Methods of fabricating nonvolatile memory devices including voids between active regions and related devices
    2.
    发明授权
    Methods of fabricating nonvolatile memory devices including voids between active regions and related devices 有权
    制造包括有源区域和相关器件之间的空隙的非易失性存储器件的方法

    公开(公告)号:US08951881B2

    公开(公告)日:2015-02-10

    申请号:US14279786

    申请日:2014-05-16

    CPC classification number: H01L21/76224 H01L21/76229 H01L21/764

    Abstract: A method of fabricating a nonvolatile memory device includes forming trenches in a substrate defining device isolation regions therein and active regions therebetween. The trenches and the active regions therebetween extend into first and second device regions of the substrate. A sacrificial layer is formed in the trenches between the active regions in the first device region, and an insulating layer is formed to substantially fill the trenches between the active regions in the second device region. At least a portion of the sacrificial layer in the trenches in the first device region is selectively removed to define gap regions extending along the trenches between the active regions in the first device region, while substantially maintaining the insulating layer in the trenches between the active regions in the second device region. Related methods and devices are also discussed.

    Abstract translation: 制造非易失性存储器件的方法包括在衬底中形成限定器件隔离区域的衬底中的沟槽,并且其间的有源区域。 沟槽和其间的有源区延伸到衬底的第一和第二器件区域。 牺牲层形成在第一器件区域中的有源区之间的沟槽中,并且形成绝缘层以基本上填充第二器件区域中的有源区之间的沟槽。 选择性地去除第一器件区域中的沟槽中的牺牲层的至少一部分,以限定沿着第一器件区域中的有源区之间的沟槽延伸的间隙区域,同时基本上将沟槽中的绝缘层保持在有源区 在第二设备区域中。 还讨论了相关的方法和设备。

    Non-volatile memory device having vertical structure and method of manufacturing the same

    公开(公告)号:US09899408B2

    公开(公告)日:2018-02-20

    申请号:US15189205

    申请日:2016-06-22

    CPC classification number: H01L27/11582 H01L27/1157

    Abstract: A non-volatile memory device having a vertical structure includes: a first interlayer insulating layer on a substrate; a first gate electrode disposed on the first interlayer insulating layer; second interlayer insulating layers and second gate electrodes alternately stacked on the first gate electrode; an opening portion penetrating the first gate electrode, the second interlayer insulating layers, and the second gate electrodes and exposing the first interlayer insulating layer; a gate dielectric layer covering side walls and a bottom surface of the opening portion; and a channel region formed on the gate dielectric layer, and penetrating a bottom surface of the gate dielectric layer and the first interlayer insulating layer and thus electrically connected to the substrate, wherein a separation distance between side walls of the gate dielectric layer in a region which contacts the first gate electrode is greater than that in a region which contacts any one of the second gate electrodes.

    Photographing lens
    4.
    再颁专利
    Photographing lens 有权
    摄影镜头

    公开(公告)号:USRE45592E1

    公开(公告)日:2015-06-30

    申请号:US14487817

    申请日:2014-09-16

    Inventor: Young-Woo Park

    Abstract: The present invention is directed to a photographing lens containing, in order from an object side: a first lens having a positive refractive power and a convex surface facing the object side; a second lens having a negative refractive power; a third lens having a positive refractive power; and a fourth lens having a negative refractive power and at least one aspheric surface, the photographing lens satisfying the following conditional expressions: L T f ≤ 1.2 0.5 ≤ f 3 f ≤ 1.0 where LT denotes the distance on the optical axis between the object side of the first lens and the image side of the fourth lens; f denotes the total focal length of the photographing lens; and f3 denotes the focal length of the third lens.

    Abstract translation: 本发明涉及一种摄影镜头,其从物体侧依次包括具有正折光力的第一透镜和面向物体侧的凸面; 具有负屈光力的第二透镜; 具有正屈光力的第三透镜; 以及具有负屈光力和至少一个非球面的第四透镜,所述拍摄透镜满足以下条件表达式:LTf≤1.20.5≤f3 f≤1.0其中,LT表示在光轴的物体侧之间的距离 第一透镜和第四透镜的像侧; f表示拍摄镜头的总焦距; f3表示第三透镜的焦距。

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