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公开(公告)号：US20120274184A1
公开(公告)日：2012-11-01
申请号：US12456245
申请日：2009-06-11
IPC分类号： H01L41/047 , H01L41/22
CPC分类号： H03H9/585 , H03H9/0207 , H03H9/02228 , H03H9/178 , Y10T29/42
摘要： A piezoelectric resonator device comprises five layers. A first layer and a fifth layer include one or more metal electrodes. A second layer and a fourth layer comprise a piezoelectric material. A third layer comprises a metal layer. In a first area of the first layer the first layer metal electrodes include a first layer periodic structure along one dimension comprising one of the one or more first layer metal electrodes and a space with no first layer metal electrodes. In a second area of the fifth layer the fifth layer metal electrodes include a fifth layer periodic structure along the one dimension comprising one of the one or more fifth layer metal electrodes and a space with no fifth layer metal electrodes. The first layer periodic structure and the fifth layer periodic structure are aligned so that the one of the one or more fifth layer metal electrodes are centered under the space with no first layer metal electrodes and the one of the one or more first layer metal electrodes are centered over the space with no fifth layer metal electrodes or are aligned so that the one of the one or more fifth layer metal electrodes are centered under the first layer metal electrodes.
摘要翻译： 压电谐振器装置包括五层。 第一层和第五层包括一个或多个金属电极。 第二层和第四层包括压电材料。 第三层包括金属层。 在第一层的第一区域中，第一层金属电极包括沿着一个维度的第一层周期性结构，其包括一个或多个第一层金属电极之一和没有第一层金属电极的空间。 在第五层的第二区域中，第五层金属电极包括沿着一个维度的第五层周期性结构，其包括一个或多个第五层金属电极之一和没有第五层金属电极的空间。 第一层周期结构和第五层周期结构被排列成使得一个或多个第五层金属电极中的一个在空间下方居中，没有第一层金属电极，并且一个或多个第一层金属电极中的一个 在没有第五层金属电极的空间的中心，或者被排列成使得一个或多个第五层金属电极中的一个位于第一层金属电极下方的中心。
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公开(公告)号：US08513863B2
公开(公告)日：2013-08-20
申请号：US12456245
申请日：2009-06-11
IPC分类号： H01L41/08
CPC分类号： H03H9/585 , H03H9/0207 , H03H9/02228 , H03H9/178 , Y10T29/42
摘要： A piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top layer and a second one of the electrodes in the bottom layer are coupled to a second contact.
摘要翻译： 压电谐振器装置包括：具有图案化结构的顶部电极层，与顶层相邻的顶部压电层，与顶部层相对的顶部压电层相邻的中间金属层，与中间层相邻的底部压电层相对 顶部压电层和具有图案化结构并且与中间层相对的底部压电层相邻的底部电极层。 顶层包括与第二多个电极相互数位化的第一多个电极。 顶层中的第一电极和底层中的电极中的第一电极耦合到第一接触，并且顶层中的电极中的第二电极和底层中的第二电极 耦合到第二触点。
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公开(公告)号：US08319584B2
公开(公告)日：2012-11-27
申请号：US12850556
申请日：2010-08-04
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US20090108959A1
公开(公告)日：2009-04-30
申请号：US12350859
申请日：2009-01-08
IPC分类号： H03H9/15
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US20110133856A1
公开(公告)日：2011-06-09
申请号：US12850556
申请日：2010-08-04
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US07492241B2
公开(公告)日：2009-02-17
申请号：US11145552
申请日：2005-06-02
IPC分类号： H03H9/00 , H03H9/54 , H01L41/08 , H01L41/053
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US20120274647A1
公开(公告)日：2012-11-01
申请号：US13094687
申请日：2011-04-26
申请人： Je-Hsiung Lan , Sang-June Park , Jonghae Kim , Evgeni Gousev , Matthew Nowak , Philip J. Stephanou , Justin Black , Kurt Petersen , Srinivasan Ganapathi
发明人： Je-Hsiung Lan , Sang-June Park , Jonghae Kim , Evgeni Gousev , Matthew Nowak , Philip J. Stephanou , Justin Black , Kurt Petersen , Srinivasan Ganapathi
IPC分类号： H01L41/053 , G09G5/39 , H01L41/22 , G06T1/60
CPC分类号： H03H3/0072 , H03H9/2447 , Y10T29/42
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a sacrificial layer is deposited on an insulating substrate. A lower electrode layer is formed proximate the sacrificial layer. A piezoelectric layer is deposited on the lower electrode layer. An upper electrode layer is formed on the piezoelectric layer. At least a portion of the sacrificial layer is removed to define a cavity such that at least a portion of the lower electrode layer is spaced apart from the insulating substrate.
摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 在一个方面，牺牲层沉积在绝缘衬底上。 在牺牲层附近形成下电极层。 压电层沉积在下电极层上。 在压电层上形成上电极层。 去除牺牲层的至少一部分以限定空腔，使得下电极层的至少一部分与绝缘基板间隔开。
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公开(公告)号：US07915974B2
公开(公告)日：2011-03-29
申请号：US12350847
申请日：2009-01-08
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US07791432B2
公开(公告)日：2010-09-07
申请号：US11444913
申请日：2006-05-31
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US20090144963A1
公开(公告)日：2009-06-11
申请号：US12350847
申请日：2009-01-08
IPC分类号： H04R31/00
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
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