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公开(公告)号：US20140144681A1
公开(公告)日：2014-05-29
申请号：US13686620
申请日：2012-11-27
发明人： Victor Louis Arockiaraj Pushparaj , Ravindra V. Shenoy , Jon Bradley Lasiter , Kwan-Yu Lai , Donald William Kidwell , Ana Rangelova Londergan
CPC分类号： H05K1/162 , B32B3/266 , B32B3/30 , B32B7/12 , C03C17/3435 , C03C17/3626 , C03C17/3639 , C03C17/3649 , C03C17/3655 , C03C17/3671 , C03C17/3697 , C23C16/045 , C23C16/34 , C23C16/45525 , C23C28/322 , C23C28/34 , H01L23/15 , H01L23/49822 , H01L23/49827 , H01L23/49894 , H01L28/75 , H01L28/91 , H01L2924/0002 , Y10T428/24322 , Y10T428/24545 , H01L2924/00
摘要： This disclosure provides systems, methods and apparatus for an adhesive metal nitride layer on glass. In one aspect, a glass substrate having a surface is provided. A via with a depth to width aspect ratio of 5 to 1 or greater extends at least partially through the glass substrate. An adhesive metal nitride layer is disposed on the surface of the glass substrate and on one or more interior surfaces of the via. The adhesive metal nitride layer includes at least one of titanium nitride and tantalum nitride.
摘要翻译： 本公开提供了用于玻璃上的粘合性金属氮化物层的系统，方法和装置。 一方面，提供具有表面的玻璃基板。 深度与宽度纵横比为5至1或更大的通孔至少部分延伸穿过玻璃基底。 粘合金属氮化物层设置在玻璃基板的表面上和通孔的一个或多个内表面上。 粘合性金属氮化物层包括氮化钛和氮化钽中的至少一种。
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公开(公告)号：US20160232858A1
公开(公告)日：2016-08-11
申请号：US14619991
申请日：2015-02-11
CPC分类号： G09G3/3466 , B81B3/00 , B81B3/0072 , B81B2201/047 , B81B2203/0163 , B81B2203/053 , C23C14/0042 , G02B5/0875 , G02B26/001 , G02B26/02
摘要： This disclosure provides devices, systems, and methods for improving creep resistance and mechanical strength of a MEMS display device. The MEMS display device can include a movable reflective structure connected and supported by a support structure. The movable reflective structure can include at least a transition metal layer sandwiched between two aluminum or aluminum alloy layers. The aluminum or aluminum alloy layers can be doped with the transition metal upon annealing. The transition metal layer between the aluminum or aluminum alloy layers can control the mechanical, optical, and electrical properties of the MEMS display device.
摘要翻译： 本公开提供了用于改善MEMS显示装置的抗蠕变性和机械强度的装置，系统和方法。 MEMS显示装置可以包括由支撑结构连接和支撑的可移动反射结构。 可移动反射结构可以包括夹在两个铝或铝合金层之间的至少一个过渡金属层。 铝或铝合金层可以在退火时掺杂过渡金属。 铝或铝合金层之间的过渡金属层可以控制MEMS显示装置的机械，光学和电学性质。
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公开(公告)号：US09190208B2
公开(公告)日：2015-11-17
申请号：US14523258
申请日：2014-10-24
发明人： Jon Bradley Lasiter , Ravindra V. Shenoy , Donald William Kidwell , Victor Louis Arockiaraj Pushparaj , Kwan-yu Lai , Ana Rangelova Londergan
IPC分类号： G06F3/044 , H01G4/06 , H01L23/498 , H01L27/12 , H01L49/02 , H01L23/15 , H01G4/008 , H01G4/30 , H05K1/03 , H05K1/11 , H05K1/18 , G02B26/00 , H01L23/00
CPC分类号： H01G4/06 , G02B26/001 , H01G4/008 , H01G4/30 , H01L23/15 , H01L23/49827 , H01L24/13 , H01L24/16 , H01L27/12 , H01L28/60 , H01L28/90 , H01L2224/131 , H01L2224/16225 , H01L2924/10253 , H01L2924/12041 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/15311 , H05K1/0306 , H05K1/115 , H05K1/182 , Y10T29/49124 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要： This disclosure provides systems, methods, and apparatus for metal-insulator-metal capacitors on glass substrates. In one aspect, an apparatus may include a glass substrate, with the glass substrate defining at least one via in the glass substrate. A first electrode layer may be disposed over surfaces of the glass substrate, including surfaces of the at least one via. A dielectric layer may be disposed on the first electrode layer. A second electrode layer may be disposed on the dielectric layer, with the dielectric layer electrically isolating the first electrode layer from the second electrode layer.
摘要翻译： 本公开提供了用于玻璃基板上的金属 - 绝缘体 - 金属电容器的系统，方法和装置。 一方面，装置可以包括玻璃基板，玻璃基板在玻璃基板中限定至少一个通孔。 第一电极层可以设置在玻璃基板的表面上，包括至少一个通孔的表面。 电介质层可以设置在第一电极层上。 第二电极层可以设置在电介质层上，其中电介质层将第一电极层与第二电极层电隔离。
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公开(公告)号：US20150041189A1
公开(公告)日：2015-02-12
申请号：US14523258
申请日：2014-10-24
发明人： Jon Bradley Lasiter , Ravindra V. Shenoy , Donald William Kidwell , Victor Louis Arockiaraj Pushparaj , Kwan-yu Lai , Ana Rangelova Londergan
CPC分类号： H01G4/06 , G02B26/001 , H01G4/008 , H01G4/30 , H01L23/15 , H01L23/49827 , H01L24/13 , H01L24/16 , H01L27/12 , H01L28/60 , H01L28/90 , H01L2224/131 , H01L2224/16225 , H01L2924/10253 , H01L2924/12041 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/15311 , H05K1/0306 , H05K1/115 , H05K1/182 , Y10T29/49124 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要： This disclosure provides systems, methods, and apparatus for metal-insulator-metal capacitors on glass substrates. In one aspect, an apparatus may include a glass substrate, with the glass substrate defining at least one via in the glass substrate. A first electrode layer may be disposed over surfaces of the glass substrate, including surfaces of the at least one via. A dielectric layer may be disposed on the first electrode layer. A second electrode layer may be disposed on the dielectric layer, with the dielectric layer electrically isolating the first electrode layer from the second electrode layer.
摘要翻译： 本公开提供了用于玻璃基板上的金属 - 绝缘体 - 金属电容器的系统，方法和装置。 一方面，装置可以包括玻璃基板，玻璃基板在玻璃基板中限定至少一个通孔。 第一电极层可以设置在玻璃基板的表面上，包括至少一个通孔的表面。 电介质层可以设置在第一电极层上。 第二电极层可以设置在电介质层上，其中电介质层将第一电极层与第二电极层电隔离。
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