Thermoelectric cooling for microelectronic packages and dice
    10.
    发明授权
    Thermoelectric cooling for microelectronic packages and dice 失效
    微电子封装和裸片的热电冷却

    公开(公告)号:US06981380B2

    公开(公告)日:2006-01-03

    申请号:US10326864

    申请日:2002-12-20

    IPC分类号: F35B21/02

    摘要: Apparatus and methods in accordance with the present invention utilize thermoelectric cooling (TEC) technology to provide enhanced power distribution and/or dissipation from a microelectronic die and/or microelectronic packages. Individual TEC devices are thermally interconnected with the microelectronic die in a number of placement configurations, including between the microelectronic die and the heat sink, on the integrated heat spreader (IHS) inner surface, and on the IHS outer surface. TEC devices comprise p- and n-type semiconducting material created using similar process as the microcircuits. The TEC devices are located in various regions within or on the microelectronic die, including directly below the microcircuits, on the backside of the microelectronic die, and on a separate substrate of microelectronic die material fabricated apart from the microelectronic die and subsequently thermally coupled to the backside of the microelectronic die.

    摘要翻译: 根据本发明的装置和方法利用热电冷却(TEC)技术来提供来自微电子管芯和/或微电子封装的增强的功率分配和/或耗散。 单个TEC装置与集成散热器(IHS)内表面和IHS外表面上的多个放置配置(包括微电子管芯和散热器之间)与微电子管芯热互连。 TEC器件包括使用与微电路类似的工艺制造的p型和n型半导体材料。 TEC器件位于微电子管芯内或微电子管芯上的多个区域中,包括微电路正下方,微电子管芯的背面,以及与微电子管芯分开制造的微电子管芯材料的分离衬底,随后热耦合到 微电子模具的背面。