公开(公告)号：US5510724A

公开(公告)日：1996-04-23

申请号：US251365

申请日：1994-05-31

申请人： Taketoshi Itoyama ,  Yuichi Abe ,  Masao Yamaguchi

发明人： Taketoshi Itoyama ,  Yuichi Abe ,  Masao Yamaguchi

IPC分类号： G01R31/28 ,  G01R31/02

CPC分类号： G01R31/2849

摘要： A loader section for supplying semiconductor wafers is arranged at one end of a linear first convey path for a convey unit. Burn-in test sections, probe test sections, a laser repair section, a deposition repair section, a marking section, a baking section, and visual test sections are arranged on both the sides of the first convey path. In the burn-in test section arranged in the loader section, each semiconductor wafer picked up from a cassette is pre-aligned. The pre-aligned semiconductor wafers are loaded/unloaded into/from the respective test sections and the repair section by the convey unit in accordance with a predetermined test procedure, thereby performing a plurality of test items and repair steps by an inline scheme. Each burn-in test section includes a probe card having conductive projections which are brought into contact with all of many semiconductor chips formed on each semiconductor wafer at once. Each burn-in test section performs burn-in tests on a plurality of semiconductor chips with which the conductive projections are brought into contact at once, while temperature/voltage stresses are applied to the semiconductor chips.

摘要翻译： 用于提供半导体晶片的装载器部分布置在用于输送单元的线性第一输送路径的一端。 在第一传送路径的两侧布置了老化测试部分，探针测试部分，激光修复部分，沉积修复部分，标记部分，烘烤部分和视觉测试部分。 在安装在装载器部分中的老化测试部分中，从盒子拾取的每个半导体晶片被预对准。 预定半导体晶片根据预定的测试程序由输送单元装载/卸载到相应的测试部分和修理部分，从而通过在线方案执行多个测试项目和修理步骤。 每个老化测试部分包括具有导电突起的探针卡，该探针卡立刻与形成在每个半导体晶片上的所有许多半导体芯片接触。 每个老化测试部分在对半导体芯片施加温度/电压应力的同时，对导体突起一次接触的多个半导体芯片执行老化测试。

公开(公告)号：US5614837A

公开(公告)日：1997-03-25

申请号：US457774

申请日：1995-06-01

申请人： Taketoshi Itoyama ,  Yuichi Abe ,  Masao Yamaguchi

发明人： Taketoshi Itoyama ,  Yuichi Abe ,  Masao Yamaguchi

IPC分类号： G01R31/28 ,  G01R31/02

CPC分类号： G01R31/2849

摘要： A loader section for supplying semiconductor wafers is arranged at one end of a linear first convey path for a convey unit. Burn-in test sections, probe test sections, a laser repair section, a deposition repair section, a marking section, a baking section, and visual test sections are arranged on both the sides of the first convey path. In the burn-in test section arranged in the loader section, each semiconductor wafer picked up from a cassette is pre-aligned. The pre-aligned semiconductor wafers are loaded/unloaded into/from the respective test sections and the repair section by the convey unit in accordance with a predetermined test procedure, thereby performing a plurality of test items and repair steps by an inline scheme. Each burn-in test section includes a probe card having conductive projections which are brought into contact with all of many semiconductor chips formed on each semiconductor wafer at once. Each burn-in test section performs burn-in tests on a plurality of semiconductor chips with which the conductive projections are brought into contact at once, while temperature/voltage stresses are applied to the semiconductor chips.

