Method of cutting integrated circuit chips from wafer by ablating with laser and cutting with saw blade
    1.
    发明申请
    Method of cutting integrated circuit chips from wafer by ablating with laser and cutting with saw blade 有权
    通过激光切割和锯片切割从晶片切割集成电路芯片的方法

    公开(公告)号:US20060189099A1

    公开(公告)日:2006-08-24

    申请号:US11174710

    申请日:2005-07-05

    IPC分类号: H01L21/78

    摘要: A method of cutting an integrated circuit chip from a wafer having a plurality of integrated circuit chips is provided. An upper portion of the wafer is ablated using two laser beams to form two substantially parallel trenches that extend into the wafer from a top surface of the wafer through intermetal dielectric layers and at least partially into a substrate of the wafer. After the ablating to form the two trenches, cutting through the wafer between outer sidewalls of the two laser-ablated trenches with a saw blade is performed. A width between the outer sidewalls of the two laser-ablated trenches is greater than a cutting width of the saw blade. This may be particularly useful in lead-free packaging applications and/or applications where the intermetal dielectric layers use low-k dielectric materials, for example.

    摘要翻译: 提供了从具有多个集成电路芯片的晶片切割集成电路芯片的方法。 使用两个激光束来消除晶片的上部,以形成两个基本上平行的沟槽,其从晶片的顶表面穿过金属间电介质层并且至少部分地延伸到晶片的衬底中延伸到晶片中。 在消融以形成两个沟槽之后,执行用锯片在两个激光烧蚀的沟槽的外侧壁之间切割晶片。 两个激光烧蚀沟槽的外侧壁之间的宽度大于锯片的切割宽度。 这对于例如在金属间电介质层使用低k电介质材料的无铅封装应用和/或应用中尤其有用。