摘要:
A method of manufacturing a micro electro-mechanical component having a three-dimensional structure includes preparing a conductive substrate, selectively insulating or removing the conductive substrate to form a functional structure for performing a desired electro-mechanical function, forming a plated structure serving as an electrical connection portion on at least one surface of the functional structure, and mounting the functional structure on a circuit substrate so that the electrical connection portion is connected to a circuit pattern of the circuit substrate.
摘要:
Provided is a method of manufacturing a ceramic probe card. A ceramic laminated body having a plurality of ceramic green sheets and an interlayer circuit including a conductive via and a conductive line formed in the plurality of ceramic green sheets is prepared. Then, at least one probe pin structure connected to the interlayer circuit is formed by selectively removing the plurality of photosensitive ceramic sheets having a ceramic powder and a photosensitive organic component on the ceramic laminated body necessarily, and by filling a metal material in a region from which the plurality of photosensitive ceramic sheets have been removed. Then, a ceramic substrate having the at least one probe pin structure is provided by simultaneously firing the ceramic laminated body and the photosensitive ceramic sheets, and by removing the photosensitive ceramic sheets.
摘要:
Provided is a method of fabricating a probe pin. In the method, a concave region for a probe pin is formed on a mold substrate. The surface roughness of the concave region is reduced to smooth the surface of the concave region. A release layer is formed on the surface of the concave region of the mold substrate. A plating process is performed to form a probe pin corresponding to the concave region. After the performing of the plating process, the mold substrate having the probe pin is disposed on a circuit substrate and the probe pin is connected to a desired portion of the circuit substrate. Thereafter, the mold substrate is separated from the probe pin in such a way that the mold substrate remains unchanged. Also, the separated mold substrate may be reused.
摘要:
Provided is a probe card. The probe card includes a ceramic substrate including a signal line, and a plurality of probe pins formed on the ceramic substrate, and including probe bodies having one end connected to the signal line and probe tips formed at other end of the probe body. The probe body is divided into a first section adjacent to the signal line and second section adjacent the probe tips. The first section is united by an insulating support, and the second sections are divergently arranged to position the probe tips at different measurement regions, respectively.
摘要:
Provided is a method of manufacturing a ceramic probe card. A ceramic laminated body having a plurality of ceramic green sheets and an interlayer circuit including a conductive via and a conductive line formed in the plurality of ceramic green sheets is prepared. Then, at least one probe pin structure connected to the interlayer circuit is formed by selectively removing the plurality of photosensitive ceramic sheets having a ceramic powder and a photosensitive organic component on the ceramic laminated body necessarily, and by filling a metal material in a region from which the plurality of photosensitive ceramic sheets have been removed. Then, a ceramic substrate having the at least one probe pin structure is provided by simultaneously firing the ceramic laminated body and the photosensitive ceramic sheets, and by removing the photosensitive ceramic sheets.
摘要:
There are provided a device for testing droplets and an operation method thereof. The device includes a receiving layer on which a sample is received; a plurality of pressure sensors disposed below the receiving layer, and generating changes in capacitance by the sample received on the receiving layer; and a control unit measuring changes in capacitance generated by the plurality of pressure sensors and determining whether the sample received on the receiving layer is defective. According to the present invention, a location and an amount of a sample received on a receiving layer are measured based on changes in capacitance generated by a plurality of respective pressure sensors disposed below the receiving layer, thereby precisely testing whether the sample ejected in droplet form is defective.
摘要:
Disclosed herein is a chip for inspecting toxicity and efficacy, including: a first substrate including fitting holes formed at corners thereof; and a second substrate including gap forming members formed at corners thereof corresponding to the fitting holes to form a gap between the first substrate and the second substrate, and protrusions formed on the gap forming members corresponding to the fitting holes and fitted in the fitting holes. The chip for inspecting toxicity and efficacy is advantageous in that alignment of the chip can be easily performed, in that problems with the emission of fluorescence or the penetration of measuring light in the chip can be solved, and in that the cost of producing the chip can be reduced.
摘要:
There is provided a micro-ejection device including: an ejector ejecting a fluid; and a body having an installation space in which the ejector is installed, wherein the installation space is provided with a guide unit inducing a line-contact or a point-contact between the ejector and the body.
摘要:
The present invention relates to novel hydrogenases isolated from novel hyperthermophilic strains belonging to Thermococcus spp., genes encoding the hydrogenases, and methods of producing hydrogen using strains having the genes. According to the hydrogen production methods of the invention, a large amount of hydrogen can be produced merely by culturing the strains in specific culture conditions. Thus, the methods of the invention have advantages in that they are more economic and efficient than existing hydrogen production methods and can produce hydrogen even at high temperature.
摘要:
There are provided an electronic paper display device and a method of manufacturing the same. The electronic paper display device includes: a lower substrate having lower barrier ribs formed thereon, the lower barrier ribs forming cells for receiving electronic paper display elements; electronic paper display elements mounted in the cells of the lower substrate and having optical and electrical anisotropy; and an upper substrate formed to cover the lower substrate and including upper patterns bonded to the lower barrier ribs so as to secure a fluid moving path of the cell.