摘要翻译： 用于提供半导体晶片的装载器部分布置在用于输送单元的线性第一输送路径的一端。 在第一传送路径的两侧布置了老化测试部分，探针测试部分，激光修复部分，沉积修复部分，标记部分，烘烤部分和视觉测试部分。 在安装在装载器部分中的老化测试部分中，从盒子拾取的每个半导体晶片被预对准。 预定半导体晶片根据预定的测试程序由输送单元装载/卸载到相应的测试部分和修理部分，从而通过在线方案执行多个测试项目和修理步骤。 每个老化测试部分包括具有导电突起的探针卡，该探针卡立刻与形成在每个半导体晶片上的所有许多半导体芯片接触。 每个老化测试部分在对半导体芯片施加温度/电压应力的同时，对导体突起一次接触的多个半导体芯片执行老化测试。

公开(公告)号：US5521522A

公开(公告)日：1996-05-28

申请号：US151367

申请日：1993-11-12

申请人： Yuichi Abe ,  Masao Yamaguchi ,  Munetosi Nagasaka

发明人： Yuichi Abe ,  Masao Yamaguchi ,  Munetosi Nagasaka

IPC分类号： G01R1/073 ,  G01R31/28 ,  H01L21/66 ,  H01R13/24 ,  G01R1/06

CPC分类号： G01R1/07314 ,  G01R1/073 ,  G01R31/2831

摘要： There is provided a probe apparatus with a stage for holding a wafer on which a plurality of chips are regularly arranged such that the chips are arranged substantially in an XY plane, a large number of contactors facing the wafer held on the stage, provided to corresponding to respective pads of the chips such as to be brought into contact collectively with the pads of all the device circuits on the wafer, tester for transmitting/receiving a test signal to/from the device via the contactors, elevator device for elevating the stage in a Z-axis direction, alignment device for moving the stage in an X-axis and/or Y-axis direction, and controller for controlling the alignment device and the elevator device.

摘要翻译： 提供了一种具有用于保持晶片的载台的探针装置，其上规则地布置有多个芯片，使得芯片基本上布置在XY平面中，大量接触器面对保持在载物台上的晶片，提供给相应的 到芯片的相应焊盘，以便与晶片上的所有器件电路的焊盘集体接触，用于经由接触器发送/接收来自器件的测试信号的测试器，用于将级的升高的电梯设备 Z轴方向，用于在X轴和/或Y轴方向上移动平台的对准装置，以及用于控制对准装置和电梯装置的控制器。

公开(公告)号：US08971627B2

公开(公告)日：2015-03-03

申请号：US13696260

申请日：2011-03-17

申请人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

发明人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

IPC分类号： G06K9/00 ,  G06K9/62 ,  G01B11/00 ,  G01B15/00 ,  G06T7/00 ,  H01L21/66

CPC分类号： G06K9/6201 ,  G01B11/00 ,  G01B15/00 ,  G06K9/6202 ,  G06T7/001 ,  G06T7/74 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.

摘要翻译： 本发明是一种模拟匹配处理装置，其能够评价即使在设计图像和摄影图像之间形成密集的情况的情况下也能够支持的相似度。 在模板匹配处理装置中，进行设计图像与摄影图像之间的匹配处理，通过剪切具有最高相关性的部分（步骤101）获得部分设计图像，以及根据 执行剪辑设计图像（步骤102至105），使得获得的变形图像与设计图像之间的相关性被设置为相似度。

公开(公告)号：US20140219545A1

公开(公告)日：2014-08-07

申请号：US14234977

申请日：2012-07-20

申请人： Akiyuki Sugiyama ,  Yuichi Abe

发明人： Akiyuki Sugiyama ,  Yuichi Abe

IPC分类号： G06T7/00

CPC分类号： G06T7/001 ,  G01B15/08 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： When the lengths of FEM wafers are automatically measured, not only the sizes of targets, the lengths of which are to be measured, are often varied from those in registration, but also the patterns of the targets are often deformed. Therefore, it is difficult to automatically determine whether the length measurement is possible or not. Therefore, the following are executed with a semiconductor inspection system: (1) a process of identifying the position of the contour line of an inspected image using a distance image calculated from a reference image, (2) a process of calculating a defect size image based on the position of the contour line with respect to the identified distance image, and detecting a defect candidate from the defect size image, and (3-1) a process of, upon detection of the defect candidate, calculating the size of the detected defect candidate, or (3-2) a process of detecting a portion different between the first and second contour lines as the defect candidate.

