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14 条记录 (耗时 0.022 秒)

    Pulsed ion beam control of solid state features
    2.
    发明申请
    Pulsed ion beam control of solid state features 有权
    脉冲离子束控制固态特征

    公开(公告)号：US20050006224A1

    公开(公告)日：2005-01-13

    申请号：US10695381

    申请日：2003-10-28

    申请人： Jene Golovchenko ,  Derek Stein ,  Jiali Li

    发明人： Jene Golovchenko ,  Derek Stein ,  Jiali Li

    IPC分类号： B01L3/00 ,  B81B1/00 ,  B81C1/00 ,  B81C99/00 ,  G01N27/28 ,  G01N27/416 ,  H01L21/66 ,  C23C14/00 ,  C23C14/32

    CPC分类号： B81C1/00626 ,  B01L3/5027 ,  B24B37/013 ,  B81C99/004 ,  B81C2201/0143 ,  G01N33/48721 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

    摘要： For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

    摘要翻译： 为了控制固态结构特征的物理尺寸，提供具有表面并具有结构特征的固态结构。 该结构暴露于具有第一曝光占空比的第一周期性通量的离子，其特征在于第一占空比的第一离子曝光持续时间和第一非曝光持续时间，然后在具有第二曝光占空比的第二周期通量的离子 其特征在于，对于所述第二占空比，所述第二离子曝光持续时间和第二非曝光持续时间大于所述第一非曝光持续时间，以使所述结构的材料在所述结构的结构体内包括所述结构表面在所述结构特征中的响应 到离子通量暴露基本上通过将结构的材料局部添加到特征来改变特征的至少一个物理尺寸。

    ION BEAM SCULPTING OF MULTIPLE DISTINCT MATERIALS
    3.
    发明申请
    ION BEAM SCULPTING OF MULTIPLE DISTINCT MATERIALS 有权
    多晶异质材料的离子束雕刻

    公开(公告)号：US20070172386A1

    公开(公告)日：2007-07-26

    申请号：US10367075

    申请日：2003-02-14

    申请人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    发明人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    IPC分类号： B01L3/00

    CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

    摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

    摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

    Solid state molecular probe device
    4.
    发明授权
    Solid state molecular probe device 有权
    固态分子探针装置

    公开(公告)号：US07258838B2

    公开(公告)日：2007-08-21

    申请号：US10367075

    申请日：2003-02-14

    申请人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    发明人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    IPC分类号： H01L29/00 ,  H01L47/00 ,  G01N15/06 ,  G01N33/00 ,  G01N33/48

    CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

    摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

    摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

    Suspended carbon nanotube field effect transistor
    6.
    发明申请
    Suspended carbon nanotube field effect transistor 有权
    悬浮碳纳米管场效应晶体管

    公开(公告)号：US20060006377A1

    公开(公告)日：2006-01-12

    申请号：US11145650

    申请日：2005-06-06

    申请人： Jene Golovchenko ,  Haibing Peng

    发明人： Jene Golovchenko ,  Haibing Peng

    IPC分类号： H01L29/06

    CPC分类号： B82Y10/00 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/66742 ,  H01L29/78684 ,  H01L51/0048 ,  H01L51/0512 ,  H01L51/0545

    摘要： The invention provides a carbon nanotube field effect transistor including a nanotube having a length suspended between source and drain electrodes. A gate dielectric material coaxially coats the suspended nanotube length and at least a portion of the source and drain electrodes. A gate metal layer coaxially coats the gate dielectric material along the suspended nanotube length and overlaps a portion of the source and drain electrodes, and is separated from those electrode portions by the gate dielectric material. The nanotube field effect transistor is fabricated by coating substantially the full suspended nanotube length and a portion of the source and drain electrodes with a gate dielectric material. Then the gate dielectric material along the suspended nanotube length and at least a portion of the gate dielectric material on the source and drain electrodes are coated with a gate metal layer.

