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公开(公告)号：US07598182B2
公开(公告)日：2009-10-06
申请号：US10569471
申请日：2004-08-27
IPC分类号： G03C1/00
CPC分类号： G03F7/091 , Y10S438/952
摘要： There is provided an anti-reflective coating forming composition for use in a lithography and for forming an anti-reflective coating that can be developed with an alkaline developer for photoresist, and a method for forming photoresist pattern by use of the anti-reflective coating forming composition. Concretely, the composition comprises a polyamic acid produced from a tetracarboxylic dianhydride compound and a diamine compound having at least one carboxyl group, a compound having at least two epoxy groups, and a solvent.
摘要翻译： 提供了用于光刻和用于形成可用用于光致抗蚀剂的碱性显影剂显影的抗反射涂层的抗反射涂层形成组合物，以及通过使用抗反射涂层形成法形成光刻胶图案的方法 组成。 具体地，该组合物包含由四羧酸二酐化合物制得的聚酰胺酸和具有至少一个羧基的二胺化合物，具有至少两个环氧基的化合物和溶剂。
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2.发明授权公开(公告)号：US08501393B2
公开(公告)日：2013-08-06
申请号：US11596391
申请日：2005-05-11
IPC分类号： G03F7/11 , G03F7/20 , G03F7/38 , H01L21/027
CPC分类号： G03F7/0392 , G03F7/091 , G03F7/095 , G03F7/11 , G03F7/168
摘要： There is provided an anti-reflective coating forming composition for use in a lithography of the manufacture of semiconductor devices and for forming an anti-reflective coating that can be developed with an alkaline developer for photoresist, and a method for forming photoresist pattern by use of the anti-reflective coating forming composition. The anti-reflective coating forming composition comprises a compound having at least two vinyl ether groups, an alkali-soluble compound having at least two phenolic hydroxy groups or carboxyl groups, a photoacid generator, and a solvent.
摘要翻译： 提供了一种用于制造半导体器件的光刻中的抗反射涂层形成组合物和用于形成可用用于光致抗蚀剂的碱性显影剂显影的抗反射涂层，以及通过使用 抗反射涂层形成组合物。 抗反射涂层形成组合物包含具有至少两个乙烯基醚基团的化合物，具有至少两个酚羟基或羧基的碱溶性化合物，光致酸产生剂和溶剂。
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3.发明申请公开(公告)号：US20080138744A1
公开(公告)日：2008-06-12
申请号：US11596391
申请日：2005-05-11
CPC分类号： G03F7/0392 , G03F7/091 , G03F7/095 , G03F7/11 , G03F7/168
摘要： There is provided an anti-reflective coating forming composition for use in a lithography of the manufacture of semiconductor devices and for forming an anti-reflective coating that can be developed with an alkaline developer for photoresist, and a method for forming photoresist pattern by use of the anti-reflective coating forming composition. The anti-reflective coating forming composition comprises a compound having at least two vinyl ether groups, an alkali-soluble compound having at least two phenolic hydroxy groups or carboxyl groups, a photoacid generator, and a solvent.
摘要翻译： 提供了一种用于制造半导体器件的光刻中的抗反射涂层形成组合物和用于形成可用用于光致抗蚀剂的碱性显影剂显影的抗反射涂层，以及通过使用 抗反射涂层形成组合物。 抗反射涂层形成组合物包含具有至少两个乙烯基醚基团的化合物，具有至少两个酚羟基或羧基的碱溶性化合物，光致酸产生剂和溶剂。
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公开(公告)号：US20070004228A1
公开(公告)日：2007-01-04
申请号：US10569471
申请日：2004-08-27
IPC分类号： H01L21/31
CPC分类号： G03F7/091 , Y10S438/952
摘要： There is provided an anti-reflective coating forming composition for use in a lithography and for forming an anti-reflective coating that can be developed with an alkaline developer for photoresist, and a method for forming photoresist pattern by use of the anti-reflective coating forming composition. Concretely, the composition comprises a polyamic acid produced from a tetracarboxylic dianhydride compound and a diamine compound having at least one carboxyl group, a compound having at least two epoxy groups, and a solvent.
