公开(公告)号：US06985058B2

公开(公告)日：2006-01-10

申请号：US10664315

申请日：2003-09-17

申请人： William P. D'Amico ,  John L. Champion ,  Gabriel M. Rebeiz ,  Dennis K. Wickenden ,  Robert B. Givens

发明人： William P. D'Amico ,  John L. Champion ,  Gabriel M. Rebeiz ,  Dennis K. Wickenden ,  Robert B. Givens

IPC分类号： H01H51/22

CPC分类号： H01H53/06 ,  H01H1/0036 ,  H01H2001/0063 ,  H01H2001/0084

摘要： A Lorentz force assisted microelectromechanical switch is provided which is configured to have a capacitive switch and an electrical conductor placed in transversely extending electric and magnetic fields to generate the Lorentz force sufficient to operate the capacitive switch.

摘要翻译： 提供洛伦兹力辅助的微机电开关，其被配置为具有放置在横向延伸的电场和磁场中的电容开关和电导体，以产生足以操作电容开关的洛伦兹力。

公开(公告)号：US06819103B2

公开(公告)日：2004-11-16

申请号：US10276983

申请日：2002-11-21

申请人： John L. Champion ,  Robert Osiander ,  Robert B. Givens ,  Dennis K. Wickenden ,  Daniel G. Jablonski ,  James H. Higbie ,  Scott T. Radcliffe ,  Margaret A. Darrin ,  Thomas J. Kistenmacher ,  Douglas A. Oursler

发明人： John L. Champion ,  Robert Osiander ,  Robert B. Givens ,  Dennis K. Wickenden ,  Daniel G. Jablonski ,  James H. Higbie ,  Scott T. Radcliffe ,  Margaret A. Darrin ,  Thomas J. Kistenmacher ,  Douglas A. Oursler

IPC分类号： G01R3300

CPC分类号： H03H9/2447 ,  H03D7/00 ,  H03H9/02259 ,  H03H2009/02511

摘要： A Lorentz force-driven mechanical resonator apparatus that utilizes a high-Q resonant structure as both a mixing device and a high-Q bandpass filter. Specifically, an external time varying, but quasistatic, magnetic field is applied to the resonating device while simultaneously running a time varying electrical current through the device. The resulting Lorentz force (I×B) is proportional to the vector product of the electrical current in the bar (I) and the external magnetic field (B). Integrating such a resonant device with a magnetic field coil produces the functionality of an ideal radio frequency (RF) mixer coupled with a high-Q intermediate frequency (IF) filter. Wide tunability provides the capability to scan, or even step, an array of filters having very narrow bandwidths via a common local oscillator to a desired frequency range.

摘要翻译： 利用高Q谐振结构作为混合装置和高Q带通滤波器的洛伦兹力驱动机械谐振器装置。 具体地，外部时变，但准静态的磁场被施加到谐振装置，同时同时运行时变电流通过该装置。 所产生的洛伦兹力（IxB）与条（I）中的电流和外部磁场（B）的矢量积成比例。 将这种谐振装置与磁场线圈集成产生与高Q中频（IF）滤波器耦合的理想射频（RF）混频器的功能。 宽可调性提供了通过公共本地振荡器扫描甚至步进具有非常窄带宽的滤波器阵列至所需频率范围的能力。

公开(公告)号：US5959452A

公开(公告)日：1999-09-28

申请号：US943735

申请日：1997-10-03

申请人： Robert B. Givens ,  John C. Murphy ,  Dennis K. Wickenden ,  Robert Osiander ,  Thomas J. Kistenmacher

发明人： Robert B. Givens ,  John C. Murphy ,  Dennis K. Wickenden ,  Robert Osiander ,  Thomas J. Kistenmacher

IPC分类号： G01R33/028 ,  G01R33/02

CPC分类号： G01R33/028

摘要： The invention consists, in one embodiment, of a resonator such as a conductive bar supported by two wires placed at the nodal points of the fundamental resonance frequency. The wires also supply current of this frequency to the resonator. In the presence of a magnetic field, the Lorentz force causes the resonator to vibrate. The amplitude of this vibration is proportional to a vector component of the magnetic field. The motion of the resonator is detected using one of a number of possible methods including optical beam deflection. The invention has a sensitivity of at least 1 nT, comparable to that of a commercial fluxgate magnetometer, and a dynamic range exceeding 80 dB.

