摘要:
A pattern-forming method includes forming a resist underlayer film on a substrate using a resist underlayer film-forming composition. The resist underlayer film-forming composition includes a base component, and a crosslinking agent. The crosslinking agent has a partial structure represented by a following general formula (i). X represents an oxygen atom, a sulfur atom, or —NR—. R represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms. n1 is an integer from 1 to 6. R1 represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms.
摘要:
A pattern-forming method includes forming a resist underlayer film on a substrate using a resist underlayer film-forming composition. The resist underlayer film-forming composition includes a base component, and a crosslinking agent. The crosslinking agent has a partial structure represented by a following general formula (i). X represents an oxygen atom, a sulfur atom, or —NR—. R represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms. n1 is an integer from 1 to 6. R1 represents a hydrogen atom, an alkyl group having 1 to 9 carbon atoms, or an aryl group having 6 to 30 carbon atoms.
摘要:
A resist underlayer film-forming composition includes (A) a polymer that includes a repeating unit shown by a formula (1), and has a polystyrene-reduced weight average molecular weight of 3000 to 10,000, and (B) a solvent, wherein R3 to R8 individually represent a group shown by the following formula (2) or the like, —O—R1≡R2 (2) wherein R1 represents a single bond or the like, and R2 represents a hydrogen atom or the like.
摘要翻译:抗蚀剂下层膜形成用组合物包括(A)包含式(1)所示的重复单元,聚苯乙烯换算的重均分子量为3000〜10000的聚合物,(B)溶剂,其中, R 8分别表示下述式(2)所示的基团等,-O-R 1 = R 2(2)其中,R 1表示单键等,R 2表示氢原子等。
摘要:
A resist underlayer film-forming composition includes a polymer including a structural unit shown by a formula (1), and having a polystyrene-reduced weight average molecular weight of from 3000 to 10000, and a solvent. Each of R3 to R8 independently represents a group shown by a formula (2), a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryl group having 6 to 14 carbon atoms, or a glycidyl ether group having 3 to 6 carbon atoms, wherein at least one of R3 to R8 represents the group shown by the formula (2).
摘要翻译:抗蚀剂下层膜形成组合物包括含有式(1)所示的结构单元,聚苯乙烯换算的重均分子量为3000〜10000的聚合物和溶剂。 R 3〜R 8各自独立地表示由式(2)表示的基团,氢原子,羟基,碳原子数1〜6的烷基,碳原子数1〜6的烷氧基,烷氧基羰基2 至10个碳原子,具有6至14个碳原子的芳基或具有3至6个碳原子的缩水甘油醚基团,其中R3至R8中的至少一个表示式(2)所示的基团。
摘要:
A resist underlayer film-forming composition includes a polymer including a structural unit shown by a formula (1), and having a polystyrene-reduced weight average molecular weight of from 3000 to 10000, and a solvent. Each of R3 to R8 independently represents a group shown by a formula (2), a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryl group having 6 to 14 carbon atoms, or a glycidyl ether group having 3 to 6 carbon atoms, wherein at least one of R3 to R8 represents the group shown by the formula (2).
摘要翻译:抗蚀剂下层膜形成组合物包括含有式(1)所示的结构单元,聚苯乙烯换算的重均分子量为3000〜10000的聚合物和溶剂。 R 3〜R 8各自独立地表示由式(2)表示的基团,氢原子,羟基,碳原子数1〜6的烷基,碳原子数1〜6的烷氧基,烷氧基羰基2 至10个碳原子,具有6至14个碳原子的芳基或具有3至6个碳原子的缩水甘油醚基团,其中R3至R8中的至少一个表示式(2)所示的基团。
摘要:
The portable device of the present invention for regulating the hardness of drinking water includes a collapsible electrode group (20) including ion-adsorbing electrodes (21) and (22) and a power supply (13) for applying a voltage between the ion-adsorbing electrode (21) and the ion-adsorbing electrode (22). The first ion-adsorbing electrode (21) includes a first electrically conductive material capable of adsorbing ions. The second ion-adsorbing electrode includes a second electrically conductive material capable of adsorbing ions. In an example, a voltage is applied between the first ion-adsorbing electrode (21) and the second ion-adsorbing electrode (22), with the first and second ion-adsorbing electrodes (21) and (22) being immersed in the drinking water (25). The applied voltage regulates the amount of ions adsorbed on the first and second electrically conductive materials, and thereby the hardness of the drinking water is regulated.
摘要:
A photoelectric conversion device including a substrate and a pin type photoelectric conversion layer disposed on the surface of the substrate is provided. The pin type photoelectric conversion layer includes a first pin type photoelectric conversion layer formed by stacking a p type semiconductor layer, an i type semiconductor layer serving as an amorphous semiconductor layer and an n type semiconductor layer. The first pin type photoelectric conversion layer includes the first portion located on a part of the surface of the substrate and the second portion located on another part of the surface of the substrate. The first portion is higher in concentration of at least one impurity element selected from oxygen, nitrogen and carbon than the second portion. The first portion is less in thickness than the second portion.
摘要:
When reverse bias processing is performed on a plurality of photoelectric conversion devices connected in series, different potentials are applied to electrodes of three or more photoelectric conversion devices to simultaneously perform reverse bias processing on two or more reverse photoelectric conversion devices. Thereby, time taken to perform reverse bias processing on the photoelectric conversion devices can be reduced.
摘要:
A method for manufacturing a thin film photoelectric conversion module comprising the steps of: (A) forming a plurality of divided strings by dividing a string, in which thin film photoelectric conversion elements provided by sequentially laminating a first electrode layer, a photoelectric conversion layer and a second electrode layer on the surface of an insulating substrate are electrically connected in series, into a plurality of strings by dividing grooves, electrically insulating and separating the first electrode layer and the second electrode layer one from the other and extending in a serial connection direction; and (B) performing reverse biasing by applying a reverse bias voltage to each of thin film photoelectric conversion elements of the divided string.
摘要:
The portable device of the present invention for regulating the hardness of drinking water includes a collapsible electrode group (20) including ion-adsorbing electrodes (21) and (22) and a power supply (13) for applying a voltage between the ion-adsorbing electrode (21) and the ion-adsorbing electrode (22). The first ion-adsorbing electrode (21) includes a first electrically conductive material capable of adsorbing ions. The second ion-adsorbing electrode includes a second electrically conductive material capable of adsorbing ions. In an example, a voltage is applied between the first ion-adsorbing electrode (21) and the second ion-adsorbing electrode (22), with the first and second ion-adsorbing electrodes (21) and (22) being immersed in the drinking water (25). The applied voltage regulates the amount of ions adsorbed on the first and second electrically conductive materials, and thereby the hardness of the drinking water is regulated.