摘要翻译： 提供了用于光刻和用于形成可用用于光致抗蚀剂的碱性显影剂显影的抗反射涂层的抗反射涂层形成组合物，以及通过使用抗反射涂层形成法形成光刻胶图案的方法 组成。 具体地，该组合物包含由四羧酸二酐化合物制得的聚酰胺酸和具有至少一个羧基的二胺化合物，具有至少两个环氧基的化合物和溶剂。
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5.发明授权Sulfonate-containing anti-reflective coating forming composition for lithography 有权含有磺酸盐的抗反射涂层组合物，用于光刻公开(公告)号：US07595144B2
公开(公告)日：2009-09-29
申请号：US11666080
申请日：2005-10-25
IPC分类号： G03F7/11
CPC分类号： G03F7/091 , C08G59/1433 , C08G59/1483 , C08G59/26 , C08G59/28 , Y10S438/952
摘要： There is provided an anti-reflective coating forming composition for lithography comprising a polymer compound, a crosslinking compound, a crosslinking catalyst, a sulfonate compound and a solvent. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light, causes no intermixing with photoresists, has a higher dry etching rate compared with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
摘要翻译： 提供了一种用于光刻的抗反射涂层形成组合物，其包含高分子化合物，交联化合物，交联催化剂，磺酸盐化合物和溶剂。 由组合物获得的抗反射涂层对反射光具有很高的防止效果，不会与光致抗蚀剂混合，与光致抗蚀剂相比具有更高的干蚀刻速率，可以在下部形成没有底脚的光致抗蚀剂图案，并且可以使用 在光刻工艺中使用诸如ArF准分子激光束和F2准分子激光束等。
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6.发明申请Sulfonate-Containing Anti-Reflective Coating Forming Composition for Lithography 有权含磺酸盐的防反射涂料组合物用于光刻公开(公告)号：US20080003524A1
公开(公告)日：2008-01-03
申请号：US11666080
申请日：2005-10-25
IPC分类号： G03F7/11 , C08G59/14 , H01L21/027
CPC分类号： G03F7/091 , C08G59/1433 , C08G59/1483 , C08G59/26 , C08G59/28 , Y10S438/952
摘要： There is provided an anti-reflective coating forming composition for lithography comprising a polymer compound, a crosslinking compound, a crosslinking catalyst, a sulfonate compound and a solvent. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light causes no intermixing with photoresists, has a higher dry etching rate compared with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
摘要翻译： 提供了一种用于光刻的抗反射涂层形成组合物，其包含高分子化合物，交联化合物，交联催化剂，磺酸盐化合物和溶剂。 由组合物得到的抗反射涂层对反射光具有很高的防止效果，不会与光致抗蚀剂混合，与光致抗蚀剂相比具有更高的干蚀刻速率，可以形成在下部没有基脚的光致抗蚀剂图案，并且可以用于 通过使用诸如ArF准分子激光束和F2准分子激光束等光的光刻工艺
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公开(公告)号：US09023583B2
公开(公告)日：2015-05-05
申请号：US13879125
申请日：2011-10-07
申请人： Takahiro Kishioka , Daisuke Sakuma , Shigeo Kimura , Hirokazu Nishimaki , Tomoya Ohashi , Yuki Usui
发明人： Takahiro Kishioka , Daisuke Sakuma , Shigeo Kimura , Hirokazu Nishimaki , Tomoya Ohashi , Yuki Usui
CPC分类号： G03F7/0752 , C07F7/1804 , C08G77/28 , C09D183/08 , G03F7/0751 , G03F7/165 , G03F7/20 , G03F7/30
摘要： There is provided a composition for forming a monolayer or a multilayer on the substrate. A composition for forming a monolayer or a multilayer containing a silane compound of Formula (1A) or Formula (1B): [where R1s are independently a methyl group or an ethyl group; Xs are independently a C1-10 linking group; and Zs are independently a C1-10 alkyl group or a phenyl group optionally having a substituent, where X optionally contains at least one oxygen atom or sulfur atom in the main chain thereof, and when Z is an alkyl group, at least one hydrogen atom of the alkyl group is optionally substituted with a fluorine atom] and an organic solvent.
