Template treatment method, program, computer storage medium, template treatment apparatus and imprint system
    3.
    发明授权
    Template treatment method, program, computer storage medium, template treatment apparatus and imprint system 失效
    模板处理方法,程序,计算机存储介质,模板处理装置和压印系统

    公开(公告)号:US08522712B2

    公开(公告)日:2013-09-03

    申请号:US12943204

    申请日:2010-11-10

    IPC分类号: B05C5/02

    摘要: In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.

    摘要翻译: 在模板处理面上形成脱模剂的膜的模板处理中,首先对模板的处理面进行清洗。 此后,在涂布单元中,将脱模剂施加到模板的处理表面。 然后将模板上的脱模剂干燥。 然后,将酒精施加到模板上的脱模剂上,使脱模剂粘附在模板的处理表面上,并除去脱模剂的未反应部分。 此后,将模板上的醇干燥并除去。 以这种方式,在模板的处理表面上以预定的膜厚度形成剥离剂的膜。

    Hydrophobicizing apparatus, hydrophobicizing method and storage medium
    4.
    发明授权
    Hydrophobicizing apparatus, hydrophobicizing method and storage medium 有权
    疏水装置,疏水化方法和储存介质

    公开(公告)号:US08430967B2

    公开(公告)日:2013-04-30

    申请号:US12859927

    申请日:2010-08-20

    IPC分类号: C23C16/00

    CPC分类号: C23C16/24 C23C16/4485

    摘要: The hydrophobicizing apparatus includes a vaporizing surface forming member of which surface is located in a vaporizing room; a vaporizing surface heating unit that heats the vaporizing surface forming member; a liquid chemical supply port that supplies a liquid chemical for a hydrophobicizing process on the surface of the vaporizing surface forming member; a gas inlet port that introduces a carrier gas into the vaporizing room; an outlet port that supplies a hydrophobicizing gas vaporized in the vaporizing room; and a processing chamber that performs the hydrophobicizing process on a substrate accommodated therein by the hydrophobicizing gas supplied through the outlet port. With this configuration, the hydrophobicizing gas of a high concentration can be supplied onto the substrate. Further, since the stored liquid chemical is not in contact with the carrier gas when a process is not being performed, degradation of the liquid chemical is suppressed.

    摘要翻译: 疏水化装置包括表面位于蒸发室内的蒸发表面形成构件; 蒸发表面加热单元,其加热蒸发表面形成构件; 在蒸发表面形成构件的表面上提供用于疏水化处理的液体化学品的液体化学物质供给口; 将载气引入蒸发室的气体入口; 提供在蒸发室中蒸发的疏水化气体的出口; 以及处理室,其通过由出口供给的疏水化气体在容纳在其中的基板上进行疏水化处理。 利用这种结构,能够将高浓度的疏水化气体供给到基板上。 此外,由于当不进行处理时,储存的液体化学品不与载气接触,所以抑制了液体化学物质的劣化。

    POLYACRYLIC ACID (SALT)-TYPE WATER ABSORBENT RESIN AND METHOD FOR PRODUCING OF SAME
    5.
    发明申请
    POLYACRYLIC ACID (SALT)-TYPE WATER ABSORBENT RESIN AND METHOD FOR PRODUCING OF SAME 有权
    聚丙烯酸(盐)型吸水树脂及其制造方法

    公开(公告)号:US20120157625A1

    公开(公告)日:2012-06-21

    申请号:US13392639

    申请日:2010-08-27

    IPC分类号: C08F2/01 C08F20/06

    摘要: Disclosed is a method for producing a water absorbent resin, by which a surface-crosslinked water absorbent resin having excellent physical properties can be efficiently obtained at low cost, while assuring high productivity. When the production scale is increased to a continuous production at 1 t/hr or more, the physical properties are improved and stabilized (for example, standard deviation of the physical properties is reduced) by a surface-crosslinking treatment, and the absorption against pressure (AAP) and liquid permeability (SFC) are further improved. Specifically disclosed is a method for producing a water absorbent resin, which is characterized in that the stirring shaft of the continuous mixing apparatus for the surface-crosslinking agent is heated during the mixing step of the surface-crosslinking agent or that the continuous mixing apparatus for the surface-crosslinking agent is operated at a pressure that is reduced relative to the ambient pressure and a gas flow is passed through the mixing apparatus during the mixing of the surface-crosslinking agent so that the gas flow in the mixing apparatus is 40° C. or more (when defined with respect to the gas temperature at the exit).

    摘要翻译: 公开了一种生产吸水性树脂的方法,通过该方法可以以低成本有效地获得具有优异物理性能的表面交联吸水性树脂,同时确保高生产率。 当生产规模增加到1t / hr以上的连续生产时,通过表面交联处理改善和稳定物理性能(例如物理性能的标准偏差),并且抗压力 (AAP)和液体渗透性(SFC)进一步提高。 具体公开了一种吸水性树脂的制造方法,其特征在于,表面交联剂的连续混合装置的搅拌轴在表面交联剂的混合工序中被加热, 表面交联剂在相对于环境压力降低的压力下操作,并且在混合表面交联剂期间使气流通过混合装置,使得混合装置中的气流为40℃ 或更多(当相对于出口处的气体温度定义时)。

    TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM
    6.
    发明申请
    TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM 有权
    模板处理装置和印刷系统

    公开(公告)号:US20120097336A1

    公开(公告)日:2012-04-26

    申请号:US13378163

    申请日:2010-06-21

    IPC分类号: B05C11/00 B29C65/24 C23C16/44

    摘要: The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit.

