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    Composite dilation mode resonators
    2.
    发明授权
    Composite dilation mode resonators 有权
    复合扩张模式谐振器

    公开(公告)号：US09331666B2

    公开(公告)日：2016-05-03

    申请号：US13657653

    申请日：2012-10-22

    Applicant: QUALCOMM MEMS Technologies, Inc.

    Inventor： Chengjie Zuo ,  Jonghae Kim ,  Changhan Hobie Yun ,  Sang-June Park ,  Philip Jason Stephanou ,  Chi Shun Lo ,  Robert Paul Mikulka ,  Mario Francisco Velez ,  Ravindra V. Shenoy ,  Matthew Michael Nowak

    IPC: H01L41/047 ,  H03H9/02 ,  H03H9/205 ,  H03H9/24

    CPC classification number: H03H9/02157 ,  H03H9/02574 ,  H03H9/205 ,  H03H9/2405 ,  H03H2009/02503 ,  H03H2009/02527 ,  H03H2009/241

    Abstract: This disclosure provides systems, methods and apparatus related to acoustic resonators that include composite transduction layers for enabling selective tuning of one or more acoustic or electromechanical properties. In one aspect, a resonator structure includes one or more first electrodes, one or more second electrodes, and a transduction layer arranged between the first and second electrodes. The transduction layer includes a plurality of constituent layers. In some implementations, the constituent layers include one or more first piezoelectric layers and one or more second piezoelectric layers. The transduction layer is configured to, responsive to signals provided to the first and second electrodes, provide at least a first mode of vibration of the transduction layer with a displacement component along the z axis and at least a second mode of vibration of the transduction layer with a displacement component along the plane of the x axis and they axis.

    Abstract translation: 本公开提供了与声谐振器相关的系统，方法和装置，其包括用于使得能够选择性地调谐一个或多个声学或机电特性的复合转导层。 一方面，谐振器结构包括一个或多个第一电极，一个或多个第二电极和布置在第一和第二电极之间的换能层。 换能层包括多个构成层。 在一些实施方式中，构成层包括一个或多个第一压电层和一个或多个第二压电层。 转导层被配置为响应于提供给第一和第二电极的信号，提供至少第一传感模式的振动，沿着z轴的位移分量和换能层的至少第二振动模式 具有沿着x轴的平面并且它们的轴线的位移分量。

    THROUGH SUBSTRATE VIA INDUCTORS
    3.
    发明申请
    THROUGH SUBSTRATE VIA INDUCTORS 审中-公开
    通过电感通过基板

    公开(公告)号：US20140104284A1

    公开(公告)日：2014-04-17

    申请号：US13653132

    申请日：2012-10-16

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

    Inventor： Ravindra V. Shenoy ,  Jitae Kim ,  Kwan-yu Lai ,  Jon Bradley Lasiter ,  Philip Jason Stephanou ,  Donald William Kidwell ,  Evgeni Petrovich Gousev

    IPC: H01F27/28 ,  H01K3/10 ,  G06T1/00 ,  H03H7/01 ,  G01B7/16

    CPC classification number: H01F27/06 ,  G09G3/3466 ,  G09G5/00 ,  H01F17/0033 ,  H01F21/00 ,  H01F41/005 ,  H01F41/041 ,  H01F41/046 ,  Y10T29/49165 ,  Y10T156/1057

    Abstract: This disclosure provides systems, methods, and apparatus for through substrate via inductors. In one aspect, a cavity is defined in a glass substrate. At least two metal bars are in the cavity. A first end of each metal bar is proximate a first surface of the substrate, and a second end of each metal bar is proximate a second surface of the substrate. A metal trace connects a first metal bar and a second metal bar. In some instances, one or more dielectric layers can be disposed on surfaces of the substrate. In some instances, the metal bars and the metal trace define an inductor. The inductor can have a degree of flexibility corresponding to a variable inductance. Metal turns can be arranged in a solenoidal or toroidal configuration. The toroidal inductor can have tapered traces and/or thermal ground planes. Transformers and resonator circuitry can be realized.

    Abstract translation: 本公开提供了用于通过基板通孔电感器的系统，方法和装置。 在一个方面，空腔被限定在玻璃基板中。 在空腔中至少有两个金属棒。 每个金属棒的第一端靠近衬底的第一表面，并且每个金属棒的第二端靠近衬底的第二表面。 金属迹线连接第一金属棒和第二金属棒。 在一些情况下，可以在衬底的表面上设置一个或多个电介质层。 在一些情况下，金属棒和金属迹线限定电感器。 电感器可以具有对应于可变电感的一定程度的灵活性。 金属线圈可以以螺线管或环形配置布置。 环形电感器可以具有锥形迹线和/或热接地平面。 可以实现变压器和谐振器电路。

    MICROMACHINED PIEZOELECTRIC Z-AXIS GYROSCOPE
    4.
    发明申请
    MICROMACHINED PIEZOELECTRIC Z-AXIS GYROSCOPE 有权
    微型压电Z轴轴承

    公开(公告)号：US20130333175A1

    公开(公告)日：2013-12-19

    申请号：US13956163

    申请日：2013-07-31

    Applicant: QUALCOMM MEMS Technologies, Inc.

