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    Silica glass honeycomb structure from silica soot extrusion
    2.
    发明授权
    Silica glass honeycomb structure from silica soot extrusion 失效
    硅胶玻璃蜂窝结构由二氧化硅烟灰挤出

    公开(公告)号：US06548142B1

    公开(公告)日：2003-04-15

    申请号：US09506040

    申请日：2000-02-17

    申请人： Gitimoy Kar ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  C. Charles Yu

    发明人： Gitimoy Kar ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  C. Charles Yu

    IPC分类号： B32B312

    CPC分类号： G02B6/02347 ,  B01D63/066 ,  B01D71/027 ,  B01D71/04 ,  C02F1/32 ,  C03B19/025 ,  C03B19/06 ,  C03B23/047 ,  C03B23/06 ,  C03B23/065 ,  C03B32/00 ,  C03B37/0124 ,  C03B2203/14 ,  C03B2203/42 ,  G02B6/02357 ,  G02B6/02371 ,  G02B6/02376 ,  Y10T428/24149 ,  Y10T428/24165

    摘要： The present invention describes a glass honeycomb structure having a variety of shapes and sizes depending on its ultimate application. Unlike prior art honeycomb structures made from ceramics, the inventive glass honeycomb can be readily bent and/or redrawn. Furthermore, the inventive honeycomb structure is lightweight, yet able to support heavy loads on its end faces. Therefore, the inventive honeycomb can be used as a light-weight support for such objects as mirrors. Other useful properties of the extruded glass honeycomb are its high softening temperature, its transparency to ultraviolet and visible light, and its ability to be redrawn. Embodiments that rely upon one or more of these properties include: a bio-reactor, a membrane reactor, a capillary flow controller, a high efficiency filtration system, in-situ water treatment, high temperature dielectric material, and photonic band gap material.

    摘要翻译： 本发明描述了根据其最终应用具有各种形状和尺寸的玻璃蜂窝结构。 不同于由陶瓷制成的现有技术的蜂窝结构体，本发明的玻璃蜂窝体可以容易地弯曲和/或重新拉伸。 此外，本发明的蜂窝结构是轻质的，但是能够支撑其端面上的重负载。 因此，本发明的蜂窝体可以用作诸如反射镜的物体的轻质支撑体。 挤出玻璃蜂窝体的其他有用性质是其高软化温度，其对紫外线和可见光的透明度以及其再拉伸能力。 依赖于这些性质中的一种或多种的实施方案包括：生物反应器，膜反应器，毛细流控制器，高效过滤系统，原位水处理，高温介电材料和光子带隙材料。

    Titanium-coating silica glass honeycomb structure from silica soot extrusion
    3.
    发明授权
    Titanium-coating silica glass honeycomb structure from silica soot extrusion 失效
    含二氧化硅烟灰挤压的含钛硅玻璃蜂窝结构

    公开(公告)号：US06479129B1

    公开(公告)日：2002-11-12

    申请号：US09506162

    申请日：2000-02-17

    申请人： Gitimoy Kar ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  C. Charles Yu

    发明人： Gitimoy Kar ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  C. Charles Yu

    IPC分类号： B32B312

    CPC分类号： G02B6/02347 ,  B28B3/269 ,  B28B11/003 ,  C03B19/025 ,  C03B19/06 ,  C03B23/047 ,  C03B23/065 ,  C03B32/00 ,  C03B37/0124 ,  C03B2203/42 ,  G02B6/02361 ,  G02B6/02371 ,  G02B6/02376 ,  Y10T428/236 ,  Y10T428/24149

    摘要： The present invention describes an extrusion process for manufacturing a titanium-containing silicate glass honeycomb structure, having a variety of shapes and sizes depending on its ultimate application. The titanium-containing glass honeycomb has a very low coefficient of thermal expansion (CTE) and the CTE can be varied by adjusting the titanium level to match the CTE of members that are bonded to the honeycomb. Furthermore, the inventive honeycomb structure is lightweight, yet able to support heavy loads on its end faces. Therefore, the inventive honeycomb can be advantageously used as a light-weight support for such objects as mirrors. Especially contemplated is using these inventive honeycomb supports for mirrors used in extraterresial environments where temperature extremes are present. These honeycombs can be used singularly or in aggregates to provide such support. Embodiments are described wherein the mass of the honeycomb is further reduced by removing select portions of the honeycomb without deleteriously impacting its ability for load bearing.

