公开(公告)号：US09927706B2

公开(公告)日：2018-03-27

申请号：US15215016

申请日：2016-07-20

Applicant: The University of Chicago ,  Wisconsin Alumni Research Foundation

Inventor： Paul Franklin Nealey ,  Tzu-Hsuan Chang ,  Shisheng Xiong ,  Zhenqiang Ma ,  Michael Scott Arnold ,  Robert Jacobberger

IPC: G03F7/004 ,  G03F7/16 ,  H01L21/308 ,  H01J37/32 ,  C09D153/00 ,  H01L21/02 ,  C08L53/00 ,  B82Y30/00 ,  B82Y40/00 ,  C23C16/02 ,  C23C16/26 ,  G03F7/00

CPC classification number: G03F7/165 ,  B82Y30/00 ,  B82Y40/00 ,  C08K3/04 ,  C08L53/00 ,  C09D153/00 ,  C23C16/0227 ,  C23C16/26 ,  G03F7/0002 ,  G03F7/002 ,  G03F7/168 ,  H01J37/32009 ,  H01J2237/334 ,  H01L21/02527 ,  H01L21/02568 ,  H01L21/0271 ,  H01L21/3081 ,  H01L21/3086

Abstract: Provided herein are methods of directed self-assembly (DSA) on atomic layer chemical patterns and related compositions. The atomic layer chemical patterns may be formed from two-dimensional materials such as graphene. The atomic layer chemical patterns provide high resolution, low defect directed self-assembly. For example, DSA on a graphene pattern can be used achieve ten times the resolution of DSA that is achievable on a three-dimensional pattern such as a polymer brush. Assembly of block copolymers on the atomic layer chemical patterns may also facilitate subsequent etch, as the atomic layer chemical patterns are easier to etch than conventional pattern materials.

公开(公告)号：US09828519B2

公开(公告)日：2017-11-28

申请号：US15047520

申请日：2016-02-18

Applicant: Tokyo Ohka Kogyo Co., Ltd. ,  The University of Chicago

Inventor： Akiya Kawaue ,  Takehiro Seshimo ,  Takaya Maehashi ,  Tasuku Matsumiya ,  Ken Miyagi ,  Hitoshi Yamano ,  Xuanxuan Chen ,  Paul Franklin Nealey

IPC: C08K5/34 ,  C08K5/3435 ,  C09D153/00 ,  C09D5/00 ,  C09D7/12 ,  B05D1/00 ,  B05D3/10

CPC classification number: C09D153/00 ,  B05D1/005 ,  B05D3/107 ,  C08K5/43 ,  C09D5/00 ,  C09D7/63 ,  G03F7/0002

Abstract: A resin composition for forming a phase-separated structure, including a block copolymer, and an ion liquid containing a compound having a cation moiety and an anion moiety, the anion moiety being represented by general formula (a1), (a2) or (a3), in which X″ represents an alkylene group of 2 to 6 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom; Y″ and Z″ each independently represents an alkyl group of 1 to 10 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom; R″ represents an alkyl group of 1 to 5 carbon atoms in which at least one hydrogen atom is optionally substituted with a fluorine atom, m represents an integer of 1 to 6, and n represents an integer of 0 to 5, provided that m+n=6.

公开(公告)号：US11921393B2

公开(公告)日：2024-03-05

申请号：US17249646

申请日：2021-03-08

Applicant: The University of Chicago

Inventor： Juan Jose de Pablo ,  Paul Franklin Nealey ,  Xiao Li ,  Jose A. Martinez-Gonzalez ,  Monirosadat Sadati ,  Rui Zhang ,  Ye Zhou

IPC: G02F1/139 ,  C09K19/00 ,  G02F1/1333 ,  G02F1/137

CPC classification number: G02F1/1393 ,  G02F1/137 ,  G02F1/1396 ,  C09K19/00 ,  G02F1/1333 ,  G02F1/13793 ,  G02F2201/00

Abstract: Stable, macroscopic single-crystal chiral liquid crystal compositions are described. The compositions include a single-crystal chiral liquid crystal material on a patterned surface. The patterned surface seeds a particular crystallographic orientation at the substrate-liquid crystal interface. Also described are methods of forming the single-crystal chiral liquid crystal compositions.

