公开(公告)号：US06255757B1

公开(公告)日：2001-07-03

申请号：US09388321

申请日：1999-09-01

Applicant: Vijayakumar R. Dhuler ,  Mark David Walters

Inventor： Vijayakumar R. Dhuler ,  Mark David Walters

IPC: H02N1000

CPC classification number: F15C5/00 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  B81C2203/031 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0009 ,  F16K99/0011 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2001/0042

Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components arc actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening. The microactuator may further include metallization traces on distal portions of the arched beams to constrain the thermally actuated regions of arched beams to medial portions thereof. The valve may also include a latch for maintaining the valve plate in a desired position without requiring continuous energy input to the microactuator. An advantageous method for fabricating a MEMS valve having unitary structure single crystalline components is also provided.

Abstract translation: 提供了一种微机电（MEMS）装置，其包括微电子基板和热致动微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关联的部件由微致动器在其热致动时被致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。 微致动器还可以包括在拱形梁的远侧部分上的金属化迹线，以将拱形梁的热致动区域约束到其中间部分。 阀还可以包括用于将阀板保持在期望位置的闩锁，而不需要连续的能量输入到微致动器。 还提供了一种用于制造具有单一结构单晶组件的MEMS阀的有利方法。

公开(公告)号：US06428173B1

公开(公告)日：2002-08-06

申请号：US09304301

申请日：1999-05-03

Applicant: Vijayakumar R. Dhuler ,  Mark David Walters ,  Edward A. Hill ,  Allen Bruce Cowen

Inventor： Vijayakumar R. Dhuler ,  Mark David Walters ,  Edward A. Hill ,  Allen Bruce Cowen

IPC: G02B508

CPC classification number: G02B26/0841 ,  G02B6/357 ,  G02B6/358 ,  H01H2001/0047 ,  H01H2001/0063

Abstract: Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror is adapted to move accordingly with the microactuator between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators, thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch and/or an electrostatic latch for controllably clamping the mirror in position. A MEMS moveable mirror array is also provided which permits individualized control of each individual MEMS moveable mirror structure within the array. The MEMS moveable mirror structures and the associated arrays can be used in a variety of applications including applications involving the controlled redirection of electromagnetic radiation. Accordingly, a method of redirecting electromagnetic radiation is provided. A method of fabricating MEMS moveable mirror structures is further provided.

Abstract translation: 提供微机电结构（MEMS），其适于响应于选择性热致动而可控地移动反射镜。 在一个实施例中，MEMS可移动镜结构包括热致动的微致动器，其适于可控制地沿着基本上平行于下面的微电子衬底的第一主表面的预定路径移动。 镜子适于随着微致动器在非致动位置和致动位置之间相应地移动。 在所有位置，反射镜具有相对于微电子衬底的第一主表面设置在平面外的镜面。 本文提供的微致动器可以包括各种热拱形梁致动器，热致动复合梁致动器，排列的致动器及其组合。 MEMS可移动镜结构还可以包括用于可控地将镜子夹持在适当位置的机械闩锁和/或静电闩锁。 还提供了MEMS移动反射镜阵列，其允许对阵列内的每个单独的MEMS可移动镜像结构进行个性化的控制。 MEMS可移动镜结构和相关阵列可用于各种应用，包括涉及电磁辐射的受控重定向的应用。 因此，提供了一种重定向电磁辐射的方法。 还提供了制造MEMS可移动镜结构的方法。

公开(公告)号：US06386507B2

公开(公告)日：2002-05-14

申请号：US09802260

申请日：2001-03-08

Applicant: Vijayakumar R. Dhuler ,  Mark David Walters

Inventor： Vijayakumar R. Dhuler ,  Mark David Walters

IPC: F16K3100

CPC classification number: F15C5/00 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  B81C2203/031 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0009 ,  F16K99/0011 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2001/0042

Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening.

Abstract translation: 提供了一种微电子机械（MEMS）装置，其包括微电子基板和热致动的微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关部​​件由热致动器由微致动器致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。

公开(公告)号：US06275320B1

公开(公告)日：2001-08-14

申请号：US09405789

申请日：1999-09-27

Applicant: Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

Inventor： Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

IPC: G02B2600

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/038 ,  B81B2201/047 ,  G02B6/266

Abstract: A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.