摘要翻译： 本发明在一个实施例中包括诸如由放置在基本共振频率的节点处的两根电线支撑的导电棒的谐振器。 电线还将该频率的电​​流提供给谐振器。 在存在磁场的情况下，洛伦兹力使谐振器振动。 该振动的振幅与磁场的矢量分量成比例。 使用包括光束偏转的多种可能方法中的一种来检测谐振器的运动。 本发明具有至少1nT的灵敏度，与商业磁通门磁强计相当，并且动态范围超过80dB。

公开(公告)号：US5998995A

公开(公告)日：1999-12-07

申请号：US944625

申请日：1997-10-03

申请人： Robert Osiander ,  Scott A. Ecelberger ,  Robert B. Givens ,  Dennis K. Wickenden ,  John C. Murphy ,  Thomas J. Kistenmacher

发明人： Robert Osiander ,  Scott A. Ecelberger ,  Robert B. Givens ,  Dennis K. Wickenden ,  John C. Murphy ,  Thomas J. Kistenmacher

IPC分类号： G01R33/02

CPC分类号： G01R33/0286 ,  G01R33/02

摘要： A microelectromechanical-based magnetostrictive magnetometer that uses, as an active element, a commercial (001) silicon microcantilever coated with an amorphous thin film of the giant magnetostrictive alloy Terfenol-D and a compact optical beam deflection transduction scheme. A set of Helmholtz coils is used to create an ac magnetic excitation field for driving the mechanical resonance of the coated microcantilever. When the coated microcantilever is placed in a dc magnetic field, the dc field will change the amplitude at the mechanical resonance of the coated microcantilever thereby causing a deflection that can be measured. The magnetometer has been demonstrated with a sensitivity near 1 .mu.T.

摘要翻译： 使用涂覆有巨磁致伸缩合金Terfenol-D的非晶薄膜的商业（001）硅微悬臂梁作为有源元件的微机电型磁致伸缩磁力计和紧凑的光束偏转换能方案。 一组亥姆霍兹线圈用于产生用于驱动涂覆的微型悬臂梁的机械共振的交流磁激励场。 当涂覆的微悬臂梁放置在直流磁场中时，直流场将改变涂覆的微型悬臂梁的机械谐振处的振幅，从而引起可测量的偏转。 磁力计已被证明灵敏度接近1亩。

公开(公告)号：US07064541B2

公开(公告)日：2006-06-20

申请号：US10896453

申请日：2004-07-22

申请人： Eli A. Richards ,  Dennis K. Wickenden

发明人： Eli A. Richards ,  Dennis K. Wickenden

IPC分类号： G01R33/00 ,  H03B5/30

CPC分类号： G01R33/0286 ,  G01R33/028 ,  H03L7/099

摘要： Provided herein is a xylophone bar magnetometer (XBM) with automatic resonance control, the XBM having a voltage input, a current drive input and a sensor output, having a voltage input switch for switching between a positive drive voltage and a negative drive voltage; a voltage controlled oscillator (VCO) for controlling the voltage input switch; and a feedback loop, connected between the sensor output and a input of the VCO.

摘要翻译： 本文提供具有自动谐振控制的木琴棒磁力计（XBM），具有电压输入的XBM，电流驱动输入和传感器输出，具有用于在正驱动电压和负驱动电压之间切换的电压输入开关; 用于控制电压输入开关的压控振荡器（VCO）; 以及连接在传感器输出端和VCO输入端之间的反馈回路。

