THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20220384491A1

    公开(公告)日:2022-12-01

    申请号:US17886489

    申请日:2022-08-12

    摘要: A substrate including a first signal line and a first electrode disposed on the substrate, an oxide semiconductor layer pattern overlapping the first electrode, an insulating layer disposed between the first electrode and the oxide semiconductor layer pattern, a second signal line intersecting the first signal line, a second electrode electrically connected to the oxide semiconductor layer pattern, a third electrode electrically connected to the oxide semiconductor layer pattern and spaced apart from the second electrode, and an insulator comprising a first portion disposed between the first signal line and the second signal line, and at least partially overlapping with both of the first signal line and the second signal line.

    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20190355752A1

    公开(公告)日:2019-11-21

    申请号:US16438385

    申请日:2019-06-11

    IPC分类号: H01L27/12

    摘要: A substrate including a gate line and a gate electrode disposed on a substrate, an oxide semiconductor layer pattern overlapping the gate electrode, a gate insulating layer disposed between the gate electrode and the oxide semiconductor layer pattern, a data line intersecting the gate line, a source electrode electrically connected to the oxide semiconductor layer pattern, a drain electrode electrically connected to the oxide semiconductor layer, the drain electrode spaced apart from the source electrode, and an insulating pattern including a first portion, which is disposed between the gate line and the data line and at least partially overlaps with both of the gate line and the data line.

    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF
    6.
    发明申请
    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF 审中-公开
    薄膜晶体管阵列基板及其制造方法

    公开(公告)号:US20150311230A1

    公开(公告)日:2015-10-29

    申请号:US14793183

    申请日:2015-07-07

    IPC分类号: H01L27/12

    摘要: A method of manufacturing a thin film transistor (TFT) array substrate includes forming a gate line and a gate electrode on a substrate, forming a gate-insulating layer and an oxide semiconductor layer on the gate line and the gate electrode, forming etch stop patterns at a thin-film transistor area and an area where the gate line and the data line overlap each other, forming a data conductor on the oxide semiconductor layer and the etch stop patterns, the data conductor comprising a source electrode and a drain electrode that constitute a TFT together with the gate electrode, and forming a data line extending in a direction intersecting the gate line.

    摘要翻译: 制造薄膜晶体管(TFT)阵列基板的方法包括在基板上形成栅极线和栅电极,在栅极线和栅电极上形成栅极绝缘层和氧化物半导体层,形成蚀刻停止图案 在薄膜晶体管区域和栅极线和数据线彼此重叠的区域中,在氧化物半导体层和蚀刻停止图案上形成数据导体,数据导体包括源电极和漏极,构成 TFT与栅极电极一起形成,并且在与栅极线相交的方向上形成数据线。

    DISPLAY SUBSTRATE, DISPLAY DEVICE, AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE
    7.
    发明申请
    DISPLAY SUBSTRATE, DISPLAY DEVICE, AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE 有权
    显示基板,显示装置以及制造显示基板的方法

    公开(公告)号:US20140349445A1

    公开(公告)日:2014-11-27

    申请号:US14455771

    申请日:2014-08-08

    摘要: Provided are a display substrate, a display device, and a method of manufacturing the display substrate. The display substrate includes: a substrate in which a pixel region is defined; a gate electrode and a gate pad are formed on the substrate; a gate insulating layer formed on the gate electrode and the gate pad; a buffer layer pattern overlaps the gate electrode and is formed on the gate insulating layer; an insulating film pattern formed on the buffer layer pattern; an oxide semiconductor pattern formed on the insulating film pattern; a source electrode formed on the oxide semiconductor pattern; and a drain electrode formed on the oxide semiconductor pattern and is separated from the source electrode.

    摘要翻译: 提供了显示基板,显示装置和制造显示基板的方法。 显示基板包括:限定像素区域的基板; 在基板上形成栅电极和栅极焊盘; 形成在栅极电极和栅极焊盘上的栅极绝缘层; 缓冲层图案与栅电极重叠并形成在栅极绝缘层上; 形成在缓冲层图案上的绝缘膜图案; 形成在所述绝缘膜图案上的氧化物半导体图案; 形成在所述氧化物半导体图案上的源电极; 以及形成在氧化物半导体图案上并与源电极分离的漏电极。

    Thin Film Transistor and Method for Manufacturing a Display Panel
    9.
    发明申请
    Thin Film Transistor and Method for Manufacturing a Display Panel 审中-公开
    薄膜晶体管及制造显示面板的方法

    公开(公告)号:US20140147947A1

    公开(公告)日:2014-05-29

    申请号:US14168971

    申请日:2014-01-30

    IPC分类号: H01L27/12

    摘要: Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.

    摘要翻译: 本发明的实施例涉及薄膜晶体管和显示面板的制造方法,包括在基板上形成包括栅电极的栅极线,在栅电极上形成栅绝缘层,在栅电极上形成本征半导体 栅极绝缘层,在本征半导体上形成非本征半导体,在外部半导体上形成包括源电极和漏电极的数据线,以及对源电极和漏极之间的非本征半导体的一部分进行等离子体处理,以形成 保护构件和保护构件的相应侧上的欧姆接触。 因此,可以省略用于蚀刻外部半导体和形成用于保护本征半导体的无机绝缘层的工艺,从而可以简化显示面板的制造工艺,可以降低制造成本,并且可以提高生产率。

    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20210143187A1

    公开(公告)日:2021-05-13

    申请号:US17124497

    申请日:2020-12-17

    摘要: A substrate including a gate line and a first electrode disposed on the substrate, an oxide semiconductor layer pattern overlapping the first electrode, an insulating layer disposed between the first electrode and the oxide semiconductor layer pattern, a data line intersecting the gate line, a second electrode electrically connected to the oxide semiconductor layer pattern, a third electrode electrically connected to the oxide semiconductor layer, the third electrode spaced apart from the second electrode, and an insulating pattern including a first portion which is disposed between the gate line and the data line and at least partially overlaps with both of the gate line and the data line.