    摘要翻译： 本发明描述了根据其最终应用，具有各种形状和尺寸的含钛硅酸盐玻璃蜂窝结构体的制造挤出方法。 含钛玻璃蜂窝体具有非常低的热膨胀系数（CTE），并且通过调节钛水平以匹配结合到蜂窝体的构件的CTE可以改变CTE。 此外，本发明的蜂窝结构是轻质的，但是能够支撑其端面上的重负载。 因此，本发明的蜂窝体可以有利地用作诸如反射镜的物体的轻质支撑。 特别考虑的是使用这些本发明的蜂窝状支撑体用于存在极端温度的外部环境中的反射镜。 这些蜂蜜可以单独使用或以聚集体形式提供这种支持。 描述了通过除去蜂窝的选择部分而进一步减小蜂窝体的质量的实施例，而不会有害地影响其承载能力。

    EUV lithography glass structures formed by extrusion consolidation process
    4.
    发明授权
    EUV lithography glass structures formed by extrusion consolidation process 有权
    通过挤压固化工艺形成的EUV光刻玻璃结构

    公开(公告)号：US06997015B2

    公开(公告)日：2006-02-14

    申请号：US10302364

    申请日：2002-11-22

    申请人： Bradley F. Bowden ,  Seann Bishop ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    发明人： Bradley F. Bowden ,  Seann Bishop ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    IPC分类号： C03B19/06

    CPC分类号： C03B19/06 ,  C03B2201/42

    摘要： The invention discloses a method for forming substantially striae-free glass substrates that are suitable for optical applications, including use in forming optical elements or structures such as mirrors and platen stage structures that can be used, for example, in EUV lithography. The method includes forming a mixture of silica soot, binder, lubricant and solvent. The homogenized mixture is then extruded through a slit die or mask into a flat planar pre-form, and the extruded pre-form is then consolidated by heating into a substantially full density, substantially striae-free lithography glass substrate structure. The consolidated perform has a substantially uniform coefficient of thermal expansion and is also substantially void free.

    摘要翻译： 本发明公开了一种用于形成适用于光学应用的基本无条纹玻璃基板的方法，包括用于形成光学元件或结构例如反射镜和压板台结构，其可以用于例如EUV光刻。 该方法包括形成二氧化硅烟灰，粘合剂，润滑剂和溶剂的混合物。 然后将匀化的混合物通过狭缝模具或掩模挤出成平坦的预成型体，然后通过加热将挤出的预成型体固化成基本上全密度，基本上无条纹的光刻玻璃基材结构。 固结性能具有基本均匀的热膨胀系数，并且也基本上无空隙。

    High purity glass bodies formed by zero shrinkage casting
    5.
    发明授权
    High purity glass bodies formed by zero shrinkage casting 失效
    通过零收缩铸造形成的高纯度玻璃体

    公开(公告)号：US06832493B2

    公开(公告)日：2004-12-21

    申请号：US10086231

    申请日：2002-02-27

    申请人： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

    发明人： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

    IPC分类号： C03B1902

    CPC分类号： C03B19/06 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/34

    摘要： The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles and coarser ground or milled glass powder. The glass particles are mixed with a liquid to form a slurry which is cast in a mold to form a porous pre-form. Subsequently, the porous pre-form is consolidated into a glass object by heating the pre-form at a relatively high temperature. The method of the present invention produces optical components having substantially no striae. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from the optical blank.

