公开(公告)号：US06841450B2

公开(公告)日：2005-01-11

申请号：US10130431

申请日：2001-09-18

申请人： Norihiro Kobayashi ,  Masaro Tamatsuka ,  Takatoshi Nagoya ,  Wei Feig Qu ,  Makoto Iida

发明人： Norihiro Kobayashi ,  Masaro Tamatsuka ,  Takatoshi Nagoya ,  Wei Feig Qu ,  Makoto Iida

IPC分类号： B60R1/06 ,  B01J35/02 ,  B60J1/00 ,  C03C17/34 ,  C09K3/18 ,  H01L21/304 ,  H01L21/324 ,  H01L21/336

CPC分类号： H01L21/324

摘要： The present invention provides an annealed wafer manufacturing method using a heat treatment method causing no change in resistivity of a wafer surface even when a silicon wafer having boron deposited on a surface thereof from an environment is subjected to heat treatment in an insert gas atmosphere and enabling the heat treatment in an ordinary diffusion furnace not requiring a sealed structure for increasing airtightness nor any specific facility such as explosion-proof facility. The present invention also provides an annealed wafer in which a boron concentration in the vicinity of a surface thereof is constant and crystal defects are annihilated. In the annealed wafer manufacturing method, a silicon wafer having a natural oxide film formed on a surface thereof with boron deposited thereon from an environment is subjected to heat treatment in an atmosphere containing hydrogen gas to remove the deposited boron before the natural oxide film is removed, and then is subjected to heat treatment in an inert gas atmosphere.

摘要翻译： 本发明提供一种退火晶片的制造方法，其使用不会改变晶片表面的电阻率的热处理方法，即使当在其表面上沉积硼的硅晶片在嵌入气体气氛中进行热处理时， 在不需要用于增加气密性的密封结构的普通扩散炉中的热处理以及防爆设施等具体设施。 本发明还提供一种其表面附近的硼浓度恒定并且结晶缺陷被消除的退火晶片。 在退火的晶片制造方法中，将具有在其表面上形成有自然氧化物膜的硅晶片从环境沉积在其上的硅晶片在包含氢气的气氛中进行热处理，以在去除天然氧化物膜之前去除沉积的硼 然后在惰性气体气氛中进行热处理。

公开(公告)号：US06191009B1

公开(公告)日：2001-02-20

申请号：US09264514

申请日：1999-03-08

申请人： Masaro Tamatsuka ,  Makoto Iida ,  Norihiro Kobayashi

发明人： Masaro Tamatsuka ,  Makoto Iida ,  Norihiro Kobayashi

IPC分类号： H01L21322

CPC分类号： C30B15/00 ,  C30B29/06 ,  C30B33/02

摘要： In a method for producing a silicon single crystal wafer, a silicon single crystal ingot in which nitrogen is doped is grown by a Czochralski method, sliced to provide a silicon single crystal wafer, and then subjected to heat treatment to out-diffuse nitrogen on the surface of the wafer. According to a further method, a silicon single crystal ingot is grown in which nitrogen is doped by a Czochralski method, with controlling nitrogen concentration, oxygen concentration and cooling rate, and then the silicon single crystal ingot is sliced to provide a wafer. A silicon single crystal wafer is obtained by slicing a silicon single crystal ingot grown by a Czochralski method with doping nitrogen, wherein the depth of a denuded zone after gettering heat treatment or device fabricating heat treatment is 2 to 12 &mgr;m, and the bulk micro-defect density after gettering heat treatment or device fabricating heat treatment is 1×108 to 2×1010 number/cm3. A CZ silicon wafer is provided, wherein generation of crystal defects on the surface of the wafer, and oxygen precipitation, is accelerated in the bulk portion of the wafer. The controllable range of the depth of the denuded zone and the bulk micro-defect density can be enlarged.

