公开(公告)号：US5889299A

公开(公告)日：1999-03-30

申请号：US804394

申请日：1997-02-21

申请人： Kazuhide Abe ,  Shuichi Komatsu ,  Mitsuaki Izuha ,  Noburu Fukushima ,  Kenya Sano ,  Takashi Kawakubo

发明人： Kazuhide Abe ,  Shuichi Komatsu ,  Mitsuaki Izuha ,  Noburu Fukushima ,  Kenya Sano ,  Takashi Kawakubo

IPC分类号： H01L21/02 ,  H01L29/76

CPC分类号： H01L28/55

摘要： A thin film capacitor including a first electrode having on its surface a (100) face of cubic system or a (001) face of tetragonal system, a dielectric thin film epitaxially grown on the first electrode and exhibiting a crystal structure which inherently belongs to a perovskite structure of cubic system, and a second electrode formed on the dielectric thin film. Further, the dielectric thin film meets the following relationship V/V.sub.0 .gtoreq.1.01 where a unit lattice volume of true perovskite crystal structure belonging to the cubic system (lattice constant a.sub.0) is represented by V.sub.0 =a.sub.0.sup.3, and a unit lattice volume (lattice constant a=b.noteq.c) which is strained toward a tetragonal system after the epitaxial growth is represented by V=a.sup.2 c, and also meets the following relationship c/a.gtoreq.1.01 where c/a represents a ratio between a lattice constant "c" in the direction thicknesswise of the film and a lattice constant "a" in the direction parallel with a plane of the film.

摘要翻译： 一种薄膜电容器，包括在其表面上具有立方体系的（100）面或四方晶系的（001）面的第一电极，在第一电极上外延生长并呈现出固有地属于 立方体的钙钛矿结构，以及形成在电介质薄膜上的第二电极。 此外，电介质薄膜满足以下关系V / V0 / = 1.01，其中属于立方体系的真实钙钛矿晶体结构的单位晶格体积（晶格常数a0）由V0 = a03表示，单位晶格体积 晶格常数a = b NOTEQUAL c），其外延生长后由V = a2c表示为四方晶系，并满足以下关系c / a> / = 1.01其中c / a表示晶格常数 在膜的厚度方向上的“c”和与膜的平面平行的方向上的晶格常数“a”。

公开(公告)号：US5889696A

公开(公告)日：1999-03-30

申请号：US45958

申请日：1998-03-23

申请人： Takashi Kawakubo ,  Noburu Fukushima ,  Kazuhide Abe

发明人： Takashi Kawakubo ,  Noburu Fukushima ,  Kazuhide Abe

IPC分类号： H01L27/10 ,  G11C11/22 ,  H01L21/8242 ,  H01L21/8246 ,  H01L27/105 ,  H01L27/108

CPC分类号： G11C11/22

摘要： A semiconductor memory device is constituted by arranging a plurality of memory cells in a matrix format, each of which includes a thin-film capacitor having a ferroelectric film and a pair of electrodes facing each other via the ferroelectric film, and a transfer gate transistor connected to the thin film capacitor. A voltage corresponding to the width of a hysteresis curve obtained when the thin-film capacitor is saturated and polarized falls within the range of 5% or higher to 20% or lower of the voltage difference between the positive and negative directions in a writing operation. A remanent polarization amount obtained when the thin-film capacitor is saturated and polarized falls within the range of 5% or higher to 30% or lower of the total polarization amount obtained upon application of a voltage in the writing operation.

摘要翻译： 半导体存储器件通过以矩阵形式布置多个存储单元而构成，每个存储单元包括具有铁电膜的薄膜电容器和经由铁电体膜相互面对的一对电极，并且连接有传输栅极晶体管 到薄膜电容器。 当薄膜电容器饱和和极化时获得的滞后曲线的宽度对应的电压落在写入操作中正负方向之间的电压差的5％以上至20％以下的范围内。 当薄膜电容器饱和和极化时获得的剩余极化量落在在写入操作中施加电压时获得的总极化量的5％以上至30％以下的范围内。

公开(公告)号：US5739563A

公开(公告)日：1998-04-14

申请号：US559945

申请日：1995-11-17

申请人： Takashi Kawakubo ,  Kenya Sano ,  Kazuhide Abe ,  Shuichi Komatsu ,  Noburu Fukushima ,  Kazuhiro Eguchi

