公开(公告)号：US11315931B2

公开(公告)日：2022-04-26

申请号：US16942197

申请日：2020-07-29

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Yu-Wei Ting ,  Chun-Yang Tsai ,  Kuo-Ching Huang

IPC分类号： H01L27/108 ,  H01L29/66 ,  H01L29/78 ,  H01L21/265 ,  H01L21/3105 ,  H01L21/768 ,  H01L21/8234 ,  H01L29/423 ,  H01L21/762 ,  H01L29/06

摘要： An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.

公开(公告)号：US20170033161A1

公开(公告)日：2017-02-02

申请号：US15292334

申请日：2016-10-13

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Yang Tsai ,  Yu-Wei Ting ,  Kuo-Ching Huang

IPC分类号： H01L27/24 ,  H01L45/00 ,  H01L23/528

CPC分类号： H01L27/2463 ,  G11C13/003 ,  G11C13/0069 ,  G11C13/0097 ,  G11C2013/0071 ,  G11C2213/79 ,  G11C2213/82 ,  H01L23/528 ,  H01L23/5283 ,  H01L27/101 ,  H01L27/2436 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/146 ,  H01L45/16 ,  H01L45/1675 ,  H01L2924/0002 ,  H01L2924/00

摘要： Some embodiments relate to an integrated circuit device including an array of memory cells disposed over a semiconductor substrate. An array of first metal lines are disposed at a first height over the substrate and are connected to the memory cells of the array. Each of the first metal lines has a first cross-sectional area. An array of second metal lines are disposed at a second height over the substrate and are connected to the memory cells of the array. Each of the second metal lines has a second cross-sectional area which is greater than the first cross-sectional area.

摘要翻译： 一些实施例涉及包括设置在半导体衬底上的存储器单元阵列的集成电路器件。 第一金属线阵列被布置在衬底上的第一高度处并连接到阵列的存储器单元。 每个第一金属线具有第一横截面积。 第二金属线阵列设置在衬底上的第二高度处，并连接到阵列的存储单元。 每个第二金属线具有大于第一横截面积的第二横截面积。

公开(公告)号：US20150187418A1

公开(公告)日：2015-07-02

申请号：US14152244

申请日：2014-01-10

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Yang Tsai ,  Yu-Wei Ting ,  Kuo-Ching Huang

IPC分类号： G11C13/00 ,  H01L27/24

CPC分类号： H01L27/2463 ,  G11C13/003 ,  G11C13/0069 ,  G11C13/0097 ,  G11C2013/0071 ,  G11C2213/79 ,  G11C2213/82 ,  H01L23/528 ,  H01L23/5283 ,  H01L27/101 ,  H01L27/2436 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/146 ,  H01L45/16 ,  H01L45/1675 ,  H01L2924/0002 ,  H01L2924/00

摘要： An integrated circuit device includes an array of RRAM cells, an array of bit lines for the array of RRAM cells, and an array of source lines for the array of RRAM cells. Both the source lines and the bit lines are in metal interconnect layers above the RRAM cells. The source line are thereby provided with a higher than conventional wire size, which increases the reset speed by approximately one order of magnitude. The lifetime of the RRAM transistors and the durability of the RRAM device are consequentially improved to a similar degree.

摘要翻译： 集成电路设备包括RRAM单元阵列，RRAM单元阵列的位线阵列，以及RRAM单元阵列的源极阵列。 源极线和位线都位于RRAM单元上方的金属互连层中。 因此，源极线被提供有高于常规电线尺寸，其将复位速度提高约一个数量级。 RRAM晶体管的寿命和RRAM器件的耐用性因此相应地得到改善。

公开(公告)号：US09893122B2

公开(公告)日：2018-02-13

申请号：US15292334

申请日：2016-10-13

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Yang Tsai ,  Yu-Wei Ting ,  Kuo-Ching Huang

IPC分类号： G11C11/00 ,  H01L27/24 ,  G11C13/00 ,  H01L23/528 ,  H01L45/00 ,  H01L27/10

CPC分类号： H01L27/2463 ,  G11C13/003 ,  G11C13/0069 ,  G11C13/0097 ,  G11C2013/0071 ,  G11C2213/79 ,  G11C2213/82 ,  H01L23/528 ,  H01L23/5283 ,  H01L27/101 ,  H01L27/2436 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/146 ,  H01L45/16 ,  H01L45/1675 ,  H01L2924/0002 ,  H01L2924/00

摘要： Some embodiments relate to an integrated circuit device including an array of memory cells disposed over a semiconductor substrate. An array of first metal lines are disposed at a first height over the substrate and are connected to the memory cells of the array. Each of the first metal lines has a first cross-sectional area. An array of second metal lines are disposed at a second height over the substrate and are connected to the memory cells of the array. Each of the second metal lines has a second cross-sectional area which is greater than the first cross-sectional area.