摘要翻译： 当自动测量有限元晶片的长度时，不仅要测量其长度的目标的尺寸通常与注册的尺寸不同，而且目标的图案也经常变形。 因此，难以自动确定长度测量是否可行。 因此，使用半导体检查系统执行以下操作：（1）使用从参考图像计算的距离图像来识别被检查图像的轮廓线的位置的处理，（2）计算缺陷尺寸图像的处理 基于所述轮廓线相对于所识别的距离图像的位置，以及从所述缺陷尺寸图像检测缺陷候选，以及（3-1）在检测到所述缺陷候选时，计算所检测到的所述缺陷候选的大小的处理 缺陷候选者，或（3-2）检测第一和第二轮廓线之间的部分的缺陷候选的处理。

公开(公告)号：US20140023265A1

公开(公告)日：2014-01-23

申请号：US13981963

申请日：2011-12-07

申请人： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

发明人： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC分类号： G06T7/00

CPC分类号： G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

摘要： It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

摘要翻译： 本发明的目的是提供一种半导体检查装置，即使被检查的图像是图像，也能够良好地执行位置对准并且正确地确定位置对准是否已经成功地执行或者在没有操作者干预的情况下已经结束 具有与重复图案的情况相同的特性，或被检查图像是具有复杂形状的图像。 半导体检查装置包括用于对晶片或曝光掩模上的形状进行成像的装置; 用于存储由成像装置检查的图像的装置; 用于存储对应于要由成像装置成像的晶片或曝光掩模上的位置的半导体电路的设计数据的装置; 用于存储作为将设计数据转换为图像而获得的设计数据图像的装置; 用于通过将从所述设计数据图像中包含的形状的相对粗密度关系中找到的兴趣绘制区域转换为图像来生成设计数据ROI图像的装置; 以及位置对准部，被配置为在被检查图像和设计数据图像上执行位置对准。 半导体检查装置利用设计数据ROI图像来识别被检查图像和设计数据图像彼此匹配的位置或计算符合度。

公开(公告)号：US20140016824A1

公开(公告)日：2014-01-16

申请号：US14005913

申请日：2011-11-09

申请人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

发明人： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

IPC分类号： G06T7/00

CPC分类号： G06T7/0004 ,  G06K9/3275

摘要： An evaluation value indicative of the extent of lines in each direction is calculated for a pre-processed image in which 0s are filled in and extended in the lateral direction of the inputted image and which has been reduced ⅛th in the longitudinal direction. To obtain the angle of rotation of an image from the change in the evaluation value obtained while the angle relative to the lateral direction of the pre-processed image is modified in small steps, a parallel line is drawn for each direction, a projection is taken, and the sum of squares serves as the evaluation value of the direction. The direction having the highest evaluation value serves as the obtained direction of rotation from the normal position. The projection of each direction references the point of intersection between the parallel line drawn for each direction and the coordinate line of the horizontal axis.

摘要翻译： 对于其中0被填充并在输入图像的横向方向上延伸并且在纵向方向上减少1/8的预处理图像来计算指示每个方向的行程度的评估值。 为了在以小步骤修改相对于预处理图像的横向方向的角度获得的评估值的变化中获得图像的旋转角度，对于每个方向绘制平行线，进行投影 ，并且平方和作为方向的评价值。 具有最高评估值的方向用作从正常位置获得的旋转方向。 每个方向的投影参考在每个方向绘制的平行线与水平轴的坐标线之间的交点。

公开(公告)号：US20120207397A1

公开(公告)日：2012-08-16

申请号：US13502823

申请日：2010-10-06

申请人： Wataru Nagatomo ,  Yuichi Abe ,  Mitsuji Ikeda

发明人： Wataru Nagatomo ,  Yuichi Abe ,  Mitsuji Ikeda

IPC分类号： G06K9/68

CPC分类号： G06K9/6203 ,  G06K9/6253 ,  G06K9/6255 ,  G06K9/6857 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/20016 ,  G06T2207/30148 ,  H01J2237/221 ,  H01J2237/226

摘要： Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.

