摘要:
A stop lamp for a vehicle, such as a stop lamp adapted for mounting on a rear spoiler of an automobile, having an improved efficiency of light utilization. The lamp includes a lamp body, a front lens, and a plural number of light-emitting diodes juxtaposed at predetermined intervals. Light control parts are formed in the inner wall of the front lens for directing the light output from the light-emitting diodes in predetermined directions. Each light control part is composed of nine prisms arranged in a 3.times.3 matrix. The central one of the prisms faces a respective one of the light-emitting diodes.
摘要:
Provided is a plasma etching method increasing the selectivity of a silicon nitride film in relation to the silicon oxide film or silicon functioning as a base. In a plasma etching method setting a pressure in a processing container as a predetermined level by exhausting a processing gas while supplying the processing gas into the processing container, generating plasma by supplying external energy to the processing container, and setting a bias applied to a holding stage holding a substrate in the processing container as predetermined value to selectively etch the silicon nitride film with respect to a silicon and/or silicon oxide film, the processing gas includes a plasma excitation gas, a CHxFy gas, and at least one oxidizing gas selected from the group consisting of O2, CO2, CO, and a flow rate of the oxidizing gas with respect to the CHxFy gas is set to be 4/9 or greater.
摘要翻译:提供了提高氮化硅膜相对于用作基底的氧化硅膜或硅的选择性的等离子体蚀刻方法。 在等离子体蚀刻方法中,通过在将处理气体供应到处理容器中的同时排出处理气体而将处理容器中的压力设定为预定水平,通过向处理容器供给外部能量来产生等离子体,并且设定施加到保持 将处理容器中的基板保持为预定值,以相对于硅和/或氧化硅膜选择性地蚀刻氮化硅膜,处理气体包括等离子体激发气体,CH x F y气体和至少一种选择的氧化气体 来自由O 2,CO 2,CO组成的组和氧化气体相对于CH x F y气体的流量设定为4/9以上。
摘要:
A two-core optical fiber magnetic field sensor is configured from at least a light incidence/emission unit; a lens; a magnetic garnet; and a reflector, wherein the lens and the magnetic garnet are disposed between the light incidence/emission end of the light incidence/emission unit and the reflector; a light beam is emitted from one optical fiber; the light beam is reflected by the reflector after being transmitted through the lens and the magnetic garnet; the light beam is transmitted again through the magnetic garnet and the lens after the reflection; and incident on the other optical fiber, the light beam is emitted again from the other optical fiber, and reflected by the reflector after being transmitted through the lens and the magnetic garnet; and the light beam is transmitted again through the magnetic garnet and the lens after the reflection and incident again on the one optical fiber.
摘要:
An apparatus for plasma treatment contains a process vessel provided with a mounting table for mounting a substrate, a first gas supplying unit configured to supply a first gas into the process vessel, a first plasma generating unit configured to convert at least a part of the first gas to a first plasma, a second gas supplying unit configured to supply a second gas into the process vessel, and a second plasma generating unit configured to convert at least a part of the second gas to a second plasma. A height of ea an inlet of the second gas from the mounting table is lower than a height of an inlet of the first gas from the mounting table.
摘要:
The etching method of the present invention comprises first and second etching steps (S1, S3) having different types of films to be etched and different types of process gases. During a transition from the first etching step (S1) to the second etching step (S3), a first switching process step (S2) is performed in which the process container is filled with a cleaning gas and the cleaning gas is turned into a plasma to remove the reaction product deposited in the process container in the first etching step. During a transition from the second etching step (S3) to the first etching step (S1), a second switching process step (S4) is performed in which the process container is filled with a cleaning gas and the cleaning gas is turned into a plasma to remove the reaction product deposited in the process container in the second etching step.
摘要:
An electric measuring apparatus is constructed in such a way as to include a signal processing circuit equipped with at least a polarized light separating unit, Faraday rotators, a light source, a photoelectric conversion element, and optical fibers for a sensor. The optical fibers for the sensor are placed around the periphery of an electrical conductor through which electric current to be measured flows. Furthermore, the rotation angle of each Faraday rotator at the time when the magnetism of each Faraday rotator is saturated is set to 22.5°+α° at a temperature of 23° C., thereby changing the rotation angle of each Faraday rotator by α° from 22.5°.
摘要:
A drainage inducing member that promotes drainage is arranged on an edge portion on the back side of a drain hole provided in an inlet base of an inlet assembly, in order to better promote the drainage of water that has reached the drain hole to the outside.
摘要:
A drainage inducing member that promotes drainage is arranged on an edge portion on the back side of a drain hole provided in an inlet base of an inlet assembly, in order to better promote the drainage of water that has reached the drain hole to the outside.
摘要:
Disclosed is an optical fibre birefringence compensation mirror. Also disclosed is a current sensor wherein vibration resistance has been increased due to the optical connection of the optical fibre birefringence compensation mirror. The optical fibre birefringence compensation mirror includes: an optical fibre, a birefringence element, a lens, a magnet, a Faraday rotator, and a mirror. From the light incidence/emission end surface of the optical fibre, the birefringence element, Faraday rotator, and mirror are arranged in said order. Light comes in from the optical fibre, and is separated into two linearly polarised lights by the birefringence element. The polarisation planes of the two linearly polarised lights are rotated by the Faraday rotator, and the two linearly polarised lights are point-symmetrically reflected at one point by the mirror, then again rotated by the Faraday rotator, then re-combined into one light by the birefringence element and made to enter the optical fibre.
摘要:
A secondary self-resonant coil is installed at substantially the central region of the bottom face of the vehicle body, receiving electric power from a power feeding apparatus in a non-contact manner by resonating with a primary self-resonant coil of a power feeding apparatus provided external to the vehicle, via an electromagnetic field. In a power reception mode from the power feeding apparatus, high voltage is generated at the wire end of the secondary self-resonant coil, causing generation of a high electric field around the wire end. In order to keep the wire end distant from an ECU that is an electric apparatus located closest to the secondary self-resonant coil, the secondary self-resonant coil is arranged such that the wire end is located at a side opposite to the side where the ECU is deviated relative to the bilateral symmetric axis of the vehicle body.