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公开(公告)号:US09589955B2
公开(公告)日:2017-03-07
申请号:US14872774
申请日:2015-10-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang-Hoon Baek , Sun-Young Park , Sang-Kyu Oh , Ha-Young Kim , Jung-Ho Do , Moo-Gyu Bae , Seung-Young Lee
IPC: H01L23/48 , H01L29/40 , H01L27/088 , H01L27/02 , H01L27/11
CPC classification number: H01L27/088 , H01L21/823431 , H01L21/823475 , H01L23/528 , H01L27/0207 , H01L27/0886 , H01L27/1104
Abstract: Systems on chips are provided. A system on chip (SoC) includes a first gate line, a second gate line and a third gate line extending in a first direction, a gate isolation region cutting the first gate line, the second gate line and the third gate line and extending in a second direction across the first direction, a first gate contact formed on the second gate line arranged between the first gate line and the third gate line, and electrically connecting the cut second gate line, a second gate contact formed on the first gate line, a third gate contact formed on the third gate line, a first metal line electrically connecting the second gate contact and the third gate contact, and a second metal line electrically connected to the first gate contact.
Abstract translation: 提供芯片系统。 片上系统(SoC)包括第一栅极线,第二栅极线和沿第一方向延伸的第三栅极线,栅极隔离区域切割第一栅极线,第二栅极线和第三栅极线并且在 在第一方向上的第二方向,形成在第二栅极线上的第一栅极接触,布置在第一栅极线和第三栅极线之间,并且电连接切割的第二栅极线,形成在第一栅极线上的第二栅极接触, 形成在第三栅极线上的第三栅极触点,电连接第二栅极触点和第三栅极触点的第一金属线以及电连接到第一栅极触点的第二金属线。
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公开(公告)号:US10050032B2
公开(公告)日:2018-08-14
申请号:US15416016
申请日:2017-01-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang-Hoon Baek , Sun-Young Park , Sang-Kyu Oh , Ha-Young Kim , Jung-Ho Do , Moo-Gyu Bae , Seung-Young Lee
IPC: H01L23/48 , H01L29/40 , H01L27/088 , H01L23/528 , H01L27/02 , H01L27/11 , H01L21/8234
Abstract: Systems on chips are provided. A system on chip (SoC) includes a first gate line, a second gate line and a third gate line extending in a first direction, a gate isolation region cutting the first gate line, the second gate line and the third gate line and extending in a second direction across the first direction, a first gate contact formed on the second gate line arranged between the first gate line and the third gate line, and electrically connecting the cut second gate line, a second gate contact formed on the first gate line, a third gate contact formed on the third gate line, a first metal line electrically connecting the second gate contact and the third gate contact, and a second metal line electrically connected to the first gate contact.
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公开(公告)号:US09640444B2
公开(公告)日:2017-05-02
申请号:US14807220
申请日:2015-07-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jung-Ho Do , Sanghoon Baek , Sang-Kyu Oh , Kwanyoung Chun , Sunyoung Park , Taejoong Song
IPC: H01L21/70 , H01L21/8238 , H01L27/092 , H01L27/02
CPC classification number: H01L21/823871 , H01L27/0207 , H01L27/092
Abstract: Provided is a method of fabricating a semiconductor device with a field effect transistor. The method may include forming a first gate electrode and a second gate electrode extending substantially parallel to each other and each crossing a PMOSFET region on a substrate and an NMOSFET region on the substrate; forming an interlayered insulating layer covering the first gate electrode and the second gate electrode; patterning the interlayered insulating layer to form a first sub contact hole on the first gate electrode, the first sub contact hole being positioned between the PMOSFET region and the NMOSFET region, when viewed in a plan view; and patterning the interlayered insulating layer to form a first gate contact hole and to expose a top surface of the second gate electrode, wherein the first sub contact hole and the first gate contact hole form a single communication hole.
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公开(公告)号:US09965579B2
公开(公告)日:2018-05-08
申请号:US14690227
申请日:2015-04-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Chul-Hong Park , Sang-Hoon Baek , Su-Hyeon Kim , Kyoung-Yun Baek , Sung-Wook Ahn , Sang-Kyu Oh , Seung-Jae Jung
CPC classification number: G06F17/5081 , G06F17/5072
Abstract: A method of manufacturing an integrated circuit, a system for carrying out the method, and a system for verifying an integrated circuit may use a standard cell layout including a first layout region that may violate design rules. The method for designing an integrated circuit may comprise receiving a data file that includes a scaling enhanced circuit layout, and designing a first standard cell layout using design rules and the data file. The designing the first standard cell layout may include designing a first layout region of the first standard cell layout using the data file, and designing a second region of the first standard cell layout using the design rules.
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公开(公告)号:US09496179B2
公开(公告)日:2016-11-15
申请号:US14833922
申请日:2015-08-24
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jung-Ho Do , Sanghoon Baek , Sunyoung Park , Sang-Kyu Oh , Jintae Kim , Hyosig Won
IPC: H01L21/768 , H01L21/8234 , H01L21/027 , H01L21/321
CPC classification number: H01L21/823475 , H01L21/0274 , H01L21/28008 , H01L21/32115 , H01L21/76802 , H01L21/76816 , H01L21/76877 , H01L21/76895 , H01L21/76897 , H01L21/823418 , H01L21/823431 , H01L21/823437 , H01L29/41758 , H01L29/66568
Abstract: A method of manufacturing a semiconductor device includes forming an active pattern and a gate electrode crossing the active pattern on a substrate, forming a first contact connected to the active pattern at a side of the gate electrode, forming a second contact connected to the gate electrode, and forming a third contact connected to the first contact at the side of the gate electrode. The third contact is formed using a photomask different from that used to form the first contact. A bottom surface of the third contact is disposed at a level in the device lower than the level of a top surface of the first contact.