Abstract translation: 提供了一种能够在全光范围内进行光衰减的MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括微电子衬底，MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。 可变光衰减器能够衰减其光轴平行且垂直于衬底的光束。 另外，本发明的MEMS致动器可以包括MEMS致动器的阵列，其能够向光学快门提供更大的位移距离，并且因此具有更宽的光学衰减范围。 在本发明的一个实施例中，MEMS致动器包括热拱形梁致动器。 另外，本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。 该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。 热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。 在激活时，热双压电晶片截取光束的路径并提供所需的光衰减水平。 本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。

公开(公告)号：US5994816A

公开(公告)日：1999-11-30

申请号：US936598

申请日：1997-09-24

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

IPC: B81B3/00 ,  B81C1/00 ,  F03G7/06 ,  F15C5/00 ,  F16K99/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H65/00 ,  H01H67/26 ,  H04Q1/16 ,  H02K15/00

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0044 ,  H01H1/0036 ,  H01H61/02 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  G02B6/3803 ,  G02B6/4226 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H67/26 ,  H01H9/14 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。

公开(公告)号：US5870518A

公开(公告)日：1999-02-09

申请号：US916089

申请日：1997-08-21

Applicant: John M. Haake ,  Vijayakumar R. Dhuler ,  Robert L. Wood

Inventor： John M. Haake ,  Vijayakumar R. Dhuler ,  Robert L. Wood

IPC: G02B6/38 ,  G02B6/42 ,  G02B6/36

CPC classification number: G02B6/4226 ,  G02B6/3803

Abstract: A microactuator for precisely aligning an optical fiber with an optical device and an associated method of fabrication thereof. The microactuator includes a carrier positioned on a base for holding the optical fiber. An alignment frame positioned on the carrier remotely from the optical fiber is adapted to engage the base and the carrier. The carrier is movable relative to the base and the alignment frame. At least one actuator has a beam for engaging the alignment frame and a pad affixed to the carrier. The beam and pad move relative to each other when the actuator is actuated. The actuator is positioned on the carrier so that the beam engages and applies a force to the alignment frame in a predetermined direction when the actuator is actuated. This causes the pad to apply an opposite force to the carrier causing the carrier to move in a direction opposite the predetermined direction for controllably positioning the carrier relative to the base and precisely aligning the optical fiber with the optical device.

Abstract translation: 一种用于将光纤与光学装置精确对准的微致动器及其制造方法。 微致动器包括位于基座上用于保持光纤的载体。 定位在远离光纤的载体上的对准框架适于接合基座和载体。 托架可相对于基座和对准框架移动。 至少一个致动器具有用于接合对准框架的梁和固定到托架的垫。 当致动器被致动时，梁和垫相对于彼此移动。 致动器定位在载体上，使得当致动器致动时，梁在预定方向上接合并向对准框架施加力。 这使得焊盘对载体施加相反的力，导致载体在与预定方向相反的方向上移动，以便相对于底座可控地定位载体，并将光纤与光学装置精确对准。

公开(公告)号：US06410361B2

公开(公告)日：2002-06-25

申请号：US09777749

申请日：2001-02-06

Applicant: Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

Inventor： Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

IPC: H01L2100

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0036 ,  F16K99/0042 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H1/0036 ,  H01H37/32 ,  H01H2037/008 ,  Y10S310/06

Abstract: A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator of the present invention may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate. In one embodiment the composite beam comprises two or layers having materials that have correspondingly different thermal coefficients of expansion. As such, the layers will respond differently when thermal energy is supplied to the composite. An electrically conductive path may extend throughout the composite beam to effectuate thermal actuation. In one embodiment of the invention a two layer composite beam comprises a first layer of a semiconductor material and a second layer of a metallic material. The semiconductor material may be selectively doped during fabrication so as to create a self-contained heating mechanism within the composite beam. The invention also comprises a MEMS thermal actuator that includes two or more composite beams. The two or more composite beams may be disposed in an array or a ganged fashion, such that the multiple composite beams benefit from overall force multiplication and are therefore capable of greater and more linear displacement distances. The invention is also embodied in a method for fabricating the MEMS thermal actuators of the present invention.

Abstract translation: 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，本发明的MEMS热致动器可以提供一种独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并且覆盖在基底的第一表面上。 组合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。 在一个实施例中，复合梁包括具有相应不同热膨胀系数的材料的两层或多层。 因此，当将热能提供给复合材料时，这些层将响应不同。 导电路径可延伸穿过复合梁，以实现热致动。 在本发明的一个实施例中，双层复合梁包括第一层半导体材料和第二层金属材料。 可以在制造期间选择性地掺杂半导体材料，以便在复合束内产生独立的加热机构。 本发明还包括包括两个或更多个复合梁的MEMS热致动器。 两个或多个复合梁可以以阵列或组合的方式设置，使得多个复合梁受益于总的力倍增，因此能够具有更大和更大的线性位移距离。 本发明还体现在本发明的MEMS热致动器的制造方法中。