发明人： Takashi Kawakubo ,  Kenya Sano ,  Kazuhide Abe ,  Shuichi Komatsu ,  Noburu Fukushima ,  Kazuhiro Eguchi

IPC分类号： H01L21/02 ,  H01L21/8246 ,  H01L27/115 ,  H01L29/94 ,  H01L27/108

CPC分类号： H01L27/11502 ,  H01L27/11507 ,  H01L28/55

摘要： A semiconductor memory device comprising a silicon substrate, a plurality of switching transistors formed on the silicon substrate, an insulating layer having an opening and formed on a surface portion of the silicon substrate where the plurality of switching transistors formed, and a plurality of capacitors for accumulating electric charge formed on the insulating layer and connected respectively to the switching transistors via a conductive film buried in the opening of insulating layer, wherein each of the capacitors for accumulating electric charge is provided with an underlying crystal layer formed on the insulating layer and with a dielectric film consisting essentially of a ferroelectric material and epitaxially or orientationaly grown on the underlying crystal layer, and the switching transistors and the capacitors for accumulating electric charge connected to each other constitute a plurality of memory cells arranged in a two-dimensional pattern.

摘要翻译： 一种半导体存储器件，包括硅衬底，形成在硅衬底上的多个开关晶体管，具有开口并形成在形成有多个开关晶体管的硅衬底的表面部分上的绝缘层，以及多个用于 累积形成在绝缘层上的电荷，并且经由埋在绝缘层开口中的导电膜分别连接到开关晶体管，其中用于积累电荷的每个电容器设置有形成在绝缘层上的下面的晶体层， 基本上由铁电材料构成并在下面的晶体层上生长的外延或取向的电介质膜，并且用于积累彼此连接的电荷的开关晶体管和电容器构成以二维图案布置的多个存储单元。

公开(公告)号：US6060735A

公开(公告)日：2000-05-09

申请号：US923123

申请日：1997-09-04

申请人： Mitsuaki Izuha ,  Noburu Fukushima ,  Kazuhide Abe

发明人： Mitsuaki Izuha ,  Noburu Fukushima ,  Kazuhide Abe

IPC分类号： H01L21/02 ,  H01L29/78 ,  H01L33/00

CPC分类号： H01L28/75 ,  H01L28/55

摘要： A thin film dielectric device is disclosed, that comprises a substrate, a lower electrode formed on the substrate and composed of a laminate film having columnar grains that have grown in a vertical to a surface of the substrate, a dielectric thin film formed on the lower electrode and composed of a perovskite oxide, the dielectric thin film being a polycrystalline film having columnar grains that have successively grown from the columnar grains of the lower electrode and that takes over a crystal orientation of the lower electrode, the lattice constant of the lower electrode being matched with the lattice constant of the dielectric thin film at the interface therebetween with the columnar grains, and an upper electrode formed on the dielectric thin film. The lattice matching of the columnar grains solves problems of the increase of the leak current of the thin film dielectric device and the degradation of the dielectric breakdown resistance. In addition, the polycrystalline film having the columnar grains that succeed at the interface of the electrode/dielectric thin film can be properly formed on the semiconductor substrate such as Si substrate. Thus, the thin film dielectric device according to the present invention can be applied to a real LSI circuit and so forth.

摘要翻译： 公开了一种薄膜电介质器件，其包括：衬底，形成在衬底上的下电极，由具有在垂直于衬底表面生长的柱状晶粒的层压膜构成;电介质薄膜，形成在下层 电极，由钙钛矿氧化物构成，所述电介质薄膜是具有从下部电极的柱状晶粒连续生长并且接受下部电极的晶体取向的柱状晶粒的多晶膜，下部电极的晶格常数 与介电薄膜在与柱状晶粒之间的界面处的晶格常数和形成在电介质薄膜上的上电极匹配。 柱状晶粒的晶格匹配解决了薄膜电介质器件的漏电流增加和介电击穿电阻的劣化的问题。 此外，可以在诸如Si衬底的半导体衬底上适当地形成具有在电极/电介质薄膜的界面处成功的柱状晶粒的多晶膜。 因此，根据本发明的薄膜电介质器件可以应用于真正的LSI电路等。