摘要翻译： 在制造硅单晶晶片的方法中，通过切克拉斯基法生长氮掺杂的硅单晶锭，切片以提供硅单晶晶片，然后对其进行热扩散氮 晶片表面。 根据另外的方法，通过切克拉斯基法，通过控制氮浓度，氧浓度和冷却速度，生长氮掺杂的硅单晶锭，然后将硅单晶锭切片以提供晶片。 通过用掺杂氮气切片通过切克劳斯基法生长的硅单晶锭获得硅单晶晶片，其中吸杂热处理或器件制造热处理后的裸露区的深度为2〜12μm， 吸气热处理或器件制造热处理后的缺陷密度为1×10 8〜2×10 10个/ cm 3。 提供了一种CZ硅晶片，其中晶片表面上的晶体缺陷的产生和氧沉淀在晶片的主体部分被加速。 可以扩大裸露区域的深度的可控范围和体积微缺陷密度。

公开(公告)号：US06261361B1

公开(公告)日：2001-07-17

申请号：US09577252

申请日：2000-05-19

申请人： Makoto Iida ,  Masaro Tamatsuka ,  Masanori Kimura ,  Shozo Muraoka

发明人： Makoto Iida ,  Masaro Tamatsuka ,  Masanori Kimura ,  Shozo Muraoka

IPC分类号： C30B1504

CPC分类号： C30B29/06 ,  C30B15/203 ,  Y10S117/917

摘要： There is disclosed a method for producing a silicon single crystal wafer wherein a silicon single crystal is grown in accordance with the CZ method with doping nitrogen in an N-region in a defect distribution chart which shows a defect distribution in which the horizontal axis represents a radial distance D (mm) from the center of the crystal and the vertical axis represent a value of F/G (mm2/° C.·min), where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient(° C./mm) along the pulling direction within a temperature range of the melting point of silicon to 1400° C. There can be provided a method of producing a silicon single crystal wafer consisting of N-region where neither V-rich region nor I-rich region is present in the entire surface of the crystal by CZ method, under the condition that can be controlled easily in a wide range, in high yield, and in high productivity.

摘要翻译： 公开了一种用于制造硅单晶晶片的方法，其中在缺陷分布图中，根据CZ方法在N区域中掺杂氮，生长硅单晶，其示出了水平轴表示的缺陷分布 距离晶体中心的径向距离D（mm）和纵轴表示F / G（mm2 /℃·min）的值，其中F是单晶的拉伸速率（mm / min），以及 G是在硅的熔点至1400℃的温度范围内沿拉伸方向的平均晶体内温度梯度（℃/ mm）。可以提供一种制造硅单晶晶片的方法，该硅单晶晶片由 通过CZ法在可以容易地在大范围，高收率，高生产率下容易地控制的条件下，通过CZ法在晶体的整个表面中不存在富V区和富I区的N区。

公开(公告)号：US07326658B2

公开(公告)日：2008-02-05

申请号：US10333771

申请日：2002-05-22

申请人： Makoto Iida ,  Masaro Tamatsuka

发明人： Makoto Iida ,  Masaro Tamatsuka

IPC分类号： H01L21/324 ,  H01L21/477 ,  H01L21/42 ,  H01L21/26

CPC分类号： H01L21/324 ,  H01L21/3225

摘要： The present invention provides a method for producing a nitrogen-doped annealed wafer, wherein before a wafer sliced from a silicon single crystal doped with at least nitrogen and polished is subjected to a high temperature heat treatment at 1100° C. to 1350° C. in an atmosphere of argon, hydrogen or a mixed gas thereof, a step of maintaining the wafer at a temperature lower than the treatment temperature of the high temperature heat treatment is conducted to allow growth of oxygen precipitation nuclei having such a size that the nuclei should be annihilated by the high temperature heat treatment to such a size that the nuclei should not be annihilated by the high temperature heat treatment, and then the high temperature heat treatment is performed. Thus, there are provided a nitrogen-doped annealed wafer with reducing variation of the BMD density after the annealing among silicon single crystal wafers sliced from various positions of the silicon single crystal without being affected by concentration of nitrogen doped in a silicon single crystal and a method for producing the same.