Abstract translation: 一种制造半导体器件的方法包括:在基板上形成与有源图案交叉的有源图案和栅电极,在栅电极侧形成连接到有源图案的第一触点,形成连接到栅电极的第二触点 并且形成在栅电极侧与第一接触连接的第三触点。 使用不同于用于形成第一接触的光掩模形成第三接触。 第三触点的底表面设置在低于第一触点的顶表面的高度的装置中的水平面上。
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公开(公告)号:US10541237B2
公开(公告)日:2020-01-21
申请号:US16037581
申请日:2018-07-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang-Hoon Baek , Sun-Young Park , Sang-Kyu Oh , Ha-Young Kim , Jung-Ho Do , Moo-Gyu Bae , Seung-Young Lee
IPC: H01L23/48 , H01L29/40 , H01L27/088 , H01L27/02 , H01L27/11 , H01L21/8234 , H01L23/528
Abstract: A method is provided. The method includes forming a first to third gate lines on a substrate, the second gate line formed between the first and third gate lines; forming a gate isolation region to cut the first to third gate lines into two first sub gate lines, two second sub gate lines and two third sub gate lines, respectively; forming a first gate contact on one of the two first sub gate lines; forming a second gate contact on the two second sub gate lines; forming a third gate contact on one of the two third sub gate lines; forming a first metal line to connect the first and third gate contacts; and forming a second metal line. The first to third gate lines extend in a first direction, and the gate isolation region extends in a second direction different from the first direction.
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公开(公告)号:US10096520B2
公开(公告)日:2018-10-09
申请号:US15392725
申请日:2016-12-28
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sanghoon Baek , Jae-Ho Park , Seolun Yang , Taejoong Song , Sang-Kyu Oh
IPC: H01L21/82 , H01L21/02 , H01L21/30 , H01L21/8234 , H01L21/027 , H01L21/308 , H01L21/762 , H01L27/02 , H01L27/108 , H01L27/11 , H01L29/78
Abstract: A method of fabricating a semiconductor device having a first region, a second region, and a third region between the first and second regions includes forming first and second preliminary active patterns protruding from a substrate in the first and second regions, respectively, forming mask patterns exposing the third region on the substrate, performing a first etching process using the mask patterns an etch mask to form first and second active patterns, respectively, and forming gate structures on the substrate.
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公开(公告)号:US09633161B2
公开(公告)日:2017-04-25
申请号:US14474484
申请日:2014-09-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sang-Hoon Baek , Sang-Kyu Oh , Na-Ya Ha , Seung-Weon Paek , Tae-Joong Song
IPC: G06F17/50 , H01L27/02 , H01L27/11 , H01L27/092 , H01L29/66
CPC classification number: G06F17/5072 , G06F17/5068 , H01L27/0207 , H01L27/0924 , H01L27/1104 , H01L29/6681
Abstract: A layout design system includes a processor; a storage unit configured to store a first unit design having a first area, wherein in the first unit design, a termination is not placed on a border thereof; and a design module configured to generate a second unit design having a second area larger than the first area by placing the termination on a border of the first unit.
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公开(公告)号:US11201150B2
公开(公告)日:2021-12-14
申请号:US16746071
申请日:2020-01-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang-Hoon Baek , Sun-Young Park , Sang-Kyu Oh , Ha-young Kim , Jung-Ho Do , Moo-Gyu Bae , Seung-Young Lee
IPC: H01L23/48 , H01L29/40 , H01L27/088 , H01L27/02 , H01L27/11 , H01L21/84 , H01L27/12 , H01L21/8234 , H01L23/528
Abstract: A system on chip includes first to third nanowires extending in a second direction, first to third gate lines respectively surrounding the first to third nanowires, each of the first to third gate lines extending in a first direction across the second direction, a gate isolation region cutting the first to third gate lines and extending in the second direction, a first gate contact formed on the second gate line arranged between the first gate line and the third gate line, and electrically connecting the cut second gate line, a second gate contact formed on the first gate line, a third gate contact formed on the third gate line, a first metal line electrically connecting the second gate contact and the third gate contact; and a second metal line electrically connected to the first gate contact.
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公开(公告)号:US20180226303A1
公开(公告)日:2018-08-09
申请号:US15856444
申请日:2017-12-28
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: HYOSIG WON , Sang-Kyu Oh , Sungmin Oh , Kwangok Jeong
IPC: H01L21/66 , H01L21/8238 , G01N23/2251 , G01R31/26
CPC classification number: H01L22/10 , G01N23/2251 , G01R31/2644 , G01R31/2856 , G01R31/307 , H01L21/8238 , H01L22/12 , H01L22/30 , H01L27/1104
Abstract: A method of manufacturing a semiconductor device includes forming transistors in a cell region of a test wafer, forming a first test pattern on a first test cell in the cell region, the first test pattern being electrically connected to the transistors, and scanning the first test pattern using an electron beam. Forming the transistors in the cell region includes patterning an upper portion of the test wafer to form active patterns, forming source/drain regions on the active patterns, forming gate electrodes extending across the active patterns, forming active contacts coupled to the source/drain regions, and forming gate contacts coupled to the gate electrodes.
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