公开(公告)号：US09472596B2

公开(公告)日：2016-10-18

申请号：US14967697

申请日：2015-12-14

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Yang Tsai ,  Yu-Wei Ting ,  Kuo-Ching Huang

IPC分类号： G11C11/00 ,  H01L27/24 ,  G11C13/00 ,  H01L23/528 ,  H01L45/00

CPC分类号： H01L27/2463 ,  G11C13/003 ,  G11C13/0069 ,  G11C13/0097 ,  G11C2013/0071 ,  G11C2213/79 ,  G11C2213/82 ,  H01L23/528 ,  H01L23/5283 ,  H01L27/101 ,  H01L27/2436 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/146 ,  H01L45/16 ,  H01L45/1675 ,  H01L2924/0002 ,  H01L2924/00

摘要： Some embodiments relate to an integrated circuit device including an array of memory cells disposed over a semiconductor substrate. An array of first metal lines are disposed at a first height over the substrate and are connected to the memory cells of the array. Each of the first metal lines has a first cross-sectional area. An array of second metal lines are disposed at a second height over the substrate and are connected to the memory cells of the array. Each of the second metal lines has a second cross-sectional area which is greater than the first cross-sectional area.

摘要翻译： 一些实施例涉及包括设置在半导体衬底上的存储器单元阵列的集成电路器件。 第一金属线阵列被布置在衬底上的第一高度处并连接到阵列的存储器单元。 每个第一金属线具有第一横截面积。 第二金属线阵列设置在衬底上的第二高度处，并连接到阵列的存储单元。 每个第二金属线具有大于第一横截面积的第二横截面积。

公开(公告)号：US10062735B2

公开(公告)日：2018-08-28

申请号：US15347255

申请日：2016-11-09

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Yu-Wei Ting ,  Chi-Wen Liu ,  Chun-Yang Tsai ,  Kuo-Ching Huang

IPC分类号： H01L29/66 ,  H01L27/24 ,  H01L27/22 ,  H01L29/423 ,  H01L29/78

CPC分类号： H01L27/2454 ,  H01L27/228 ,  H01L27/2463 ,  H01L29/4236 ,  H01L29/7827

摘要： Some embodiments of the present disclosure relate to an integrated chip having a vertical transistor device. The integrated chip may have a semiconductor body with a trench extending along first sides of a source region, a channel region over the source region, and a drain region over the channel region. A gate electrode is arranged along a first sidewall of the trench, and a metal contact is arranged on the drain region. An isolation dielectric material is disposed within the trench. The isolation dielectric material is vertically over a top surface of the gate electrode and is laterally adjacent to the gate electrode.

公开(公告)号：US09543404B2

公开(公告)日：2017-01-10

申请号：US14826318

申请日：2015-08-14

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Yu-Wei Ting ,  Chun-Yang Tsai ,  Kuo-Ching Huang

IPC分类号： H01L27/00 ,  H01L29/66 ,  H01L27/24 ,  G11C11/40 ,  H01L29/732 ,  H01L29/82 ,  H01L45/00 ,  G11C13/00 ,  H01L27/22

CPC分类号： H01L29/732 ,  G11C11/161 ,  G11C11/40 ,  G11C13/0002 ,  G11C13/003 ,  G11C13/0069 ,  G11C2213/79 ,  H01L27/226 ,  H01L27/228 ,  H01L27/2436 ,  H01L27/2445 ,  H01L27/2454 ,  H01L29/66272 ,  H01L29/66333 ,  H01L29/82 ,  H01L45/04

摘要： Some aspects of this disclosure relate to a memory device. The memory device includes a collector region having a first conductivity type and which is coupled to a source line of the memory device. A base region is formed over the collector region and has a second conductivity type. A gate structure is coupled to the base region and acts as a shared word line for first and second neighboring memory cells of the memory device. First and second emitter regions are formed over the base region and have the first conductivity type. The first and second emitter regions are arranged on opposite sides of the gate structure. First and second contacts extend upwardly from the first and second emitter regions, respectively, and couple the first and second emitter regions to first and second data storage elements, respectively, of the first and second neighboring memory cells, respectively.

摘要翻译： 本公开的一些方面涉及存储器设备。 存储器件包括具有第一导电类型并且耦合到存储器件的源极线的集电极区域。 基极区域形成在集电极区域上并且具有第二导电类型。 栅极结构耦合到基极区域并用作存储器件的第一和第二相邻存储器单元的共享字线。 第一和第二发射极区域形成在基极区域上并且具有第一导电类型。 第一和第二发射极区域布置在栅极结构的相对侧上。 第一和第二触点分别从第一和第二发射极区域向上延伸，并分别将第一和第二发射极区域耦合到第一和第二相邻存储器单元的第一和第二数据存储元件。

公开(公告)号：US09520446B2

公开(公告)日：2016-12-13

申请号：US14450809

申请日：2014-08-04

申请人： Taiwan Semiconductor Manufacturing Co. Ltd.

