Process for sequential multi beam laser processing of materials
    10.
    发明授权
    Process for sequential multi beam laser processing of materials 失效
    材料顺序多光束激光加工工艺

    公开(公告)号:US06168744A

    公开(公告)日:2001-01-02

    申请号:US08946712

    申请日:1997-10-08

    IPC分类号: B29C3508

    摘要: A method of processing a substrate by first processing the substrate surface with a laser operating at a first wavelength to both evaporate a portion of the substrate and structurally weaken the substrate surface, and then by processing the substrate surface with a laser operating at a second wavelength to remove the structurally weakened surface.

    摘要翻译: 一种处理基板的方法,该方法是用以第一波长工作的激光器首先处理该基板表面,以使基板的一部分蒸发并使结构上弱化该基板表面,然后通过以第二波长工作的激光来处理该基板表面 以去除结构弱化的表面。