公开(公告)号：US4761269A

公开(公告)日：1988-08-02

申请号：US873581

申请日：1986-06-12

申请人： Darrell R. Conger ,  John G. Posa ,  Dennis K. Wickenden

发明人： Darrell R. Conger ,  John G. Posa ,  Dennis K. Wickenden

IPC分类号： C23C16/44 ,  C23C16/455 ,  C30B25/14 ,  C30B35/00 ,  C23C16/54

CPC分类号： C23C16/45582 ,  C23C16/45561 ,  C23C16/45585 ,  C30B25/14

摘要： An apparatus for depositing materials on a substrate includes a manifold having a plurality of inlet valves located equidistantly from the manifold outlet. Preferably the inlet valves are mounted in radial configuration to minimize any "dead space" between the valves and the manifold outlet. The manifold connects a plurality of gas sources through its inlets to a process chamber at its outlet. The valves within the manifold switch continuous reactive gas flows from the sources back and forth between the process chamber and a vent chamber during the deposition process. A purging gas flow is also provided at each valve to purge the "dead space" within the manifold of reactive gases that can linger once the reactive gas flow has been switched to the vent. The method employed by the apparatus maintains a predetermined constant gas flow through the process chamber to produce uniform deposition on the substrate. Reactive and nonreactive gas flows are injected into the process chamber at a rate sufficient to maintain the predetermined flow. After each deposition step, reactive gas flows are switched into and out of the process chamber and the nonreactive gas flows are adjusted in response to maintain a constant total flow. The vent chamber is maintained at substantially equal pressure to the process chamber to minimize fluctuations in reactive gas flows as the flows are switched between chambers.

摘要翻译： 用于在衬底上沉积材料的装置包括具有多个与歧管出口等距离设置的入口阀的歧管。 优选地，入口阀以径向构造安装以最小化阀和歧管出口之间的任何“死区”。 歧管将多个气体源通过其入口连接到其出口处的处理室。 歧管开关内的连续反应性气体中的阀在沉积过程中在处理室和排气室之间来回流动。 在每个阀门处还设置吹扫气体流，以清除反应气体流已经切换到排气口时可能停留的反应气体歧管内的“死空间”。 该装置采用的方法维持预定的恒定气流通过处理室，以在衬底上产生均匀的沉积。 反应性和非反应性气体流以足以维持预定流量的速率注入到处理室中。 在每个沉积步骤之后，反应性气体流动被切换进入和离开处理室，并且响应于保持恒定的总流量来调节非反应性气体流。 通气室保持在与处理室基本相等的压力，以使流动在室之间切换时最小化反应气流的波动。

公开(公告)号：US4546373A

公开(公告)日：1985-10-08

申请号：US575066

申请日：1984-01-30

申请人： Anthony G. Todd ,  Dennis K. Wickenden

发明人： Anthony G. Todd ,  Dennis K. Wickenden

IPC分类号： G01K7/01 ,  H01L29/45 ,  H01L29/737 ,  H01L23/48 ,  H01L23/56

CPC分类号： H01L29/7371 ,  G01K7/01 ,  H01L29/452

摘要： In a temperature sensor of the kind comprising a bipolar transistor (1) having an adjustable constant current source (3) connected between its collector and base regions (7 and 9) and its emitter region (11) connected to the output of a high gain amplifier (5) whose input is derived from the current source (3), the junction between the emitter and base regions (11 and 9) of the transistor is a heterojunction and each of the emitter and base regions (11 and 9) is provided with a metal contact (17 or 19) separated from the associated region by a barrier layer (21 or 23) of an amorphous tantalum iridium alloy. The use of a heterojunction for the transistor emitter-base junction increases the temperature range of the sensor while the barrier layers ensure metallic stability at the high temperature end of the sensor temperature range.

摘要翻译： 在包括连接在其集电极和基极区域（7和9）之间的可调恒流源（3）的双极性晶体管（1）的温度传感器及其连接到高增益输出的发射极区域（11） 放大器（5），其输入源自电流源（3），晶体管的发射极和基极区域（11和9）之间的结是异质结，并且提供发射极和基极区域（11和9）中的每一个 具有通过无定形钽铱合金的阻挡层（21或23）与相关区域分离的金属接触（17或19）。 晶体管发射极 - 基极结的异质结的使用增加了传感器的温度范围，而阻挡层确保了传感器温度范围高温端的金属稳定性。

