摘要:
In certain aspects, disclosed methods include combining reference light reflected from a reference surface with test light reflected from a test surface to form combined light, the test and reference light being derived from a common source, sinusoidally varying a phase between the test light and reference light, where the sinusoidal phase variation has an amplitude u, recording at least one interference signal related to changes in an intensity of the combined light in response to the sinusoidal variation of the phase, determining information related to the phase using a phase shifting algorithm that has a sensitivity that varies as a function of the sinusoidal phase shift amplitude, where the sensitivity of the algorithm at 2 u is 10% or less of the sensitivity of the algorithm at u.
摘要:
In general, in one aspect, the invention features apparatus that includes a broadband scanning interferometry system including interferometer optics for combining test light from a test object with reference light from a reference object to form an interference pattern on a detector, wherein the test and reference light are derived from a common light source. The interferometry system further includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light from the common source to the detector and a detector system including the detector for recording the interference pattern for each of a series of OPD increments, wherein the frequency of each OPD increment defines a frame rate. The interferometer optics are configured to produce at least two monitor interferometry signals each indicative of changes in the OPD as the OPD is scanned, wherein the detector system is further configured to record the monitor interferometry signals. The apparatus also includes an electronic processor electronically coupled to the detection system and scanning stage and configured to determine information about the OPD increments with sensitivity to perturbations to the OPD increments at frequencies greater than the frame rate.
摘要:
System for monitoring a position of one or more optical elements in a projection objective (PO) include a plurality of sensors each configured to receive input light and to form output light, each sensor including a first sensor optic and a second sensor optic, the first sensor optic of at least one of the sensors being affixed to a first PO optical element and the second sensor optic of the at least one sensor being affixed to a support element that positions the first PO optical element within the PO, the first and second sensor optics being configured introduce a first optical path length difference (OPD) between two components of the input light to form the output light, the first OPD being related to the position of the first PO optical element with respect to the support element. The systems also include a plurality of detectors configured to detect the output light from the sensors, a plurality of optical fibers configured to direct the input light to the sensors and to direct the output light from the sensors to the detectors, and an electronic controller in communication with the plurality of detectors, the electronic controller being configured to determine information about the position of the first PO optical element relative to the support element based on the detected output light from the at least one sensor.
摘要:
In general, in one aspect, the invention features a system including a light source, a plurality of interferometers configured to receive light from the light source and to form output light, each interferometer including a first optic and a second optic, the first and second optics configured to be mounted on a first object and a second object, respectively, where first object is moveable with respect to the second object, the first and second optics being configured introduce an optical path length difference (OPD) between two components of the light to form the output light, the OPD being related to the position of the first optic with respect to the second optic. The system further includes a plurality of detectors configured to detect the output light from the interferometers, a modulation apparatus in the optical path between the light source and the detectors, the modulation apparatus being configured to vary an OPD between the two components of the light over a range including OPDs for which a net OPD of the output light from at least one of the interferometers at the detectors is zero, a plurality of waveguides configured to direct light between the interferometers, the modulation apparatus, and the detectors, and an electronic controller in communication with the detectors, the electronic controller being configured to determine information about a position of the first object based on the detected output light from at least one of the interferometers.
摘要:
Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
摘要:
A conveyor system includes a plurality of produce clamps that rotate around a clamp conveyor assembly. On a field side of the conveyor system, a synchronous conveyor belt provides a support for the butt or stem of a plant placed thereon, in between clamps. As the clamp conveyor turns away from the field side, the clamps close and fully support the plants. The conveyor assembly carries the clamps, and the clamped plants, through a series of coring and trimming blades. The clamps then open to release the cored and trimmed product onto a collection conveyor, and the clamps continue to the field side to receive further plants for processing.
摘要:
The invention is a harvester particularly suited for harvesting baby greens. The harvester generally comprises a chassis with wheels that travel in the furrows between raised beds, a sorting belt assembly, and an articulated connection to a cutting assembly on a floating header. The floating header rides on the top surface of a raised bed and is articulated so that the floating header can move independently of the chassis to follow the contours of the top of the raised bed so that the cutting assembly can cut at a uniform height. The sorting belt assembly includes a series of belts for collecting and sorting the cut baby greens at the easiest and most effective time to do so, immediately after the baby greens are cut and before the baby greens are clumped in storage bins or in other storage containers. The invention further includes a method of using the harvester of the invention in which the forward momentum of the harvester and the density of the crop are used to assist the cut product onto the collection belt.
摘要:
Apparatus and methods particularly suitable for use in electro-optical metrology and other applications to measure and monitor the refractive index of a gas in a measurement path and/or the change in optical path length of the measurement path due to the gas while the refractive index of the gas may be fluctuating due to turbulence or the like and/or the physical length of the measuring path may be changing. More specifically, the invention employs electronic frequency processing to provide measurements of dispersion of the refractive index, the dispersion being substantially proportional to the density of the gas, and/or measurements of dispersion of the optical path length, the dispersion of the optical path length being related to the dispersion of the refractive index and the physical length of the measurement path. The refractive index of the gas and/or the optical path length effects of the gas are subsequently computed from the measured dispersion of the refractive index and/or the measured dispersion of the optical path length, respectively. The information generated by the inventive apparatus is particularly suitable for use in interferometric distance measuring instruments (DMI) to compensate for errors related to refractive index of gas in a measurement path brought about by environmental effects and turbulence induced by rapid stage slew rates.
摘要:
A two-beam interferometer illuminates a sample surface with light at grazing incidence angles for the purpose of analyzing a surface characteristic such as surface topography. The interferometer includes a diffractive-optic beam splitter, which separates an incoming light beam into measurement and reference beams and a diffractive-optic beam combiner, which produces an output beam by interfering portions of the reference beam with reflected portions of the measurement beam. Those portions of the reference wavefront and the measurement wavefront that interfere originate from substantially the same portion of the initial illumination wavefront.
摘要:
A conveyor system includes a plurality of produce clamps that rotate around a clamp conveyor assembly. On a field side of the conveyor system, a synchronous conveyor belt provides a support for the butt or stem of a plant placed thereon, in between clamps. As the clamp conveyor turns away from the field side, the clamps close and fully support the plants. The conveyor assembly carries the clamps, and the clamped plants, through a series of coring and trimming blades. The clamps then open to release the cored and trimmed product onto a collection conveyor, and the clamps continue to the field side to receive further plants for processing.