公开(公告)号：US07769352B2

公开(公告)日：2010-08-03

申请号：US11568365

申请日：2006-09-25

申请人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

发明人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

IPC分类号： H04B1/40 ,  H04B7/00 ,  H04L27/22

CPC分类号： H04L27/2272 ,  H03C3/0966 ,  H03D3/242 ,  H04B1/38 ,  H04L27/2273 ,  H04L2027/0016 ,  H04L2027/0022 ,  H04L2027/0055 ,  H04W56/00 ,  H04W88/02 ,  Y02D70/1222 ,  Y02D70/40

摘要： A receiver has a first voltage control oscillator configured to generate a first oscillation signal, a second voltage control oscillator configured to generate a second oscillation signal having a first phase, a first phase comparator configured to detect a phase difference between the first and second oscillation signals, a demodulator configured to perform demodulation processing of the received signal and to generate timing information of a second phase included in the first oscillation signal, a second phase comparator configured to detect the phase difference between the first and second oscillation signals, and a first control voltage generator configured to generate a first control voltage for controlling a phase and a frequency of the second voltage control oscillator based on the phase difference detected by the second phase comparator.

摘要翻译： 一种接收器具有：第一电压控制振荡器，被配置为产生第一振荡信号;第二压控振荡器，被配置为产生具有第一相位的第二振荡信号;第一相位比较器，被配置为检测第一和第二振荡信号之间的相位差; 解调器，被配置为执行所述接收信号的解调处理并生成包括在所述第一振荡信号中的第二相位的定时信息;第二相位比较器，被配置为检测所述第一和第二振荡信号之间的相位差;以及第一控制 电压发生器被配置为基于由第二相位比较器检测的相位差产生用于控制第二压控振荡器的相位和频率的第一控制电压。

公开(公告)号：US07215066B2

公开(公告)日：2007-05-08

申请号：US11196596

申请日：2005-08-04

申请人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

发明人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

IPC分类号： H01L41/053

CPC分类号： H01H57/00 ,  H01G5/18 ,  H01G5/38 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0946 ,  H01L41/0953 ,  Y10S977/837

摘要： A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.

摘要翻译： 压电致动器包括第一梁，该第一梁包括第一底电极，第一底电极上的第一压电膜和第一压电膜上的第一顶电极，分配在第一梁的端部并固定在基板上的固定端 ，分配在第一梁的另一端并悬挂在自由空间上的连接端; 以及第二光束，包括在连接端连接到第一压电膜的第二压电膜，第二压电膜下的第二底电极和第二压电膜上的第二顶电极，分配在第二压电膜的端部的工作端 第二梁相对于连接端被分配并悬挂在自由空间上的另一端; 其中固定端和工作端的中心之间的距离短于从工作端到连接端的距离。

公开(公告)号：US20060055287A1

公开(公告)日：2006-03-16

申请号：US11196596

申请日：2005-08-04

申请人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

发明人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

IPC分类号： H01L41/04

CPC分类号： H01H57/00 ,  H01G5/18 ,  H01G5/38 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0946 ,  H01L41/0953 ,  Y10S977/837

摘要： A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.

摘要翻译： 压电致动器包括第一梁，该第一梁包括第一底电极，第一底电极上的第一压电膜和第一压电膜上的第一顶电极，分配在第一梁的端部并固定在基板上的固定端 ，分配在第一梁的另一端并悬挂在自由空间上的连接端; 以及第二光束，包括在连接端连接到第一压电膜的第二压电膜，第二压电膜下的第二底电极和第二压电膜上的第二顶电极，分配在第二压电膜的端部的工作端 第二梁相对于连接端被分配并悬挂在自由空间上的另一端; 其中固定端和工作端的中心之间的距离短于从工作端到连接端的距离。

公开(公告)号：US06870446B2

公开(公告)日：2005-03-22

申请号：US10252105

申请日：2002-09-23

申请人： Ryoichi Ohara ,  Kazuhide Abe ,  Takashi Kawakubo ,  Hiroshi Yoshida ,  Hiroshi Tsurumi ,  Ryuichi Fujimoto