    Inventor： Cenk Acar ,  Ravindra V. Shenoy ,  Justin Phelps Black ,  Kurt Edward Petersen ,  Srinivasan Kodaganallur Ganapathi ,  Philip Jason Stephanou

    IPC: G01C25/00

    CPC classification number: G01C19/5769 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  H01L41/25 ,  H01L41/311 ,  H01L41/312 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155

    Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.

    Abstract translation: 本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。 这种陀螺仪可以包括中心锚固体，围绕中心锚固设置的感测框架，被配置用于将感测框架连接到中心锚固件的多个感测梁和设置在感测框架周围并耦合到感测框架的驱动框架。 陀螺仪可以包括设置在感测框架的相对侧上的成对的驱动梁。 陀螺仪可以包括驱动框架悬架，用于将驱动框架的驱动运动基本上限制为沿着第一轴线的基本上线性的位移。 感测框架可以基本上与驱动框架的驱动运动分离。 这样的设备可以被包括在诸如移动显示设备的移动设备中。

    Selective tuning of acoustic devices
    8.
    发明授权
    Selective tuning of acoustic devices 有权
    声学设备的选择性调谐

    公开(公告)号：US09337799B2

    公开(公告)日：2016-05-10

    申请号：US13667918

    申请日：2012-11-02

    Applicant: QUALCOMM MEMS Technologies, Inc.

    Inventor： Philip Jason Stephanou ,  Chengjie Zuo ,  Changhan Hobie Yun ,  Sang-June Park ,  Charles Chengyea Leu ,  Jonghae Kim ,  Ravindra V. Shenoy

    IPC: H03H9/02 ,  H03H3/02

    CPC classification number: H03H9/02149 ,  H03H3/02 ,  H03H2003/021 ,  H03H2003/025 ,  H03H2003/028 ,  Y10T29/42

    Abstract: This disclosure provides implementations of methods, apparatus and systems for producing acoustic wave devices and for selectively modifying one or more acoustic or electromechanical characteristics of such devices. In one aspect, a method includes depositing a structural layer over a substrate. The structural layer includes a plurality of structural portions, each being positioned over a corresponding device region. The method also includes arranging a mask layer over the structural layer. The mask layer includes a plurality of mask portions, each including a number of mask openings that expose a corresponding region of the structural portion. The method also includes accelerating dopant particles toward the mask layer. The accelerated dopant particles that proceed through the mask openings are impacted into the corresponding structural portion. The impacted dopant particles modify material properties in the structural portion, which then effect a change in the acoustic or electromechanical characteristics of the acoustic wave device.

    Abstract translation: 本公开提供了用于产生声波装置并用于选择性地修改这种装置的一个或多个声学或机电特性的方法，装置和系统的实现。 一方面，一种方法包括在衬底上沉积结构层。 结构层包括多个结构部分，每个结构部分位于相应的装置区域上。 该方法还包括在结构层上布置掩模层。 掩模层包括多个掩模部分，每个掩模部分包括暴露结构部分的对应区域的多个掩模开口。 该方法还包括向掩模层加速掺杂剂颗粒。 进入掩模开口的加速掺杂剂颗粒被冲击到相应的结构部分。 受影响的掺杂剂颗粒改变结构部分中的材料性质，其然后影响声波装置的声学或机电特性的变化。

    MICROMACHINED PIEZOELECTRIC X-AXIS GYROSCOPE
    10.
    发明申请
    MICROMACHINED PIEZOELECTRIC X-AXIS GYROSCOPE 有权
    微型压电X轴晶圆

    公开(公告)号：US20140041174A1

    公开(公告)日：2014-02-13

    申请号：US14054617

    申请日：2013-10-15

    Applicant: QUALCOMM MEMS Technologies, Inc.

    Inventor： Cenk Acar ,  Ravindra V. Shenoy ,  Justin Phelps Black ,  Kurt Edward Petersen ,  Srinivasan Kodaganallur Ganapathi ,  Philip Jason Stephanou

    IPC: G01C25/00

    CPC classification number: G01C19/5769 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  H01L41/25 ,  H01L41/311 ,  H01L41/312 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155

    Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.

    Abstract translation: 本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。 一些陀螺仪包括驱动框架，中心锚杆和设置在中心锚固件的相对侧上的多个驱动梁。 驱动梁可以将驱动框架连接到中心锚杆上。 驱动梁可以包括压电层，并且可以被配置为使得驱动框架在驱动梁的平面中扭转地摆动。 陀螺仪还可以包括检测质量块和多个压电感测光束。 至少一些组分可以由镀金属形成。 驱动框架可以设置在检验质量块内。 驱动梁可以限制驱动框架大致在驱动梁的平面内旋转。 这样的设备可以被包括在诸如移动显示设备的移动设备中。

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