摘要翻译： 提供了在基材上形成单层或多层的组合物。 用于形成单层的组合物或含有式（1A）或式（1B）的硅烷化合物的多层：[其中R 1独立地是甲基或乙基; X独立地为C1-10连接基团; 并且Z独立地为C1-10烷基或任选具有取代基的苯基，其中X任选地在其主链中含有至少一个氧原子或硫原子，当Z为烷基时，至少一个氢原子 的烷基任选被氟原子取代]和有机溶剂。
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公开(公告)号：US20060143203A1
公开(公告)日：2006-06-29
申请号：US10559607
申请日：2004-11-08
申请人： Kamen Kanev , Shigeo Kimura
发明人： Kamen Kanev , Shigeo Kimura
IPC分类号： G06F17/00
CPC分类号： G06T1/005 , G06K19/06037 , G06T2201/0051 , G06T2201/0065 , H04N19/17 , H04N19/20
摘要： [Problem to be Solved] To provide a digital information carrier which enables blending of cluster information carrier comprising of image objects joined together to other viewable content (a character, an image, background, etc.) of a document, to seamlessly unify a printed document and an electronic document when accessing the cluster information carrier by an image recognition means, such as partial scanning, and to perform a method for finding positional information and processing commutative with the written contents of the document without incorrect recognition at high speed and a method for recognition. [Solution Means] A digital information carrier comprising of a plurality of image objects as constituent elements, containing a cluster information carrier constituted by at least two image objects, and having bit data correlated to the relative relationship of at least two image objects concerned serving as configuration elements were used. In addition judgment conditions of whether the two image objects concerned serving as configuration elements constitute a cluster information carrier were correlated to the above-mentioned cluster information carrier. Furthermore, configuration of a logical block obtained by unifying a plurality of unit information carriers which are the minimum units at the time of decoding bit data from a digital information carrier was realized, and configuration of a new logical block was enabled by replacing at least one of the configuration elements of the concerned logical block with the above-mentioned unit information carrier adjacent to the logical block concerned.
摘要翻译： [待解决的问题]为了提供数字信息载体，其能够将包括连接在一起的图像对象的群集信息载体与文档的其他可见内容（字符，图像，背景等）混合，以将打印的 文档和电子文档，以及通过诸如部分扫描的图像识别装置访问群集信息载体时，并且执行用于找到位置信息的方法和用文件的书面内容进行交换的方法，而不会高速地进行不正确的识别和方法 认可。 [解决方案]一种数字信息载体，包括作为组成元素的多个图像对象，包含由至少两个图像对象构成的群集信息载体，并且具有与至少两个图像对象的相关关系相关的比特数据， 配置元素被使用。 此外，作为构成要素的两个图像对象构成群集信息载体的判定条件与上述的群集信息载体相关联。 此外，实现了通过统一从数字信息载体解码位数据时的最小单位的多个单位信息载体获得的逻辑块的配置，并且通过将至少一个 相关逻辑块的配置元素与上述与所涉及的逻辑块相邻的单元信息载体。
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公开(公告)号：US06818969B2
公开(公告)日：2004-11-16
申请号：US10283365
申请日：2002-10-30
IPC分类号： H01L23495
CPC分类号： H01L23/49838 , H01L21/4832 , H01L23/4824 , H01L23/49541 , H01L23/49562 , H01L23/49844 , H01L23/66 , H01L24/45 , H01L24/48 , H01L24/49 , H01L27/0605 , H01L2223/6644 , H01L2223/6688 , H01L2224/05554 , H01L2224/32057 , H01L2224/32225 , H01L2224/32245 , H01L2224/451 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48463 , H01L2224/49171 , H01L2224/73265 , H01L2224/83385 , H01L2224/97 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/01031 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/07802 , H01L2924/09701 , H01L2924/10161 , H01L2924/10253 , H01L2924/10329 , H01L2924/12042 , H01L2924/1306 , H01L2924/13063 , H01L2924/14 , H01L2924/1423 , H01L2924/15313 , H01L2924/15787 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H03K17/002 , H01L2224/85 , H01L2224/83 , H01L2924/00 , H01L2224/45099 , H01L2224/05599 , H01L2924/00012
摘要： A semiconductor device includes four input terminals, four leads extending from the corresponding input terminals and a semiconductor chip that has a first circuit and a second circuit and is mounted on one of the leads. The lead having the semiconductor chip thereon bends in a plane of the substrate so that an end portion and a mid portion of the lead are exposed on one side of the semiconductor chip. One of the input electrode pads of the first circuit is connected to the end portion of the lead by a bonding wire. The end portion of the lead is on the opposite side of the mid portion of the lead with respect to one of the leads that is connected to one of the input electrode pads of the second circuit by a bonding wire. This configuration achieves a crossing wiring structure within the packaging. By changing the connection of bonding wires, the crossing wiring structure is easily undone.