公开(公告)号：US20170062229A1

公开(公告)日：2017-03-02

申请号：US15215016

申请日：2016-07-20

Applicant: The University of Chicago ,  Wisconsin Alumni Research Foundation

Inventor： Paul Franklin Nealey ,  Tzu-Hsuan Chang ,  Shisheng Xiong ,  Zhenqiang Ma ,  Michael Scott Arnold ,  Robert Jacobberger

IPC: H01L21/308 ,  H01J37/32 ,  C09D153/00 ,  C23C16/455

CPC classification number: G03F7/165 ,  B82Y30/00 ,  B82Y40/00 ,  C08K3/04 ,  C08L53/00 ,  C09D153/00 ,  C23C16/0227 ,  C23C16/26 ,  G03F7/0002 ,  G03F7/002 ,  G03F7/168 ,  H01J37/32009 ,  H01J2237/334 ,  H01L21/02527 ,  H01L21/02568 ,  H01L21/0271 ,  H01L21/3081 ,  H01L21/3086

Abstract: Provided herein are methods of directed self-assembly (DSA) on atomic layer chemical patterns and related compositions. The atomic layer chemical patterns may be formed from two-dimensional materials such as graphene. The atomic layer chemical patterns provide high resolution, low defect directed self-assembly. For example, DSA on a graphene pattern can be used achieve ten times the resolution of DSA that is achievable on a three-dimensional pattern such as a polymer brush. Assembly of block copolymers on the atomic layer chemical patterns may also facilitate subsequent etch, as the atomic layer chemical patterns are easier to etch than conventional pattern materials.

Abstract translation: 本文提供了关于原子层化学图案和相关组合物的定向自组装（DSA）的方法。 原子层化学图案可以由诸如石墨烯的二维材料形成。 原子层化学图案提供高分辨率，低缺陷指向的自组装。 例如，可以使用石墨烯图案上的DSA实现在三维图案（例如聚合物刷）上可实现的DSA的分辨率的十倍。 原子层化学图案上的嵌段共聚物的组装也可以促进随后的蚀刻，因为原子层化学图案比常规图案材料更容易蚀刻。

公开(公告)号：US20190049767A1

公开(公告)日：2019-02-14

申请号：US16048891

申请日：2018-07-30

Applicant: The University of Chicago

Inventor： Juan Jose de Pablo ,  Paul Franklin Nealey ,  Xiao Li ,  Jose A. Martinez-Gonzalez ,  Monirosadat Sadati ,  Rui Zhang ,  Ye Zhou

IPC: G02F1/139

Abstract: Stable, macroscopic single-crystal chiral liquid crystal compositions are described. The compositions include a single-crystal chiral liquid crystal material on a patterned surface. The patterned surface seeds a particular crystallographic orientation at the substrate-liquid crystal interface. Also described are methods of forming the single-crystal chiral liquid crystal compositions.

公开(公告)号：US20210263357A1

公开(公告)日：2021-08-26

申请号：US17249646

申请日：2021-03-08

Applicant: The University of Chicago

Inventor： Juan Jose de Pablo ,  Paul Franklin Nealey ,  Xiao Li ,  Jose A. Martinez-Gonzalez ,  Monirosadat Sadati ,  Rui Zhang ,  Ye Zhou

IPC: G02F1/139 ,  G02F1/137

Abstract: Stable, macroscopic single-crystal chiral liquid crystal compositions are described. The compositions include a single-crystal chiral liquid crystal material on a patterned surface. The patterned surface seeds a particular crystallographic orientation at the substrate-liquid crystal interface. Also described are methods of forming the single-crystal chiral liquid crystal compositions.

公开(公告)号：US10969642B2

公开(公告)日：2021-04-06

申请号：US16048891

申请日：2018-07-30

Applicant: The University of Chicago

Inventor： Juan Jose de Pablo ,  Paul Franklin Nealey ,  Xiao Li ,  Jose A. Martinez-Gonzalez ,  Monirosadat Sadati ,  Rui Zhang ,  Ye Zhou

IPC: G02F1/139 ,  G02F1/137 ,  C09K19/00 ,  G02F1/1333

Abstract: Stable, macroscopic single-crystal chiral liquid crystal compositions are described. The compositions include a single-crystal chiral liquid crystal material on a patterned surface. The patterned surface seeds a particular crystallographic orientation at the substrate-liquid crystal interface. Also described are methods of forming the single-crystal chiral liquid crystal compositions.

