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    Planar resonant tunneling sensor and method of fabricating and using the same
    1.
    发明授权
    Planar resonant tunneling sensor and method of fabricating and using the same 失效
    平面谐振隧道传感器及其制造和使用方法

    公开(公告)号：US07114378B1

    公开(公告)日：2006-10-03

    申请号：US11107996

    申请日：2005-04-14

    申请人： Philip W. Barth ,  Derek Stein ,  Curt Flory ,  Rick Pittaro ,  Daniel Roitman

    发明人： Philip W. Barth ,  Derek Stein ,  Curt Flory ,  Rick Pittaro ,  Daniel Roitman

    IPC分类号： G01B5/28

    CPC分类号： G01Q30/02 ,  G01N15/1031

    摘要： Planar resonant tunneling sensor devices and methods for using the same are provided. The subject devices include first and second electrodes present on a surface of a planar substrate and separated from each other by a nanodimensioned gap. The devices also include a first member for holding a sample, and a second member for moving the first member and planar resonant tunneling electrode relative to each other. Also provided are methods of fabricating such a device and methods of using such a device for improved detection and characterization of a sample.

    摘要翻译： 提供了平面谐振隧道传感器装置及其使用方法。 本装置包括存在于平面基板的表面上的第一和第二电极，并通过纳米尺寸的间隙彼此分离。 这些装置还包括用于保持样品的第一构件和用于相对于彼此移动第一构件和平面谐振隧穿电极的第二构件。 还提供了制造这种装置的方法和使用这种装置来改进样品的检测和表征的方法。

    PLANAR RESONANT TUNNELING SENSOR AND METHOD OF FABRICATING AND USING THE SAME
    2.
    发明申请
    PLANAR RESONANT TUNNELING SENSOR AND METHOD OF FABRICATING AND USING THE SAME 失效
    平面谐振隧道传感器及其制造和使用方法

    公开(公告)号：US20060230818A1

    公开(公告)日：2006-10-19

    申请号：US11107996

    申请日：2005-04-14

    申请人： Phillip Barth ,  Derek Stein ,  Curt Flory ,  Rick Pittaro ,  Daniel Roitman

    发明人： Phillip Barth ,  Derek Stein ,  Curt Flory ,  Rick Pittaro ,  Daniel Roitman

    IPC分类号： H01L31/072

    CPC分类号： G01Q30/02 ,  G01N15/1031

    摘要： Planar resonant tunneling sensor devices and methods for using the same are provided. The subject devices include first and second electrodes present on a surface of a planar substrate and separated from each other by a nanodimensioned gap. The devices also include a first member for holding a sample, and a second member for moving the first member and planar resonant tunneling electrode relative to each other. Also provided are methods of fabricating such a device and methods of using such a device for improved detection and characterization of a sample.

    摘要翻译： 提供了平面谐振隧道传感器装置及其使用方法。 本装置包括存在于平面基板表面上的第一和第二电极，并通过纳米尺寸的间隙彼此分离。 这些装置还包括用于保持样品的第一构件和用于相对于彼此移动第一构件和平面谐振隧穿电极的第二构件。 还提供了制造这种装置的方法和使用这种装置来改进样品的检测和表征的方法。

    Pulsed ion beam control of solid state features
    6.
    发明申请
    Pulsed ion beam control of solid state features 有权
    脉冲离子束控制固态特征

    公开(公告)号：US20050006224A1

    公开(公告)日：2005-01-13

    申请号：US10695381

    申请日：2003-10-28

    申请人： Jene Golovchenko ,  Derek Stein ,  Jiali Li

    发明人： Jene Golovchenko ,  Derek Stein ,  Jiali Li

    IPC分类号： B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  B81C99/00 ,  G01N27/28 ,  G01N27/416 ,  H01L21/66 ,  C23C14/00 ,  C23C14/32

    CPC分类号： B81C1/00626 ,  B01L3/5027 ,  B24B37/013 ,  B81C99/004 ,  B81C2201/0143 ,  G01N33/48721 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

    摘要： For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

    摘要翻译： 为了控制固态结构特征的物理尺寸，提供具有表面并具有结构特征的固态结构。 该结构暴露于具有第一曝光占空比的第一周期性通量的离子，其特征在于第一占空比的第一离子曝光持续时间和第一非曝光持续时间，然后在具有第二曝光占空比的第二周期通量的离子 其特征在于，对于所述第二占空比，所述第二离子曝光持续时间和第二非曝光持续时间大于所述第一非曝光持续时间，以使所述结构的材料在所述结构的结构体内包括所述结构表面在所述结构特征中的响应 到离子通量暴露基本上通过将结构的材料局部添加到特征来改变特征的至少一个物理尺寸。

    ION BEAM SCULPTING OF MULTIPLE DISTINCT MATERIALS
    10.
    发明申请
    ION BEAM SCULPTING OF MULTIPLE DISTINCT MATERIALS 有权
    多晶异质材料的离子束雕刻

    公开(公告)号：US20070172386A1

    公开(公告)日：2007-07-26

    申请号：US10367075

    申请日：2003-02-14

    申请人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    发明人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    IPC分类号： B01L3/00

    CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

    摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

    摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。