摘要翻译： 半导体器件包括四个输入端子，从相应的输入端子延伸的四个引线和具有第一电路和第二电路并且安装在引线之一上的半导体芯片。 其上具有半导体芯片的引线在基板的平面中弯曲，使得引线的端部和中间部分在半导体芯片的一侧露出。 第一电路的输入电极焊盘之一通过接合线连接到引线的端部。 引线的端部相对于通过接合线连接到第二电路的一个输入电极焊盘的引线之一位于引线的中间部分的相对侧。 该配置实现了包装内的交叉布线结构。 通过改变接合线的连接，交叉布线结构容易被取消。
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10.发明授权公开(公告)号：US06421520B2
公开(公告)日：2002-07-16
申请号：US09757620
申请日：2001-01-11
申请人： Koji Masuda , Shigeo Kimura , Takao Ogata , Kazuhiro Hasegawa
发明人： Koji Masuda , Shigeo Kimura , Takao Ogata , Kazuhiro Hasegawa
IPC分类号： G03G1509
CPC分类号： G03G15/0921
摘要： When the structure is arranged such that one of the repulsion poles is used as a developer layer thickness regulation pole, screw pitch-shaped density unevenness occurred at the rear end of a solid black image. To provide a developing apparatus, comprising a developing container containing developer including magnetic carrier and non-magnetic toner, a developer bearing body provided at an opening of the developer container, for rotating while bearing the developer, a magnet member provided within the developer bearing body, the magnet member having a first magnetic pole, and a second magnetic pole adjacent on the downstream side of the developer bearing body of the first magnetic pole in a direction of rotation thereof, having a second magnetic pole having the same polarity as the first magnetic pole, a regulating member provided in the vicinity of the second magnetic pole, for regulating an amount of developer on the developer bearing body, in which between the first magnetic pole and the second magnetic pole, there exists 40° or more an area having 8 mT or less in magnetic flux density in the direction of the normal to the surface of the developer bearing body.
摘要翻译： 当结构被布置为使得排斥极中的一个用作显影剂层厚度调节极时，在黑色黑色图像的后端处发生螺距螺距形密度不均匀。 为了提供一种显影装置，包括显影容器，该显影容器含有包含磁性载体和非磁性调色剂的显影剂，显影剂承载体，设置在显影剂容器的开口处，用于在承载显影剂的同时旋转;设置在显影剂承载体内的磁性构件 具有第一磁极的磁体部件和与第一磁极的旋转方向相邻的第一磁极的显影剂承载体的下游侧的第二磁极，具有与第一磁极相同极性的第二磁极 极，设置在第二磁极附近的调节构件，用于调节在第一磁极和第二磁极之间的显影剂承载体上的显影剂的量存在40°以上的面积为8 在显影剂承载体的表面的法线方向上的磁通密度为mT以下。
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