摘要翻译： 本发明提供了一种制造氮掺杂退火晶片的方法，其中在从掺杂有至少氮并且抛光的硅单晶切片的晶片在1100℃至1350℃进行高温热处理之前。 在氩气，氢气或其混合气体的气氛中，进行将晶片维持在低于高温热处理的处理温度的温度的步骤，以允许具有如下尺寸的氧沉淀核的生长：核应该 通过高温热处理而被消除，使得不能通过高温热处理来消除核的尺寸，然后进行高温热处理。 因此，提供了氮掺杂退火晶片，其在硅单晶的各个位置切片的硅单晶晶片退火之后具有降低的BMD密度的变化，而不受硅单晶中掺杂的氮的浓度的影响， 其制造方法

公开(公告)号：US06299982B1

公开(公告)日：2001-10-09

申请号：US09313856

申请日：1999-05-18

申请人： Masaro Tamatsuka ,  Akihiro Kimura ,  Katsuhiko Miki ,  Makoto Iida

发明人： Masaro Tamatsuka ,  Akihiro Kimura ,  Katsuhiko Miki ,  Makoto Iida

IPC分类号： C03B1529

CPC分类号： C30B29/06 ,  C30B15/206 ,  C30B33/00

摘要： There is disclosed a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, wherein a size of grown-in defects in the silicon single crystal wafer is 70 nm or less, a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, the silicon single crystal ingot is grown with controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and a method for producing a silicon single crystal wafer wherein a silicon single crystal ingot is grown with doping nitrogen and controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and is then processed to provide a silicon single crystal wafer. The silicon single crystal wafer for device wherein growth of the crystal defects is suppressed can be produced by CZ method in high productivity.

摘要翻译： 公开了通过用掺杂氮处理通过Czochralski法生长的硅单晶锭制造的硅单晶晶片，其中硅单晶晶片中的长期缺陷的尺寸为70nm以下，制造的硅单晶晶片 通过处理通过掺杂氮气的切克劳斯基法生长的硅单晶锭，生长硅单晶锭，控制冷却速率为1150℃至1080℃，为2.3℃/分钟以上， 制造硅单晶晶片，其中使用掺杂氮气生长硅单晶锭，并将冷却速率控制在1150至1080℃至2.3℃/分钟以上，然后进行处理以提供硅单晶 晶圆。 可以通过CZ法以高生产率制造晶体缺陷生长被抑制的器件用硅单晶晶片。

公开(公告)号：US06197109B1

公开(公告)日：2001-03-06

申请号：US09329615

申请日：1999-06-10

申请人： Makoto Iida ,  Masaro Tamatsuka ,  Wataru Kusaki ,  Masanori Kimura ,  Shozo Muraoka

发明人： Makoto Iida ,  Masaro Tamatsuka ,  Wataru Kusaki ,  Masanori Kimura ,  Shozo Muraoka

IPC分类号： C30B1504

CPC分类号： C30B29/06 ,  C30B15/203

摘要： There is disclosed a method for producing a silicon single crystal by growing the silicon single crystal by the Czochralski method, characterized in that the crystal is pulled at a pulling rate [mm/min] within a range of from V1 to V1+0.062×G while the crystal is doped with nitrogen during the growing, where G [K/mm] represents an average temperature gradient along the crystal growing direction, which is for a temperature range of from the melting point of silicon to 1400° C., and provided in an apparatus used for the crystal growing, and V1 [mm/min] represents a pulling rate at which an OSF ring disappears at the center of the crystal when the crystal is pulled by gradually decreasing the pulling rate. The method of the present invention can produce silicon single crystal wafers exhibiting an extremely low defect density over the entire plane of the crystal, in particular, with no small pits, and having an excellent oxide dielectric breakdown voltage, based on the CZ method under widely and easily controllable production conditions at a high production rate and high productivity.

