Nonvolatile semiconductor memory device and method for manufacturing same

    公开(公告)号:US08487364B2

    公开(公告)日:2013-07-16

    申请号:US12792378

    申请日:2010-06-02

    摘要: A nonvolatile semiconductor memory device according to embodiment includes: a semiconductor substrate having an upper portion being partitioned into a plurality of semiconductor portions extending in a first direction; a charge storage film provided on the semiconductor portion; a word-line electrode provided on the semiconductor substrate and extending in a second direction intersecting with the first direction; and a pair of selection gate electrodes provided on both sides of the word-line electrode in the first direction on the semiconductor substrate and extending in the second direction, a shortest distance between a corner portion of each of the semiconductor portions and each of the selection gate electrodes being longer than a shortest distance between the corner portion of the semiconductor portion and the word-line electrode in a cross section parallel to the second direction.

    Nonvolatile semiconductor memory device and method for manufacturing same
    2.
    发明授权
    Nonvolatile semiconductor memory device and method for manufacturing same 失效
    非易失性半导体存储器件及其制造方法

    公开(公告)号:US08598649B2

    公开(公告)日:2013-12-03

    申请号:US12792378

    申请日:2010-06-02

    摘要: A nonvolatile semiconductor memory device according to embodiment includes: a semiconductor substrate having an upper portion being partitioned into a plurality of semiconductor portions extending in a first direction; a charge storage film provided on the semiconductor portion; a word-line electrode provided on the semiconductor substrate and extending in a second direction intersecting with the first direction; and a pair of selection gate electrodes provided on both sides of the word-line electrode in the first direction on the semiconductor substrate and extending in the second direction, a shortest distance between a corner portion of each of the semiconductor portions and each of the selection gate electrodes being longer than a shortest distance between the corner portion of the semiconductor portion and the word-line electrode in a cross section parallel to the second direction.

    摘要翻译: 根据实施例的非易失性半导体存储器件包括:半导体衬底,其具有被分隔成沿第一方向延伸的多个半导体部分的上部; 设置在半导体部分上的电荷存储膜; 字线电极,其设置在所述半导体基板上并沿与所述第一方向交叉的第二方向延伸; 以及一对选择栅电极,其设置在所述半导体基板上的所述字线电极的所述第一方向的两侧,并且沿所述第二方向延伸,所述半导体部分的每个的角部与所述选择中的每一个之间的最短距离 栅电极比与半导体部分的角部和字线电极之间的平行于第二方向的截面中的最短距离更长。

    Nonvolatile semiconductor memory device
    5.
    发明授权
    Nonvolatile semiconductor memory device 有权
    非易失性半导体存储器件

    公开(公告)号:US08212303B2

    公开(公告)日:2012-07-03

    申请号:US12821689

    申请日:2010-06-23

    申请人: Wataru Sakamoto

    发明人: Wataru Sakamoto

    IPC分类号: H01L29/94

    摘要: According to one embodiment, a nonvolatile semiconductor memory device includes a semiconductor substrate including a first region in which a memory cell transistor is arranged, a second region in which an electrode that extracts a word line electrically connected to the memory cell transistor is arranged, and a third region in which a peripheral transistor is arranged, the semiconductor substrate including an element isolation layer which separates adjacent active regions, first active regions provided in the first region and each having a first width, second active regions provided in the second region and each having a second width greater than the first width, third active regions provided in the third region and each having a third with greater than the first width. An upper surface of an element isolation layer in the second region is higher than that of an element isolation layer in the first region.

    摘要翻译: 根据一个实施例,非易失性半导体存储器件包括:半导体衬底,包括其中布置有存储单元晶体管的第一区域;第二区域,其中布置提取与存储单元晶体管电连接的字线的电极;以及 其中配置有外围晶体管的第三区域,所述半导体衬底包括分隔相邻有源区的元件隔离层,设置在所述第一区域中的每一个具有第一宽度的第一有源区,并且每个具有第一宽度,所述第二有源区设置在所述第二区中, 具有大于第一宽度的第二宽度,设置在第三区域中的每一个具有大于第一宽度的第三有效区域。 第二区域中的元件隔离层的上表面高于第一区域中的元件隔离层的上表面。

    BATTERY STATE MONITORING CIRCUIT AND BATTERY DEVICE
    6.
    发明申请
    BATTERY STATE MONITORING CIRCUIT AND BATTERY DEVICE 有权
    电池状态监测电路和电池装置

    公开(公告)号:US20100194343A1

    公开(公告)日:2010-08-05

    申请号:US12699593

    申请日:2010-02-03

    IPC分类号: H02J7/00

    摘要: Provided are a battery state monitoring circuit and a battery device which are capable of inhibiting discharge without enabling an overdischarge cell balance function when an overcurrent detection circuit detects a discharge overcurrent, without the need for an additional terminal of the battery state monitoring circuit. A detection signal of the overcurrent detection circuit is input to each of a communication terminal for overdischarge signal and a communication terminal for overcharge signal included in the battery state monitoring circuit provided on a side of the overcurrent detection circuit. An overdischarge cell balance circuit outputs a cell balance signal when an overdischarge detection signal indicates an overdischarge non-detected state, an overdischarge signal indicates an overdischarge detected state, and an overcharge signal indicates an overcharge non-detected state.

