Conformal coating of highly structured surfaces
    3.
    发明授权
    Conformal coating of highly structured surfaces 有权
    高度结构化表面的保形涂层

    公开(公告)号:US08329502B2

    公开(公告)日:2012-12-11

    申请号:US12904959

    申请日:2010-10-14

    IPC分类号: H01L23/532 H01L21/283

    摘要: Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.

    摘要翻译: 公开了将共形涂层施加到高度结构化的衬底上的方法和通过公开的方法制造的器件。 一种示例性方法包括将沉积处理室内的高度结构化表面的基本上邻接的材料层沉积。 高度结构化的表面可以与沉积在基底上的基底或另一层相关联。 该方法包括以等于或小于约3mTorr的沉积压力将具有非晶结构的材料沉积在高度结构化的表面上。 该方法还可以包括去除沉积在选定表面上的非晶材料的一部分,并在高度结构化的表面上沉积额外的无定形材料。

    CONFORMAL COATING OF HIGHLY STRUCTURED SURFACES
    5.
    发明申请
    CONFORMAL COATING OF HIGHLY STRUCTURED SURFACES 有权
    高结构表面的合适涂层

    公开(公告)号:US20120091586A1

    公开(公告)日:2012-04-19

    申请号:US12904959

    申请日:2010-10-14

    IPC分类号: H01L23/532 H01L21/283

    摘要: Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.

    摘要翻译: 公开了将共形涂层施加到高度结构化的衬底上的方法和通过公开的方法制造的器件。 一种示例性方法包括将沉积处理室内的高度结构化表面的基本上邻接的材料层沉积。 高度结构化的表面可以与沉积在基底上的基底或另一层相关联。 该方法包括以等于或小于约3mTorr的沉积压力将具有非晶结构的材料沉积在高度结构化的表面上。 该方法还可以包括去除沉积在选定表面上的非晶材料的一部分,并在高度结构化的表面上沉积额外的无定形材料。

    Process for etching mixed metal oxides
    10.
    发明授权
    Process for etching mixed metal oxides 失效
    蚀刻混合金属氧化物的方法

    公开(公告)号:US5356516A

    公开(公告)日:1994-10-18

    申请号:US23286

    申请日:1993-02-26

    IPC分类号: C04B41/53 H01L39/24 C23F1/00

    CPC分类号: H01L39/2467 C04B41/5353

    摘要: An etching process using dicarboxylic and tricarboxylic acids as chelating etchants for mixed metal oxide films such as high temperature superconductors and ferroelectric materials. Undesirable differential etching rates between different metal oxides are avoided by selection of the proper acid or combination of acids. Feature sizes below one micron, excellent quality vertical edges, and film thicknesses in the 100 Angstom range may be achieved by this method.

    摘要翻译: 使用二羧酸和三羧酸作为混合金属氧化物膜如高温超导体和铁电材料的螯合蚀刻剂的蚀刻方法。 通过选择合适的酸或酸的组合来避免不同金属氧化物之间的不良蚀刻速率。 通过该方法可以实现低于1微米的特征尺寸,优异的垂直边缘和100埃的范围内的膜厚度。