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14 条记录 (耗时 0.027 秒)

    Spiral cut honeycomb body for fluid mixing
    5.
    发明授权
    Spiral cut honeycomb body for fluid mixing 失效
    用于流体混合的螺旋切割蜂窝体

    公开(公告)号：US06227699B1

    公开(公告)日：2001-05-08

    申请号：US09467743

    申请日：1999-12-20

    申请人： John F. Wight, Jr.

    发明人： John F. Wight, Jr.

    IPC分类号： F28F114

    CPC分类号： B01J35/04 ,  B01F5/0646 ,  B01F5/0647 ,  B01J19/2485 ,  B01J19/32 ,  B01J2219/32268 ,  B01J2219/32275 ,  B01J2219/32296 ,  B01J2219/32408 ,  B01J2219/32425 ,  B01J2219/32441 ,  B01J2219/32466 ,  B01J2219/32483 ,  Y10T428/24744 ,  Y10T428/24777 ,  Y10T428/2975

    摘要： A honeycomb article has longitudinal channels extending from one face to a second face. A portion of the honeycomb is removed by cutting away a helical slot that depthwise extends from the outer surface of the honeycomb through a majority of the channels and lengthwise extends along the honeycomb channel axis commencing at or near the first face and toward the second face. The helical slot traverses a minimum of one rotation around the honeycomb axis. The honeycomb article can be used in a number of applications including heat exchange, thermal mixing, physical mixing, chemical stripping, and chemical reactions of one or more workstreams entering from one face, or entering in a countercurrent mode from both faces.

    摘要翻译： 蜂窝制品具有从一个面延伸到第二面的纵向通道。 通过切除通过大部分通道从蜂窝体的外表面向深度方向延伸的螺旋槽，沿着从第一面或其附近开始朝向第二面的蜂窝通道轴纵向延伸，去除蜂窝的一部分。 螺旋槽围绕蜂窝轴线移动最少一圈。 蜂窝制品可以用于多个应用，包括从一个面进入的一个或多个工作流的热交换，热混合，物理混合，化学剥离和化学反应，或从两个面进入逆流模式。

    EUV lithography glass structures formed by extrusion consolidation process
    7.
    发明授权
    EUV lithography glass structures formed by extrusion consolidation process 有权
    通过挤压固化工艺形成的EUV光刻玻璃结构

    公开(公告)号：US06997015B2

    公开(公告)日：2006-02-14

    申请号：US10302364

    申请日：2002-11-22

    申请人： Bradley F. Bowden ,  Seann Bishop ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    发明人： Bradley F. Bowden ,  Seann Bishop ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    IPC分类号： C03B19/06

    CPC分类号： C03B19/06 ,  C03B2201/42

    摘要： The invention discloses a method for forming substantially striae-free glass substrates that are suitable for optical applications, including use in forming optical elements or structures such as mirrors and platen stage structures that can be used, for example, in EUV lithography. The method includes forming a mixture of silica soot, binder, lubricant and solvent. The homogenized mixture is then extruded through a slit die or mask into a flat planar pre-form, and the extruded pre-form is then consolidated by heating into a substantially full density, substantially striae-free lithography glass substrate structure. The consolidated perform has a substantially uniform coefficient of thermal expansion and is also substantially void free.

    摘要翻译： 本发明公开了一种用于形成适用于光学应用的基本无条纹玻璃基板的方法，包括用于形成光学元件或结构例如反射镜和压板台结构，其可以用于例如EUV光刻。 该方法包括形成二氧化硅烟灰，粘合剂，润滑剂和溶剂的混合物。 然后将匀化的混合物通过狭缝模具或掩模挤出成平坦的预成型体，然后通过加热将挤出的预成型体固化成基本上全密度，基本上无条纹的光刻玻璃基材结构。 固结性能具有基本均匀的热膨胀系数，并且也基本上无空隙。

    High purity glass bodies formed by zero shrinkage casting
    8.
    发明授权
    High purity glass bodies formed by zero shrinkage casting 失效
    通过零收缩铸造形成的高纯度玻璃体

    公开(公告)号：US06832493B2

    公开(公告)日：2004-12-21

    申请号：US10086231

    申请日：2002-02-27

    申请人： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

    发明人： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

    IPC分类号： C03B1902

    CPC分类号： C03B19/06 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/34

    摘要： The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles and coarser ground or milled glass powder. The glass particles are mixed with a liquid to form a slurry which is cast in a mold to form a porous pre-form. Subsequently, the porous pre-form is consolidated into a glass object by heating the pre-form at a relatively high temperature. The method of the present invention produces optical components having substantially no striae. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from the optical blank.