摘要翻译： 公开了通过使用Czochralski法生长硅单晶来制造单晶的方法，其特征在于，以V1至V1 + 0.062×G的范围内的拉伸速度[mm / min]拉伸晶体，同时 晶体在生长期间掺杂有氮，其中G [K / mm]表示沿着晶体生长方向的平均温度梯度，其处于从硅熔点至1400℃的温度范围内，并且设置在 用于晶体生长的装置，V1 [mm / min]表示当通过逐渐降低拉伸速率拉动晶体时OSF环在晶体的中心消失的拉伸速率。 本发明的方法可以在广泛的CZ方法的基础上生产出在整个晶体平面上显示出非常低的缺陷密度的硅单晶晶片，特别是没有小凹坑，并且具有优异的氧化物介电击穿电压 并且以高生产率和高生产率容易控制生产条件。

公开(公告)号：US06077343A

公开(公告)日：2000-06-20

申请号：US318055

申请日：1999-05-25

申请人： Makoto Iida ,  Masaro Tamatsuka ,  Masanori Kimura ,  Shozo Muraoka

发明人： Makoto Iida ,  Masaro Tamatsuka ,  Masanori Kimura ,  Shozo Muraoka

IPC分类号： C30B15/02 ,  C30B15/00 ,  C20B25/02

CPC分类号： C30B29/06 ,  C30B15/203 ,  Y10S117/917

摘要： There is disclosed a method for producing a silicon single crystal wafer wherein a silicon single crystal is grown in accordance with the CZ method with doping nitrogen in an N-region in a defect distribution chart which shows a defect distribution in which the horizontal axis represents a radial distance D (mm) from the center of the crystal and the vertical axis represent a value of F/G (mm.sup.2 /.degree. C..multidot.min), where F is a pulling rate (mm/min) of the single crystal, and G is an average intra-crystal temperature gradient (.degree. C./mm) along the pulling direction within a temperature range of the melting point of silicon to 1400.degree. C. There can be provided a method of producing a silicon single crystal wafer consisting of N-region where neither V-rich region nor I-rich region is present in the entire surface of the crystal by CZ method, under the condition that can be controlled easily in a wide range, in high yield, and in high productivity.

摘要翻译： 公开了一种用于制造硅单晶晶片的方法，其中在缺陷分布图中，根据CZ方法在N区域中掺杂氮，生长硅单晶，其示出了水平轴表示的缺陷分布 从晶体中心的径向距离D（mm）和纵轴表示F / G（mm 2 /℃×min）的值，其中F是单晶的拉伸速率（mm / min），G 是在硅的熔点至1400℃的温度范围内沿拉伸方向的平均晶体内温度梯度（DEG C./mm）。可以提供一种由N形成的硅单晶晶片的制造方法 在通过CZ法在晶体的整个表面中不存在富V区和富I区的条件下，可以在宽范围，高收率，高生产率下容易地控制的条件下进行。

公开(公告)号：US08308864B2

公开(公告)日：2012-11-13

申请号：US13143859

申请日：2009-11-27

申请人： Makoto Iida ,  Kazuo Matsuzawa

发明人： Makoto Iida ,  Kazuo Matsuzawa

IPC分类号： C30B15/00

CPC分类号： C30B15/14 ,  C30B15/20 ,  C30B29/06

摘要： The present invention is a single-crystal manufacturing method based on the Czochralski method, comprising at least the steps of: producing a melt by heating and melting a crystalline raw material in a crucible with a heater; maturing the melt by keeping the melt at a high temperature; growing a single crystal after dipping a seed crystal into the matured melt, wherein the heater and the crucible are relatively moved up and down in the step of maturing. As a result, there is provided a single-crystal manufacturing method that enables the generation of dislocation to be effectively suppressed and a high quality single crystal to be manufactured at good yield, particularly in case of pulling the single crystal having a large diameter, in manufacture of the single crystal.