公开(公告)号：US06291922B1

公开(公告)日：2001-09-18

申请号：US09383053

申请日：1999-08-25

Applicant: Vijayakumar R. Dhuler

Inventor： Vijayakumar R. Dhuler

IPC: H02N1000

CPC classification number: H01H1/0036 ,  H01H59/0009 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0078 ,  H01H2061/006

Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator such that the metallic structure is on substantially the same plane as the microactuator and is actuated thereby. For example, the MEMS device may be a microrelay. As such, the microrelay may include a pair of metallic structures that are controllably brought into contact by selective actuation of the microactuator. While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator which advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch. In an alternate embodiment, the microactuator is an electrostatic microactuator which includes a stationary stator and a movable shuttle. Imposing an electrical bias between the stator and the shuttle causes the shuttle to move with respect to the stator. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure. Several advantageous methods for fabricating a MEMS device having both single crystal components and metallic components are also provided.

Abstract translation: 提供了一种微机电（MEMS）器件，其包括微电子衬底，设置在衬底上并由单晶材料形成的微致动器，以及至少一个金属结构，其布置在与微致动器相邻的衬底上，使得金属结构基本上在 与微致动器相同的平面并由此致动。 例如，MEMS器件可以是微型继电器。 因此，微型继电器可以包括通过微致动器的选择性致动可控制地接触的一对金属结构。 虽然MEMS器件可以包括各种微致动器，微致动器的一个实施例是热致动微致动器，其有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱形。 在另一个实施例中，微型致动器是静电微型致动器，其包括固定式定子和可移动梭。 在定子和梭之间施加电偏压使梭子相对于定子移动。 因此，在致动时，微致动器在其中微致动器与至少一个金属结构间隔开的第一位置移动到第二位置，在第二位置，微致动器可操作地接合至少一个金属结构。 还提供了用于制造具有单晶组件和金属部件的MEMS器件的几种有利方法。

公开(公告)号：US06215644B1

公开(公告)日：2001-04-10

申请号：US09392987

申请日：1999-09-09

Applicant: Vijayakumar R. Dhuler

Inventor： Vijayakumar R. Dhuler

IPC: H01G700

CPC classification number: H01G5/16

Abstract: A tunable capacitor having low loss and a corresponding high Q is provided. The tunable capacitor includes first and second substrates having first and second capacitor plates disposed, respectively, thereon. The capacitor plates may include a high temperature superconductor material. A MEMS actuator, that is either driven by electrostatic force, heat or both, operably contacts the second substrate so that once the actuator is engaged it responds by displacing the second substrate, thereby varying the capacitance between said first capacitor plate and said second capacitor plate. As such, the capacitance can be controlled based upon the relative spacing between the first and second capacitor plates. The MEMS actuator may either be operably attached to the second substrate or detached, yet supporting, the second substrate.

Abstract translation: 提供具有低损耗和相应高Q的可调谐电容器。 可调谐电容器包括分别设置在其上的第一和第二电容器板的第一和第二基板。 电容器板可以包括高温超导体材料。 由静电力，热或两者驱动的MEMS致动器可操作地接触第二基板，使得一旦致动器接合，则通过移动第二基板来响应，由此改变所述第一电容器板和所述第二电容器板之间的电容 。 因此，可以基于第一和第二电容器板之间的相对间隔来控制电容。 MEMS致动器可以可操作地附接到第二基板或者分离，而是支撑第二基板。

公开(公告)号：US6124663A

公开(公告)日：2000-09-26

申请号：US382790

申请日：1999-08-25

Applicant: John M. Haake ,  Vijayakumar R. Dhuler ,  Robert L. Wood

Inventor： John M. Haake ,  Vijayakumar R. Dhuler ,  Robert L. Wood

IPC: G02B6/35 ,  G02B6/42 ,  H01L37/00 ,  H03H37/32

CPC classification number: G02B6/3508 ,  G02B6/4226 ,  G02B6/3544 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3596

Abstract: A fiber optic connector is provided that is capable of precisely aligning an optical fiber with another optical element by using a MEMS positioning apparatus subsystem capable of being manufactured in an affordable, repeatable and reliable manner which can precisely microposition an optical fiber relative to another optical element in each of the X, Y and Z directions.

Abstract translation: 提供一种光纤连接器，其能够通过使用能够以可承受的，可重复和可靠的方式制造的MEMS定位装置子系统来将光纤与另一光学元件精确对准，其可以相对于另一光学元件精确地定位光纤 在X，Y和Z方向中的每一个。