    摘要翻译： 本发明提供一种碳纳米管场效应晶体管，其包括长度悬置在源极和漏极之间的纳米管。 栅介电材料同时涂覆悬浮的纳米管长度和至少一部分源极和漏极。 栅极金属层沿着悬挂的纳米管长度同轴地涂覆栅极电介质材料，并与源极和漏极的一部分重叠，并通过栅极电介质材料与那些电极部分分离。 纳米管场效应晶体管通过用栅极电介质材料基本上涂覆完全悬浮的纳米管长度和一部分源极和漏极来制造。 然后沿着悬浮的纳米管长度的栅极电介质材料和源极和漏极上的栅极电介质材料的至少一部分涂覆有栅极金属层。

    Material deposition techniques for control of solid state aperture surface properties
    7.
    发明申请
    Material deposition techniques for control of solid state aperture surface properties 有权
    用于控制固态孔径表面性质的材料沉积技术

    公开(公告)号：US20050241933A1

    公开(公告)日：2005-11-03

    申请号：US11015349

    申请日：2004-12-17

    申请人： Daniel Branton ,  Roy Gordon ,  Peng Chen ,  Toshiyuki Mitsui ,  Damon Farmer ,  Jene Golovchenko

    发明人： Daniel Branton ,  Roy Gordon ,  Peng Chen ,  Toshiyuki Mitsui ,  Damon Farmer ,  Jene Golovchenko

    IPC分类号： C23C14/32

    CPC分类号： G01N33/48721 ,  B82Y15/00

    摘要： The invention provides a method for molecular analysis. In the method, sidewalls are formed extending through a structure between two structure surfaces, to define an aperture. A layer of material is deposited on the aperture sidewalls and the two structure surfaces. The aperture with the deposited material layer is then configured in a liquid solution with a gradient in a chemical potential, between the two structure surfaces defining the aperture, that is sufficient to cause molecular translocation through the aperture.

    摘要翻译： 本发明提供了一种分子分析方法。 在该方法中，形成延伸穿过两个结构表面之间的结构的侧壁，以限定孔。 一层材料沉积在孔侧壁和两个结构表面上。 然后将具有沉积材料层的孔配置在具有化学势的梯度的液体溶液中，限定孔的两个结构表面之间，足以使分子易位穿过孔。

    Controlled Fabrication of Nanopores in Nanometric Solid State Materials
    8.
    发明申请
    Controlled Fabrication of Nanopores in Nanometric Solid State Materials 有权
    纳米固体材料中纳米孔的控制制备

    公开(公告)号：US20140079936A1

    公开(公告)日：2014-03-20

    申请号：US14004743

    申请日：2012-03-14

    申请人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

    发明人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

    IPC分类号： B81C1/00

    CPC分类号： B81B1/002 ,  B81B2201/0214 ,  B81B2203/0127 ,  B81B2207/056 ,  B81C1/00087 ,  G01N33/48721

    摘要： In a method of forming a nanopore in a nanometric material, a nanopore nucleation site is formed at a location that is interior to lateral edges of the nanometric material by directing a first energetic beam, selected from the group of ion beam and neutral atom beam, at the interior location for a first time duration that imposes a first beam dose which causes removal of no more than five interior atoms from the interior location to produce at the interior location a nanopore nucleation site having a plurality of edge atoms. A nanopore is then formed at the nanopore nucleation site by directing a second energetic beam, selected from the group consisting of electron beam, ion beam, and neutral atom beam, at the nanopore nucleation site with a beam energy that removes edge atoms at the nanopore nucleation site but does not remove bulk atoms from the nanometric material.

    摘要翻译： 在纳米孔内形成纳米孔的方法中，通过引导选自离子束和中性原子束组的第一能量束，在纳米材料的横向边缘内部的位置处形成纳米孔成核位点， 在内部位置处施加第一束剂量，其引起从内部位置移除不超过五个内部原子，以在内部位置产生具有多个边缘原子的纳米孔成核位点。 然后在纳米孔成核位置通过在纳米孔成核位置引入从由电子束，离子束和中性原子束组成的组中选择的第二能量束，以纳米孔成核位点形成纳米孔，该束能量去除纳米孔上的边缘原子 但不能从纳米材料中去除体原子。