摘要翻译： 本发明是一种基于切克劳斯基法的单晶制造方法，其至少包括以下步骤：通过加热熔融坩埚中的结晶原料来制造熔体; 通过将熔体保持在高温下使熔体成熟; 在将晶种浸入成熟熔体中之后生长单晶，其中加热器和坩埚在成熟步骤中相对上下移动。 结果，提供了能够有效地抑制位错产生的单晶制造方法，以及以高产率制造的高品质单晶，特别是在将具有大直径的单晶拉出的情况下， 制造单晶。

公开(公告)号：US07790267B2

公开(公告)日：2010-09-07

申请号：US11795388

申请日：2006-01-30

申请人： Yasuhito Kinpara ,  Makoto Iida

发明人： Yasuhito Kinpara ,  Makoto Iida

IPC分类号： B32B15/00

CPC分类号： H05K3/0047 ,  H05K2201/0133 ,  H05K2201/0209 ,  H05K2203/0214 ,  Y10T428/24917 ,  Y10T428/249951 ,  Y10T428/249953 ,  Y10T428/31938

摘要： A workpiece boring/cutting operation aiding plate material comprising a rubber-containing styrene resin composition and an inorganic filler, wherein these are compounded in a weight ratio of 80:20 to 40:60; and a molding making use of the same.

摘要翻译： 一种包含含橡胶的苯乙烯树脂组合物和无机填料的工件镗/切割操作辅助板材料，其中以80:20至40:60的重量比混合; 和使用其的模制品。

公开(公告)号：US20100031869A1

公开(公告)日：2010-02-11

申请号：US12308122

申请日：2007-05-28

申请人： Makoto Iida ,  Nobuaki Mitamura ,  Takahiro Yanagimachi

发明人： Makoto Iida ,  Nobuaki Mitamura ,  Takahiro Yanagimachi

IPC分类号： C30B15/20

CPC分类号： C30B15/203 ,  C30B29/06 ,  C30B35/00

摘要： The present invention provides a system for manufacturing a silicon single crystal which designs manufacturing conditions under which a value of F/G is controlled to fall within a predetermined range in order that a crystal quality of a silicon single crystal manufactured by a pulling apparatus using the CZ method falls within a target standard, including, automatically, at least: means 1 tentatively designing manufacturing conditions of a silicon single crystal in a subsequent batch from a crystal quality result of a silicon single crystal in a previous batch; means 2 calculating a correction amount from an amount of change in F and/or G due to constituent members of the pulling apparatus in the subsequent batch; means 3 calculating a correction amount from an amount of change in F and/or G due to a manufacturing process in the subsequent batch; and means 4 adding the correction amount by the means 2 and/or the means 3 to the manufacturing conditions by the means 1 to calculate manufacturing conditions in the subsequent batch. As a result, there can be provided the system for manufacturing a silicon single crystal that can more assuredly obtain a silicon single crystal having a desired crystal quality and improve productivity or a yield and a method for manufacturing a silicon single crystal using this system.

摘要翻译： 本发明提供了一种制造硅单晶的系统，其设计了将F / G的值控制在规定范围内的制造条件，以使由使用 CZ方法属于目标标准，至少包括：1，从上一批硅晶单晶的晶体质量结果出发，初步设计后续批次中硅单晶的制造条件; 装置2根据后续批次中的牵引装置的构成部件从F和/或G的变化量计算校正量; 意味着3根据后续批次中的制造过程从F和/或G的变化量计算校正量; 以及通过装置1将装置2和/或装置3的校正量加到制造条件的装置4，以计算后续批次中的制造条件。 结果，可以提供一种制造硅单晶的系统，其可以更可靠地获得具有期望的晶体质量的硅单晶并且提高生产率或产率，以及使用该系统制造单晶硅的方法。