    摘要翻译: 提供一种电池状态监视电路和电池装置,其能够在过电流检测电路检测到放电过电流时能够抑制放电,而不需要过放电电池平衡功能,而不需要电池状态监视电路的附加端子。 过电流检测电路的检测信号输入到过放电信号的通信端子和设置在过电流检测电路一侧的电池状态监视电路中的过充电信号的通信端子。 当过放电检测信号表示过放电未检测状态,过放电信号表示过放电检测状态,过充电单元平衡电路输出单元平衡信号,过充电信号表示过充电未检测状态。

    MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE USING INSULATING FILM AS CHARGE STORAGE LAYER
    7.
    发明申请
    MANUFACTURING METHOD OF SEMICONDUCTOR MEMORY DEVICE USING INSULATING FILM AS CHARGE STORAGE LAYER 有权
    使用绝缘膜作为充电储存层的半导体存储器件的制造方法

    公开(公告)号:US20090053885A1

    公开(公告)日:2009-02-26

    申请号:US12194050

    申请日:2008-08-19

    IPC分类号: H01L21/3205

    摘要: A manufacturing method of a semiconductor memory device includes forming a first gate electrode having a charge storage layer, a block layer, and a control gate electrode on a first region of a semiconductor substrate, forming a second gate electrode on a second region of the semiconductor substrate, forming a protective insulating film on a side surface of the block layer, exposing the first region while covering the second region on the semiconductor substrate with a photoresist, using the photoresist, the first gate electrode, and the protective insulating film as masks to implant an impurity into the first region of the semiconductor substrate, and removing the photoresist by wet etching which uses a mixed solution containing H2SO4 and H2O2. The protective insulating film having an etching selective ratio of 1:100 or above with respect to the photoresist under wet etching conditions using the mixed solution.

    摘要翻译: 半导体存储器件的制造方法包括在半导体衬底的第一区域上形成具有电荷存储层的第一栅电极,阻挡层和控制栅电极,在半导体衬底的第二区域上形成第二栅电极 衬底,在阻挡层的侧表面上形成保护绝缘膜,使用光致抗蚀剂,第一栅极电极和保护绝缘膜作为掩模,用光致抗蚀剂暴露第一区域同时覆盖半导体衬底上的第二区域, 将杂质注入半导体衬底的第一区域,并通过使用含有H 2 SO 4和H 2 O 2的混合溶液的湿法蚀刻去除光致抗蚀剂。 该保护绝缘膜在湿蚀刻条件下使用混合溶液相对于光致抗蚀剂的蚀刻选择比为1:100或更高。

    Power-on detecting circuit
    9.
    发明授权
    Power-on detecting circuit 失效
    上电检测电路

    公开(公告)号:US5374923A

    公开(公告)日:1994-12-20

    申请号:US945783

    申请日:1992-09-16

    申请人: Wataru Sakamoto

    发明人: Wataru Sakamoto

    CPC分类号: G01R19/155

    摘要: A power-on detecting circuit includes a capacitance for sensing power-on, and a signal generating circuit which responds to the output node potential of capacitance by generating a signal indicative of the power-on. The signal generating circuit includes inverter circuits forming a latch circuit. The power-on detecting circuit includes a control circuit, which adjusts driving capabilities of inverter circuits at the power-on and power-off, or an activation control circuit, which delays the activation timing. The control circuit differentiates the driving capability of the latch circuit formed of inverter circuits at the power-on from that at the power-off. Activation control circuit activates signal generating circuit at the time the potential of the output node ND10 of a sensing circuit rises above the potential of the output node of signal generating circuit.

    摘要翻译: 上电检测电路包括用于感测上电的电容,以及信号发生电路,其通过产生表示通电的信号来响应电容的输出节点电位。 信号发生电路包括形成锁存电路的反相器电路。 上电检测电路包括控制电路,其调节上电和断电时的逆变器电路的驱动能力,或启动控制电路,其延迟激活定时。 控制电路将上电时由逆变器电路构成的锁存电路的驱动能力与断电时的驱动能力区分开。 激活控制电路在感测电路的输出节点ND10的电位上升到信号发生电路的输出节点的电位以上时激活信号发生电路。