    摘要翻译： 本发明涉及一种形成光学元件的方法。 该方法包括提供玻璃聚集体。 通常，玻璃聚集体是细玻璃烟灰颗粒和较粗糙的研磨或研磨玻璃粉末的混合物。 将玻璃颗粒与液体混合以形成在模具中铸造以形成多孔预成型体的浆料。 随后，通过在相对高的温度下加热预成型件将多孔预成型件固结成玻璃制品。 本发明的方法产生基本上没有条纹的光学部件。 结果，当EUV光从由光学坯料产生的组分反射时，散射显着降低。

    Solid freeform fabrication of lightweight lithography stage
    6.
    发明授权
    Solid freeform fabrication of lightweight lithography stage 失效
    轻质光刻阶段的固体自由形成

    公开(公告)号：US06764619B2

    公开(公告)日：2004-07-20

    申请号：US10001346

    申请日：2001-10-31

    申请人： James J. Bernas ,  Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    发明人： James J. Bernas ,  Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    IPC分类号： G02B100

    CPC分类号： G03F7/7095 ,  B33Y10/00 ,  B33Y70/00 ,  G03B27/48 ,  G03F7/70716 ,  G03F7/70825

    摘要： A method of making an EUV lithography stage structure includes depositing a layer of a Ti doped SiO2 glass powder in a confined region to provide an underlying layer; applying a binder to form a primitive with the binder bonding the glass powder together at one or more selected regions; depositing an above layer of the glass powder above the deposited layer; applying the binder to the above layer with the binder bonding the glass powder together at one or more selected regions; repeating the deposition and binding steps to produce a number of successive layers with the binder bonding the successive layers together; and removing the unbonded glass powder to provide a bonded glass powder lithography stage structure which is then sintered and densified into a densified nonpowder glass lithography stage.

    摘要翻译： 制造EUV光刻级结构的方法包括在限制区域中沉积Ti掺杂的SiO 2玻璃粉末的层以提供下层; 施加粘合剂以形成原料，其中粘合剂将玻璃粉末在一个或多个选定区域粘合在一起; 在所述沉积层上沉积上述玻璃粉末层; 将粘合剂施加到上述层，粘合剂将玻璃粉末在一个或多个选定的区域粘合在一起; 重复沉积和结合步骤以产生多个连续层，粘合剂将连续的层粘合在一起; 并除去未结合的玻璃粉末以提供粘结的玻璃粉末光刻阶段结构，然后将其烧结并致密化成致密的非粉末玻璃光刻阶段。

    Spiral cut honeycomb body for fluid mixing
    8.
    发明授权
    Spiral cut honeycomb body for fluid mixing 失效
    用于流体混合的螺旋切割蜂窝体

    公开(公告)号：US06227699B1

    公开(公告)日：2001-05-08

    申请号：US09467743

    申请日：1999-12-20

    申请人： John F. Wight, Jr.

    发明人： John F. Wight, Jr.

    IPC分类号： F28F114

    CPC分类号： B01J35/04 ,  B01F5/0646 ,  B01F5/0647 ,  B01J19/2485 ,  B01J19/32 ,  B01J2219/32268 ,  B01J2219/32275 ,  B01J2219/32296 ,  B01J2219/32408 ,  B01J2219/32425 ,  B01J2219/32441 ,  B01J2219/32466 ,  B01J2219/32483 ,  Y10T428/24744 ,  Y10T428/24777 ,  Y10T428/2975

    摘要： A honeycomb article has longitudinal channels extending from one face to a second face. A portion of the honeycomb is removed by cutting away a helical slot that depthwise extends from the outer surface of the honeycomb through a majority of the channels and lengthwise extends along the honeycomb channel axis commencing at or near the first face and toward the second face. The helical slot traverses a minimum of one rotation around the honeycomb axis. The honeycomb article can be used in a number of applications including heat exchange, thermal mixing, physical mixing, chemical stripping, and chemical reactions of one or more workstreams entering from one face, or entering in a countercurrent mode from both faces.

    摘要翻译： 蜂窝制品具有从一个面延伸到第二面的纵向通道。 通过切除通过大部分通道从蜂窝体的外表面向深度方向延伸的螺旋槽，沿着从第一面或其附近开始朝向第二面的蜂窝通道轴纵向延伸，去除蜂窝的一部分。 螺旋槽围绕蜂窝轴线移动最少一圈。 蜂窝制品可以用于多个应用，包括从一个面进入的一个或多个工作流的热交换，热混合，物理混合，化学剥离和化学反应，或从两个面进入逆流模式。