    摘要翻译： 本发明涉及一种形成光学元件的方法。 该方法包括提供玻璃聚集体。 通常，玻璃聚集体是细玻璃烟灰颗粒和较粗糙的研磨或研磨玻璃粉末的混合物。 将玻璃颗粒与液体混合以形成在模具中铸造以形成多孔预成型体的浆料。 随后，通过在相对高的温度下加热预成型件将多孔预成型件固结成玻璃制品。 本发明的方法产生基本上没有条纹的光学部件。 结果，当EUV光从由光学坯料产生的组分反射时，散射显着降低。

    Burner manifold apparatus for use in a chemical vapor deposition process
    9.
    发明授权
    Burner manifold apparatus for use in a chemical vapor deposition process 失效
    用于化学气相沉积工艺的燃烧器歧管装置

    公开(公告)号：US06736633B1

    公开(公告)日：2004-05-18

    申请号：US09830512

    申请日：2001-04-26

    申请人： David F. Dawson-Elli ,  Xiaodong Fu ,  Daniel W. Hawtof ,  William J. Kiefer ,  John F. Wight, Jr. ,  John Stone, III

    发明人： David F. Dawson-Elli ,  Xiaodong Fu ,  Daniel W. Hawtof ,  William J. Kiefer ,  John F. Wight, Jr. ,  John Stone, III

    IPC分类号： F23D1400

    CPC分类号： F23D14/583 ,  C03B19/1423 ,  C03B37/0142 ,  C03B2207/02 ,  C03B2207/04 ,  C03B2207/42 ,  C23C16/453 ,  F23D14/22 ,  F23D2203/101 ,  F23D2203/104 ,  F23D2212/10 ,  F23D2213/00 ,  F23D2900/14001

    摘要： A burner manifold apparatus (10) for delivering reactants to a combustion site of a chemical vapor deposition process includes fluid inlets (32a, 32b), fluid outlets (49), and a plurality of fluid passages (50) extending therebetween. The fluid passages (50) converge toward each other from the fluid inlets to the fluid outlets. One embodiment includes a manifold base (12), a pressure plate (14), and a manifold burner mount (16) for mounting thereto a micromachined burner (58). The fluid passages (50) internal to the manifold base are configured to distribute symmetrically the fluid to the manifold burner mount. The fluid is then channeled through fluid passages in the manifold burner mount. The fluid passages converge, yet remain fluidly isolated from each other, and the fluid passages create a linear array for producing linear streams of fluid. Alternatively, the burner manifold apparatus may include a plurality of manifold elements in a stacked arrangement. In this alternative embodiment, the manifold elements are configured to produce a linear array of fluid passages at the top of the stack, increasing the number of fluid passages at each level of the stack closer to the top. As yet a further alternative, the burner manifold may be produced by extruding a particulate composite through a die to produce a manifold having fluid passages therein. This extruded manifold generally has a tapered section to which a burner may be mounted.

    摘要翻译： 用于将反应物输送到化学气相沉积工艺的燃烧部位的燃烧器歧管装置（10）包括流体入口（32a，32b），流体出口（49）和在它们之间延伸的多个流体通道（50）。 流体通道（50）从流体入口朝向流体出口彼此会聚。 一个实施例包括歧管基座（12），压力板（14）和用于安装到微加工燃烧器（58）上的歧管燃烧器支架（16）。 歧管基座内部的流体通道（50）被构造为将流体对称地分布到歧管燃烧器安装座。 然后将流体通过歧管燃烧器安装座中的流体通道引导。 流体通道汇合，但保持流体彼此隔离，并且流体通道产生用于产生线性流体流的线性阵列。 或者，燃烧器歧管装置可以包括堆叠布置的多个歧管元件。 在该替代实施例中，歧管元件构造成在堆叠的顶部产生流体通道的线性阵列，从而增加靠近顶部的堆叠的每个层级处的流体通道的数量。 作为另一替代方案，燃烧器歧管可以通过将颗粒状复合材料挤出通过模具来制造，以产生其中具有流体通道的歧管。 该挤出歧管通常具有可安装燃烧器的锥形部分。

    Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article
    10.
    发明授权
    Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article 失效
    弯曲蜂窝体制品，具有弯曲蜂窝制品的EUV装置，以及制造弯曲蜂窝制品的方法

    公开(公告)号：US07189446B2

    公开(公告)日：2007-03-13

    申请号：US10882011

    申请日：2004-06-30

    申请人： Anthony R. Olszewski ,  Paul M. Then ,  John F. Wight, Jr.

    发明人： Anthony R. Olszewski ,  Paul M. Then ,  John F. Wight, Jr.

    IPC分类号： B32B3/12 ,  H05G2/00 ,  G21K5/00

    CPC分类号： B82Y10/00 ,  G03F7/70166 ,  G03F7/70916 ,  Y10T428/236 ,  Y10T428/24149

    摘要： The present invention provides a curved honeycomb article having a first face, a second face, and a plurality of channels formed from the first face to the second face, each channel having a channel axis, the curved honeycomb article having a width of at least about 15 cm in at least one direction in the plane normal to a channel axis at its geometrical center, each channel having a virtual channel extension associated therewith, the virtual channel extensions defining a convergence area substantially smaller than the occluded area of the curved honeycomb article. Methods for making the curved honeycomb article and apparati using the curved honeycomb article are also disclosed.

    摘要翻译： 本发明提供了一种具有第一面，第二面和从第一面到第二面形成的多个通道的弯曲蜂窝制品，每个通道具有通道轴线，所述弯曲蜂窝制品的宽度至少约为 每个通道具有与其相关联的虚拟通道延伸的平面中的垂直于通道轴的平面中的至少一个方向上的15cm，虚拟通道延伸部限定了基本上小于弯曲蜂窝体的闭塞区域的会聚区域。 还公开了使用弯曲蜂窝制品制造弯曲蜂窝体制品和装置的方法。