    摘要翻译: 本发明是一种模板处理装置,在模板上形成具有形成在其前表面上的转印图案的模板上的脱模剂的膜,该模板处理装置包括:处理站,在前表面形成脱模剂膜 模板; 以及能够保持多个模板并将模板搬入/离开处理站的模板搬入/出站,其中处理站包括:清洁模板的前表面的清洁单元; 涂布单元,将脱模剂施加到模板的清洁前表面上; 加热单元烘烤施加的脱模剂; 以及将模板携带到清洁单元,涂覆单元和加热单元的携带单元。

    IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE MEDIUM
    7.
    发明申请
    IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE MEDIUM 审中-公开
    印刷系统,印刷方法和非电子计算机存储介质

    公开(公告)号:US20120086142A1

    公开(公告)日:2012-04-12

    申请号:US13378079

    申请日:2010-06-21

    IPC分类号: B29C59/02 B29C59/00 B28B17/00

    摘要: The present invention is a system including: an imprint unit transferring a transfer pattern to a coating film on a substrate using a template to form a predetermined pattern in the coating film; a treatment station connected to the imprint unit and performing a predetermined treatment on the template; a template carry-in/out station connected to the treatment station, capable of keeping templates, and carrying the template in/out from/to the treatment station; a carry line provided through the imprint unit and carrying the template between the imprint unit and the treatment station; and a substrate carry-in/out station connected to the imprint unit, capable of keeping substrates, and carrying the substrate in/out from/to the imprint unit.

    摘要翻译: 本发明是一种系统,包括:压印单元,使用模板将转印图案转印到基板上的涂膜上,以在涂膜中形成预定图案; 连接到压印单元并对模板执行预定处理的处理站; 连接到治疗台的模板进/出站,能够保存模板,并将模板从/移出到处理站; 通过压印单元提供的携带线,并且在压印单元和处理站之间承载模板; 以及连接到压印单元的基板输入/输出站,能够保持基板,并将基板输入/输出到压印单元。

    Solar Cell Array
    8.
    发明申请
    Solar Cell Array 审中-公开
    太阳能电池阵列

    公开(公告)号:US20100288336A1

    公开(公告)日:2010-11-18

    申请号:US12681764

    申请日:2008-10-03

    IPC分类号: H01L31/048

    摘要: Provided is a solar cell array having excellent power generation efficiency by being capable of efficiently cooling solar cell panels with a simple structure. The solar cell array according to the present invention includes a first solar cell panel and a second solar cell panel, and an installation member configured to install the first and second solar cell panels, the installation member being disposed with a space on back surface side of the installation member when installed, and holds the first and second solar cell panels with a gap between a first edge along one side of the first solar cell panel and a second edge along one side of the second solar cell panel, the solar cell array further including a wind-blocking wall configured to extend from a portion holding the first edge of the first solar cell panel toward the back surface, and a configured to allow communication between a space on a front surface side of the first solar cell panel and a space on a back surface side of the second solar cell panel through the gap.

    摘要翻译: 提供一种通过能够以简单的结构有效地冷却太阳能电池面板而具有优异的发电效率的太阳能电池阵列。 根据本发明的太阳能电池阵列包括第一太阳能电池面板和第二太阳能电池面板,以及安装构件,用于安装第一和第二太阳能电池面板,安装构件设置在 安装构件,并且在沿着第一太阳能电池面板的一侧的第一边缘和沿着第二太阳能电池面板的一侧的第二边缘之间具有间隙地保持第一和第二太阳能电池面板,将太阳能电池阵列进一步 包括防风壁,其被配置为从保持第一太阳能电池面板的第一边缘朝向背面的部分延伸,并且被配置为允许第一太阳能电池面板的正面侧的空间与空间 在第二太阳能电池板的背面侧通过间隙。

    Developing treatment apparatus and developing treatment method
    10.
    发明授权
    Developing treatment apparatus and developing treatment method 有权
    开发治疗仪器和开发治疗方法

    公开(公告)号:US07766566B2

    公开(公告)日:2010-08-03

    申请号:US11495732

    申请日:2006-07-31

    IPC分类号: G03D5/04

    摘要: In the present invention, a substrate transfer unit into/from which a substrate is transferred from/to the outside of a treatment container and a developing treatment unit in which development of the substrate is performed are arranged side by side in the treatment container, and a carrier mechanism is provided which carries the substrate while grasping an outside surface of the substrate from both sides, between the substrate transfer unit and the developing treatment unit. A developing solution supply nozzle for supplying a developing solution onto the substrate and a gas blow nozzle for blowing a gas to the substrate, are provided between the substrate transfer unit and the developing treatment unit and above a carriage path along which the substrate is carried, and a cleaning solution supply nozzle is provided in the developing treatment unit for supplying a cleaning solution onto the substrate. According to the present invention, since the substrate is carried with its outside surface being grasped, spread of contamination can be prevented to restrain generation of particles in the treatment container.

    摘要翻译: 在本发明中,在处理容器中并排设置有将基板从处理容器的外部转移到基板转移单元和进行基板的显影的显影处理单元,并且 提供了一种承载机构,其承载基板,同时从基板转印单元和显影处理单元之间的两侧抓住基板的外表面。 用于将显影液供给到基板上的显影液供给喷嘴和用于将气体吹送到基板的气体吹出喷嘴设置在基板转印单元和显影处理单元之间以及载置基板的滑架路径上方, 并且在显影处理单元中设置清洁液供给喷嘴,用于将清洗液供给到基板上。 根据本发明,由于基板的外表面被抓住,因此可以防止污染物的扩散,从而抑制处理容器中的颗粒的产生。