nozzle between the outlet port and the atomizer and having a plurality of substantially uniformly distributed mist passages for passing the atomized film-forming solution in a first flow passage direction therethrough. An air blower is coupled to the atomizer for delivering the atomized film-forming solution into the nozzle. A driver unit is coupled to the disperser for reciprocally moving the mist passages in a second flow passage direction transverse to the first flow passage direction.

摘要翻译： 用于供给成膜溶液以在基材上形成薄膜的雾供应装置包括具有细长出口的喷嘴，与喷嘴连接的用于雾化成膜溶液的雾化器和可移动地设置在喷嘴中的分散器 在所述出口和所述雾化器之间具有多个基本上均匀分布的雾通道，用于使所述雾化膜形成溶液沿第一流动通道方向通过。 鼓风机与雾化器连接，用于将雾化的成膜溶液输送到喷嘴中。 驱动器单元联接到分散器，用于在与第一流动通道方向横切的第二流动通道方向上往复移动雾气通道。

公开(公告)号：US4644091A

公开(公告)日：1987-02-17

申请号：US645059

申请日：1984-08-28

申请人： Yutaka Hayashi ,  Hideyo Iida ,  Toshio Mishuku

发明人： Yutaka Hayashi ,  Hideyo Iida ,  Toshio Mishuku

IPC分类号： H01L31/04 ,  H01L31/0236 ,  H01L31/052 ,  H01L31/06

CPC分类号： H01L31/0236 ,  H01L31/056 ,  Y02B10/12 ,  Y02B10/14 ,  Y02E10/52

摘要： A photoelectric transducer comprising at least a light-transmissive substrate having a relatively flat surface provided on its light-receiving side and an uneven surface provided on its opposite side, and a photoelectric transducing layer provided on the uneven surface of the substrate. The photoelectric transducing layer comprises at least a light-transmissive conductive layer, a semiconductor layer, and a back conductive electrode layer. The back conductive electrode layer comprises a second light-transmissive conductive layer and a conductive layer. The uneven surface on the substrate includes numerous projections, each projection having a triangular section and a shape of pyramidal, ridged roof, or conical type. The projections and the second light-transmissive conductive layer of the uneven back conductive electrode layer elongate the optical path of light beams in the photoelectric transducing layer, and prevent the adherence of dust particles and the abrasion of the photoelectric transducing layer.

摘要翻译： 一种光电变换器，其至少具有设置在其受光侧具有相对平坦的表面的透光性基板和设置在其相对侧上的不平坦表面，以及设置在基板的不平坦表面上的光电转换层。 光电转换层至少包括透光导电层，半导体层和背面导电电极层。 背面导电电极层包括第二透光导电层和导电层。 基板上的不平坦表面包括许多突起，每个突起具有三角形截面和锥形，脊状屋顶或圆锥形的形状。 不平整背面导电电极层的突起和第二透光导电层使光电转换层中的光束的光路伸长，防止灰尘颗粒的附着和光电转换层的磨损。