公开(公告)号：US4335501A

公开(公告)日：1982-06-22

申请号：US200257

申请日：1980-10-23

申请人： Dennis K. Wickenden ,  Vera M. Vincent

发明人： Dennis K. Wickenden ,  Vera M. Vincent

IPC分类号： H01L27/15 ,  H01L21/302 ,  H01L21/316

CPC分类号： H01L27/156 ,  Y10S257/926

摘要： In the manufacture of a monolithic LED array, in particular a matrix array, in which portions of the array are electrically isolated from one another by channels cut or etched through the slice of n-type material, the channels are formed in two stages, relatively wide channels first being formed from the back surface of the slice to within 50 microns of the front surface, and filled with a glass frit which is bonded to the semiconductor material on each side of the channel, then narrower channels are formed from the front surface of the slice to meet the glass in the initial channels, and are similarly filled with glass frit. A glass powder suspension is introduced into each set of channels by spreading or spinning over the surface of the slice, or by electrophoretic deposition and/or capillary action, then the liquid suspension medium is removed and the glass powder is sintered.

摘要翻译： 在制造单片LED阵列，特别是矩阵阵列中，其中阵列的部分通过切割或蚀刻穿过n型材料切片的通道彼此电隔离，通道形成为两个阶段 首先从切片的后表面形成到前表面的50微米内的宽通道，并且填充有玻璃料，该玻璃料在通道的每一侧与半导体材料接合，然后从前表面形成较窄的通道 的切片以在初始通道中满足玻璃，并且类似地填充有玻璃料。 通过在切片的表面上铺展或旋转，或通过电泳沉积和/或毛细管作用将玻璃粉末悬浮液引入每组通道中，然后除去液体悬浮介质并玻璃粉末被烧结。

公开(公告)号：US06727511B2

公开(公告)日：2004-04-27

申请号：US10006449

申请日：2001-11-21

申请人： Richard T. Cusick ,  Robert F. Walsh ,  Dennis K. Wickenden

发明人： Richard T. Cusick ,  Robert F. Walsh ,  Dennis K. Wickenden

IPC分类号： G01N2186

CPC分类号： G01S17/46 ,  G01S7/4818 ,  G01S17/87

摘要： A sensor array system for detecting the position of an object or energy source. The system includes a plurality of sensors, each sensor having a limited field of view and being capable of detecting an object or energy source that is positioned within its field of view. The fields of view of at least some of the sensors overlap the fields of view of other sensors, and the overlapping fields of view define unique spatial regions. A data acquisition system is operatively connected to the plurality of sensors and is used to determine which sensors simultaneously detect an object or energy source, thereby determining the unique spatial region in which the object or energy source is located.

摘要翻译： 一种用于检测物体或能量源的位置的传感器阵列系统。 该系统包括多个传感器，每个传感器具有有限的视野并且能够检测位于其视场内的物体或能量源。 至少一些传感器的视野与其他传感器的视野重叠，并且重叠的视场定义了独特的空间区域。 数据采集​​系统可操作地连接到多个传感器，并且用于确定哪些传感器同时检测物体或能量源，从而确定物体或能量源所位于的独特的空间区域。

公开(公告)号：US4182025A

公开(公告)日：1980-01-08

申请号：US837611

申请日：1977-09-28

申请人： Dennis K. Wickenden

发明人： Dennis K. Wickenden

IPC分类号： H01L21/762 ,  H01L25/075 ,  H01L27/15 ,  B01J17/00

CPC分类号： H01L27/156 ,  H01L21/76264 ,  H01L25/0753 ,  H01L21/76289 ,  H01L2224/48137 ,  H01L2224/49175 ,  H01L2924/0002

摘要： In the manufacture of a monolithic light-emitting diode array, electrical isolation between the n-type regions of portions of the array, for example the columns of a matrix array, is effected by mechanically cutting channels between the portions, through the n-type region and the common electrode. This method of forming the isolation channels makes it possible to produce much narrower channels than can be achieved by chemical etching, thus providing a high resolution array.

摘要翻译： 在单片发光二极管阵列的制造中，阵列部分的n型区域（例如矩阵阵列的）之间的电隔离通过机械地切割部分之间的通道，通过n型 区域和公共电极。 形成隔离通道的这种方法使得可以产生比通过化学蚀刻可以实现的更窄的通道，从而提供高分辨率阵列。