Abstract:
The distributed capacitance at circuit node between conduction paths of interconnected field-effect transistors of a memory array is maintained charged to a fixed value during the major portion of the memory operating time. As one example, the distributed capacitance at the columns of an integrated circuit of a memory chip may be connected to the charging source except for the times during which any location on that chip is being accessed. Operation in this way opens sneak paths in the circuit and reduces power dissipation.
Abstract:
The ratio of the resistances of two diffused integrated circuit resistors of dissimilar geometries is made relatively insensitive to processing variations in the structure of the resistors in different devices. Wider resistors in a given device are made more sensitive to width variations to match the greater sensitivity of narrower resistors in that device, and longer resistors are made more sensitive to length variations to match the greater sensitivity of shorter resistors. Lower value resistors are made less sensitive to metallurgical phenomena that affect contact resistance so that proportionally less contact resistance change is produced by a given processing variation in the lower value resistors than in the higher value resistors.
Abstract:
A PHOTOMASK HAS MULTILAYER OPAQUE PLATTERNS ON A TRANSPARENT SUBSTRATE. EACH PATTERN INCLUDES A BOTTOM LAYER AND A TOP LAYER, EACH OF A MATERIAL CAPABLE OF BEING ETCHED BY A SUBSTANCE WHICH WILL NOT ETCH THE SUBSTRATE, AND AN INTERMEDIATE LAYER OF A MATERIAL CAPABLE OF BEING ETCHED BY A SUBSTANCE WHICH WILL NOT ETCH THE BOTTOM AND TOP LAYERS. THE SEVERAL LAYERS COMPENSATE FOR DEFECTS IN EACH LAYER. AN IMPROVED PHOTOMASK FABRICATION METHOD INCLUDES FORMING THE ABOVEMENTIONED PATTERNS BY SUCCESSIVELY DEPOSITING THE BOTTOM AND INTERMEDIATE LAYERS, PHOTOETCHING THE INTERMEDIATE LAYER INTO A DESIRED PATTERN, DEPOSITING THE TOP LAYER, AND THEN PHOTOETCHING THE TOP AND BOTTOM LAYERS INTO A DESIRED PATTERN.