发明人： Yu-Wei Ting ,  Chi-Wen Liu ,  Chun-Yang Tsai ,  Kuo-Ching Huang

IPC分类号： H01L29/66 ,  H01L27/24 ,  H01L27/22

CPC分类号： H01L27/2454 ,  H01L27/228 ,  H01L27/2463 ,  H01L29/4236 ,  H01L29/7827

摘要： Some embodiments of the present disclosure relate to a memory array comprising memory cells having vertical gate-all-around (GAA) selection transistors. In some embodiments, the memory array has a source region disposed within an upper surface of a semiconductor body, and a semiconductor pillar of semiconductor material extending outward from the upper surface of the semiconductor body and having a channel region and an overlying drain region. A gate region vertically overlies the source region at a position laterally separated from sidewalls of the channel region by a gate dielectric layer. A first metal contact couples the drain region to a data storage element that stores data. The vertical GAA selection transistors provide for good performance, while decreasing the size of the selection transistor relative to a planar MOSFET, so that the selection transistors do not negatively impact the size of the memory array.

摘要翻译： 本公开的一些实施例涉及包括具有垂直栅极全周（GAA）选择晶体管的存储器单元的存储器阵列。 在一些实施例中，存储器阵列具有设置在半导体本体的上表面内的源极区域和从半导体本体的上表面向外延伸并具有沟道区域和上覆漏极区域的半导体材料的半导体柱。 栅极区域通过栅极介电层在与沟道区域的侧壁横向分离的位置处垂直地覆盖源极区域。 第一金属触点将漏极区域耦合到存储数据的数据存储元件。 垂直GAA选择晶体管提供良好的性能，同时相对于平面MOSFET减小选择晶体管的尺寸，使得选择晶体管不会对存储器阵列的尺寸产生负面影响。

公开(公告)号：US20160099291A1

公开(公告)日：2016-04-07

申请号：US14967697

申请日：2015-12-14

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Yang Tsai ,  Yu-Wei Ting ,  Kuo-Ching Huang

IPC分类号： H01L27/24 ,  H01L23/528 ,  H01L45/00

CPC分类号： H01L27/2463 ,  G11C13/003 ,  G11C13/0069 ,  G11C13/0097 ,  G11C2013/0071 ,  G11C2213/79 ,  G11C2213/82 ,  H01L23/528 ,  H01L23/5283 ,  H01L27/101 ,  H01L27/2436 ,  H01L45/08 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/146 ,  H01L45/16 ,  H01L45/1675 ,  H01L2924/0002 ,  H01L2924/00

摘要： Some embodiments relate to an integrated circuit device including an array of memory cells disposed over a semiconductor substrate. An array of first metal lines are disposed at a first height over the substrate and are connected to the memory cells of the array. Each of the first metal lines has a first cross-sectional area. An array of second metal lines are disposed at a second height over the substrate and are connected to the memory cells of the array. Each of the second metal lines has a second cross-sectional area which is greater than the first cross-sectional area.

摘要翻译： 一些实施例涉及包括设置在半导体衬底上的存储器单元阵列的集成电路器件。 第一金属线阵列被布置在衬底上的第一高度处并连接到阵列的存储器单元。 每个第一金属线具有第一横截面积。 第二金属线阵列设置在衬底上的第二高度处，并连接到阵列的存储单元。 每个第二金属线具有大于第一横截面积的第二横截面积。

公开(公告)号：US20140177330A1

公开(公告)日：2014-06-26

申请号：US13723762

申请日：2012-12-21

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Yu-Wei Ting ,  Chun-Yang Tsai ,  Kuo-Ching Huang

IPC分类号： H01L29/732 ,  H01L29/82 ,  H01L45/00 ,  G11C11/40

CPC分类号： H01L29/732 ,  G11C11/161 ,  G11C11/40 ,  G11C13/0002 ,  G11C13/003 ,  G11C13/0069 ,  G11C2213/79 ,  H01L27/226 ,  H01L27/228 ,  H01L27/2436 ,  H01L27/2445 ,  H01L27/2454 ,  H01L29/66272 ,  H01L29/66333 ,  H01L29/82 ,  H01L45/04

摘要： Some aspects of this disclosure relate to a memory device. The memory device includes a collector region having a first conductivity type and which is coupled to a source line of the memory device. A base region is formed over the collector region and has a second conductivity type. A gate structure is coupled to the base region and acts as a shared word line for first and second neighboring memory cells of the memory device. First and second emitter regions are formed over the base region and have the first conductivity type. The first and second emitter regions are arranged on opposite sides of the gate structure. First and second contacts extend upwardly from the first and second emitter regions, respectively, and couple the first and second emitter regions to first and second data storage elements, respectively, of the first and second neighboring memory cells, respectively.

摘要翻译： 本公开的一些方面涉及存储器设备。 存储器件包括具有第一导电类型并且耦合到存储器件的源极线的集电极区域。 基极区域形成在集电极区域上并且具有第二导电类型。 栅极结构耦合到基极区域并用作存储器件的第一和第二相邻存储器单元的共享字线。 第一和第二发射极区域形成在基极区域上并且具有第一导电类型。 第一和第二发射极区域布置在栅极结构的相对侧上。 第一和第二触点分别从第一和第二发射极区域向上延伸，并分别将第一和第二发射极区域分别耦合到第一和第二相邻存储器单元的第一和第二数据存储元件。