摘要翻译： 提供了一种模板匹配方法和模板匹配装置，其中模板匹配之间的模板和实际图像之间的匹配程度保持在高水平，而不依赖于较低层的部分外观。 作为一个实施例，提出了一种用于模板匹配的方法和装置，其中设置了不进行模板和图像的比较的区域，或者在模板内部设置第二区域，其中比较不同于进行比较 将进行第一比较区域，并且基于除非比较区域之外的比较或使用第一和第二区域的比较进行模板匹配。

公开(公告)号：US08091027B2

公开(公告)日：2012-01-03

申请号：US11654730

申请日：2007-01-18

申请人： Takatoshi Nakamura ,  Yuichi Abe ,  Yoichiro Sako ,  Masamichi Asukai ,  Mitsuru Takehara ,  Katsuya Shirai ,  Toru Sasaki ,  Toshiro Terauchi

发明人： Takatoshi Nakamura ,  Yuichi Abe ,  Yoichiro Sako ,  Masamichi Asukai ,  Mitsuru Takehara ,  Katsuya Shirai ,  Toru Sasaki ,  Toshiro Terauchi

IPC分类号： G06F3/16 ,  G06F3/00

CPC分类号： G06F3/04842 ,  G05B15/02 ,  G06F3/04817 ,  G06F3/0482 ,  G11B19/025 ,  G11B27/105 ,  G11B27/34

摘要： A content playback apparatus includes: a display section that displays a plurality of indicators associated with a plurality of pieces of content, and a specifier to be used to specify one of the indicators; a playback section that plays back the piece of content associated with the indicator specified by the specifier; a switch section that switches, in accordance with a user's operation, what the specifier specifies to new the indicator; and a playback control section that controls the playback section such that if the user's operation switches, while the piece of content associated with the indicator specified by the specifier is played, what the specifier specifies to next the indicator and the user's subsequent operation switches, within a predetermined period of time from when the previous switch is completed, what the specifier specifies to subsequent the indicator, the playback section keeps playing back the piece of content.

摘要翻译： 内容再现装置包括：显示部，其显示与多条内容相关联的多个指示符;以及指定符，用于指定其中一个指示符; 播放部分，其播放与由说明符指定的指示符相关联的内容; 切换部，其根据用户的操作切换指定者对新的指示符指定的内容; 以及播放控制部分，其控制重放部分，使得如果用户的操作切换，当与由说明符指定的指示符相关联的内容被播放时，说明符指定下一个指示符和用户的后续操作切换， 从上次切换完成之后的预定时间段，说明符对随后的指示符指定什么，播放部分继续播放该片内容。

公开(公告)号：US20110119356A1

公开(公告)日：2011-05-19

申请号：US12943383

申请日：2010-11-10

申请人： Yuichi Abe

发明人： Yuichi Abe

IPC分类号： G06F15/16

CPC分类号： G06F17/30893

摘要： There is provided a data processing system including a server device for providing Web data having a data portion with a specific identifier, and a data processing apparatus having a receiving unit for receiving the Web data from the server device, an analysis unit for analyzing the Web data to extract the specific identifier from the Web data, and a data processing unit for changing the data portion with the specific identifier based on local data.

摘要翻译： 提供了一种数据处理系统，包括用于提供具有特定标识符的数据部分的Web数据的服务器设备，以及具有用于从服务器设备接收Web数据的接收单元的数据处理设备，用于分析Web的分析单元 用于从Web数据中提取特定标识符的数据，以及用于基于本地数据用特定标识符改变数据部分的数据处理单元。