发明人： Ryoichi Ohara ,  Kazuhide Abe ,  Takashi Kawakubo ,  Hiroshi Yoshida ,  Hiroshi Tsurumi ,  Ryuichi Fujimoto

IPC分类号： H03H9/00 ,  H03H9/54 ,  H03H9/58 ,  H03H9/60

CPC分类号： H03H9/605 ,  H03H9/0095 ,  H03H9/542 ,  H03H9/581 ,  H03H2009/02196

摘要： A high frequency filter comprises thin film piezoelectric resonators connected in series between the input/output nodes, thin film piezoelectric resonators connected in parallel between the input/output nodes and a variable voltage circuit adapted to change the voltage applied to at least either the thin film piezoelectric resonators connected in series or the thin film piezoelectric resonators connected in parallel. The resonance characteristic of at least either the thin film piezoelectric resonators connected in series or the thin film piezoelectric resonator connected in parallel is shifted by changing the voltage applied by the variable voltage circuit to change the pass characteristic of the filter.

摘要翻译： 高频滤波器包括串联连接在输入/输出节点之间的薄膜压电谐振器，并联连接在输入/输出节点之间的薄膜压电谐振器和可变电压电路，可变电压电路适于改变施加到至少薄膜的电压 串联连接的压电谐振器或并联连接的薄膜压电谐振器。 串联连接的薄膜压电谐振器或并联连接的薄膜压电谐振器中的至少一个的谐振特性通过改变由可变电压电路施加的电压来改变滤波器的通过特性而被移位。

公开(公告)号：US06809604B2

公开(公告)日：2004-10-26

申请号：US10397876

申请日：2003-03-27

申请人： Takashi Kawakubo ,  Ryoichi Ohara ,  Kazuhide Abe ,  Hiroshi Tsurumi ,  Hiroshi Yoshida ,  Ryuichi Fujimoto

发明人： Takashi Kawakubo ,  Ryoichi Ohara ,  Kazuhide Abe ,  Hiroshi Tsurumi ,  Hiroshi Yoshida ,  Ryuichi Fujimoto

IPC分类号： H03B532

CPC分类号： H03H9/173 ,  H03H9/0095 ,  H03H9/545 ,  H03H9/562 ,  H03H9/564 ,  H03H9/566 ,  H03H9/581 ,  H03H9/585 ,  H03H9/60 ,  H03H2009/02196

摘要： To provide a miniaturized voltage controlled oscillator which can oscillate simultaneously a plurality of frequencies and has high stability of frequency, an excellent low phase noise, small variation per hour, and a wide frequency variable range. A thin film bulk acoustic wave resonator using single crystal ferroelectric material equal to or smaller than 10 &mgr;m in thickness whose direction of polarization is aligned to the direction of thickness is utilized as the piezoelectric member. The voltage controlled oscillator having large changing rate of the oscillation frequency of 0.01%/V or more and an extremely small phase noise is provided by changing the voltage applied to the electrodes.

摘要翻译： 为了提供能够同时振荡多个频率并且具有高的频率稳定性，优异的低相位噪声，小时变化小和宽频率可变范围的微型压控振荡器.1。一种使用单晶的薄膜体声波谐振器 作为压电部件，利用等于或小于10μm厚的偏振方向与厚度方向对准的铁电材料。 通过改变施加到电极上的电压，提供振荡频率变化率大于0.01％/ V以上且极小相位噪声的压控振荡器。

公开(公告)号：US07471031B2

公开(公告)日：2008-12-30

申请号：US11229694

申请日：2005-09-20

申请人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki ,  Tomio Ono

发明人： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki ,  Tomio Ono

IPC分类号： H01L41/09

CPC分类号： H03H9/542 ,  H01G5/16 ,  H01H57/00 ,  H01H2057/006 ,  H03H9/605 ,  H03H2007/008 ,  H03H2210/025 ,  H03H2210/033

摘要： In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.

摘要翻译： 在具有压电驱动机构的MEMS型可变容量中，具有可移动电极的可动头布置在其上，固定电极被定位成面对可动电极，并且压电驱动梁结构接合到可动头部，并且一端固定到 底物。 可动电极和固定电极形成可变容量。 在可变容量中，可变电容和可变电容的固定电极之间的距离和电容可以保持恒定，从而实现再现性和可靠的可控性。