公开(公告)号：US10179866B2

公开(公告)日：2019-01-15

申请号：US15047468

申请日：2016-02-18

Applicant: Tokyo Ohka Kogyo Co., Ltd. ,  The University of Chicago

Inventor： Akiya Kawaue ,  Takehiro Seshimo ,  Takaya Maehashi ,  Tasuku Matsumiya ,  Ken Miyagi ,  Hitoshi Yamano ,  Xuanxuan Chen ,  Paul Franklin Nealey

IPC: C08K5/34 ,  C08K5/3435 ,  C09D153/00 ,  G03F7/00 ,  B82Y40/00

Abstract: A resin composition for forming a phase-separated structure, including: a block copolymer, and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety, the cation moiety of the compound (IL) having a dipole moment of 3 debye or more.

公开(公告)号：US09914847B2

公开(公告)日：2018-03-13

申请号：US15185899

申请日：2016-06-17

Applicant: TOKYO OHKA KOGYO CO., LTD. ,  The University of Chicago

Inventor： Akiya Kawaue ,  Takehiro Seshimo ,  Takaya Maehashi ,  Tasuku Matsumiya ,  Ken Miyagi ,  Hitoshi Yamano ,  Xuanxuan Chen ,  Paul Franklin Nealey

IPC: B01J41/00 ,  C09D153/00 ,  C09D5/00 ,  C09D7/12 ,  B05D1/00 ,  B05D3/10

CPC classification number: C09D153/00 ,  B05D3/107 ,  C08K5/17 ,  C08K5/3415 ,  C08K5/3435 ,  C09D5/00 ,  C09D7/63 ,  G03F3/00 ,  G03F7/00

Abstract: A resin composition for forming a phase-separated structure, including: a block copolymer, and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety, the energy of the LUMO of the cation moiety being −4.5 eV or more, and the energy difference between the LUMO and the HOMO of the cation moiety being 10.0 ev or more, or the Log P value of the anion moiety being 1 to 3.

公开(公告)号：US20160297986A1

公开(公告)日：2016-10-13

申请号：US15043048

申请日：2014-08-14

Applicant: Mustafa Serdar ONSES ,  John A. ORGERS ,  Placid FERREIRA ,  Andrew ALLEYNE ,  Paul Franklin NEALEY ,  THE UNIVERSITY OF CHICAGO ,  THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLNOIS

Inventor： Mustafa Serdar Onses ,  John A. Rogers ,  Placid Ferreira ,  Andrew Alleyne ,  Paul Franklin Nealey

IPC: C09D153/00 ,  B41J2/06

CPC classification number: C09D153/00 ,  B41J2/06 ,  B81C1/00031 ,  B81C2201/0149 ,  B81C2201/0198 ,  G03F7/0002

Abstract: Provided are methods of patterning block copolymer (BCP) films with independent control of the size, periodicity and morphology of the resulting nanoscale domains. Also disclosed are BCP patterns having discrete areas of different self-assembled BCP thin films on a surface, the BCP thin films differing in one or more of molecular weight (MW), composition, morphology, and feature size. In some implementations, multiple BCPs with different MWs can be printed onto a single substrate, thereby providing access to patterns with diverse geometries and feature sizes. The printing approaches can be applied to various BCP chemistries, morphologies and directed self-assembly (DSA) strategies. Also provided are methods of forming BCP thin films on patterns of polymer brushes formed by electrohydrodynamic printing. The methods involve direct, high resolution electrohydrodynamic delivery of random copolymer brushes as surface wetting layers to control the geometries of nanoscale domains in spin-cast and printed BCPs.

Abstract translation: 提供图案化嵌段共聚物（BCP）膜的方法，其独立控制所得纳米尺度域的尺寸，周期和形态。 还公开了在表面上具有不同的自组装BCP薄膜的离散区域的BCP图案，BCP薄膜在分子量（MW），组成，形态和特征尺寸中的一个或多个中不同。 在一些实施方案中，具有不同MW的多个BCP可以印刷到单个基板上，从而提供对具有不同几何形状和特征尺寸的图案的访问。 打印方法可应用于各种BCP化学，形态和定向自组装（DSA）策略。 还提供了通过电动液压印刷形成的聚合物刷的图案上形成BCP薄膜的方法。 该方法涉及直接，高分辨率的电流动力学递送无规共聚物刷作为表面润湿层，以控制旋转铸塑和印刷BCP中纳米级域的几何形状。