公开(公告)号：US07804231B2

公开(公告)日：2010-09-28

申请号：US11677267

申请日：2007-02-21

申请人： Toshihiro Ifuku ,  Katsumi Aoki ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kwan Kim ,  Hiroshi Nakaki ,  Rikyu Ikariyama

发明人： Toshihiro Ifuku ,  Katsumi Aoki ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kwan Kim ,  Hiroshi Nakaki ,  Rikyu Ikariyama

IPC分类号： H01L41/187

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

摘要： Provided are a piezoelectric film, a piezoelectric film element, a liquid discharge head using the piezoelectric film element, and a liquid discharge apparatus. A piezoelectric film element that can be suitably used for a discharge pressure-generating element of a liquid discharge head is obtained by using an epitaxial oxide film composed of a perovskite composite oxide constituted according to a general formula ABO3 as a piezoelectric film. The epitaxial oxide film has at least an A domain and a B domain having a crystal orientation deviation with respect to each other. The crystal orientation deviation between the A domain and the B domain is less than 2°.

摘要翻译： 提供一种压电膜，压电膜元件，使用该压电膜元件的液体排出头和液体排出装置。 通过使用由根据通式ABO3构成的钙钛矿复合氧化物构成的外延氧化膜作为压电膜，可以适用于液体排出头的排出压力产生元件的压电膜元件。 外延氧化膜具有至少A畴和具有相对于晶体取向偏离的B畴。 A域与B域之间的晶体取向偏差小于2°。

公开(公告)号：US20080012054A1

公开(公告)日：2008-01-17

申请号：US11677267

申请日：2007-02-21

申请人： Toshihiro IFUKU ,  Katsumi Aoki ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kim ,  Hiroshi Nakaki ,  Rikyu Ikariyama

发明人： Toshihiro IFUKU ,  Katsumi Aoki ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kim ,  Hiroshi Nakaki ,  Rikyu Ikariyama

IPC分类号： H01L29/76 ,  H01L29/94

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

摘要： Provided are a piezoelectric film, a piezoelectric film element, a liquid discharge head using the piezoelectric film element, and a liquid discharge apparatus. A piezoelectric film element that can be suitably used for a discharge pressure-generating element of a liquid discharge head is obtained by using an epitaxial oxide film composed of a perovskite composite oxide constituted according to a general formula ABO3 as a piezoelectric film. The epitaxial oxide film has at least an A domain and a B domain having a crystal orientation deviation with respect to each other. The crystal orientation deviation between the A domain and the B domain is less than 2°.

摘要翻译： 提供一种压电膜，压电膜元件，使用该压电膜元件的液体排出头和液体排出装置。 通过使用由根据通式ABO 3构成的钙钛矿复合氧化物构成的外延氧化膜，可以适用于液体排出头的排出压力产生元件的压电膜元件， 作为压电膜。 外延氧化膜具有至少A畴和具有相对于晶体取向偏离的B畴。 A域与B域之间的晶体取向偏差小于2°。

公开(公告)号：US07857431B2

公开(公告)日：2010-12-28

申请号：US11813943

申请日：2006-01-18

申请人： Tetsuro Fukui ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kwan Kim ,  Hiroshi Nakaki ,  Risako Ueno ,  Shoji Okamoto

发明人： Tetsuro Fukui ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Yong Kwan Kim ,  Hiroshi Nakaki ,  Risako Ueno ,  Shoji Okamoto

IPC分类号： B41J2/045

CPC分类号： B41J2/161 ,  B41J2/1642 ,  B41J2/1646 ,  H01L41/0478 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/313 ,  H01L41/316 ,  H01L41/319

摘要： A piezoelectric substance element has a piezoelectric substance film and a pair of electrodes connected to the piezoelectric substance film on a substrate, and a main component of the piezoelectric substance film is Pb(Zr, Ti)O3, a composition ratio of Zr/(Zr+Ti) is over 0.4 but less than 0.7, the piezoelectric substance film is a film having at last a tetragonal crystal a-domain and a c-domain within a range of ±10° with respect to the surface of the substrate, and a volume rate of the c-domain to the total of the a-domain and the c-domain is equal to or larger than 20% and equal to or smaller than 60%.

摘要翻译： 压电体元件在基板上具有与压电体膜连接的压电体膜和一对电极，压电体膜的主要成分为Pb（Zr，Ti）O 3，Zr /（Zr + Ti）超过0.4但小于0.7时，压电体膜是至少具有相对于基板的表面±10°的四方晶系a畴和c域的膜， c域的体积率相对于a域和c域的总和等于或大于20％且等于或小于60％。

公开(公告)号：US07622852B2

公开(公告)日：2009-11-24

申请号：US12031176

申请日：2008-02-14

申请人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

发明人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

IPC分类号： H01L41/04 ,  H01L41/187

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

摘要： The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.

摘要翻译： 本发明提供一种压电性能大的压电膜，以及压电元件，液体排出头和利用该压电元件的液体排出装置。 压电膜由具有至少四方晶系结构的<100>取向的外延氧化物形成，其中氧化物是由通式ABO 3表示的钙钛矿型复合氧化物，并且至少含有C，D和E的畴， 100]取向在晶体方向上具有相互偏离，其中区域C和D中的结构域C和D中的结构域D和E中的区域C和E以及区域D和E中的角度偏差分别为5°或更小，5 °或更小，0.3°以下，0.3°以上，域C，E以及区域D，E的[001]方向的角度偏差分别为1.0°以上1.0°以上。

公开(公告)号：US20080211881A1

公开(公告)日：2008-09-04

申请号：US12031176

申请日：2008-02-14

申请人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

发明人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

IPC分类号： H01L41/187 ,  B41J2/045

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

摘要： The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.

摘要翻译： 本发明提供一种压电性能大的压电膜，以及压电元件，液体排出头和利用该压电元件的液体排出装置。 压电膜由具有至少四方晶系结构的<100>取向的外延氧化物形成，其中氧化物是由通式ABO 3 N表示的钙钛矿型复合氧化物，并且至少包含 [100]取向的结构域C，D和E在晶体方向上具有相互偏离，其中域C和D中的结构域C和D中的结构域D和E中，域C和E以及结构域D和E中的[100]方向之间的角度偏差 分别为5°以下，5°以下，0.3°以下，0.3°以上，区域C和E以及区域D，E的[001]方向的角度偏差分别为1.0°以上， 和1.0°以上。

公开(公告)号：US20060131627A1

公开(公告)日：2006-06-22

申请号：US11106529

申请日：2005-04-15

申请人： Masao Kondo ,  Kenji Maruyama ,  Risako Ueno ,  Hiroshi Funakubo ,  Hiroshi Uchida ,  Seiichiro Koda ,  Hiroshi Nakaki

发明人： Masao Kondo ,  Kenji Maruyama ,  Risako Ueno ,  Hiroshi Funakubo ,  Hiroshi Uchida ,  Seiichiro Koda ,  Hiroshi Nakaki

IPC分类号： H01L29/94 ,  H01L29/76 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： H01L21/02197 ,  C23C18/1216 ,  C23C18/1275 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02356 ,  H01L21/31691 ,  H01L27/11502 ,  H01L27/11585 ,  H01L27/1159 ,  H01L28/56

摘要： BiFeO3 precursor solution is coated on the surface of an underlying member. Teat treatment is performed after the coating to form a dielectric film. The dielectric film is heated in a non-oxidizing atmosphere to crystallize the dielectric film. With this method, a ferroelectric material can be obtained which contains constituent elements of Bi, Fe and O and has crystal lattice of a tetragonal or orthorhombic system.

摘要翻译： BiFeO 3 3前体溶液涂覆在底层构件的表面上。 在涂覆之后进行乳液处理以形成电介质膜。 电介质膜在非氧化性气氛中加热，使电介质膜结晶。 通过这种方法，可以获得含有Bi，Fe和O的构成元素并具有四方晶系或斜方晶系的晶格的铁电体材料。